Publikations Einzelansicht
Artikel
| Titel: | Bayesian approach to the statistical inverse problem of scatterometry: Comparison of three surrogate models |
|---|---|
| Autor(en): | S. Heidenreich, H. Gross and M. Bär |
| Journal: | International Journal for Uncertainty Quantification |
| Jahr: | 2015 |
| Seite(n): | 511 |
| DOI: | 10.1615/Int.J.UncertaintyQuantification.2015013050 |
| Marker: | 8.43, Scatter-Inv, UQ |