Metrology with Synchrotron Radiation

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2023

S. Alam, P. Paul, V. Beladiya, P. Schmitt, O. Stenzel, M. Trost, S. Wilbrandt, C. Mühlig, S. Schröder, G. Matthäus, S. Nolte, S. Riese, F. Otto, T. Fritz, A. Gottwald, A. Szeghalmi

Heterostructure Films of SiO2 and HfO2 for High-Power Laser Optics Prepared by Plasma-Enhanced Atomic Layer Deposition

Coatings 13(2) , 278 (2023)
https://doi.org/10.3390/coatings13020278

M. Bavdaz, E. Wille, M. Ayre, I. Ferreira, B. Shortt, S. Fransen, M. J. Collon, G. Vacanti, N. M. Barrière, B. Landgraf, D. Girou, M. Olde Riekering, J. Haneveld, R. Start, B. Schurink, C. van Baren, D. D. Monica Ferreira, S. Massahi, S. Svendsen, F. Christensen, M. Krumrey, D. Skroblin et. al.

NewATHENA optics technology

Proc. of SPIE 12679 , 267902 (2023)
https://doi.org/10.1117/12.2678522

K. Bzheumikhova, J. Vinson, R. Unterumsberger, M. Wansleben, C. Zech, K. Schüler, Y. Kayser, P. Hönicke, B. Beckhoff

Titanium and titanium oxides at the K- and L-edges: comparing theoretical calculations to X-ray absorption and X-ray emission measurements

J. Anal. At. Spectrom. 38 , 1885-1894 (2023)
https://doi.org/10.1039/D3JA00215B

E. Cara, P. Hönicke, Y. Kayser, J. K. N. Lindner, M. Castellino, I. Murataj, S. Porro, A. Angelini, N. De Leo, C. F. Pirri, B. Beckhoff, L. Boarino, F. F. Lupi

Developing Quantitative Nondestructive Characterization of Nanomaterials: A Case Study on Sequential Infiltration Synthesis of Block Copolymers

ACS Appl. Polym. Mater. 5(3) , 2079–2087 (2023)
https://doi.org/10.1021/acsapm.2c02094

R. Ciesielski, L. M. Lohr, A. Fernández Herrero, A. Fischer, A. Grothe, H. Mentzel, F. Scholze, V. Soltwisch

A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range

Review of Scientific Instruments 94(1) , 013904 (2023)
https://doi.org/10.1063/5.0120146

M. Collon, L. Abalo, N. Barrière, A. Bayerle, L. Castiglione, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, M. Krumrey, D. Skroblin et. al.

The development of the mirror for the Athena X-ray mission

Proc. of SPIE 12777 , 127770R (2023)
https://doi.org/10.1117/12.2689003

X. J. Deng, A. W. Chao, J. Feikes, A. Hoehl, W. H. Huang, R. Klein, A. Kruschinski, J. Li, M. Ries, C. X. Tang

Breakdown of classical bunch length and energy spread formula in a quasi-isochronous electron storage ring

Phys. Rev. Accel. Beams 26 , 054001 (2023)
https://doi.org/10.1103/PhysRevAccelBeams.26.054001

D. Eberbeck, S. Gustafsson, E. Olsson, K.-F. Braun, C. Gollwitzer, M. Krumrey, C. Bergemann, A. Wang, W. W. Yu, H. Kratz, B. Hankiewicz, R. Messing, N. Steffens, A. M. Schmidt, C. Schmidt, R. Müller, F. Wiekhorst

Magneto-structural characterization of different kinds of magnetic nanoparticles

Journal of Magnetism and Magnetic Materials 583 , 171031 (2023)
https://doi.org/10.1016/j.jmmm.2023.171031

N. Feltin, L. Crouzier, , A. Delvallée, F. Pellegrino, V. Maurino, J. Deumer, C. Gollwitzer, M. Neuwirth, D. Bergmann, D. Hüser, T. Klein et. al.

Metrological Protocols for Reaching Reliable and SI-Traceable Size Results for Multi-Modal and Complexly Shaped Reference Nanoparticles

Nanomaterials 13(6) , 993 (2023)
https://doi.org/10.3390/nano13060993

I. Ferreira, M. Bavdaz, M. Ayre, E. Wille, B. Shortt, S. Fransen, M. Collon, G. Vacanti, N. Barrière, B. Landgraf, M. Olde Riekerink, J. Haneveld, R. Start, C. van Baren, D. D. M. Ferreira, S. Massahi, S. Svendsen, F. Christensen, M. Krumrey, D. Skroblin et. al.

Status of the demonstration of the critical technologies of the ATHENA telescope

Proc. of SPIE 12777 , 127770Q (2023)
https://doi.org/10.1117/12.2688840

F. Förste, L. Bauer, C. Streeck, M. Radtke, U. Reinholz, D. Kadow, C. Keil, I. Mantouvalou

Quantitative Analysis and 2D/3D Elemental Imaging of Cocoa Beans Using X-ray Fluorescence Techniques

Anal. Chem. 95(13) , 5627–5634 (2023)
https://doi.org/10.1021/acs.analchem.2c05370

P. A. Gargini, J. P. Benschop,C. Wagner and N. Harned, I. Fomenkov, H. Mizoguchi, F. Scholze

Photon Sources for Lithography and Metrology

PM351 SPIE , 1302 (2023) , ISBN: 9781510653719
https://spie.org/Publications/Book/2638241?&origin_id=x646&SSO=1

D. Heinis, A. Carballedo, C. Colldelram, G. Cuni, N. Valls Vidal, A. Sánchez, J. Casas, J. Nicolàs, M. Collon, G. Vacanti, M. Krumrey, I. Ferreira, M. Bavdaz

MINERVA installation status, an X-ray facility for the characterization of the ATHENA mirror modules at the ALBA synchrotron

Proc. of SPIE 12777 , 1277721 (2023)
https://doi.org/10.1117/12.2689958

P. Hönicke

A novel and holistic approach for experimental X-ray fundamental parameter determination - the Ru L-shell

New J. Phys. 25 , 073012 (2023)
https://doi.org/10.1088/1367-2630/ace3ec

Y. Kayser, P. Hönicke, M. Wansleben, A. Wählisch, B. Beckhoff

Experimental determination of the gadolinium L subshells fluorescence yields and Coster-Kronigtransition probabilities

X-Ray Spectrom. 52(5) , 235-246 (2023)
https://doi.org/10.1002/xrs.3313

C. S. Kern, A. Haags, L. Egger, X. Yang, H. Kirschner, S. Wolff, T. Seyller, A. Gottwald, M. Richter, U. De Giovannini, A. Rubio, M. G. Ramsey, F. C. Bocquet, S. Soubatch, F. S. Tautz, P. Puschnig, S. Moser

Simple extension of the plane-wave final state in photoemission: Bringing understanding to the photon-energy dependence of two-dimensional materials

Phys. Rev. Research 5 , 033075 (2023)
https://doi.org/10.1103/PhysRevResearch.5.033075

H. Kirschner, H. Kaser, A. Gottwald

Commissioning of a gas monitor detector for an undulator beamline in the VUV and EUV wavelength range

J. Phys.: Conf. Ser. 2380 , 012084 (2023)
https://doi.org/10.1088/1742-6596/2380/1/012084

S. de Kock, K. Skudler, R. Matsidik, M. Sommer, M. Müller, M. Walter

NEXAFS spectra of model sulfide chains: implications for sulfur networks obtained from inverse vulcanization

Phys. Chem. Chem. Phys. 25 , 20395-20404 (2023)
https://doi.org/10.1039/D3CP02285D

B. Landgraf, L. Abalo, N. M. Barrière, A. Bayerle, D. de Borst, L. Castiglione, M. J. Collon, L. Crama, A. Chatbi, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, R. van der Hoeven, J. den Hollander, Y. Jenkins, L. Cibik, M. Krumrey, D. Skroblin et. al.

High-resolution and light-weight silicon pore x-ray optics

Proc. of SPIE 12679 , 1267903 (2023)
https://doi.org/10.1117/12.2678106

L. M. Lohr, R. Ciesielski, S. Glabisch, S. Schröder, S. Brose, V. Soltwisch

Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation

Applied Optics 62(1) , 117-132 (2023)
https://doi.org/10.1364/AO.475566

R. Matsidik, K. Skudler, S. de Kock, A. Seifert, M. Müller, M. Walter, S. Choudhury, M. Sommer

On the Effect of Sulfur Strand Length on the Electrochemical Performance of Dual-Redox-Active Sulfur-Naphthalene Diimide Cathode Materials

ACS Appl. Energy Mater. 6(18) , 9466−9474 (2023)
https://doi.org/10.1021/acsaem.3c01438

O. Ogor, U. Kroth, H. Kaser, M. Krzyzagorski, A. Gottwald

The new PTB beamline for vacuum-ultraviolet radiometry

J. Phys.: Conf. Ser. 2380 , 012032 (2023)
https://doi.org/10.1088/1742-6596/2380/1/012032

X. Pan, Z. Kochovski, Y.-L. Wang, R. M. Sarhan, E. Härk, S. Gupta, S. Stojkovikj, G. A. El-Nagar, M. T. Mayer, R. Schürmann, J. Deumer, C. Gollwitzer, J. Yuan, Y. Lu

Poly(ionic liquid) nanovesicles via polymerization induced self-assembly and their stabilization of Cu nanoparticles for tailored CO₂ electroreduction

Journal of Colloid and Interface Science 637 , 408-420 (2023)
https://doi.org/10.1016/j.jcis.2023.01.097

D. Paredes-Sanz, S. Svendsen, S. Massahi, D. D. M. Ferreira, N. C. Gellert, A. S. Jegers, P. L. Henriksen, B. Landgraf, A. Thete, I. Ferreira, M. Bavdaz, M. Collon, M. Krumrey, D. Skroblin, F. E. Christensen

Characterization of carbon thin films as an overcoating candidate material for the optics of NewATHENA

Proc. of SPIE 12679 , 1267913 (2023)
https://doi.org/10.1117/12.2677304

V. Soltwisch, T. Biskup, M. Kolbe, F. Scholze

Opportunities of Polarization-Resolved EUV Scatterometry on Photomasks

Proc. of SPIE 12802 , 128020G (2023)
https://doi.org/10.1117/12.2675921

C. Streeck, D. Grötzsch, J. Weser, A. Nutsch, W. Malzer, B. Beckhoff, B. Kanngiesser, I. Mantouvalou

In situ gas cell for the analysis of adsorption behaviour on surfaces using X-ray spectroscopy

Applied Surface Science 609 , 155179 (2023)
https://doi.org/10.1016/j.apsusc.2022.155179

A. Wählisch, R. Unterumsberger, P. Hönicke, J. Lubeck, Y. Kayser, J. Weser, G. Dai, K. Hahm, T. Weimann, C. Seim, S. Rehbein, B. Beckhoff

Quantitative Element-Sensitive Analysis of Individual Nanoobjects

Small 19(9) , 2204943 (2023)
https://doi.org/10.1002/smll.202204943

A. Wählisch, M. Wansleben, J. Weser, C. Stadelhoff, I. Holfelder, Y. Kayser, B. Beckhoff

Experimental determination of differential scattering coefficients for nickel by means of linearly polarized x-ray radiation

Metrologia 60 , 035001 (2023)
https://doi.org/10.1088/1681-7575/acca87

A. Wählisch, M. Wansleben, R. Unterumsberger, Y. Kayser, B. Beckhoff

Reference-free X-ray fluorescence analysis using well-known polychromatic synchrotron radiation

J. Anal. At. Spectrom. 38 , 1865-1873 (2023)
https://doi.org/10.1039/D3JA00109A

N. Wauschkuhn, K. Frenzel, B. Beckhoff, P. Hönicke

Experimental determination of tantalum L-shell fluorescence yields and Coster–Kronig transition probabilities

J. Anal. At. Spectrom. 38 , 197-203 (2023)
https://doi.org/10.1039/D2JA00325B

N. Wauschkuhn, K. Frenzel, B. Beckhoff, P. Hönicke

Experimental determination of ruthenium L-shell fluorescence yields and Coster–Kronig transition probabilities

J. Anal. At. Spectrom. 38 , 1301-1306 (2023)
https://doi.org/10.1039/D3JA00085K

2022

M. Barbera, U. Lo Cicero, L. Sciortino, M. Todaro, E. Puccio, F. D'Anca, N. Montinaro, S. Varisco, P. Törmä, L. Riuttanen, I. Varjos, B. Mikladal, E. Magnano, I. Pis, C. Gollwitzer, E. Handick, M. Krumrey, C. Laubis

Carbon nanotubes thin filters for x- ray detectors in space

Proc. of SPIE 12181 , 121814H (2022)
https://doi.org/10.1117/12.2631516

M. Bavdaz, E. Wille, M. Ayre, I. Ferreira, B. Shortt, S. Fransen, M. Millinger, M. Collon, G. Vacanti, N. Barrière, B. Landgraf, M. Olde Riekerink, J. Haneveld, R. Start, C. van Baren, D. D. M. Ferreira, S. Massahi, S. Svendsen, F. Christensen, M. Krumrey, E. Handick, V. Burwitz, G. Pareschi, B. Salmaso, A. Moretti, D. Spiga, G. Valsecchi, D. Vernani, P. Lupton, W. Mundon, G. Phillips, J. Schneider, T. Korhonen, A. Sanchez, D. Heinis, C. Colldelram, M. Tordi, S. De Lorenzi, R. Willingale

ATHENA optics technology development

Proc. of SPIE 12181 , 121810T (2022)
https://doi.org/10.1117/12.2629894

B. Beckhoff

Traceable Characterization of Nanomaterials by X-ray Spectrometry Using Calibrated Instrumentation

Nanomaterials 12(13) , 2255 (2022)
https://doi.org/10.3390/nano12132255

B. Beckhoff, S. Essmann, T. Horn, F. Lienesch, S. Seitz, S. M. Sarge, C. Zech

Metrologie und Sicherheit für Batterien

PTB-Mitteilungen 132, Heft 2 , 55 (2022)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2022/Heft2/PTB-Mitteilungen_2022_Heft_2.pdf#page=55

K. Bzheumikhova, J. Vinson, R. Unterumsberger, Y. Kayser, T. Jach, B. Beckhoff

Near-edge x-ray absorption and emission of cyanates and thiocyanates

PHYSICAL REVIEW B 106(12) , 125133 (2022)
https://doi.org/10.1103/PhysRevB.106.125133

U. L. Cicero, M Barbera, N. Montinaro, F. D’Anca, M. Todaro, E. Puccio, L. Sciortino, F. Ambrosino, R. Campana, T. Chen, Y. Chen, Y. Evangelista, M. Feroci, N. Gao, F. Lu, Y. Xu, L. Cibik, M. Krumrey

Filters design and characterization for LAD instrument onboard eXTP

Proc. of SPIE 12181 , 121816H (2022)
https://doi.org/10.1117/12.2631556

R. Ciesielski, Q. Saadeh, V. Philipsen, K. Opsomer, J.-P. Soulié, M. Wu, P. Naujok, R. W. E. van de Kruijs, C. Detavernier, M. Kolbe, F. Scholze, V. Soltwisch

Determination of optical constants of thin films in the EUV

Applied Optics 61(8) , 2060-2078 (2022)
https://doi.org/10.1364/AO.447152

M. J. Collon, L. Abalo, N. M. Barrière, A. Bayerle, L. Castiglione, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, R. van der Hoeven, J. den Hollander, Y. Jenkins, B. Landgraf, L. Keek, B. Okma, P. da Silva Ribeiro, C. Rizzos, A. Thete, G. Vacanti, S. Verhoeckx, M. Vervest, R. Visser, L. Voruz, M. Bavdaz, E. Wille, I. Ferreira, M. Olde Riekerink, J. Haneveld, A. Koelewijn, M. Wijnperle, J.-J. Lankwarden, B. Schurink, R. Start, C. van Baren, J.-W. A. den Herder, E. Handick, M. Krumrey, V. Burwitz, S. Massahi, D. D. M. Ferreira, S. Svendsen, F. E. Christensen, W. Mundon, G. Phillips

The development of the mirror for the Athena x-ray mission

Proc. of SPIE 12181 , 121810U (2022)
https://doi.org/10.1117/12.2630775

V. Cotroneo, G. Rivolta, M. Bavdaz, R. Bruni, M. M. Civitani, T. Döhring, I. Ferreira, E. Gibertini, A. Giglia, C. Gollwitzer, S. Iovenitti, M. Krumney, L. Magagnin, N. Mahne, S. Nannarone, G. Pareschi, S. Romaine, L. Sethares, B. Shortt, D. Skroblin, G. Sironi, D. Spiga, G. Tagliaferri, G. Valsecchi

