322. PTB Seminar: EUV2023 in Berlin

Metrology, fundamental research and applications in the spectral range of the extreme ultraviolet (EUV) and vacuum ultraviolet (VUV): For 40 years, PTB has been conducting research and measurements using synchrotron radiation as part of collaborations and services for science and industry. For the seventh time, PTB organised a workshop from 13 to 15 November 2023 under the umbrella of the Helmholtz-Fonds e.V. with the aim of presenting current developments in the use of this radiation. More than 120 participants discussed advances in the fields of EUV lithography, the characterisation of nanostructures and thin optical layers as well as the radiometric characterisation of instruments for space-based exploration of the solar system in over 30 lectures and poster presentations.

The three-day event began with a tour of PTB's facilities for metrology with synchrotron radiation in Berlin-Adlershof on the afternoon of 13 November and continued on 14 and 15 November in the Hermann von Helmholtz Building on PTB's Charlottenburg campus. In a special session, the history of PTB's activities in this field of research, spanning more than 40 years, was honoured, but also the way into the future was outlined in a lecture by the Scientific Director of the Helmholtz-Zentrum für Materialien und Energie Berlin (HZB), Prof. Dr. B. Rech. The utilisation of a future radiation source BESSY III will not only continue the successful activities of PTB, but will also enable a completely new quality for materials metrology.

Web: www.EUV2023.ptb.de

Contact:

M. Kolbe, 7.12, e-mail: michael.kolbe(at)ptb.de
A. Gottwald, 7.13, e-mail: alexander.gottwald(at)ptb.de