Publikations Einzelansicht
Artikel
Titel: | Suppression of aliasing in multi-sensor scanning absolute profile measurement |
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Autor(en): | A. Wiegmann, M. Schulz and C. Elster |
Journal: | Optics Express |
Jahr: | 2009 |
Band: | 17 |
Ausgabe: | 13 |
Seite(n): | 11098 |
Optical Society of America | |
DOI: | 10.1364/OE.17.011098 |
ISSN: | 1094-4087 |
Web URL: | http://www.osapublishing.org/viewmedia.cfm?uri=oe-17-13-11098&seq=0&html=true |
Schlüsselwörter: | Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement |
Marker: | 8.42, Form, SimOpt |
Zusammenfassung: | The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 μm-1) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 μm. |