Dopamine dip-liquid overcoatings for soft x-ray reflectivity enhancement

Proc. of SPIE 12181 , 1218117 (2022)
https://doi.org/10.1117/12.2630212

J. Deumer, B. R. Pauw, S. Marguet, D. Skroblin, O. Taché, M. Krumrey, C. Gollwitzer

Small-angle X-ray scattering: characterization of cubic Au nanoparticles using Debye's scattering formula

J. Appl. Cryst. 55 , 993-1001 (2022)
https://doi.org/10.1107/S160057672200499X

A. Erdmann, H. Mesilhy, P. Evanschitzky, Q. Saadeh, V. Soltwisch, S. Bihr, J. Zimmermann, V. Philipsen

Simulation of polychromatic effects in high NA EUV lithography

Proc. of SPIE 11854 , 1185405 (2022)
https://doi.org/10.1117/12.2600931

A. Fernandez Herrero, F. Scholze, G. Dai, V. Soltwisch

Analysis of Line-Edge Roughness Using EUV Scatterometry

Nanomanufacturing and Metrology 164 (2022)
https://doi.org/10.1007/s41871-022-00126-w

A. Gottwald, M. Krumrey, F. Scholze, M. Richter

Metrology with synchrotron radiation at PTB

Eur. Phys. J. Plus 137 , 1238 (2022)
https://doi.org/10.1140/epjp/s13360-022-03417-9

A. Haags, X. Yang, L. Egger, D. Brandstetter, H. Kirschner, F. C. Bocquet, G. Koller, A. Gottwald, M. Richter, J. M. Gottfried, M. G. Ramsey, P. Puschnig, S. Soubatch, F. S. Tautz

Momentum space imaging of orbitals for chemical analysis

Sci. Adv. 8 (29) (2022)
https://www.science.org/doi/10.1126/sciadv.abn0819

P. Hönicke, Y. Kayser, K. V. Nikolaev, V. Soltwisch, J. E. Scheerder, C. Fleischmann, T. Siefke, A. Andrle, G. Gwalt, F. Siewert, J. Davis, M. Huth, A. Veloso, R. Loo, D. Skroblin, M. Steinert, A. Undisz, M. Rettenmayr, B. Beckhoff

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Small 18 , 2105776 (2022)
https://doi.org/10.1002/smll.202105776

P. Hönicke, R. Unterumsberger, N. Wauschkuhn, M. Krämer, B. Beckhoff, P. Indelicato, J. Sampaio, J. P. Marques, M. Guerra, F. Parente, J. P. Santos

Experimental and theoretical approaches for determining the K-shell fluorescence yield of carbon

Radiation Physics and Chemistry 202 , 110501 (2022)
https://doi.org/10.1016/j.radphyschem.2022.110501

A. Hornemann, D. M. Eichert, A. Hoehl, B. Tiersch, G. Ulm, M. G. Ryadnov, B. Beckhoff

Investigating Membrane-Mediated Antimicrobial Peptide Interactions with Synchrotron Radiation Far-Infrared Spectroscopy

ChemPhysChem , e202100815 (2022)
https://doi.org/10.1002/cphc.202100815

P. Hurdax, C. S. Kern, T. G. Boné, A. Haags, M. Hollerer, L. Egger, X. Yang, H. Kirschner, A. Gottwald, M. Richter, F. C. Bocquet, S. Soubatch, G. Koller, F. S. Tautz, M. Sterrer, P. Puschnig, M. G. Ramsey

Large Distortion of Fused Aromatics on Dielectric Interlayers Quantified by Photoemission Orbital Tomography

ACS Nano 16 , 17435−17443 (2022)
https://doi.org/10.1021/acsnano.2c08631

Y. Kayser, J. Osan, P. Hönicke, B. Beckhoff

Reliable compositional analysis of airborne particulate matter beyond the quantification limits of total reflection X-ray fluorescence

Anal. Chim. Acta 1192 , 339367 (2022)
https://doi.org/10.1016/j.aca.2021.339367

D. Marchi, E. Cara, F. Ferrarese Lupi, P. Hönicke, Y. Kayser, B. Beckhoff, M. Castellino, P. Klapetek, A. Zoccante, M. Laus, M. Cossi

Structure and stability of 7-mercapto-4- methylcoumarin self-assembled monolayers on gold: an experimental and computational analysis

Phys. Chem. Chem. Phys. 24 , 22083–22090 (2022)
https://doi.org/10.1039/d2cp03103e

S. Massahi, D. D. M. Ferreira, F. E. Christensen, S. Svendsen, N. Gellert, A. 'S Jegers, M. Collon, B. Landgraf, A. Thete, I. Ferreira, M. Bavdaz, B. Shortt, W. Schönberger, A. Langer, M. Krumrey, C. Gollwitzer, E. Handick

Coating process parameter influence on thin films for the ATHENA x-ray optics

Proc. of SPIE 12181 , 121814F (2022)
https://doi.org/10.1117/12.2630726

S. Metzner, B. Kästner, M. Marschall, G. Wübbeler, S. Wundrack, A. Bakin, A. Hoehl, E. Rühl, C. Elster

Assessment of Subsampling Schemes for Compressive Nano-FTIR Imaging

IEEE 71 , 4506208 (2022)
https://doi.org/10.1109/TIM.2022.3204072

C. Minelli, M. Wywijas, D. Bartczak, S. Cuello-Nuñez, H. G. Infante, J. Deumer, C. Gollwitzer, M. Krumrey et. al.

Versailles project on advanced materials and standards (VAMAS) interlaboratory study on measuring the number concentration of colloidal gold nanoparticles

Nanoscale 14 , 4690-4704 (2022)
https://doi.org/10.1039/D1NR07775A

G. F. Mohsin, F.-J. Schmitt, C. Kanzler, A. K. Alzubaidi, A. Hornemann

How alanine catalyzes melanoidin formation and dehydration during synthesis from glucose

European Food Research and Technology 37 (2022)
https://doi.org/10.1007/s00217-022-03989-x

Y. Petenev, J. Feikes, J. Li, R. Klein, M. Müller, A. Barboutis

Automatic adjustment and measurement of the electron beam current at the Metrology Light Source (MLS)

JACoW Publishing , 113-116 (2022)
https://doi.org/10.18429/JACoW-IBIC2022-MOP31

N. Phung, A. Mattoni, J. A. Smith, D, Skroblin, H. Köbler, L. Choubrac, J. Breternitz, J. Li, T. Unold, S. Schorr, C. Gollwitzer, I. G. Scheblykin, E. L. Unger, M. Saliba, S. Meloni, A. Abate, A. Merdasa

Photoprotection in metal halide perovskites by ionic defect formation

Joule 6(9) , 2152-2174 (2022)
https://doi.org/10.1016/j.joule.2022.06.029

M. Plock, K. Andrle, S. Burger, P. Schneider

Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction

Adv. Theory Simul. 2200112 (2022)
https://doi.org/10.1002/adts.202200112

Q. Saadeh, P. Naujok, M. Wu, V. Philipsen, D. Thakare, F. Scholze, C. Buchholz, C. Stadelhoff, T. Wiesner, V. Soltwisch

Nested Sampling aided determination of tantalum optical constants in the EUV spectral range

Applied Optics 61 (33) , 10032-10042 (2022)
https://doi.org/10.1364/AO.472556

D. Skroblin, A. Fernandez Herrero, T. Siefke, K. Nikolaev, A. Andrle, P. Hönicke, Y. Kayser, M. Krumrey, C. Gollwitzer, V. Soltwisch

Challenges of grazing emission X-ray fluorescence ({GEXRF}) for the characterization of advanced nanostructured surfaces

Nanoscale (2022)
https://doi.org/10.1039/D2NR03046B

D. Skroblin, L. Cibik, B. Klemke, J. Deumer, C. Gollwitzer

Magnetic Sample Environment for in-situ SAXS/WAXS Measurements on Magnetic Nanoparticles with Shape Anisotropy

J. Phys.: Conf. Ser. 2380 , 012107 (2022)
https://doi.org/10.1088/1742-6596/2380/1/012107

V. Soltwisch, S. Glabisch, A. Andrle, V. Philipsen, Q. Saadeh, S. Schröder, L. Lohr, R. Ciesielski, S. Brose

High-precision optical constant characterization of materials in the EUV spectral range: from large research facilities to laboratory-based instruments

Proc. of SPIE 124720 , 124720Q (2022)
https://doi.org/10.1117/12.2640176

S. Staeck, A. Andrle, P. Hönicke, J. Baumann, D. Grötzsch, J. Weser, G. Goetzke, A. Jonas, Y. Kayser, F. Förste, I. Mantouvalou, J. Viefhaus, V. Soltwisch, H. Stiel, B. Beckhoff, B. Kanngießer

Scan-free GEXRF in the soft X-ray range for the investigation of structured nanosamples

Nanomaterials 12(21) , 3766 (2022)
https://doi.org/10.3390/nano12213766

S. Svendsen, S. Massahi, D. Ferreira, N. Gellert, A. 'S Jegers, F. Christensen, A. Thete, B. Landgraf, M. Collon, E. Handick, D. Skroblin, L. Cibik, C. Gollwitzer, M. Krumrey, I. Ferreira, B. Shortt, M. Bavdaz

Characterisation of iridium and low-density bilayer coatings for the Athena optics

Proc. of SPIE 12181 , 121810Z (2022)
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D. Thakare, M. Wu, K. Opsomer, C. Detavernier, P. Naujok, Q. Saadeh, V. Soltwisch, A. Delabie, V. Philipsen

Evaluation of Ta-Co alloys as novel high-k EUV mask absorber

Proc. of SPIE 12051 , 120510D (2022)
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C. Wang, W. Li, A. A. Kistanov, H. Singh, Y. Kayser, W. Cao, B. Geng

Structural engineering and electronic state tuning optimization of molybdenum-doped cobalt hydroxide nanosheet self-assembled hierarchical microtubules for efficient electrocatalytic oxygen evolution

Journal of Colloid and Interface Science 628 , 398-406 (2022)
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2021

A. Andrle, P. Hönicke, J. Vinson, R. Quintanilha, Q. Saadeh, S. Heidenreich, F. Scholze, V. Soltwisch

The anisotropy in the optical constants of quartz crystals for soft X-rays

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Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning

Nanomaterials 11(7) , 1647 (2021)
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N. M. Barrière, L. Babić, A. Bayerle, L. Castiglione, M. J. Collon, N. Eenkhoorn, D. Girou, R. Günther, E. Hauser, Y. Jenkins, B. Landgraf, L. Keek, B. Okma, G. M. Serano, A. Thete, G. Vacanti, S. Verhoeckx, M. Vervest, L. Voruz, M. W. Beijersbergen, M. Bavdaz, E. Wille, I. Ferreira, S. Fransen, M. O. Riekerink, J. Haneveld, B. Schurink, R. Start, C. van Baren, E. Handick, M. Krumrey, G. Valsecchi, M. Bradshaw, V. Burwitz

Assembly of confocal silicon pore optics mirror modules

Proc. of SPIE 11822 , 1182208-1-1182208-09 (2021)
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J. Baumann, Y. Kayser, B. Kanngießer

Grazing Emission X-Ray Fluorescence: Novel Concepts and Applications for Nano-Analytics

Phys. Status Solidi B 258 , 2000471-1-2000471-11 (2021)
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M. Bavdaz, E. Wille, M. Ayre, I. Ferreira, B. Shortt, S. Fransen, M. Millinger, M. J. Collon, G. Vacanti, N. M. Barrière, B. Landgraf, M. O. Riekerink, J. Haneveld, R. Start, C. van Baren, D. D. M. Ferreira, S. Massahi, S. Svendsen, F. Christensen, M. Krumrey, E. Handick, V. Burwitz, M. Bradshaw, G. Pareschi, G. Valsecchi, D. Vernani, G. Kailla, W. Mundon, G. Phillips, J. Schneider, T. Korhonen, A. Sanchez, D. Heinis, M. Tordi, R. Willingale

The Athena x-ray optics development and accommodation

Proc. of SPIE 11852 , 1185220-1-1185220-16 (2021)
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ATHENA X-ray Optics Development and Accommodation

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W. Blachucki, Yves Kayser, A. Wach, R. Fanselow, C. Milne, J. Sá, J. Szlachetko

Resonant X-ray Emission Spectroscopy with a SASE Beam

Appl. Sci. 11 (18) , 8775 (2021)
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Harnessing Carrier Multiplication in Silicon Solar Cells Using UV Photons

IEEE PHOTONICS TECHNOLOGY LETTERS 33 (24) , 1041-1135 (2021)
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X-ray mirror development and production for the Athena telescope

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Silicon Pore Optics X-ray mirror development for the ATHENA telescope

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Correlative Analysis of the Dimensional Properties of Bipyramidal Titania Nanoparticles by Complementing Electron Microscopy with Other Methods

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Experimental demonstration of the mechanism of steady-state microbunching

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Characterisation of X-ray mirrors based on chromium-iridium tri-layer coatings

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Charge-Promoted Self-Metalation of Porphyrins on an Oxide Surface

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Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

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Direct Observation of the Xenon Physisorption Process in Mesopores by Combining In Situ Anomalous Small-Angle X-ray Scattering and X-ray Absorption Spectroscopy

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Impact of annealing on performance of X-ray mirror coatings for Athena

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Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm – 23.75 nm

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Going beyond Pentacene: Photoemission Tomography of a Heptacene Monolayer on Ag(110)

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Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence

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S. Seeger, J. Osan, O. Czömpöly, Armin Gross, H. Stosnach, L. Stabile, M. Ochsenkuehn-Petropoulou, L. A. Tsakanika, T. Lymperopoulou, S. Goddard, M. Fiebig, F. Gaie-Levrel, Y. Kayser, B. Beckhoff

Quantification of Element Mass Concentrations in Ambient Aerosols by Combination of Cascade Impactor Sampling and Mobile Total Reflection X-ray Fluorescence Spectroscopy

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K. Smuda, J. Gienger, P. Hönicke, J. Neukammer

Function of Hemoglobin-Based Oxygen Carriers: Determination of Methemoglobin Content by Spectral Extinction Measurements

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Towards soft x-ray fluorescence measurements in the laboratory using a laser-produced plasma source and a complementary metal-oxide semiconductor detector

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A round robin test for total reflection X-ray fluorescence analysis using preselected and well characterized samples

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Development of a combined XRF/XPS surface-analysis system for the surface-layer quantification of ²⁸Si spheres

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Characterization of Ru4_-xTa_x (x =1,2,3) alloy as material candidate for EUV low-n mask

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Study of novel EUVL mask absorber candidates

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Quantification via X-ray fluorescence analysis of oxygen in the surface layer of a Si-sphere used as a new mass standard

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Quantitative Manganese Dissolution Investigation in Lithium-Ion Batteries by Means of X-ray Spectrometry Techniques

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P. Hönicke, A. Andrle, Y. Kayser, K.V. Nikolaev, J. Probst, F. Scholze, V. Soltwisch, T. Weimann, B. Beckhoff

Grazing incidence-X-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures

Nanotechnology 31 , 505709 (2020)
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P. Hurdax, M. Hollerer, L. Egger, G. Koller, X. Yang, A. Haags, S. Soubatch, F. S. Tautz, M. Richter, A. Gottwald, P. Puschnig, M. Sterrer, M. G. Ramsey

Controlling the electronic and physical coupling on dielectric thin films

Beilstein Journal of Nanotechnology 11 , 1492–1503 (2020) ; Beilstein-Institut zur Förderung der Chemischen Wissenschaften
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A. Jafari, D. D. M. Ferreira, S. Kadkhodazadeh, T. Kasama, S. Massahi, S. Svendsen, L. M. Vu, P. L. Henriksen, Z. M. Balogh, M. Krumrey, L. Cibik, F. E. Christensen, and B. Shortt

Long-term performance and durability of Ir/-B₄C multilayer x-ray mirrors: focusing on composition, structure, and reflectivity properties

Journal of Astronomical Telescopes, Instruments, and Systems 6 , 034005 (2020)
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T. Janda, J. Godinho, T. Ostatnicky, E. Pfitzner, G. Ulrich, A. Hoehl, S. Reimers, Z. Šobán, T. Metzger, H. Reichlová, V. Novák, R. P. Campion, J. Heberle, P.Wadley, K. W. Edmonds, O. J. Amin, J. S. Chauhan, S. S. Dhesi, F. Maccherozzi, R. M. Otxoa, P. E. Roy, K. Olejník, P. Nemec, T. Jungwirth, B. Kaestner, J. Wunderlich

