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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Title: Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates
Author(s): H. Gross, A. Rathsfeld, F. Scholze and M. Bär
Journal: Measurement Science and Technology
Year: 2009
Volume: 20
Issue: 10
Pages: 105102
IOP Publishing
DOI: 10.1088/0957-0233/20/10/105102
ISSN: 0957-0233
Web URL: http://iopscience.iop.org/article/10.1088/0957-0233/20/10/105102
Keywords: 8.41,Scatter-EUV,Scatter-Inv,Scatterometrie
Tags: 8.41,Scatter-Inv

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