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Upgrade for VUV radiometry

08.11.2023

Design schematic of the VUVR beamline, top right: monochromator grating during adjustment

A new beamline for radiometry in the vacuum ultraviolet spectral range (VUVR) was successfully commissioned at the Metrology Light Source (MLS). By quickly redirecting the radiation to three different measuring stations, the availability for different measuring tasks is significantly increased.

The new beamline offers dedicated beamline branches for radiometric calibration of radiation receivers, characterisation of optical materials and components (reflectometry), and investigation of complex (imaging) detection systems and spectrometers.

The wavelength range between 40 nm and 200 nm, i.e. the spectral ranges of ultraviolet radiation (UV), "deep" UV and vacuum ultraviolet (VUV), are gaining industrial interest in addition to their importance for basic research, e.g. for increasing the spatial resolution of "classical" optical metrology for the inspection of wafer structures in semiconductor manufacturing and as an "out-of-band" spectral range in EUV lithography. Typical applications in the industrial sector are in material investigations and the characterisation of optical systems. Basic research-oriented measurements are e.g. investigations on photoelectron tomography as well as the characterisation of spectroscopic satellite instrumentation for astrophysics.

Publication:

O. Ogor et al., J. Phys.: Conf. Ser. 2380 , 012032 (2023),
https://doi.org/10.1088/1742-6596/2380/1/012032

Contact:

A. Gottwald, 7.13, e-mail: alexander.gottwald(at)ptb.de