Magneto-Seebeck microscopy of domain switching in collinear antiferromagnet CuMnAs

Phys. Rev. Materials 4 , 094413-1 - 094413-9 (2020)
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R. Jonckheere, C.-C. Wu, V. de Rooij-Lohmann, D. Elstgeest, H. Lensen, P. Hönicke, M. Kolbe, V. Soltwisch, C. Zech, F. Scholze, R. Aubert, V. V. Nair, E. Hendrickx

Study of EUV reticle storage effects through exposure on EBL2 and NXE

SPIE Digital Library 11517 , 1-14 (2020)
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Small angle x-ray scattering (SAXS)

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H. Li, B. Li, S. Wang, Z. Li, J. Qi, M. Yu, Y. Huang, Y. Li, A. Barboutis, J. Lubeck, R. Klein, S. Kroth, W. Paustian, M. Ressin, R. Thornagel

Research on the irradiance calibration of a VUV dual-grating spectrometer based on synchrotron radiation

Optics Communications 475 , 126254 (2020)
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M. Marschall, A. Hornemann, G. Wübbeler, A. Hoehl, E. Rühl, B. Kästner, C. Elster

Compressed FTIR spectroscopy using low-rank matrix reconstruction

Optics Express 28 , 38762 (2020)
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G.F. Mohsin, F. J. Schmitt, C. Kanzle, J. D. Epping, D. Buhrke, A. Hornemann

Melanoidin formed from fructosylalanine contains more alanine than melanoidin formed from D-glucose with L-alanine

Food Chemistry 305 , 125459 (2020)
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K.V. Nikolaev, V. Soltwisch, P. Hönicke, F. Scholze, J. de la Rie, S. N. Yakunin, I. A. Makhotkin, R. W. E. van de Kruijs, F. Bijkerk

A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

J. Synchr. Rad. 27 , 386-395 (2020)
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E. Nolot, S. Cadot, F. Martin, P. Hönicke, C. Zech, B. Beckhoff

In-line characterization of ultrathin transition metal dichalcogenides using X-ray fluorescene and X-ray photoelectron spectroscopy

Spectrochim. Acta, Part B 166 , 105788 (2020) ; Elsevier
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M. Pflüger, R. J. Kline, A. Fernandez Herrero, M. Hammerschmidt, V. Soltwisch and M. Krumrey

Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazingincidence small-angle x-ray scattering

J. Micro/Nanolith. MEMS MOEMS 19 , 014001 (2020)
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M. Richter, G. Ulm

Metrology with Synchrotron Radiation

Synchrotron Light Sources and Free-Electron Lasers (2020) , edited by E. Jaeschke, S. Khan, J. R. Schneider, J. B. Hastings ; Springer
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R. Sachse, M. Pflüger, J.-J. Velasco-Vélez, M. Sahre, J. Radnik, M. Bernicke, D. Bernsmeier, V.-D. Hodoroaba, M. Krumrey, P. Strasser, R. Kraehnert, A. Hertwig

Assessing Optical and Electrical Properties of Highly Active IrOx Catalysts for the Electrochemical Oxygen Evolution Reaction via Spectroscopic Ellipsometry

ACS Catalysis 10 , 14210-14223 (2020)
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D. Skroblin, A. Schavkan, M. Pflüger, N. Pilet, B. Lüthi, M. Krumrey

Vacuum-compatible photon-counting hybrid pixel detector for wide-angle x-ray scattering , x-ray diffraction, and x-ray reflectometry in the tender x-ray range

Review of Scientific Instruments 91 , 023102 (2020)
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S. Svendsen, D. D. M. Ferreira, S. Massahi, A. Jafari, N. C. Gellert, F. E. Christensen, P. L. Henriksen, L. M. Vu, A. 'S Jegers, B. Shortt, B. Landgraf, D. A. Girou, M. J. Collon, L. Cibik, E. Handick, M. Krumrey

Status of the Ir and Ir/SiC coating development for the Athena optics

Proc. of SPIE 11444 , 114444K (2020)
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V. Szwedowski-Rammert, P. Hönicke, M. Wu, U. Waldschläger, A. Gross, J. Baumann, G. Goetzke, F. Delmotte, E. Meltchakov, B. Kanngie{ss}er, P. Jonnard, I. Mantouvalou

Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer {CrSc} multilayer water window optics

Spectrochim. Acta, Part B 174 , 105995 (2020)
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Georg Ulrich , Emanuel Pfitzner , Arne Hoehl , Jung-Wei Liao , Olga Zadvorna , Guillaume Schweicher , Henning Sirringhaus , Joachim Heberle , Bernd Kästner , Jörg Wunderlich und Deepak Venkateshvaran

Thermoelectric nanospectroscopy for the imaging of molecular fingerprints

20200316 Nanophotonics 9, 14 (2020)
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R. Unterumsberger, P. Hönicke, Y. Kayser, B. Pollakowski, S. Gholhaki, Q. Guo, R.E. Palmer, B. Beckhoff

Interaction of nanoparticle properties and X-ray analytical techniques

Journal of Analytical Atomic Spectrometry 35 , 1022--1033 (2020)
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A. Wählisch, C. Streeck, P. Hönicke, B. Beckhoff

Validation of secondary fluorescence excitation in quantitative X-ray fluorescence analysis of thin alloy films

Journal of Analytical Atomic Spectrometry 35 , 1664 - 1670 (2020)
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M. Wansleben, J. Vinson, A. Wählisch, K. Bzheumikhova, P. Hönicke, B. Beckhoff, Y. Kayser

Speciation of iron sulfide compounds by means of X-ray emission spectroscopy using a compact full-cylinder von Hamos spectrometer

J. Anal. At. Spectrom. 35 , 2679-2685 (2020)
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F. Weigert, A. Müller, I. Häusler, D. Geißler, D. Skroblin, M. Krumrey, W. Unger, J. Radnik, U. Resch‑Genger

Combining HR-TEM and XPS to elucidate the core–shell structure of ultrabright CdSe/CdS semiconductor quantum dots

Sci. Rep. 10 , 20712 (2020)
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M. Wu, D. Thakare, J.-F. de Marneffe, P. Jaenen, L. Souriau, K. Opsomer, J.-P. Soulié, A. Erdmann, H. Mesilhy, P. Naujok, M. Foltin, V. Soltwisch, Q. Saadeh, V. Philipsen

Mask absorber for next generation EUV lithography

SPIE Digital Library 11517 , 1-15 (2020)
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N. Yu, W. Cao, M. Huttula, Y. Kayser, P. Hoenicke, B. Beckhoff, F. Lai, R. Dong, H. Sun, B. Geng

Fabrication of FeNi Hydroxides Double-shell Nanotube Arrays with Enhanced Performance for Oxygen Evolution Reaction

Appl. Catal. 261 , 118193 (2020)
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M.C. Zapata, N. Farchmin, M. Pflüger, K. Nikolaev, V. Soltwisch, S. Heidenreich, C. Laubis, M. Kolbe, F. Scholze

Sensitivity analysis for the detection of pitchwalk in self-aligned quadruple patterning by GISAXS

Proc. of SPIE 11325 , 113251D (2020)
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Claudia Zech, Yves Kayser, Philipp Hönicke and Burkhard Beckhoff

Investigations of Ageing Mechanisms for New High-Energy-Density Battery Materials with X-Ray Spectrometry

Spectroscopy 35, 7 , 39–40 (2020)
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2019

A. Andrle, P. Hönicke, P.-I. Schneider, Y. Kayser, M. Hammerschmidt, S. Burger, F. Scholze, B. Beckhoff, V. Soltwisch

Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction

Proc. of SPIE 110570 , 110570M (2019)
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I. Barcelos, H. Bechtel, C. de Santos, D. Bahamon, B. Kaestner, F. Maia, R. Freitas

Probing Polaritons in 2D Materials with Synchrotron Infrared Nanospectroscopy

ADVANCED OPTICAL MATERIALS 1901091 , 1 - 16 (2019)
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N. M. Barrière, G. Vacanti, S. Verhoeckx, E. Hauser, M. Vervest, L. Keek, B. Okma, B. Landgraf, R. Günther, L. Voruz, D. Girou, L. Babi'c, M. Collon, M. W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, J. Haneveld, A. Koelewijn, R. Start, M. Wijnperlé, J-J. Lankwarden, C. van Baren, A. Eigenraam, P. Müller, E. Handick, G. Valsecchi

Assembly of confocal silicon pore optic mirror modules

Proc. of SPIE 11119 , 111190J (2019)
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M. Bavdaz, E. Wille, M. Ayre, I. Ferreira, B. Shortt, S. Fransen, M. Collon, G. Vacanti, N. Barrière, B. Landraf, C. v. Baren, D.D.M. Ferreira, S. Massahi, F. Christensen, M. Krumrey, V. Burwitz, G. Pareschi, G. Valsecchi, P. Oliver, A. Seidel, T. Korhonen

Optics developments for ATHENA

Proc. of SPIE 11119 , 111190D (2019)
https://doi.org/10.1117/12.2530912

W. Blachucki, Y. Kayser, J. Czapla-Masztafiak, M. Guo, P. Juranic, M. Kavcic, E. Källman, G. Knopp, M. Lundberg, C. Milne, J. Rehanek, J. Sá, J. Szlachetko

Inception of electronic damage of matter by photon-driven post-ionization mechanisms

Structural Dynamics 6 , 024901 (2019)
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M. J. Collon, G. Vacanti, N. M. Barrière, B. Landgraf, R. Günther, M. Vervest, L. Voruz, S. Verhoex, L. Babić, R. van der Hoeven, K. van Straeten, A. Chatbi, D. Girou, M. W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, B. Shortt, I. Ferreira, J. Haneveld, A. Koelewijn, K. Booysen, M. Wijnperle, J.-J. Lankwarden, C. van Baren, A. Eigenraam, J. W. den Herder, P. Müller, M. Krumrey, V. Burwitz, G. Pareschi, S. Massahi, D. Della Monica Ferreira, F. E. Christensen, G. Valsecchi, P. Oliver, I. Chequer, K. Ball, K.-H. Zuknik, D. Vernani

Silicon pore optics mirror module production and testing

Proc. of SPIE 11180 , 1118023 (2019)
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M. J. Collon, G. Vacanti, N. M. Barrière, B. Landgraf, R. Günther, M. Vervest, L. Voruz, S. Verhoeckx, L. Babić, L. Keek, D. Girou, B. Okma, E. Hauser, M. W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, B. Shortt, I. Ferreira, J. Haneveld, A. Koelewijn, R. Start, M. Wijnperle, J-J. Lankwarden, C. van Baren, P. Hieltjes, J. W. den Herder, P. Müller, E. Handick, M. Krumrey, M. Bradshaw, V. Burwitz, G. Pareschi, S. Massahi, S. Svendsen, D. Della Monica Ferreira, F. E. Christensen, G. Valsecchi, P. Oliver, I. Chequer, K. Ball

Status of the silicon pore optics technology

Proc. of SPIE 11119 , 111190L (2019)
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D. H. van Dorp, L. Nyns, D. Cuypers, T. Ivanov, S. Brizzi, M. Tallarida, C. Fleischmann, P. Hönicke, M. Müller, O. Richard, D. Schmeißer, S. De Gendt, D. H. C. Lin, C. Adelmann

Amorphous Gadolinium Aluminate as a Dielectric and Sulfur for Indium Phosphide Passivation

ACS Appl. Electron. Mater 1 , 2190-2201 (2019)
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L. Egger, B. Kollmann, P. Hurdax, D. Lüftner, X. Yang, S. Weiss, A. Gottwald, M. Richter, G. Koller, S. Soubatch, F. S. Tautz, P. Puschnig, M.G. Ramsey

Can photoemission tomography be useful for small, strongly-interacting adsorbate systems?

New J. Phys 21 , 043003 (2019)
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A. Gottwald, H. Kaser, M. Kolbe

The U125 insertion device beamline at the Metrology Light Source

J. Synchrotron Rad. 26 , 535–542 (2019)
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A. Gottwald, K. Wiese, T. Siefke, M. Richter

Validation of thin film TiO2 optical constants by reflectometry and ellipsometry in the VUV spectral range

Meas. Sci. Technol. 30 , 045201 (2019)
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G. Greco, K. Mazzio, X. Dou, E. Gericke, R. Wendt, M. Krumrey, S. Passerini

Structural study of carbon-coated TiO2 anatase nanoparticles as high-performance anode materials for Na-ion batteries

ACS Applied Energy Materials 2 , 7142 – 7151 (2019)
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P. Hönicke, B. Detlefs, E. Nolot, Y. Kayser, U. Mühle, B. Pollakowski, B. Beckhoff

Reference-free grazing incidence X-ray fluorescence and reflectometry as a methodology for independent validation of X-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

J. Vac. Sci. Technol. 37 , 041502 (2019)
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A. Jafari, F. Christensen, S. Svendsen, S. Massahi, P. Henriksen, B. Shortt, M. Krumrey, L. Cibik, A. Schubert, E. Handick, D. D. M. Ferreira

X-ray reflectometry of a platinum coating as reference sample for the ATHENA coating development

Proc. of SPIE 11119 , 111191K (2019)
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Y. Kayser, C. Milne, P. Juranić, L. Sala, J. Czapla-Masztafiak, R. Follath, M. Kavčič, G. Knopp, J. Rehanek, W. Błachucki, M. G. Delcey, M. Lundberg, K. Tyrała, D. Zhu, R. Alonso-Mori, R. Abela, J. Sá, J. Szlachetko

Core-level nonlinear spectroscopy triggered by stochastic X-ray pulses

Nat. Commun 10 , 4761 (2019)
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C. Laubis, A. Babalik, A. Babuschkin, A. Barboutis, C. C. Buchholz, A. Fischer, S. Jaroslawzew, J. Lehnert, H. Mentzel, J. Puls, A. Schönstedt, M. Sintschuk, C. Stadelhoff, C. Tagbo, F. Scholze

Photon detector calibration in the EUV spectral range at PTB

Proc. of SPIE 10957 , 109571L (2019)
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H. L. Lin, W. E. Fu, H -F Weng, I. Misumi, K. Sugawara, S. Gonda, K. Takahashi, K. Takahata, K. Ehara, T. Takatsuji, T. Fujimoto, J. Salas, K. Dirscherl, , J. Garnäs, J. Damasceno, J. C. V. de Oliveira, E. Emanuele, G. B. Picotto, C. S. Kim, S. J.Cho, C. Motzkus, F. Meli, S. Gao, Y. Shi, J. Liu, Å. K. Jämting, H. J. Catchpoole, M. A. Lawn, J. Herrmann, V. A. Coleman, L. Adlem, O.A. Kruger, J. Buajarern, E. Buhr, H. U. Danzebrink, M. Krumrey and H. Bosse

Nanoparticle Characterization - Supplementary Comparison on Nanoparticle Size

Metrologia 56 , 04004 (2019)
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V. Luong, V. Philipsen, K. Opsomer, J. Rip, E. Hendrickx, M. Heyns, C. Detavernier, C. Laubis, F. Scholze

Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

061607 J. Vac. Sci. Technol. 37 , 061607 (2019)
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I. Mantouvalou, S. Staeck, A. Jonas, D. Grötzsch, M. Spanier, J. Baumann, K. Witte, R. Unterumsberger, M. Müller, B. Kanngießer

A compact and versatile grating spectrograph for soft X-ray emission analysis

Rev. Sci. Instrum. 90 , 106105 (2019)
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S. Massahi, F. E. Christensen, D. D. M. Ferreira, A. Jafari, S. Svendsen, P. L. Henriksen, B. Shortt, I. Ferreira, M. Bavdaz, M. Collon, B. Landgraf, D. Girou, A. Langer, W. Schönberger, T. Wellner, M. Krumrey, L. Cibik

Installation and commissioning of the silicon pore optics coating facility for the ATHENA mission S

Proc. of SPIE 11119 , 111190F (2019)
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G. F. Mohsin, F-J. Schmitt, C. Kanzler, A. Hoehl, A. Hornemann

PCA-based identification and differentiation of FTIR data from model melanoidins with specific molecular compositions

Food Chemistry 281 , 106-113 (2019)
https://doi.org/10.1016/j.foodchem.2018.12.054

H.-E. Nieminen, V. Miikkulainen, D. Settipani, L. Simonelli, P. Hönicke, C. Zech, Y. Kayser, B. Beckhoff, A.-P. Honkanen, M. J. Heikkilä, K. Mizohata, K. Meinander, O. M. E. Ylivaara, S. Huotari, M. Ritala

Intercalation of Lithium-Ion from Gaseous Precursors into b-MnO2 Thin Films Deposited by Atomic Layer Deposition

