Titel: |
A standard to test the dynamics of vacuum gauges in the millisecond range |
Autor(en): |
K. Jousten, S. Pantazis, J. Buthig, R. Model, M. Wüest and J. Iwicki |
Journal: |
Vacuum |
Jahr: |
2013 |
Band: |
100 |
Seite(n): |
14--17 |
DOI: |
10.1016/j.vacuum.2013.07.037 |
ISSN: |
0042207X |
Datei / URL: |
fileadmin/internet/fachabteilungen/abteilung_8/8.4_mathematische_modellierung/8.42/DYNAMIK/842_dynamik_Sensors_2010_10_7621.pdf |
Web URL: |
http://www.sciencedirect.com/science/article/pii/S0042207X13002546 |
Schlüsselwörter: |
Choked flow,Dynamic pressure,Response time,Vacuum gauge,Vacuum metrology |
Marker: |
8.41,Flow |
Zusammenfassung: |
Vacuum gauges that control fast processes in industrial applications, e.g. load locks, should immediately react to pressure changes. To study the response time of vacuum gauges to rapid pressure changes, a dynamic vacuum standard was developed where the pressure may change from 100 kPa to 100 Pa within 20 ms in a step-wise manner or within longer times up to 1 s in a predictable manner. This is accomplished by a very fast opening gate valve DN40 and exchangeable orifices and ducts through which the mass flow rate can be calculated by gas flow simulation software. A simple physical model can be used to approximate the calculations. Experiments have been performed with capacitance diaphragm gauges with improved electronics to give a read-out every 0.7 ms. Preliminary results indicate that their response time is at most 1.7 ms, but may be significantly less. |