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Software-Toolbox for complex models on measurement processes in optics

09/2017 - 08/2020


  • Federal Ministry for Economic Affairs and Energy (Opens external link in new windowBMWi)

The goal of the joint research project is to develop a software toolbox for uncertainty quantification in optical metrology.  By using mathematical methods, the effect of measurement uncertainties on simulation results of a finite-element Maxwell-solver and on inverse problems in optics should be efficiently quantified.  The toolbox can be used to optimize semiconductor devices or for the fast evaluation of indirect optical measurements.