J. Phys. Chem. 123 , 15802-15814 (2019)
https://pubs.acs.org/doi/abs/10.1021/acs.jpcc.9b03039

M. Pflüger, V. Soltwisch, J. Xavier, J. Probst, F. Scholze, C. Becker and M. Krumrey

Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with GISAXS

J. Appl. Cryst. 52 , 322-331 (2019)
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V. Philipsen, K. Vu Luong, K. Opsomer, C. Detavernier, E. Hendrickx, A. Erdmann, P. Evanschitzky, R. W. E. van de Kruijs, Z. Heidarnia-Fathabad, F. Scholze, C. Laubis

Novel EUV mask absorber evaluation in support of next-generation EUV imaging

Proc. of SPIE 10810 , 108100C-1 (2019)
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V. Philipsen, K. V. Luong, K. Opsomer, L. Souriau, J. Rip, C. Detavernier, A. Erdmann, P. Evanschitzky, C. Laubis, P. Hönicke, V. Soltwisch, E. Hendrickx

Mask absorber development to enable next-generation EUVL

Proc. of SPIE 11178 , 111780F-1 (2019)
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A. Schavkan, C. Gollwitzer, Raul Garcia-Diez, M. Krumrey, C. Minelli, D. Bartczak, S. Cuello–Nuñez, H. Goenaga–Infante, J. Rissler, E. Sjöström, G. B. Baur, K. Vasilatou and A. G. Shard

Number concentration of gold nanoparticles in suspension: SAXS and spICPMS as traceable methods compared to laboratory methods

Nanomaterials 9 , 502 (2019)
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T. Schenk, A. Anspoks, I. Jonane, R. Ignatans, B.S. Johnson, J.L. Jones, M. Tallarida, C. Marini., L. Simonelli, P. Hönicke, C. Richter, T. Mikolajick, U. Schroeder

Local structural investigation of hafnia-zirconia polymorphs in powders and thin films by X-ray absorption spectroscopy

Acta Mater 180 , 158-169 (2019)
https://www.sciencedirect.com/science/article/abs/pii/S135964541930583X

P-I. Schneider, X. Garcia Santiago, V. Soltwisch, M. Hammerschmidt, S. Burger, C. Rockstuhl

Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction

ACS Photonics 6 , 2726-2733 (2019)
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S. Song, R. Alonso-Mori, M. Chollet, Y. Feng, J. M. Glownia, H. T. Lemke, M. Sikorski, D. Zhu, S. Moeller, H. J. Lee, M. S. Hunter, G. Carini, K. Tiedtke, U. Jastrow, A. Sorokin, M. Richter, S. Owada, K. Tono, N. Saito, T. Tanaka, M. Kato, M. Yabashie, A. Robert

Measurement of the absolute number of photons of the hard X-ray beamline at the Linac Coherent Light Source

Journal of Synchrotron Radiation 26 , 320-327 (2019)
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Pulse power measurements and attenuator characterization of the hard X-ray beamline at the Linac Coherent Light Source

SPIE Digital Library 1103810 , 1-7 (2019)
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A. A. Sorokin, Y. Bican, S. Bonfigt, M. Brachmanski, M. Braune, U. F. Jastrow, A. Gottwald, H. Kaser, M. Richter, K. Tiedtke

An X-ray gas monitor for free-electron lasers

J. Synchrotron Rad. 26 , 1092–1100 (2019)
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J. M. Sturm, F. Liu, E. Darlatt, M. Kolbe, A. A. I. Aarnink, C. J. Lee, F. Bijkerk

Extreme UV secondary electron yield measurements of Ru, Sn, and Hf oxide thin films

J. of Micro/Nanolithography, MEMS, and MOEMS 18 , 033501 (2019)
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S. Svendsen, S. Massahi, D. D. M. Ferreira, F. Christensen, A. Jafari, P. Henriksen, M. Collon, B. Landgraf, D. Girou, M. Krumrey, L. Cibik, A. Schubert, B. Shortt

Performance and time stability of Ir/SiC x-ray mirror coatings for ATHENA

Proc. of SPIE 11119 , 111190G-1 - 111190G (2019)
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G. Vacanti, N. M. Barrière, M. Collon, E. Hauser, L. Babi'c, A. Bayerle, D. Girou, R. Günther, L. Keek, B. Landgraf, B. Okma, S. Verhoeckx, M. Vervest, L. Voruz, M. Bavdaz, E. Wille, M. Krumrey, P. Müller, E. Handick

X-ray testing of silicon pore optics.

Proc. of SPIE 11119 , 111190I-1 - 111190I (2019)
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M. Wansleben, Y. Kayser, P. Hönicke, I. Holfelder, A. Wählisch, R. Unterumsberger, B. Beckhoff

Experimental determination of line energies, line widths and relative transition probabilities of the Gadolinium L X-ray emission spectrum

Metrologia 56 , 065007 (2019)
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M. Wansleben, C. Zech, C. Streeck, J. Weser, C. Genzel, B. Beckhoff, R. Mainz

Photon flux determination of a liquid-metal jet X-ray source by means of photon scattering

J. Anal. At. Spectrom 34 , 1497-1502 (2019)
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C-C. Wu, M. Bender, R. Jonckheere, F. Scholze, H. Bekman, M. van Putten, R. de Zanger, R. Ebeling, J. Westerhout, K. Nicolai, J. van Veldhoven, V. de Rooij-Lohmann, O. Kievit, A. Deutz

Lifetime test on EUV photomask with EBL2

Proc. of SPIE 11178 , 111780E-1 (2019)
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X. Yang, L. Egger, P. Hurdax, H. Kaser, D. Lüftner, F. C. Bocquet, G. Koller, A. Gottwald, P. Tegeder, M. Richter, M. G. Ramsey, P. Puschnig, S. Soubatch, F. S. Tautz

Identifying surface reaction intermediates with photoemission tomography

Nat. Commun. 10 , 3189 (2019)
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2018

T. Arion , W. Eberhardt , J. Feikes , A. Gottwald , P. Goslawski , A. Hoehl , H. Kaser , M. Kolbe , J. Li , C. Lupulescu , M. Richter , M. Ries , F. Roth , M. Ruprecht , T. Tydecks , and G. Wüstefeld

Transverse resonance island buckets for synchrotron-radiation based electron time-of-flight spectroscopy

10 Review of Scientific Instruments 89 , 103114 (2018)
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Dorota Bartczak, Julie Davies, Christian Gollwitzer, Michael Krumrey and Heidi Goenaga-Infante

Changes of silica nanoparticles upon internalisation by cells: size, aggregation/ agglomeration state, mass- and number-based concentrations

Toxicology Research 7 , 172 - 181 (2018)
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Development of the ATHENA mirror

Proc. of SPIE 10699 , 106990X (2018)
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A Compact High-Power Radiation Source Based on Steady-State Microbunching Mechanism

SLAC-PUB 10699 , 106990Y (2018)
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Maximilien J. Collon, Giuseppe Vacanti, Nicolas M. Barrière, Boris Landgraf, et al.

Silicon Pore Optics Mirror Module Production and Testing

Proc. of SPIE 10699 , 106990Y (2018)
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Mihael Coric, Nitin Saxena, Mika Pflüger, Peter Müller-Buschbaum, Michael Krumrey, and Eva M. Herzig

Resonant Grazing-Incidence Small-Angle X-ray Scattering at the Sulfur K-Edge for Material-Specific Investigation of Thin-Film Nanostructures

J. Phys. Chem. Lett. 9 , 3081 – 3086 (2018)
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M. Dialameh, F. Ferrarese Lupi, P. Hönicke, Y. Kayser, B. Beckhoff, T. Weimann, C. Fleischmann, W. Vandervorst, P. Dubcek, B. Pivac, M. Perego, G. Seguini, N. De Leo, L. Boarino

Development and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques

Phys. Status Solidi A 215 , 1700866 (2018)
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A. Do, M. Briat, S. D. Baton, M. Krumrey, L. Lecherbourg, B. Loupias, F. Pérez, P. Renaudin, C. Rubbelynck and Ph. Troussel

Two-channel high-resolution quasi-monochromatic X-ray imager or Al and Ti plasma

Review of Scientific Instruments 89 , 113702 (2018)
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Analía Fernández Herrero, Heiko Mentzel, Victor Soltwisch, Sina Jaroslawzew, Christian Laubis, and Frank Scholze

EUV-angle resolved scatter (EUV-ARS): a new tool for the characterization of nanometre structures

Proc. of SPIE 10585 , 105850P (2018)
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Desiree Della Monica Ferreira, Sara Svendsena, Sonny Massahia, et al.

Performance and Stability of Mirror Coatings for the ATHENA Mission

Proc. of SPIE 10699 , 106993K (2018)
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Emily Gallagher; Marina Y. Timmermans; Ivan Pollentier; Jae Uk Lee; Marina Mariano; Christoph Adelmann; Cedric Huyghebaert; Frank Scholze; Christian Laubis

CNTs in the context of EUV pellicle history

Proc. of SPIE 10583 , 105831E (2018)
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Andrea M. Giovannozzi, Andrea Hornemann, Beatrix Pollakowski-Herrmann, Felicia M. Green, Paul Gunning, Tara L. Salter, Rory T. Steven, Josephine Bunch, Chiara Portesi, Bonnie J. Tyler, Burkhard Beckhoff, Andrea Mario Rossi

A methodological inter-comparison study on the detection of surface contaminant sodium dodecyl sulfate applying ambient-and vacuum-based techniques

Analytical and Bioanalytical Chemistry 411 , 217–229 (2018)
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A. Gottwald, F. Scholze

Advanced silicon radiation detectors in the vacuum ultraviolet and the extreme ultraviolet spectral range

Smart sensors and MEMS, Intelligent devices and microsystems for industrial applications, 2nd edition , 151-170 (2018)
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Alexander Gottwald, Udo Kroth, Evgenia Kalinina, and Vladimir Zabrodskii

Optical properties of a Cr/4H-SiC photodetector in the spectral range from ultraviolet to extreme ultraviolet

Appl. Opt. 57 , 8431-8436 (2018)
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Giorgia Greco, Dragomir Tatchev, Armin Hoell, Michael Krumrey, Simone Raoux, Robert Hahn, Giuseppe Antonio Elia

Influence of the electrode nano/micro structure on the electrochemical properties of graphite in aluminum batteries

Journal of Materials Chemistry A 6 , 22673 - 22680 (2018)
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M. Guerra, J. M. Sampaio, F. Parente, P. Indelicato, P. Hönicke, M. Müller, B. Beckhoff, J.P. Marques, J.P. Santos

Theoretical and experimental determination of K- and L-shell x-ray relaxation parameters in Ni

Phys. Rev. A 97 , 042501 (2018)
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J.-P. Halaina, E. Renottea, F. Auchèreb, et al.

The EUI flight instrument of Solar Orbiter – From Optical Alignment to End-to-End Calibration

Proc. of SPIE 10699 , 106990H (2018)
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P. Hönicke, M. Krämer, L. Lühl, K. Andrianov, B. Beckhoff, R. Dietsch, T. Holz, B. Kanngiesser, D. Weißbach, T. Wilhein

Development and characterization of sub-monolayer coatings as novel calibration samples for X-ray spectroscopy

Spectrochimica Acta B 145 , 36-42 (2018)
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Bernd Kästner, Franko Schmähling, Andrea Hornemann, Georg Ulrich, Arne Hoehl, Mattias Kruskopf, Klaus Pierz, Markus B. Raschke, Gerd Wübbeler, and Clemens Elster

Compressed sensing FTIR nano-spectroscopy and nano-imaging

Optics Express 14 , 18115-18124 (2018)
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Bernd Kästner, C. Magnus Johnson, Peter Hermann, Mattias Kruskopf, Klaus Pierz, Arne Hoehl, Andrea Hornemann, Georg Ulrich, Jakob Fehmel, Piotr Patoka, Eckart Rühl, and Gerhard Ulm

Infrared Nanospectroscopy of Phospholipid and Surfactin Monolayer Domains

ACS Omega 3 (4) , 4141–4147 (2018)
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M. KEHRT, C. MONTE, A. STEIGER, A. HOEHL, J. HOLLANDT, H.-P. GEMÜND, A. BRÖMEL, F. HÄNSCHKE, T. MAY, N. DEßMANN, H.-W. HÜBERS, R. MIENTUS, AND E. RECK

Intercomparison of far-infrared transmittance measurements

Optics Express 26 , 34484 (2018)
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J.W. Keister, L. Cibik, S. Schreiber, and M. Krumrey

Characterization of a quadrant diamond transmission X-ray detector including a precise determination of the mean electron–hole pair creation energy

J. Synchrotron Radiation 25 , 407-412 (2018)
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Roman Klein, Simone Kroth, Wolfgang Paustian, Mathias Richter and Reiner Thornagel

PTB’s radiometric scales for UV and VUV source calibration based on synchrotron radiation

Metrologia 55 , 386–391 (2018)
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T.-T. Le, C. Pistidda, J. Puszkiel, M. V. Castro Riglos, F. Karimi, J. Skibsted, S. P. Gharibdoust, B. Richter, T. Emmler, C. Milanese, A. Santoru, A. Hoell, M. Krumrey, E. Gericke, E. Akiba, T. R. Jensen, T, Klassen and M. Dornheim

Design of a Nanometric AlTi Additive for MgB2 Based Reactive Hydride Composites with Superior Kinetic Properties

J. Phys. Chem. C 122 , 7642 – 7655 (2018)
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Alexey Lipatov, Michael J. Loes, Haidong Lu, Jun Dai, Piotr Patoka, Nataliia S. Vorobeva, Dmitry S. Muratov, Georg Ulrich, Bernd Kästner, Arne Hoehl, Gerhard Ulm, Xiao Cheng Zeng, Eckart Rühl, Alexei Gruverman, Peter A. Dowben, Alexander Sinitskii

Quasi-1D TiS3 Nanoribbons: Mechanical Exfoliation and Thickness-Dependent Raman Spectroscopy

ACS Nano 12 , 12713-12720 (2018)
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Vu Luong, Vicky Philipsen, Eric Hendrickx, Karl Opsomer, Christophe Detavernier, Christian Laubis, Frank Scholze, Marc Heyns

Ni-Al Alloys as Alternative EUV Mask Absorber

applied sciences 8 , 521 (2018)
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Y. Ménesguen, M.C. Lepy, P. Hönicke, M. Müller, R. Unterumsberger, B. Beckhoff, J. Hoszowska, J.-Cl. Dousse, W. Blachucki, Y. Ito, M. Yamashita, S. Fukushima

Experimental determination of X-ray atomic fundamental parameters of nickel

Metrologia 55 , 56-66 (2018)
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Igor A. Makhotkin, Ryszard Sobierajski, Jaromir Chalupsky´, Kai Tiedtke, Gosse de Vries, Michael Störmer, Frank Scholze et al.

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Journal of Synchrotron Radiation 25 , 77-84 (2018)
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Igor A. Makhotkin, Ryszard Sobierajski, Jaromir Chalupský, Kai Tiedtke, Gosse de Vries, Michael Störmer, Frank Scholze, et al.

