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bib
--- Timezone: CEST
Creation date: 2022-09-27
Creation time: 16-59-09
--- Number of references
9
article
FarchminHSWBBH2020
Efficient Bayesian inversion for shape reconstruction of lithography masks
Journal of Micro/Nanolithography, MEMS, and MOEMS
2020
5
5
2
19
1--11
8.4,8.41,8.43,UQ,Scatter-Inv
10.1117/1.JMM.19.2.024001
NFarchmin
MHammerschmidt
P ISchneider
MWurm
BBodermann
MBär
SHeidenreich
article
HeidenreichGB2018
Bayesian approach to determine critical dimensions from scatterometric measurements
Metrologia
2018
10
19
55
6
201
8.4,8.41,8.43, UQ
10.1088/1681-7575/aae41c
SHeidenreich
HGross
MBär
article
HeidenreichGBW2016
Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry
Measurement
2017
2
1
97
79--87
8.4,8.41,UQ
10.1016/j.measurement.2016.06.009
SHeidenreich
HGross
MBär
LWright
article
WeissenbrunnerFSMTL2016
Simulation-based determination of systematic errors of flow meters due to uncertain inflow conditions
Flow Measurement and Instrumentation
2016
8
29
8.4,8.41,Flow,UQ
in_preparation
10.1016/j.flowmeasinst.2016.07.011
AWeissenbrunner
AFiebach
SSchmelter
MBär
P.UThamsen
TLederer
article
Schmelter_2016_1
Polynomchaos zur Unsicherheitsquantifizierung in Strömungssimulationen für metrologische Anwendungen
tm-Technisches Messen
2016
1
8
83
2
71-76
8.41, Flow, UQ
http://www.degruyter.com/view/j/teme.2016.83.issue-2/teme-2015-0109/teme-2015-0109.xml
SSchmelter
AFiebach
AWeissenbrunner
article
e73c330da32016_2
Numerical prediction of the flow rate through a flow meter with uncertain inflow profile
Proceedings of Imeko 2015 XXI World Congress Measurement in Research and Industry
2015
11
30
8.41, Flow, UQ
AWeissenbrunner
AFiebach
SSchmelter
MStraka
MBär
TLederer
article
heidenreich2015bayesian
Bayesian approach to the statistical inverse problem of scatterometry: Comparison of three surrogate models
International Journal for Uncertainty Quantification
2015
1
8
511
8.41, Scatter-Inv, UQ
10.1615/Int.J.UncertaintyQuantification.2015013050
SHeidenreich
HGross
MBär
article
Schmelt_JCF2015
Numerical prediction of the influence of uncertain inflow conditions in pipes by polynomial chaos
Int. J. Comp. Fluid. Dyn.
2015
1
5
29
6-8
411-422
8.41, Flow, UQ
10.1080/10618562.2015.1112899
SSchmelter
AFiebach
RModel
MBär
article
Heidenreich2014a
A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
J. Phys. Conf. Ser.
2014
490
1
012007
8.41,Bayes,Scatter-Inv,Regression,8.42, UQ
http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007
IOP Publishing
en
1742-6596
10.1088/1742-6596/490/1/012007
SHeidenreich
HGross
M-AHenn
CElster
MBär