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322. PTB-Seminar "VUV and EUV Metrology" 2023

The 7th seminar in this series, launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces.

The venue of this seminar is the Helmholtz Building of the historical PTB campus site in Berlin-Charlottenburg (Abbestr. 2-12, 10587 Berlin).
Further information and deadlines are available at the seminar's website, Opens external link in new windowwww.euv2023.ptb.de.