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the singleshot ablation threshold

11 JOSA B35 , 2799-2805 (2018)
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Y. Ménesguen, M.-C. Lépy, J.M. Sampaio, J.P. Marques, F. Parente, M. Guerra, P. Indelicato, J. P. Santos, P. Hönicke, B. Beckhoff

A combined experimental and theoretical approach to determine X-ray atomic fundamental quantities of Tin

X-Ray Spectrom. 47 , 341-351 (2018)
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C. Minelli, A. Sikora, R. Garcia-Diez, K. Sparnacci, C. Gollwitzer, M. Krumrey and A. Shard

Measuring the size and density of nanoparticles by centrifugal sedimentation and flotation

Anal. Meth. 10 , 1725–1732 (2018)
http://pubs.rsc.org/en/content/articlehtml/2018/ay/c8ay00237a

G.F. Mohsin, F.-J. Schmitt, C. Kanzler, J.D. Epping, S. Fleming, and A. Hornemann

Structural characterization of melanoidin formed from D-glucose and Lalanine at different temperatures applying FTIR, NMR, EPR, and MALDIToF- MS

Food Chemistry 245 , 761-767 (2018)
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D. Noll, P. Hönicke, Y. Kayser, B. Beckhoff, U. Schwalke

Transfer-free in situ CCVD grown nanocrystalline graphene for sub-ppmv ammonia detection

ECS J. Solid State Sc. 7 , 3108-3113 (2018)
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E. Pfitzner, X. Hu, H. W. Schumacher, A. Hoehl, D. Venkateshvaran, M. Cubukcu, J.-W. Liao, S. Auffret, J. Heberle, J. Wunderlich, and B. Kästner

Near-field magneto-caloritronic nanoscopy on ferromagnetic nanostructures

AIP Advances 8 , 125329 (2018)
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B. Pollakowski-Herrmann, A. Hornemann, A.M. Giovannozzi, F. Green, P. Gunning, C. Portesi, A. Rossi, C. Seim, R. Steven, B. Tyler, B. Beckhoff

A calibration procedure for a traceable contamination analysis on medical devices by combined X-ray spectrometry and ambient spectroscopic techniques

J. Pharm. Biomed. Anal. 150 , 308-317 (2018)
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S. Radunz, A. Schavkan, S. Wahl, C. Würth, H. R. Tschiche, M. Krumrey and U. Resch-Genger

Evolution of Size and Optical Properties of Upconverting Nanoparticles during High Temperature Synthesis

The Journal of Physical Chemistry C 122 , 28958–28967 (2018)
https://pubs.acs.org/doi/10.1021/acs.jpcc.8b09819

F. Roth, T. Arion, H. Kaser, A. Gottwald, W. Eberhardt

Angle resolved Photoemission from Ag and Au single crystals: Finalstate lifetimes in the attosecond range

ELSPEC 224 , 84-92 (2018)
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R. Schaefer, A. Gottwald, M. Richter

Traceable measurements of He, Ne, Ar, Kr, and Xe photoionization cross sections in the EUV spectral range

J. Phys. B: At. Mol. Opt. Phys. 51 , 135004 (2018)
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A. Schleife, M. D. Neumann, N. Esser, Z. Galazka, A. Gottwald, J. Nixdorf, R. Goldhahn, and M. Feneberg,

Optical properties of In2O3 from experiment and first-principles theory: influence of lattice screening

New J. Phys. 20 , 053016 (2018) ; IOP
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Frank Scholze, Christian Laubis, Michael Krumrey, Marina Y. Timmermans, Ivan Pollentier, et al.

EUV optical characterization of alternative membrane materials for EUV pellicles

Proc. of SPIE 10451 , 104510R (2018)
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Frank Scholze, Andreas Fischer, Claudia Tagbo, Christian Buchholz, Victor Soltwisch, Christian Laubis,

Spatially resolved reflectometry for EUV optical components

Proc. of SPIE 10809 , 108091U-1 (2018)
https://spie.org/Publications/Proceedings/Paper/10.1117/12.2501774

Victor Soltwisch, Philipp Hönicke, Yves Kayser, Janis Eilbracht, Jürgen Probst, Frank Scholze and Burkhard Beckhoff

Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Nanoscale 10 , 6177 (2018)
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Simon Stellmer, Georgy Kazakov, Matthias Schreitl, Hendrik Kaser, Michael Kolbe, and Thorsten Schumm

On an attempt to optically excite the nuclear isomer in Th-229 Simon

Phys. Rev. A 97 , 062506 (2018)
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M. Stock, P. Barat, P. Pinot , F. Beaudoux, P. Espel, F. Piquemal, M. Thomas, D. Ziane, P. Abbott, D. Haddad, Z. Kubarych, J. R. Pratt, S. Schlamminger , K. Fujii, K. Fujita, N. Kuramoto, S. Mizushima, L. Zhang, S. Davidson, R. G. Green, J. Liard, C. Sanchez, B. Wood, H. Bettin, M. Borys, I. Busch, M. Hämpke, M. Krumrey, and A. Nicolaus

A comparison of future realizations of the kilogram

Metrologia 55 , T1 (2018)
https://doi.org/10.1088/1681-7575/aa9a7e

R. Unterumsberger , P. Hönicke, J. Colaux , C. Jeynes, M. Wansleben, M. Müller, B. Beckhoff

Accurate experimental determination of Gallium K- and L3-shell XRF fundamental parameters

J. Anal. At. Spectrom 33 , 1003 (2018)
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R. Unterumsberger, P. Hönicke, B. Pollakowski-Herrmann, M. Müller, B. Beckhoff

Relative L3 transition probabilities of titanium compounds as a function of the oxidation state using high-resolution X-ray emission spectrometry

Spectrochim. Acta B 145 , 71-78 (2018)
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Indhu Varatharajan, Alessandro Maturilli, Jörn Helbert, Georg Ulrich, Kirsten Born, Olivier Namur, Bernd Kästner, Lutz Hecht, Bernard Charlier, Herald Hiesinger

Bi-directional reflectance and NanoFTIR spectroscopy of synthetic analogues of Mercury: Supporting MERTIS payload of ESA/JAXA BepiColombo mission

EPSC 12 (2018)
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Z. VARGA, E . VAN DER POL M. PALMAI , R. GARCIA-DIEZ, C. GOLLWITZER, M. KRUMREY et al.

Hollow organosilica beads as reference particles for optical detection of extracellular vesicles

8 Journal of Thrombosis and Haemostasis 16 , 1646–1655 (2018)
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Dervis Vernani; Steffen Blum; Thibault Seure; Marcos Bavdaz, et al.

Integration of the Athena mirror modules: development status of the indirect and direct X-ray methods

Proc. of SPIE 10699 , 1069910 (2018)
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Malte Wansleben, John Vinson, Ina Holfelder, Yves Kayser, Burkhard Beckhoff

Valence-to-core X-ray emission spectroscopy of Ti, TiO, and TiO2 by means of a double full-cylinder crystal von Hamos spectrometer

X-ray spectrometry 48 , 102-106 (2018)
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E. Wille , M. Bavdaz, K. Wallace , B. Shortt, M. Collon, M. Ackermann, et al.

Silicon pore optics for future x-ray telescopes

Proc. of SPIE 10564 , 105640H (2018)
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2017

G. Bartl, P. Becker, B. Beckhoff, H. Bettin, E. Beyer, M .Borys, I. Busch, L. Cibik, G. D’Agostino, E. Darlatt, M. Di Luzio, K. Fujii, H. Fujimoto, K. Fujita, M. Kolbe, M. Krumrey, N. Kuramoto, E. Massa, M. Mecke, S. Mizushima, M. Müller, T. Narukawa, A. Nicolaus, A. Pramann, D. Rauch, O. Rienitz, C. P. Sasso, A. Stopic, R. Stosch, A. Waseda, S. Wundrack, L. Zhang, and X.W. Zhang

A new ²⁸Si single crystal: counting the atoms for the new kilogram definition

Metrologia 54 , 693 (2017)
http://doi.org/10.1088/1681-7575/aa7820

M. Bavdaz, E. Wille, M. Ayre, I. Ferreira, B Shortt, S. Fransen, M. Collon, G. Vacanti, N. Barriere, B. Landgraf, J. Haneveld, C. van Baren, K.-H. Zuknik, D. D.M. Ferreira, S. Massahi, F. Christensen, M. Krumrey, V. Burwitz, G. Pareschi, D. Spiga, G. Valsecchi, D. Vernani, P. Olivier, and A. Seidel

The ATHENA Telescope and Optics Status

Proc. of SPIE 10399 , 103990B-1 (2017)
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W. Blachucki, J. Hoszowska, J.-Cl. Dousse, Y. Kayser, R. Stachura, K. Tyrala, K. Wojtaszek, J. Sá, J. Szlachetko

High energy resolution off-resonant spectroscopy: A review

Spectrochim. Acta B 136 , 23-33 (2017)
http://www.sciencedirect.com/science/article/pii/S0584854717302604?via%3Dihub

E. Buhr, T. Dziomba, C.G. Frase, M. Krumrey, and H. Bosse

Traceable size and size distribution calibrations of nanoparticles

Chem. Ing. Tech. 89 , 239 (2017)
http://dx.doi.org/10.1002/cite.201600075

M.J. Collon, G. Vacanti, N.M. Barrière, B. Landgraf, R. Günther, M. Vervest, R. van der Hoeven, D. Dekker, A. Chatbi, D. Girou, J. Sforzini, M.W. Beijersbergen, M. Bavdaz, E. Wille, S. Fransen, B. Shortt, J. Haneveld, A. Koelewijn, K. Booysen, M. Wijnperle, C. van Baren, A. Eigenraam, P. Müller, M. Krumrey, V. Burwitz, G. Pareschi, S. Massahi, F.E. Christensen, D.D.M. Ferreira, G. Valsecchi, P. Oliver, I. Chequer, K. Ball, and K.-H. Zuknik

Development of Athena mirror modules

Proc. of SPIE 10399 , 103990C-1 (2017)
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Design, development, and performance of X-ray mirror coatings for the ATHENA mission

Proc. of SPIE 10399 , 1039918-1 (2017)
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M. Dialameh, F. Ferrarese Lupi, P. Hönicke, Y. Kayser, B. Beckhoff, T. Weimann, C. Fleischmann, W. Vandervorst, P. Dubcek, B. Pivac, M. Perego, G. Seguini, N. De Leo, L. Boarino

Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Physica Status Solidi A (2017)
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Fingerprinting the type of line roughness

Proc. of SPIE 10330 , 103300U-1 (2017)
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Uncertainty analysis for the deteermination of B₄C optical constants by angle-dependent reflectance measurement for 40 nm to 80 nm wavelength

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A sealable ultrathin window sample cell for the study of liquids by means of soft X-ray spectroscopy

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Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering

Opt. Express 25 , 15441 (2017)
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Enhancing the sensitivity of nano-FTIR spectroscopy

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Towards a correlative approach for characterising single virus particles by transmission electron microscopy and nanoscale Raman spectroscopy

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Determination of SiO2 and C layers on a monocrystalline silicon sphere by reference-free x-ray fluorescence analysis

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A pilot study on fingerprinting Leishmania species from the Old World using Fourier transform infrared spectroscopy.

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Ellipsometric and X-Ray Spectrometric Investigation of Fibrinogen Protein Layers

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Ellipsometric and X-Ray Spectrometric Investigation of Fibrinogen Protein Layers

Physica Status Solidi C 14 , 1700210 (2017)
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S. Klumpp, N. Gerken, K. Mertens, M. Richter, B. Sonntag, A.A. Sorokin, M. Braune, K. Tiedtke, P. Zimmermann, and M. Martins

Multiple Auger cycle photoionisation of manganese atoms by short soft x-ray pulses

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Daniel Lüftner, Simon Weiß, Xiaosheng Yang, Philipp Hurdax, Vitaliy Feyer, Alexander Gottwald, Georg Koller, Serguei Soubatch, Peter Puschnig, Michael G. Ramsey, and F. Stefan Tautz

Understanding the photoemission distribution of strongly interacting two-dimensional overlayers

Phys. Rev. B 96 , 125402 (2017)
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Y. Ménesguen, B. Boyer, H. Rotella, J. Lubeck, J. Weser, B. Beckhoff, D. Grötzsch, B. Kanngießer, A. Novikova, E. Nolot, M.-C. Lépy

CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

X-Ray Spectrom 46(5) , 303-308 (2017)
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M. Müller, B. Beckhoff, E. Beyer, E. Darlatt, R. Fliegauf, G. Ulm, M. Kolbe

Quantitative surface characterization of silicon spheres by combined XRF and XPS analysis for the determination of the Avogadro constant

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M. Pflüger, V. Soltwisch, J. Probst, F. Scholze, and M. Krumrey

Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

IUCrJ 4 , 431 (2017)
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Selective measurement of small metrology targets using CD-GISAXS

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V. Philipsen, K.V. Luong, L. Souriau, A. Erdmann, D. Xu, P. Evanschitzky, R.W.E. van de Kruijs, A. Edrisi, F. Scholze, C. Laubis, M. Irmscher, S. Naasz, C. Reuter, and E. Hendrickx

Reducing extreme ultraviolet mask three-dimentsional effects by alternative metal absorbers

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Reducting EUV masks 3D effects by alternative metal absorbers

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Morphology–Function Relationship of Thermoelectric Nanocomposite Films from PEDOT:PSS with Silicon Nanoparticles

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Update on optical material properties for alternative EUV mask absorber materials

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Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver

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Investigating surface structures by EUV scattering

Proc. of SPIE 10143 , 101430P-1 (2017)
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K. Tyrala, K. Wojtaszek, M. Pajek, Y. Kayser, C. Milne, J. Sá, J. Szlachetko

State-Population Narrowing Effect in Two-Photon Absorption for Intense Hard X-ray Pulses

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G. Vacanti, N. Barrière, M. Bavdaz, A. Chatbi, M. Collon, D. Dekker, D. Girou, R. Günther, R. van der Hoeven, M. Krumrey, B. Landgraf, P. Müller, S. Schreiber, M. Vervest, and E. Wille

Measuring Silicon Pore Optics

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D. Vernani, S. Blum, T. Seure, M. Bavdaz, E. Wille, U. Schaeffer, Ni. Lièvre, A. Nezeeruddin, N. Barrière, M. Collon, L. Cibik, M. Krumrey, P. Müller, and V. Burwitz

Integration of the Athena mirror modules: development of indirect and X-ray direct AIT methods

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J. Vinson, T. Jach, M. Müller, R. Unterumsberger, B. Beckhoff

Resonant x-ray emission of hexagonal boron nitride

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M. Bavdaz, E. Wille, B. Shortt, S. Fransen, M. Collon, N. Barrière, A. Yanson, G. Vacanti, J. Haneveld, C. van Baren, K.-H. Zuknik F. Christensen, D.D.M. Ferreira, M. Krumrey, V. Burwitz, G. Pereschi, D. Spiga, G. Valsecchi, and D. Vernani

The ATHENA optics development

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M. Collon, G. Vacanti, R. Günther, A. Yason, N. Barrière,B. Landgraf, M. Vervest, A. Chatbi, R. van der Hoeven, M. W. Beijersbergen, M. Bavdaz, E. Wille, B. Shortt, J. Haneveld, A. Koelewijn, C. van Baren, A. Eigenraam, P. Müller, M. Krumrey, V. Burwitz, G. Pereschi, P. Conconi, S. Massahi, F.E. Christensen, and G. Valsecchi

Silicon pore optics for the ATHENA telescope

Proc. of SPIE 9905 , 990528 (2016)
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D. Cuypers, C. Fleischmann, D. van Dorp, S. Brizzi, M. Tallarida, M. Mueller, P. Hönicke, A. Billen, R. Chintala, T. Conard, D. Schmeißer, W. Vandervorst, S. Van Elshocht, S. Armini, S. De Gendt, and C. Adelmann

Sacrificial Self-Assembled Monolayers for the Passivation of GaAs (100) Surfaces and Interfaces

Chem. Mater. 28 , 5689 (2016)
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E. Darlatt, B. Mushin, R. Roesch, C. Lupulescu, F. Roth, M. Kolbe, A. Gottwald, H. Hoppe, and M. Richter

Irradiation-induced degradation of PTB7 investigated by valence band and S 2p photoelectron spectroscopy

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D.D.M. Ferreira, A.C. Jakobsen, S. Massahi, F.E. Christensen, B.Shortt, J. Garnaes, A. Torras-Rosell, M. Krumrey, L. Cibik, and S. Marggraf

X-ray mirror development and testing for the ATHENAmission

Proc. of SPIE 9905 , 9905Y-1 (2016)
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C. Fleischmann, R.R. Lieten, P. Hermann, P. Hönicke, B. Beckhoff, F. Seidel, O. Richard, H. Bender, Y. Shimura, S. Zaima, N. Uchida, K. Temst, W. Vandervorst, and A. Vantomme

Thermal stability and relaxation mechanisms in compressively-strained Ge0.94Sn0.06 thin films grown by molecular beam epitaxy

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Size Determination of a Liposomal Drug by Small-Angle X-ray Scattering Using Continuous Contrast Variation

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R. Garcia-Diez, A. Sikora, C. Gollwitzer, C. Minelli, and M. Krumrey

Simultaneous size and density determination of polymeric colloids by continuous contrast variation in small angle X-ray scattering

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A comparison of techniques for size measurement of nanoparticles in cell culture medium

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Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements

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Experimental determination of the oxygen K-shell fluorescence yield using thin SiO2 and Al2O3 foils

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What are the correct L-subshell photoionization cross sections for quantitative X-ray spectroscopy?

