Poster Prize of the 2019 Adlershof Research Forum

Analía Fernández Herrero, a doctoral candidate with Working Group 7.14, "EUV Nanometrology", won the Poster Prize at the Adlershof Research Forum on 11 November 2019 for her work on edge roughness in etched line structures. In her investigations using grazing-incidence small-angle X-ray scattering (GISAXS) on line grating structures in the nanometer range, she was able to demonstrate that diffuse X-rays can be used to determine the type and roughness of line edges. This new measurement technology could be useful for photolithographic processes in order to examine large areas of nanostructured surfaces much faster than with conventional (scanning) procedures.

Publication: Fernández Herrero, A., Pflüger, M., Probst, J., Scholze, F. & Soltwisch, V. (2017). J. Appl. Cryst. 50, 1766-1772. doi: 10.1107/S1600576717014455

Contact:

V. Soltwisch, 7.14, E-Mail: Victor.Soltwisch(at)ptb.de