Funding
- Federal Ministry for Economic Affairs and Energy (BMWi)
The goal of the joint research project is to develop a software toolbox for uncertainty quantification in optical metrology. By using mathematical methods, the effect of measurement uncertainties on simulation results of a finite-element Maxwell-solver and on inverse problems in optics should be efficiently quantified. The toolbox can be used to optimize semiconductor devices or for the fast evaluation of indirect optical measurements.
Partners
- Federal Ministry for Economic Affairs and Energy (BMWi)