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CCQM pilot study CCQM-P140: quantitative surface analysis of multi-element alloy films

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Validation of the probability density function for the calculated radiant power of synchrotron radiation according to the Schwinger formalism

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Photoelektronen-tomographische Bilder von Molekülorbitalen - Elektronenorbitale in 3D

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New X-ray parallel beam facility XPBF 2.0 for the characterization of silicon pore optics

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Update on EUV radiometry at PTB

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A New Generation of X-ray Spectrometry UHV Instruments at the SR Facilities BESSY II, ELETTRA and SOLEIL

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Single shot near edge x-ray absorption fine structure spectroscopy in the laboratory

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Modeling and empirical characterization of the polarization response of off-plane reflection gratings

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S. Massahi, D.D.M. Ferreira, F.E. Christensen, B. Shortt, D.A. Girou, M. Collon, B. Landgraf, N. Barrière, M. Krumrey, L. Cibik, and S. Schreiber

Development and production of a multilayer-coated X-ray reflecting stack for the ATHENA mission

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Y. Ménesguen, M. Gerlach, B. Pollakowski, R. Unterumsberger, M. Haschke, B. Beckhoff, and M.-C. Lépy

High accuracy experimental determination of copper and zinc mass attenuation coefficients in the 100 eV to 30 keV photon energy range

Metrologia 53 , 7 (2016)
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A. Nicolet, F. Meli, E. van der Pol, Y. Yuana, C. Gollwitzer, M. Krumrey, P. Cizmar, E. Buhr, J. Pétry, N. Sebaihi, B. de Boeck, V. Fokkema, R. Bergmans, and R. Nieuwland

Inter-laboratory comparison on the size and stability of monodisperse and bimodal synthetic reference particles for standardization of extracellular vesicle measurements

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Nanoscale plasmonic phenomena in CVD-grown MoS₂ monolayer revealed by ultra-broadband synchrotron radiation based nano-FTIR spectroscopy and near-field microscopy

Opt. Express 24 , 1154-1 (2016)
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Field transients of coherent terahertz synchrotron radiation accessed via time-resoving and correlation techniques

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NICER instrument detector subsystem: description and performance

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Developments in calibration of EUV and VUV detectors for solar orbiter instrumentation using synchrotron radiation

Proc. of SPIE 9905 , 990547-6 (2016)
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F. Roth, C. Lupulescu, E. Darlatt, A. Gottwald, and W. Eberhardt

Angle resolved photoemission from Cu single crystals: Known facts and a few surprises about the photoemission process

JESRP 208 , 2 (2016)
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V. Soltwisch, A. Haase, J. Wernecke, J. Probst, M. Schoengen, S. Burger, M. Krumrey, and F. Scholze

Correlated diffuse x-ray scattering from periodically nanostructured surfaces

Phys. Rev. B 94 , 035419 (2016)
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M. Spanier, C. Herzog, D. Grötzsch, F. Kramer, I. Mantouvalou, J. Lubeck, J. Weser, C. Streeck, W. Malzer, B. Beckhoff, and B. Kanngießer

A flexible setup for angle-resolved X-ray fluorescence spectrometry with laboratory sources

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J. H. Tutt, R. L. McEntaffer, H. Marlowe, D. M. Miles, T. J. Peterson, C. T. DeRoo, F. Scholze, and C. Laubis

Diffraction Effciency Testing of Sinusoidal and Blazed Off-Plane Reflection Gratings

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Quasiparticle lifetime broadening in resonant x-ray scattering of NH4NO3

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S. Zakel, B. Pollakowski, C. Streeck, S. Wundrack, A. Weber, S. Brunken, R. Mainz, B. Beckhoff, and R. Stosch

Traceable quantitative raman microscopy and X-ray fluorescence analysis as non-destructive methods for the characterization of Cu(In,Ga)Se 2 absorber films

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Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films additional techniques

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Improved measurement results for the Avogadro constant using a ²⁸Si-enriched crystal

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The Athena Optics

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Challenges in nanometrology: high precision measurement of position and size

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Silicon Pore Optics development for ATHENA

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Quantification of Silane Molecules on Oxidized Silicon: Are there Options for a Traceable and Absolute Determination?

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Grazing incidence X-ray fluorescence analysis of buried interfaces in periodically structured crystalline silicon thin-film solar cells

Physica Status Solidi A 212 , 529 (2015)
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T. Fischer, P.M. Dietrich, C. Streeck, S. Ray, A. Nutsch, A.G. Shard, B. Beckhoff, W.E.S. Unger, and K. Rurack

Quantification of variable functional-group densities of mixed-silane monolayers on surfaces via a dual-mode fluorescence and XPS label

Anal. Chem. 87 , 2685 (2015)
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R. García-Diez, C. Gollwitzer, and M. Krumrey

Nanoparticle characterization by continuouscontrast variation in small-angle X-ray scatteringwith a solvent density gradient

J. Appl. Cryst. 48 , 20 (2015)
http://dx.doi.org/10.1107/S1600576714024455

D. Geißler, C. Gollwitzer, A. Sikora, C. Minelli, M. Krumrey, and U. Resch-Genger

Effect of fluorescent staining on size measurements of polymeric nanoparticles using DLS and SAXS

Anal. Meth. 7 , 9785 (2015)
http://dx.doi.org/10.1039/c5ay02005k

M. Gerlach, L. Anklamm, A. Antonov, I. Grigorieva, I. Holfelder, B. Kanngießer, H. Legall, W. Malzer, C. Schlesiger, and B. Beckhoff

Characterization of HAPG mosaic crystals using synchrotron radiation

J. Appl. Cryst. 48 , 1381 (2015)
http://dx.doi.org/10.1107/S160057671501287X

M. Guerra, J.M. Sampaio, T.I. Madeira, F. Parente, P. Indelicato, J.P. Marques, J.P. Santos, J. Hoszowska, J.-Cl. Dousse, L. Loperetti, F. Zeeshan, M. Müller, R. Unterumsberger, and B. Beckhoff

Theoretical and experimental determination of L-shell decay rates, line widths, and fluorescence yields in Ge

Phys. Rev. A 92 , 022507 (2015)
http://dx.doi.org/10.1103/PhysRevA.92.022507

P. Hönicke, B. Detlefs, M. Müller, E. Darlatt,E. Nolot, H. Grampeix, and B. Beckhoff

Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis

Physica Status Solidi A 212 , 523 (2015)
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A. Haase, V. Soltwisch, F. Scholze, and S. Braun

Characterization of Mo/Si mirror interface roughness for different Mo layer thickness using resonant diffuse EUV scattering

Proc. SPIE 9628 , 962804-1 (2015)
http://dx.doi.org/10.1117/12.2191265

A. Hornemann, D. Eichert, S. Fleming, G. Ulm, and B. Beckhoff

Qualifying label components for effective biosensing using advanced high-throughput SEIRA methodology

Phys.Chem., Chem.Phys. 17 , 9471 (2015)
http://dx.doi.org/10.1039/c4cp05944a

B. Kaestner and V. Kashcheyevs

Non-adiabatic quantized charge pumping with tunable-barrier quantum dots: a review of current progress

Report on Progress 78 , 103901 (2015)
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A.G. Karydas, I. Bogdanovic Radovic, C. Kaufmann, T. Rissom, M. Jaksic, and N.P. Barradas

Ion Beam Analysis of Cu (In, Ga) Se 2 thin film solar cells

Appl. Surf. Sci. 356 , 631 (2015)
http://dx.doi.org/10.1016/j.apsusc.2015.08.133

Y. Kayser, P. Hönicke, D. Banas, j.-C. Dousse, J. Hoszowska, P. Jagodzinski, A. Kubala-Kukus, S.H. Nowak, and M. Pajek

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

J. Anal. At. Spectrom. 30 , 1089 (2015)
http://pubs.rsc.org/en/content/articlehtml/2015/JA/C4JA00461B

R. Klein, R. Fliegauf, A. Gottwald, M. Kolbe,W. Paustian, T. Reichel, M. Richter, R. Thornagel, and G. Ulm

Calibration of space instruments at the Metrology Light Source

AIP Conf. Proc. 1741 , 030013 (2015)
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M. Kolbe and P. Hönicke

Fundamental parameters of Zr and Ti for a reliable quantitative X-ray fluorescence analysis

X-Ray Spectrometry 44 , 217 (2015)
http://dx.doi.org/10.1002/xrs.2603

Y. Ménesguen, M. Gerlach, B. Pollakowski, R. Unterumsberger, M. Haschke, B. Beckhoff, and M.-C. Lépy

High accuracy experimental determination of copper and zinc mass attenuation coefficients in the 100 eV to 30 keV photon energy range

Metrologia 53 , 7 (2015)
http://dx.doi.org/10.1088/0026-1394/53/1/7

H. Marlow, R.L. McEntaffer, C.T. DeRoo, D.M. Miles, J.H. Tutt, C. Laubis, and V. Soltwisch

Polarization Sensitivity Testing of Off-Plane Reflection Gratings

Proc. SPIE 9603 , 960318-1 (2015)
http://dx.doi.org/10.1117/12.2186344

D.M. Miles, J.H. Tutt, C.T. DeRoo, H. Marlow, T.J. Peterson, R.L. McEntaffer, B. Menz, V. Burwitz, G. Hartner, C. Laubis, and F. Scholze

Diffraction Efficiency of Radially-Profiled Off-Plane Reflection Gratings

Proc. SPIE 9603 , 960316-1 (2015)
http://dx.doi.org/10.1117/12.2186842

V. Mohammadi, L. Shi, S. Nihtianov, U. Kroth, and C. Laubis

Stability Characterization of High-performance PureB Si-Photodiodes under Aggressive Cleaning Treatments in Industrial Applications

Proc. IEEE , 3370 (2015)
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K. Nass et al.,

Indications of radiation damage in ferrodoxin microcrystals using high intensity X-FEL beams

J. Synchrotron Rad. 22 , 1 (2015)
http://dx.doi.org/10.1107/S1600577515002349

S.H. Nowak, B. Beckhoff, F. Reinhardt, and J.-C. Dousse

Reply to the Comment on "Grazing incidence X-ray fluorescence of periodic structures - a comparison between X-ray standing waves and geometrical optics calculations"

J. Anal. At. Spectrom. 30 , 2551 (2015)
http://dx.doi.org/10.1039/C5JA00244C

A. Nutsch, F.A. Castro, C. Adelmann, and B. Detlefs

Analytical techniques for precise characterization of nanomaterials

Physica Status Solidi C 12 , 253 (2015)
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M. Pálmai, R. Szalay, D. Barczak, Z. Varga, L.N. Nagy, C. Gollwitzer, M. Krumrey, and H. Goenega-Infante

Total synthesis of isotopically enriched Si-29 silica NPs as potential spikes for isotope dilution quantification of natural silica NPs

J. Coll. Int. Sci. 445 , 161 (2015)
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M.L. Polignano, D. Codegoni, S. Grasso, I. Mica, G. Borionetti, and A. Nutsch

A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing

Physica Status Solidi A 212 , 495 (2015)
http://dx.doi.org/10.1002/pssa.201400082

B. Pollakowski and B. Beckhoff

Non-destructive speciation depth profiling of complex TiOx nanolayer structures by GIXRF-NEXAFS

Anal. Chem. 87 , 77057711 (2015)
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M. Prasciolu, A. Haase, F. Scholze, H. N. Chapman, S. Bajt

Extended asymmetric-cut multilayer X-ray gratings

Optics Express 23, 12 , 1-10 (2015)
http://dx.doi.org/10.1364/OE.23.015195

V. Rackwitz, M. Krumrey, C. Laubis, F. Scholze, and V.-D. Hodoroaba

New reference and test materials for the characterization of energy dispersive X-ray spectrometers at scanning electron microscopes

Anal. Bioanal. Chem. 407 , 3045 (2015)
http://dx.doi.org/10.1007/s00216-014-8242-5

G. Roebben, V. Kestens, Z. Varga, J. Charoud-Got, Y. Ramaye, C. Gollwitzer, D. Bartczak, D. Geißler, J. Noble,S. Mazoua, N. Meeus, P. Corbisier, M. Palmai, J. Mihaly, M. Krumrey, J. Davies, U. Resch-Genger, N. Kumarswami, C. Minelli, A. Sikora, and H. Goenaga-Infante

Reference materials and representative testmaterials to develop nanoparticle characterization methods: the NanoChOp project case

Frontiers in Chemistry 3 , 56 (2015)
http://dx.doi.org/10.3389/fchem.2015.00056

F. Roth, M. Herzig, C. Lupulescu, E. Darlatt, A. Gottwald, M. Knupfer, and W. Eberhardt

Electronic properties of Mn-Phthalocyanine - C60 bulk heterojunctions: combining photoemission and electron energy-loss spectroscopy

J. Appl. Phys. 118 , 185310 (2015)
http://dx.doi.org/10.1063/1.4935623

G. Schmidtke, S.V. Avakyan, J. Berdermann, V. Bothmer, G. Cessateur, L. Ciraolo, L. Didkovsky, T. Dudok de Wit, F.G. Eparvier, A. Gottwald, M. Haberreiter, R. Hammer, Ch. Jacobi, N. Jakowski, M. Kretzschmar, J . Lilensten, M. Pfeifer, S.M. Radicella, R. Schäfer, W. Schmidt, S.C. Solomon, G. Thuillier, W.K. Tobiska, S. Wieman, and T.N. Woods

Where does the Thermospheric Ionospheric GEosphericResearch (TIGER) Program go?

Adv. Space Res. 56 , 1547 (2015)
http://dx.doi.org/10.1016/j.asr.2015.07.043

R. Thornagel, R. Fliegauf, R. Klein, S. Kroth, W. Paustian, and M. Richter

A new facility for the synchrotron radiation-based calibration of transfer radiation sources in the ultraviolet and vacuum ultraviolet spectral range

Rev. Sci. Instrum. 86 , 013106-1 (2015)
http://dx.doi.org/10.1063/1.4905187

S. Weiß, D. Lüftner, T. Ules, E.M. Reinisch, H. Kaser, A. Gottwald, M. Richter, S. Soubatch, G. Koller, M.G. Ramsey, F.S. Tautz,P. Puschnig

Exploring three-diemensional orbital imaging with energy dependent photoemission tomography

Nat. Commun. 6, [open access] , 8287 (2015)
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2014

A. Gottwald, A. Fischer, U. Kroth, C. Laubis, and F. Scholze

Detector-based Radiometry and Reflectometry in the EUV and VUV Spectral Ranges

Proc. NEWRAD 2014 [online] , 378 (2014)
http://newrad2014.aalto.fi/Newrad2014_Proceedings.pdf#

E. Agocs, B. Fodor, B. Pollakowski, B. Beckhoff, A. Nutsch, M. Jank, and P. Petrik

Approaches to calculate the dielectric function of ZnO around the band grap

Thin Solid Films 571 , 684688 (2014)
http://dx.doi.org/10.1016/j.tsf.2014.03.028

F. Choueikani, B. Lagarde, F. Delmotte, M. Krumrey, F. Bridou, M. Thommasset, E. Meltchakov, and F. Polak

High-efficiency B₄C/Mo₂C alternate multilayer grating for monochromators in the photon energy range from 0.7 to 3.4 keV

Opt. Lett. 39 , 2141 (2014)
http://dx.doi.org/10.1364/OL.39.002141

S. Düsterer et al.,

Development of experimental techniques for the characterization of ultrashort photon pulses of extreme ultraviolet free-electron lasers

Phys. Rev. STAB 17 , 120702-1 (2014)
http://dx.doi.org/10.1103/PhysRevSTAB.17.120702

N. Gerken, S. Klumpp, A. A. Sorokin, K. Tiedtke, M. Richter, V. Bürk, K. Mertens, P. Juranic, and M. Martins

Time-Dependent Multiphoton Ionization of Xenon in the Soft-X-Ray Regime

Phys. Rev. Lett. 112 , 213002 (2014)
https://journals.aps.org/prl/abstract/10.1103/PhysRevLett.112.213002

S. Gissot, A. BenMoussa, B. Giordanen, A. Soltani, T. Saito, U. Schühle, U. Kroth, and A. Gottwald

Design and radiation hardness of next generation solar UV radiometers

IEEE REDW [online] (2014)
http://dx.doi.org/10.1109/REDW.2014.7004563

C. Gollwitzer and M. Krumrey

A diffraction effect in X-ray area detectors

J. Appl. Cryst. 47 , 378 (2014)
http://dx.doi.org/10.1107/S1600576713031981

A. Gottwald and F. Scholze

Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range

Smart sensors and MEMS, Intelligent devices and microsystems for industrial applications , 102 (2014)
http://www.sciencedirect.com/science/article/pii/B9780857095022500053

A. Gottwald, B. Beckhoff, A. Fischer, R. Fliegauf, P. Hermann, A. Hoehl, A. Hornemann, H. Kaser, R. Klein, M. Kolbe, U. Kroth, C. Laubis, R. Müller, W. Paustian, M. Richter, F. Scholze, R. Thornagel, and G. Ulm

Measurement and Calibration facilities at the Metrology Light Source

Proc. NEWRAD 2014 [online] , 359 (2014)
http://newrad2014.aalto.fi/Newrad2014_Proceedings.pdf#page=359

