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% This file was created by the TYPO3 extension
% bib
% --- Timezone: CET
% Creation date: 2023-01-28
% Creation time: 13-34-04
% --- Number of references
% 9
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@Article { FarchminHSWBBH2020,
   title = {Efficient Bayesian inversion for shape reconstruction of lithography masks},
   journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
   year = {2020},
   month = {5},
   day = {5},
   volume = {2},
   number = {19},
   pages = {1--11},
   tags = {8.4,8.41,8.43,UQ,Scatter-Inv},
   DOI = {10.1117/1.JMM.19.2.024001},
   author = {Farchmin, N and Hammerschmidt, M and Schneider, P I and Wurm, M and Bodermann, B and B{\"a}r, M and Heidenreich, S}
}

@Article { HeidenreichGB2018,
   title = {Bayesian approach to determine critical dimensions from scatterometric measurements},
   journal = {Metrologia},
   year = {2018},
   month = {10},
   day = {19},
   volume = {55},
   number = {6},
   pages = {201},
   tags = {8.4,8.41,8.43, UQ},
   DOI = {10.1088/1681-7575/aae41c},
   author = {Heidenreich, S and Gross, H and B{\"a}r, M}
}

@Article { HeidenreichGBW2016,
   title = {Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry},
   journal = {Measurement},
   year = {2017},
   month = {2},
   day = {1},
   volume = {97},
   number = {79--87},
   tags = {8.4,8.41,UQ},
   DOI = {10.1016/j.measurement.2016.06.009},
   author = {Heidenreich, S and Gross, H and B{\"a}r, M and Wright, L}
}

@Article { WeissenbrunnerFSMTL2016,
   title = {Simulation-based determination of systematic errors of flow meters due to uncertain inflow conditions},
   journal = {Flow Measurement and Instrumentation},
   year = {2016},
   month = {8},
   day = {29},
   tags = {8.4,8.41,Flow,UQ},
   state = {in_preparation},
   DOI = {10.1016/j.flowmeasinst.2016.07.011},
   author = {Weissenbrunner, A and Fiebach, A and Schmelter, S and B{\"a}r, M and Thamsen, P.U and Lederer, T}
}

@Article { Schmelter_2016_1,
   title = {Polynomchaos zur Unsicherheitsquantifizierung in Str{\"o}mungssimulationen f{\"u}r metrologische Anwendungen},
   journal = {tm-Technisches Messen},
   year = {2016},
   month = {1},
   day = {8},
   volume = {83},
   number = {2},
   pages = {71-76},
   tags = {8.41, Flow, UQ},
   web_url = {http://www.degruyter.com/view/j/teme.2016.83.issue-2/teme-2015-0109/teme-2015-0109.xml},
   author = {Schmelter, S and Fiebach, A and Weissenbrunner, A}
}

@Article { e73c330da32016_2,
   title = {Numerical prediction of the flow rate through a flow meter with uncertain inflow profile},
   journal = {Proceedings of Imeko 2015 XXI World Congress Measurement in Research and Industry},
   year = {2015},
   month = {11},
   day = {30},
   tags = {8.41, Flow, UQ},
   author = {Weissenbrunner, A and Fiebach, A and Schmelter, S and Straka, M and B{\"a}r, M and Lederer, T}
}

@Article { heidenreich2015bayesian,
   title = {Bayesian approach to the statistical inverse problem of scatterometry: Comparison of three surrogate models},
   journal = {International Journal for Uncertainty Quantification},
   year = {2015},
   month = {1},
   day = {8},
   pages = {511},
   tags = {8.41, Scatter-Inv, UQ},
   DOI = {10.1615/Int.J.UncertaintyQuantification.2015013050},
   author = {Heidenreich, S and Gross, H and B{\"a}r, M}
}

@Article { Schmelt_JCF2015,
   title = {Numerical prediction of the influence of uncertain inflow conditions in pipes by polynomial chaos},
   journal = {Int. J. Comp. Fluid. Dyn.},
   year = {2015},
   month = {1},
   day = {5},
   volume = {29},
   number = {6-8},
   pages = {411-422},
   tags = {8.41, Flow, UQ},
   DOI = {10.1080/10618562.2015.1112899},
   author = {Schmelter, S and Fiebach, A and Model, R and B{\"a}r, M}
}

@Article { Heidenreich2014a,
   title = {A surrogate model enables a Bayesian approach to the inverse problem of scatterometry},
   journal = {J. Phys. Conf. Ser.},
   year = {2014},
   volume = {490},
   number = {1},
   pages = {012007},
   tags = {8.41,Bayes,Scatter-Inv,Regression,8.42, UQ},
   web_url = {http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007},
   publisher = {IOP Publishing},
   language = {en},
   ISSN = {1742-6596},
   DOI = {10.1088/1742-6596/490/1/012007},
   author = {Heidenreich, S and Gross, H and Henn, M-A and Elster, C and B{\"a}r, M}
}