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304. PTB Seminar "VUV and EUV Metrology"


Fig. 1: Participants of the VUV and EUV Metrology seminar, October, 19 to 20, 2017 at the Berlin Institute of PTB.

The bi-annual "VUV and EUV Metrology" event took place on 19 and 20 October 2017 for the fourth time; it was organized at the Hermann von Helmholtz building within the scope of the 304th PTB Seminar. With more than 35 presentations and posters, the wide range of topics addressed spanned from the industrial application of EUV radiation to the manufacturing of semiconductor structures, to the development of high-reflection lens systems and to the diagnostics of high-intensity pulsed radiation (from free-electron lasers up to space-supported VUV spectroscopy). Lively exchanges about the latest developments and results took place between the more than 110 particip ants from research and metrology institutes as well as industry. This seminar was funded by ten industrial enterprises along with the Helmholtz Fund.


A. Gottwald, 7.13, E-Mail: Opens window for sending emailAlexander.Gottwald(at)ptb.de

F. Scholze, 7.12, E-Mail: Opens window for sending emailFrank.Scholze(at)ptb.de