A. Gottwald, R. Klein, M. Krumrey, P. Müller, W. Paustian, T. Reichel, F. Scholze, and R. Thornagel

Radiometrische Charakterisierung von Weltrauminstrumentierung

PTB-Mitteilungen 124, Heft 3 , 30 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=31

A. Gottwald, U. Kroth, M. Krumrey, P. Müller, and F. Scholze

Empfängergestütze Radiometrie mit Kryoradiometern und monochromatisierter Synchrotronstrahlung

PTB-Mitteilungen 124, Heft 3 , 21 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=22

H. Gross, S. Heidenreich, M.-A. Henn, G. Dai, F. Scholze, and M. Bär

Modelling line edge roughness in periodic line-space structures by Fourier optics to improve scatterometry

J. Europ. Opt. Soc. Rap. Public. 9 , 14003 (2014)
http://dx.doi.org/10.2971/jeos.2014.14003

P. Hönicke, M. Kolbe, M. Müller, M. Mantler, M. Krämer, and B. Beckhoff

Experimental verification of the individual energy dependencies of the partial L-shell photoionization cross sections of Pd and Mo

Phys. Rev. Lett. 113 , 163001 (2014)
http://dx.doi.org/10.1103/PhysRevLett.113.163001

A. Haase, V. Soltwisch, C. Laubis, and F. Scholze

Role of dynamic effects in the characterization of multilayers by means of power spectral density

Appl. Opt. 53 , 3019 (2014)
https://www.osapublishing.org/ao/abstract.cfm?uri=ao-53-14-3019

P. Hermann, A. Hoehl, G. Ulrich, C. Fleischmann, A. Hermelink, B. Kästner, P. Patoka, A. Hornemann, B. Beckhoff, E. Rühl, and G. Ulm

Characterization of semiconductors using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy

Opt. Express 22 , 17948 (2014)
http://dx.doi.org/10.1364/OE.22.017948

Peter Hermann, Arne Hoehl, Georg Ulrich, Claudia Fleischmann, Antje Hermelink, Bernd Kästner, Piotr Patoka, Andrea Hornemann, Burkhard Beckhoff, Eckart Rühl, and Gerhard Ulm

Characterization of semiconductor materials using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy

Optics Express 22 , 17948 (2014)
https://www.osapublishing.org/oe/abstract.cfm?uri=oe-22-15-17948

P. Hermann, A. Hoehl, A. Hornemann, B. Kästner, R. Müller, B. Beckhoff, G. Ulm

Mikro- und Nano-Spektroskopie und Detektorcharakterisierung im IR- und THz-Bereich an der Metrology Light Source

PTB-Mitteilungen 124, Heft 4 , 24 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft4/PTB-Mitteilungen_2014_Heft_4.pdf#page=25

A. Hoell, Z. Varga, V. S. Raghuwanshi, M. Krumrey, C. Bocker, and C. Rüssel

ASAXS study of CaF₂ nanoparticles embedded in a silicate glass matrix

J. Appl. Cryst. 47 , 60 (2014)
http://dx.doi.org/10.1107/S1600576713030100

A.G. Karydas, I. Bogdanovic Radovic, C. Streeck, C. Kaufmann, R. Caballero, T. Rissom, B. Kanngießer, B. Beckhoff, M. Jaksic, and N.P. Barradas

In-depth elemental characterization of Cu(In,Ga)Se2 thin film solar cells by means of RBS and PIXE techniques

Nucl. Instrum. Methods Phys. Res. B 331 , 93 (2014)
http://dx.doi.org/10.1016/j.nimb.2014.01.025

R. Klein, S. Kroth, W. Paustian, M. Richter, and R. Thornagel

Quellengestütze Radiometrie mit Synchrotronstrahlung

PTB-Mitteilungen 124, Heft 3 , 16 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=17

R. Klein, R. Thornagel, and G. Ulm

Die Elektronenspeicherringe MLS und BESSY II als primäre Speichernormale

PTB-Mitteilungen 124, Heft 3 , 7 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=8

M. Kolbe, E. Darlatt, R. Fliegauf, H. Kaser, A. Gottwald, M. Richter

Oberflächenuntersuchungen mit Vakuum-UV-Strahlung

PTB-Mitteilungen 124, Heft 4 , 29 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft4/PTB-Mitteilungen_2014_Heft_4.pdf#page=30

M. Krumrey, L. Cibik, A. Fischer, A. Gottwald, U. Kroth, and F. Scholze

Reflektomerie mit Synchrotronstrahlung

PTB-Mitteilungen 124, Heft 3 , 35 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=36

M. Krumrey, R. Garcia-Diez, C. Gollwitzer, S. Langner

Größenbestimmung von Nanopartikeln mit Röntgenkleinwinkelstreuung

PTB-Mitteilungen 124, Heft 4 , 13 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft4/PTB-Mitteilungen_2014_Heft_4.pdf#page=14

M. Müller, S. Choudhury, K. Gruber, V. Cruz, B. Fuchsbichler, T. Jacob, S. Koller, M. Stamm, L. Ionov, and B. Beckhoff

Sulfur X-ray absorption fine structure in porous Li-S cathode films measured under argon atmospheric conditions

Spectrochim. Acta B 94-95 , 22 (2014)
http://dx.doi.org/10.1016/j.sab.2014.03.001

M. Müller, P. Hönicke, B. Detlefs, and C. Fleischmann

Characterization of high-knanolayers by grazing incidence X-ray spectrometry

Materials 7 (4) , 3147 (2014)
http://dx.doi.org/10.3390/ma7043147

M. Müller, M. Gerlach, I. Holfelder, P. Hönicke, J. Lubeck, A. Nutsch, B. Pollakowski, C. Streeck, R. Unterumsberger, J. Weser, and B. Beckhoff

Röntgenspektrometrie mit Synchrotronstrahlung

PTB-Mitteilungen 124, Heft 4 , 17 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft4/PTB-Mitteilungen_2014_Heft_4.pdf#page=18

P. Majewski, F. Aschauer,S. Aschauer, A. Bähr, B. Bergbauer, M. Hilchenbach, M. Krumrey, C. Laubis, T. Lauf, P. Lechner, G. Lutz, F. Scholze, H. Soltau, A. Stefanescu, L. Strüder, and J. Treis

Calibration measurements on the DEPFET Detectors for the MIXS instrument on BepiColombo

Exp. Astron. 37 (2014)
http://dx.doi.org/10.1007/s10686-014-9374-5

C. Minelli, R. García-Diez, A.E. Sikora, C. Gollwitzer,M. Krumrey, and A.G. Shard

Characterization of IgG-protein-coated polymeric nanoparticles using complementary particle sizing techniques

Surf. Interface Anal. 46 , 663 (2014)
http://dx.doi.org/10.1002/sia.5381

M. Müller, S. Choudhury, K. Gruber, V.B. Cruz, B. Fuchsbichler, T. Jacob, S. Koller, M. Stamm, L. Ionov, and B. Beckhoff

Sulfur X-ray absorption fine structure in porous Li-S cathode films meassured under argon atmospheric conditions

Spectrochim. Acta B 94/95 , 22 (2014)
http://dx.doi.org/10.1016/j.sab.2014.03.001

M. Müller, P. Hönicke, B. Detlefs, and C. Fleischmann

Characterization of high-k nanolayers by grazing incidence x-ray spectrometry

Materials 7 , 3147 (2014)
http://dx.doi.org/10.3390/ma7043147

L.K. Nanver, L. Qi, V. Mohammadi, K.R.M. Mok, W.B. de Boer, N. Golshani, A. Sammak, T.L.M. Scholtes, A. Gottwald, U. Kroth, and F. Scholze

Robust UV/VUV/EUV PureB Photodiode DetectorTechnology With High CMOS Compatibility

IEEE, STQE 20 , 3801711 (2014)
http://dx.doi.org/10.1109/JSTQE.2014.2319582

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser

A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range

Rev. Sci. Instrum. 85 , 055117 (2014)
http://dx.doi.org/10.1063/1.4878919

S.H. Nowak, D. Banás, W. Blchucki, W. Cao, J.-Cl. Dousse, P. Hönicke, J. Hoszowska, L. Jablonski, Y. Kayser, A. Kubala-Kukus, M. Pajek, F. Reinhardt, A.V. Savu, and J. Szlachetko

Grazing angle X-ray fluorescence from periodic structures on silicon andsilica surfaces

Spectrochim. Acta B 98 , 65-75 (2014)
http://dx.doi.org/10.1016/j.sab.2014.03.015

S.H. Nowak, D. Banas,W. Blchucki, W. Cao, J.-Cl. Dousse, P. Hönicke,J. Hoszowska, L. Jablonski, Y. Kaiser, A. Kubala-Kukus, M. Pajek, F. Reinhardt, A.V. Savu, and J. Szlachetko

Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

Spectrochim. Acta B 98 , 65 (2014)
http://dx.doi.org/10.1016/j.sab.2014.03.015

V. Philipsen, E. Hendrickx, E. Verduijn, S. Raghunathan, O. Wood, V. Soltwisch, F. Scholze, N. Davydova. P. Mangat

Imaging impact of multilayer tuning in EUV masks, experimental validation

Proc. SPIE 9235 , 92350J-1 - 92350J-13 (2014)
https://doi.org/10.1117/12.2066222

P.R. Rao, S. Nihtianov, and C. Laubis

Backside illuminated CMOS image sensors for extreme ultraviolet applications

Proc. IEEE , 1660 (2014)
http://dx.doi.org/10.1109/ICSENS.2014.6985339

F. Reinhardt, S.H. Nowak, B. Beckhoff, J.-C. Dousse, and M. Schoengen

Grazing Incidence X-ray Fluorescence of periodic structures a comparison between X-ray Standing Waves and Geometrical Optics calculations

J. Anal. At. Spectrom. 29 (2014)
http://dx.doi.org/10.1039/C4JA00164H

M. Richter, A. Gottwald, and M. Krumrey

Metrologie für Röntgenlaser

PTB-Mitteilungen 124, Heft 3 , 27 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=28

M. Richter, and G. Ulm

Metrologie mit Synchrotronstrahlung

PTB-Mitteilungen 124, Heft 3 , 3 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft3/PTB-Mitteilungen_2014_Heft_3.pdf#page=4

F. Roth, C. Lupulescu, T. Arion, E. Darlatt, A. Gottwald, and W. Eberhardt

Electronic properties and morphology of Cu-phthalocyanine-C₆₀

J. Appl. Phys. 115 , 033705 (2014)
http://dx.doi.org/10.1063/1.4861886

F. Scholze, B. Bodermann, S. Burger, J. Endres, A. Haase, M. Krumrey, C. Laubis, V. Soltwisch, A. Ullrich, and J. Wernecke

Determination of lie profiles on photomasks using DUV, EUV, and X-ray

Proc. SPIE 9231 , 92310M-1 (2014)
http://dx.doi.org/10.1117/12.2065941

F. Scholze, C. Laubis, A. Barboutis, C. Buchholz, A. Fischer, J. Puls, C. Stadelhoff

Radiometrie für die EUV-Lithographie

PTB-Mitteilungen 124, Heft 4 , 3 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft4/PTB-Mitteilungen_2014_Heft_4.pdf#page=4

Frank Scholze, Anton Haase, Michael Krumrey, Victor Soltwisch, Jan Wernecke:

Streuverfahren an nanostrukturierten Oberflächen

PTB-Mitteilungen 124, Heft 4 , 8 (2014)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2014/Heft4/PTB-Mitteilungen_2014_Heft_4.pdf#page=9

V. Soltwisch, J. Wernecke, A. Haase, J. Probst, M. Schoengen, M. Krumrey, and F. Scholze

Nanometrology on Gratings with GISAXS: FEMReconstruction and Fourier Analysis

Proc. SPIE 9050 , 905012-1 (2014)
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M. Sznajder, T. Renger, A. Witzke, U. Geppert, and R. Thornagel

Design and performance of a vacuum-UV simulator for material testingunder space conditions

Adv. Space Res. 52 , 1993 (2014)
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R. Thornagel, R. Klein, S. Kroth, W. Paustian, and M. Richter

Validation of a new facility at the Metrology Light Source for the calibration of radiation sources in the wavelength range from 116nm to 400nm

Metrologia 51 , 528 (2014)
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K. Tiedtke, A. A. Sorokin, U. Jastrow, P. Juranić, S. Kreis, N. Gerken, M. Richter, U. Arp, Y. Feng, D. Nordlund, R. Soufli, M. Fernández-Perea, L. Juha, P. Heimann, B. Nagler, H. J. Lee, S. Mack, M. Cammarata, O. Krupin, M. Messerschmidt, M. Holmes, M. Rowen, W. Schlotter, S. Moeller, and J. J. Turner

Absolute pulse energy measurements of soft x-rays at the Linac Coherent Light Source

Opt. Express 22 , 21214 (2014)
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P.T. Törmä, J. Kostamo, H.J. Sipilä, M. Mattila, P. Kostamo, E. Kostamo, H. Lipsanen, C. Laubis, F. Scholze, N. Nelms, B. Shortt, and M. Bavdaz

Performance and properties of ultra-thin silicon nitride X-ray windows

IEEE TNS 61 , 695 (2014)
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P. Troussel, D. Dennetiere, R. Maroni, P. Høghøj, S. Hedacq, L. Cibik, M. Krumrey

Multilayer optics for monochromatic high-resolution X-ray imaging diagnostic in a broad photon energy range from 2 keV to 22 keV

Nucl. Instrum. Meth. A 767 , 1-4 (2014)
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P. Troussel, B. Emprim, G. Oudot, V. Tassin, F. Bridou, F. Delmotte, and M. Krumrey

Absolute radiant power measurement for the Au M lines of laser-plasma using a calibrated broadband soft X-ray spectrometer with flat-spectral response

Rev. Sci. Instrum. 85 , 013503 (2014)
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Z. Varga, Y. Yuana, A. E. Grootemaat, E. van der Pol, C. Gollwitzer, M. Krumrey, and R. Nieuwland

Towards traceable size determination of extracellular vesicles

J. Extracell. Vesicles 3 , 23298 (2014)
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J. Wernecke, C. Gollwitzer, P. Müller, and M. Krumrey

Characterization of an in-vacuum PILATUS 1M detector

J. Synchrotron Rad. 21 (2014)
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J. Wernecke, M. Krumrey, A. Hoell, J. Kline, H.-K. Liuc, and W.-Li. Wuc

Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating

J. Appl. Crystallogr. 47 , 1912-1920 (2014)
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J. Wernecke, A.G. Shard, and M. Krumrey

Traceable thickness determination of organic nanolayers by X-ray reflectometry

Surf. Interface Anal. 46 , 911 (2014)
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J. Wernecke, H. Okuda, H. Ogawa, F. Siewert, and M. Krumrey

Depth-Dependent Structural Changes in PS-b-P2VP Thin Films Induced by Annealing

Macromolecules 47 , 5719 (2014)
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2013

M. Bavdaz, E. Wille, K. Wallace, B. Shortt, S. Fransen, N. Rando, M. Collon, M. Ackermann, G. Vacanti, R. Günther, J. Haneveld, M.O. Riekerink, A. Koelewijn, K. van Baren, D. Kampf, K.-H. Zuknik, A. Reutlinger, F. Christensen, D. Della M. Ferreira, A.C. Jacobsen, M. Krumrey, P. Müller et al. ,

X-ray optics developments at ESA

Proc. SPIE 8861 , 88610L (2013)
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C. Becker, M. Pagels, C. Zachäus, B. Pollakowski, B. Beckhoff, B. Kanngießer, and B. Rech

Chemical speciation at buried interfaces in high-temperature processed polycrystalline silicon thin-film solar cells on ZnO:Al

J. Appl. Phys. 113 , 1089 (2013) ; American Institute of Physics
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A. BenMoussa, B. Giordanengo, S. Gissot, G. Meynants, X. Wang, B. Wolfs, J. Bogaerts, U. Schühle, G. Berger, A. Gottwald, Ch. Laubis, U. Kroth, and F. Scholze

Characterization of Backside-Illuminated CMOS APS Prototypes for the Extreme Ultraviolet Imager On-Board Solar Orbiter

IEEE Trans. Electron Devices 60 , 1701 (2013)
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A. BenMoussa, S. Gissot, B. Giordanengo, G. Meynants, X. Wang, B. Wolfs, J. Bogaerts, U. Schühle, G. Berger, A. Gottwald, C. Laubis, U. Kroth, F. Scholze, A. Soltani, and T. Saito

Irradiation Damage Tests on Backside-Illuminated CMOS APS Prototypes for the Extreme Ultraviolet Imager On-Board Solar Orbiter

IEEE Trans. Nucl. Sci. 60 , 3907 (2013)
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M.J. Collon, M. Ackermann, R. Günther, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, E. Wille, K. Wallace, J. Haneveld, M.O. Riekerink, A. Koelewijn, C. van Baren, P. Müller, M. Krumrey et al.

