In the subject area "Nanometrology", work is carried out for the metrological traceability of the characteristics of nano-objects and the understanding of metrologically relevant processes on the nanoscale. Nano-objects are defined by dimensions in the nanoscale range, i.e. of approx. 1 nm to 100 nm in at least one dimension. As many functional characteristics of nano-objects depend critically on their dimensions, and as these must, therefore, be checked for nanotechnological applications, special importance is attached to the dimensional characterization of nano-objects. The fields of work are:

1. Creation of the scientific bases for the understanding and description of metrologically relevant processes on the nanoscale. Combination of the results of different measurement procedures for a better understanding of the measurements. Use of these findings for new and optimized metrological applications in nanotechnology

2. Safeguarding of the metrological traceability of measurement results of different measurement procedures which are used to investigate the properties of unordered nanomaterials and nanoparticles

3. Safeguarding of the metrological traceability of measurement results on ordered nanostructures and ultraprecise surfaces

4. Safeguarding of the metrological traceability of material-specific measurement results on nano-objects and nanostructures

5. Manufacture of nanostructures and nanomaterials for metrological applications

6. Applications of nanotechnology for metrology