Publikations Einzelansicht
Artikel
Titel: | Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing |
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Autor(en): | A. Wiegmann, M. Schulz and C. Elster |
Journal: | Optics express |
Jahr: | 2010 |
Band: | 18 |
Ausgabe: | 15 |
Seite(n): | 15807--19 |
Optical Society of America | |
DOI: | 10.1364/OE.18.015807 |
ISSN: | 1094-4087 |
Web URL: | http://www.osapublishing.org/viewmedia.cfm?uri=oe-18-15-15807&seq=0&html=true |
Schlüsselwörter: | Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement |
Marker: | 8.42, Form, SimOpt |
Zusammenfassung: | We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly. |