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Development of reference-free measurement procedure for straightness

05/2008 - 12/2010

The PTB Nanometer Comparator allows for length measurements with an accuracy in the nanometer range. In this project the additional and simultaneous straightness measurement shall be realized at an uncertainty in the nanometer range. The procedure to be developed is based on scanning interferometric measurements and mathematical modelling of systematic interferometer errors as well as scanning stage errors. This research is part of the joint project.

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