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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Title: Sensitivity Analysis for Indirect Measurement in Scatterometry and the Reconstruction of Periodic Grating Structures
Author(s): H. Groß and A. Rathsfeld
Year: 2006
Book title: WIAS Preprint No. 1164
Keywords: 8.41,Scatter-Inv
Tags: 8.41,Scatter-Inv

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