Vacuum interferometer
Laser interferometers are frequently used for high-precision length measurements on objects having structures in the nanometer range. If precision requirements are high, even slight changes of the refractive index of air have a negative impact. A measurement in vacuum would prevent this impact but is not possible for all measurement objects. Together with the Institut für Mikroelektronik- und Mechatronik-Systeme (IMMS) in Ilmenau, PTB has developed a principle that is based on an air-cushioned vacuum seal. The measurement object can be positioned outside the vacuum and – except for a very small air gap – the optical path of the interferometer runs within vacuum. (Technology Offer 420)
interferometric measurement of objects that are not suitable for measurements in vacuum
high accuracy
position regulation free of vacuum forces
Contact person for questions about technology transfer
Andreas Barthel,
Telefon: (0531) 592-8307,
andreas.barthel(at)ptb.de,
www.technologietransfer.ptb.de