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Lens inspection using Multiple Aperture Shear Interferometry: Comparison to Wave Front Sensing Methods


We present a new method for lens inspection, called Multiple Aperture Shear Interferometry
(MArS) using the spatial coherence function of light as a primary
measurand. MArS allows the use of several independent light sources (illumination
apertures) at the same time. In this paper, we however only employ a single
light source in order to enable a direct comparision to wave front sensing.