% % This file was created by the TYPO3 extension % bib % --- Timezone: CET % Creation date: 2023-01-28 % Creation time: 13-34-04 % --- Number of references % 9 % @Article { FarchminHSWBBH2020, title = {Efficient Bayesian inversion for shape reconstruction of lithography masks}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, year = {2020}, month = {5}, day = {5}, volume = {2}, number = {19}, pages = {1--11}, tags = {8.4,8.41,8.43,UQ,Scatter-Inv}, DOI = {10.1117/1.JMM.19.2.024001}, author = {Farchmin, N and Hammerschmidt, M and Schneider, P I and Wurm, M and Bodermann, B and B{\"a}r, M and Heidenreich, S} } @Article { HeidenreichGB2018, title = {Bayesian approach to determine critical dimensions from scatterometric measurements}, journal = {Metrologia}, year = {2018}, month = {10}, day = {19}, volume = {55}, number = {6}, pages = {201}, tags = {8.4,8.41,8.43, UQ}, DOI = {10.1088/1681-7575/aae41c}, author = {Heidenreich, S and Gross, H and B{\"a}r, M} } @Article { HeidenreichGBW2016, title = {Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry}, journal = {Measurement}, year = {2017}, month = {2}, day = {1}, volume = {97}, number = {79--87}, tags = {8.4,8.41,UQ}, DOI = {10.1016/j.measurement.2016.06.009}, author = {Heidenreich, S and Gross, H and B{\"a}r, M and Wright, L} } @Article { WeissenbrunnerFSMTL2016, title = {Simulation-based determination of systematic errors of flow meters due to uncertain inflow conditions}, journal = {Flow Measurement and Instrumentation}, year = {2016}, month = {8}, day = {29}, tags = {8.4,8.41,Flow,UQ}, state = {in_preparation}, DOI = {10.1016/j.flowmeasinst.2016.07.011}, author = {Weissenbrunner, A and Fiebach, A and Schmelter, S and B{\"a}r, M and Thamsen, P.U and Lederer, T} } @Article { Schmelter_2016_1, title = {Polynomchaos zur Unsicherheitsquantifizierung in Str{\"o}mungssimulationen f{\"u}r metrologische Anwendungen}, journal = {tm-Technisches Messen}, year = {2016}, month = {1}, day = {8}, volume = {83}, number = {2}, pages = {71-76}, tags = {8.41, Flow, UQ}, web_url = {http://www.degruyter.com/view/j/teme.2016.83.issue-2/teme-2015-0109/teme-2015-0109.xml}, author = {Schmelter, S and Fiebach, A and Weissenbrunner, A} } @Article { e73c330da32016_2, title = {Numerical prediction of the flow rate through a flow meter with uncertain inflow profile}, journal = {Proceedings of Imeko 2015 XXI World Congress Measurement in Research and Industry}, year = {2015}, month = {11}, day = {30}, tags = {8.41, Flow, UQ}, author = {Weissenbrunner, A and Fiebach, A and Schmelter, S and Straka, M and B{\"a}r, M and Lederer, T} } @Article { heidenreich2015bayesian, title = {Bayesian approach to the statistical inverse problem of scatterometry: Comparison of three surrogate models}, journal = {International Journal for Uncertainty Quantification}, year = {2015}, month = {1}, day = {8}, pages = {511}, tags = {8.41, Scatter-Inv, UQ}, DOI = {10.1615/Int.J.UncertaintyQuantification.2015013050}, author = {Heidenreich, S and Gross, H and B{\"a}r, M} } @Article { Schmelt_JCF2015, title = {Numerical prediction of the influence of uncertain inflow conditions in pipes by polynomial chaos}, journal = {Int. J. Comp. Fluid. Dyn.}, year = {2015}, month = {1}, day = {5}, volume = {29}, number = {6-8}, pages = {411-422}, tags = {8.41, Flow, UQ}, DOI = {10.1080/10618562.2015.1112899}, author = {Schmelter, S and Fiebach, A and Model, R and B{\"a}r, M} } @Article { Heidenreich2014a, title = {A surrogate model enables a Bayesian approach to the inverse problem of scatterometry}, journal = {J. Phys. Conf. Ser.}, year = {2014}, volume = {490}, number = {1}, pages = {012007}, tags = {8.41,Bayes,Scatter-Inv,Regression,8.42, UQ}, web_url = {http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007}, publisher = {IOP Publishing}, language = {en}, ISSN = {1742-6596}, DOI = {10.1088/1742-6596/490/1/012007}, author = {Heidenreich, S and Gross, H and Henn, M-A and Elster, C and B{\"a}r, M} }