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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Contribution to proceeding

Title: Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelihood estimation
Author(s): M.-A. Henn, H. Groß, F. Scholze, C. Elster and M. Bär
Year: 2011
Book title: SPIE Proc. 80830N
Keywords: 8.41,Scatter-Inv
Tags: 8.41,Scatter-Inv

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