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273rd PTB Seminar

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The 273rd PTB Seminar "VUV and EUV Metrology" was held in the Lecture Hall of the Helmholtz-Zentrum Berlin at the electron storage ring BESSY II in Berlin-Adlershof on 24 and 25 October 2013. More than 110 participants from industry and research made use of these two days to discuss current developments with regard to the application, instrumentation and measuring techniques of and for the spectral ranges of vacuum ultraviolet (VUV) and extreme ultraviolet (EUV). The programme included presentations by 29 invited speakers, a poster show as well as a tour of PTB's measuring facilities at the Metrology Light Source. This Seminar was organized with the support of numerous companies (Carl Zeiss SMT, ASML, BESTEC, Bruker, Iszgro Diodes, Optixfab, Rigaku, Technoexan) and of the Helmholtz-Fonds.


F. Scholze, 7.12, e-mail: Opens window for sending emailFrank.Scholze(at)ptb.de


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