Abberation-free silicon pore x-ray optics

Proc. SPIE 8861 , 88610M (2013)
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T. Donath, S. Brandstetter, S. Commichau, P. Hofer, B. Luethi, M. Schneebeli, C. Schulze-Briese, L. Cibik, M. Krumrey, S. Marggraf, P. Müller, and J. Wernecke

Characterization of the PILATUS photon-counting pixel detector for X-ray energies from 1.75 keV to 60 keV

J. Phys. Conf. Series 425 , 062001 (2013)
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C. Fleischmann, M. Houssa, M. Müller, B. Beckhoff, H.-G. Boyen, M. Meuris, K. Temst, and A. Vantomme

Liquid-phase adsorption of sulfur on germanium: reaction mechanism and atomic geometry

J. Phys. Chem. C 117 , 7451 (2013)
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C. Fleischmann, K. Schouteden, P. Hönicke, B. Beckhoff, M. Müller, S. Sioncke, H.-G. Boyen, M. Meuris, C. v. Haesendonck, K. Temst, and A. Vantomme

Impact of ammonium sulfide solution on electronic properties and ambient stability of germanium surfaces: Towards Ge-based microelectronic devices

J. Mat. Chem. C 1 , 4105 (2013)
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SPICE EUV spectrometer for the Solar Orbiter mission

Proc. SPIE 8862 , 88620F (2013)
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S. Granato, R. Andritschke, J. Elbs, N. Meidinger, L. Strüder, G. Weidenspointner, M. Krumrey, and F. Scholze

Characterization of eROSITA PNCCDs

IEEE Trans. Nucl. Sci. 60 , 3150 (2013)
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R. Guichard, M. Richter, J.-M. Rost, U. Saalmann, A.A. Sorokin, and K. Tiedtke

Multiple ionization of neon by soft x-rays at ultrahigh intensity

J. Phys. B: At. Mol. Opt. Phys. 46 , 164025 (2013)
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P. Hermann, A. Hoehl, P. Patoka, F. Huth, E. Rühl, and G. Ulm

Near-Field Imaging and Nano-Fourier-Transform Infrared Spectroscopy using Broadband Synchrotron Radiation

Opt. Expr. 21 , 2913 (2013)
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A. Hornemann, D. Drescher, S. Flemig, and J. Kneipp

Intracellular SERS hybrid probes using BSA–reporter conjugates

Anal. Bioanal. Chem. 405 , 6209 (2013)
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R. Klein, A. Gottwald, M. Kolbe, M. Richter, F. Scholze, R. Thornagel, and G. Ulm

UV and VUV Calibration Capabilities at the Metrology Light Source for Solar and Atmospheric Research

AIP Conf. Proc. 1531 , 879 (2013)
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B. Lagarde, F. Choueikani, B. Capitano, P. Ohresser, E. Melchakov, F. Delmotte, M. Krumrey, and F. Polack

High efficiency multilayer gratings for monochromators in the energy range from 500 eV to 2500 eV

J. Phys. Conf. Series 425 , 152012 (2013)
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C. Laubis, A. Barboutis, M. Biel, C. Buchholz, B. Dubrau, A. Fischer, A. Hesse, J. Puls, C. Stadelhoff, V. Soltwisch, and F. Scholze

Status of EUV Reflectometry at PTB

Proc. SPIE 8679 , 867921 (2013)
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C. Longstaff, I. Varju, P. Sótonyi, L. Szabó, M. Krumrey, A. Hoell, A. Bóta, Z. Varga, E. Komorowicz, and K. Kolev

Mechanical Stability and Fibrinolytic Resistance of Clots Containing Fibrin, DNA, and Histones

J. Biol. Chem. 288 , 6946 (2013)
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J. Lubeck, B. Beckhoff, R. Fliegauf, P. Hönicke, M. Müller, B. Pollakowski, F. Reinhardt, and J. Weser,

A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies

Rev. Sci. Instrum. 84 , 045106 (2013)
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H. Meister, M. Willmeroth, D. Zhang, A. Gottwald, M. Krumrey, and F. Scholze

Broad-band efficiency calibration of ITER bolometer prototypes using Pt absorbers on SiN membranes

Rev. Sci. Instrum. 84 , 123501 (2013)
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R.A. Nicolaus, G. Bartl, H. Bettin, M. Borys, M. Firlus, I. Busch, A. Felgner, R. Krüger-Sehm, M. Krumrey, M. Krystek, and U. Kuetgens

Current State of Avogadro ²⁸Si sphere S8

IEEE Trans. Instrum. Meas. 62 , 1499 (2013)
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S. Nowak, F. Reinhardt, B. Beckhoff, J.-C. Dousse, and J. Szlachetko,

Geometrical optics modelling of grazing incidence x-ray fluorescence of nanoscaled objects

J. Anal. Atom. Spectrom. 28 , 689 (2013)
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P. Petrik, B. Pollakowski, S. Zakel, T. Gumprecht, B. Beckhoff, M. Lemberger, Z. Labadi, Z. Baji, M. Jank, and A. Nutsch

Characterization of ZnO structures by optical and x-ray methods

Appl. Surf. Sci. 281 , 123 (2013)
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E. van der Pol, F. Coumans, Z. Varga, M. Krumrey, and R. Nieuwland

Innovation in detection of microparticles and exosomes

J. Thromb. Haemost. 11 , 36 (2013)
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M. Richter, A.A. Sorokin, and K. Tiedtke

The impact of pulse duration on multiphoton ionization in the soft X-ray regime

Proc. SPIE 8778 , 877808 (2013)
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F. Scholze, V. Soltwisch, G. Dai, M.-A. Henn, and H. Gross

Comparison of CD measurements of an EUV photomask by EUV scatterometry and CD-AFM

Proc. SPIE 8880 , 88800O (2013)
http://dx.doi.org/10.1117/12.2025827

L. Shi, St. Nihtianov, L.K. Nanver, and F. Scholze

Stability Characterization of High-Sensitivity Silicon-Based EUV Photodiodes in a Detrimental Environment

IEEE Sens. J. 13 , 1699-1707 (2013)
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V. Soltwisch, S. Burger, and F. Scholze

Scatterometry sensitivity analysis for conical diractionversus in-plane diraction geometry with respect to the sidewall angle

Proc. SPIE 8789 , 878905-1 (2013)
http://dx.doi.org/10.1117/12.2020487

C. Streeck, S. Brunken, M. Gerlach, C. Herzog, P. Hönicke, C.A. Kaufmann, C. Becker, J. Lubeck, B. Pollakowski, R. Unterumsberger, A. Weber, B. Beckhoff, B. Kanngießer, H.-W. Schock, and R. Mainz,

Grazing-incidence x-ray fluorescence analysis for non-destructive determination of In and Ga depth profiles in Cu(In,Ga)Se₂ absorber films

Appl. Phys. Lett. 11 , 113904 (2013)
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P.T. Törmä, H.J. Sipilä, M. Mattila, P. Kostamo, J. Kostamo, E. Kostamo, H. Lipsanen, N. Nelms, B. Shortt, M. Bavdaz, and C. Laubis

Ultra-thin silicon nitride X-ray windows

IEEE TNS 60 , 1311 (2013)
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G. Vacanti, M. Ackermann, M. Vervest, M. Collon, R. Günther, C. Kelly, E. Wille, L. Cibik, M. Krumrey, and P. Müller

X-ray pencil beam characterization of silicon pore optics

Proc. SPIE 8861 , 88611K (2013)
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2012

M. Bavdaz, E. Wille, K. Wallace, B. Shortt, M. Collon, M. Ackermann, M.O. Riekerink, J. Haneveld, C. van Baren, M. Erhard, F. Christensen, M. Krumrey, and V. Burwitz

Silicon Pore Optics Developments and Status

Proc. SPIE 8443 , 844329 (2012)
http://dx.doi.org/10.1117/12.926111

C. Braig, L. Fritzsch, T. Käsebier, E.-B. Kley, C. Laubis, Y. Liu, F. Scholze, and A. Tünnermann

An EUV beamsplitter based on conical grazing incidence diffraction

Opt. Expr. 20 , 1825 (2012)
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H. Buhr, L. Büermann, M. Gerlach, M. Krumrey, and H. Rabus

Measurement of the mass energy-absorption coefficient of air for x-rays in the range from 3 to 60 keV

Phys. Med. Biol. 57 , 8231 (2012)
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D.D.M. Ferreira, A. C. Jakobsen, F. E. Christensen, B. Shortt, M. Krumrey, J. Garnaes, and R. B. Simons

Development and characterization of coatings on Silicon Pore Optics substrates for the ATHENA mission

Proc. SPIE 8443 , 84435E (2012)
http://dx.doi.org/10.1117/12.927290

A. Gottwald, R. Klein, R. Müller, M. Richter, F. Scholze, R. Thornagel, and G. Ulm

Current capabilities at the Metrology Light Source

Metrologia 49 , S146 (2012)
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P. Hönicke, M. Müller, and B. Beckhoff

X-Ray induced depth profiling of ion implantations into various semiconductor materials

Solid State Phenom. 195 , 274 (2012)
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P. Hönicke, Y. Kayser, B. Beckhoff, M. Müller, J.-Cl. Dousse, J. Hoszowska, and S. Nowak

Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy

J. Anal. At. Spectrom. 27 , 1432 (2012)
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P.S. Hoffmann, O. Baake, M.L. Kosinova, B. Beckhoff, A. Klein, B. Pollakowski, V.A. Trunova, V.S. Sulyaeva, F.A. Kuznetsov, and W. Ensinger

Chemical bonds and elemental compositions of BC_xN_y layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine

X-Ray Spectrom. 41 , 240 (2012)
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P.S. Hoffmann, N.I. Fainer, O. Baake, M.L. Kosinova, Y.M. Rumyantsev, V.A. Trunova, A. Klein, B. Pollakowski, B. Beckhoff, and W. Ensinger

Silicon carbonitride nanolayers — Synthesis and chemical characterization

Thin Solid Films 520 , 5906 (2012)
http://dx.doi.org/10.1016/j.tsf.2012.04.082

P.S. Hoffmann, M.I. Kosinova, S. Flege, O. Baake, B. Pollakowski, V.A. Trunova, A. Klein, B. Beckhoff, F.A. Kuznetsov, and W. Ensinger

Chemical interactions in the layered system BC_xN_y/Ni(Cu)/Si, produced by CVD at high temperature

Anal. Bioanal. Chem. 404 , 479 (2012)
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T.L. Hopman, C.M. Heirwegh, J.L. Campbell, M. Krumrey, and F. Scholze

An accurate determination of the K-shell X-ray fluorescence yield of silicon

X-Ray Spectrom. 41 , 164 (2012)
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M. Kato, T. Tanaka, T. Kurosawa, N. Saito, M. Richter, A.A. Sorokin, K. Tiedtke, T. Kudo, K. Tono, M. Yabashi, and T. Ishikawa

Pulse energy measurement at the hard x-ray laser in Japan

Appl. Phys. Lett. 101 , 023503 (2012)
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A. Kato, S. Burger, and F. Scholze

Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry

Appl. Opt. 51 , 6457 (2012)
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M. Kolbe, P. Hönicke, M. Müller, and B. Beckhoff

L-subshell fluorescence yields and Coster-Kronig transition probabilities with a reliable uncertainty budget for selected high- and medium-Z elements

Phys. Rev. A 86 , 042512 (2012)
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C. Laubis, A. Fischer, and F. Scholze

Extension of PTB's EUV metrology facilities

Proc. SPIE 8322 , 832236 (2012)
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M. Martins, M. Meyer, M. Richter, A. A. Sorokin, and K. Tiedtke

Atomic Physics Using Ultra-Intense X-Ray Pulses

Atomic Processes in Basic and Applied Physics 68 , 307 (2012)
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F. Meli, T. Klein, E. Buhr, C.G. Frase, G. Gleber, M. Krumrey, A. Duta, St. Duta, V. Korpelainen, R. Bellotti, G.B. Picotto, R.D. Boyd, and A. Cuenat

Traceable size determination of nanoparticles, a comparison among European metrology institutes

Meas. Sci. Technol. 86 , 125005 (2012)
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I. Müller, R.M. Klein, J. Hollandt, G. Ulm, and L. Werner

Traceable calibration of Si avalanche photodiodes using synchrotron radiation

Metrologia 49 , S152 (2012)
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M. Müller, A. Nutsch, R. Altmann, G. Borionetti, T. Holz, C. Mantler, P. Hönicke, M. Kolbe, and B. Beckhoff

Reliable quantification of inorganic contamination by TXRF

Solid State Phenom. 187 , 291 (2012)
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R. Müller, A. Hoehl, A. Matschulat, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, and G. Wüstefeld

Status of the IR and THz beamlines at the Metrology Light Source

J. Phys. Conf. Series 359 , 012004 (2012)
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M. Müller, S. Sioncke, A. Delabie, and B. Beckhoff

ALD growth behavior of high-k nanolayers on various substrates characterized by X-Ray Spectrometry in gracing incidence geometry

Solid State Phenom. 195 , 95 (2012)
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A. Nutsch, B. Beckhoff, G. Borionetti, D. Codegoni, S. Grasso, P. Hoenicke, A. Leibold, M. Müller, M. Otto, L. Pfitzner, and M.-L. Polignano

Reference Samples for Ultra Trace Analysis of Organic Compounds on Substrate Surfaces

Solid State Phenom. 187 , 295 (2012)
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B. Pollakowski, P. Hoffmann, M. I. Kosinova, O. Braake, V. A. Trunova, R. Unterumsberger, W. Ensinger, and B. Beckhoff

Nondestructive and nonpreparative chemical nanometrology of internal material interfaces at tunable high information depths

85 Anal. Chem. 1 , 193 (2012)
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P. Probst, A. Semenov, M. Ries, A. Hoehl, P. Rieger, A. Scheuring, V. Judin, S. Wünsch, K. Il'in, N. Smale, Y.-L. Mathis, R. Müller, G. Ulm, G. Wüstefeld, H.-W. Hübers, J. Hänisch, B. Holzapfel, M. Siegel, and A.-S. Müller

Non-thermal response of YBa₂CU₃O_7-δ thin films to picosecond THz pulses

Phys. Rev. B 85 , 174511 (2012)
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Nonthermal response of YBCO thin films to picosecond THz pulses

Phys. Rev. B 85 , 174511 (2012)
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F. Reinhardt, J. Osán, S. Török, A. E. Pap, M. Kolbe, and B. Beckhoff

Reference-free quantification of particle-like surface contaminations by grazing incidence X-ray fluorescence analysis

J. Anal. Atom. Spectrom. 27 , 248 (2012)
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T. Seuthe, M. Höfner, F. Reinhardt, W.J. Tsai, J. Bonse, M. Eberstein, H.J. Eichler, and M. Grehn

Femtosecond laser-induced modification of potassium-magnesium silicate glasses: An analysis of structural changes by near edge x-ray absorption spectroscopy

Appl. Phys. Lett. 100 , 224101 (2012)
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L. Shi, S. Nihitianov, S. Xia, L.K. Nanver, A. Gottwald, and F. Scholze

Electrical and Optical Performance Investigation of Si-Based Ultrashallow-Junction p⁺-n VUV/EUV Photodiodes

IEEE Trans. Instrum. Meas. 61 , 1268 (2012)
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L. Shi, St. Nihtianov, L. Haspeslagh, F. Scholze, A. Gottwald, and L.K. Nanver

Surface-Charge-Collection-Enhanced High-Sensitivity High-Stability Silicon Photodiodes for DUV and VUV Spectral Ranges

IEEE Trans. Electron Devices 59 , 2888 (2012)
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L. Shi, S.N. Nihtianov, F. Scholze, and L.K. Nanver

Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application

Proc. IECON 2012 (2012)
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S. Sioncke, C. Fleischmann, D. Lin, E. Vrancken, M. Caymax, M. Meuris, K. Temst, A. Vantomme, M. Müller, M. Kolbe, and B. Beckhoff

S-passivation of the Ge gate stack using (NH4)2S

Solid State Phenom. 187 , 23 (2012)
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D. Sokaras, Ch. Zarkadas, R. Fliegauf, B. Beckhoff, and A. G. Karydas

Proton induced quasi-monochromatic x-ray beams for soft x-ray spectroscopy studies and selective x-ray fluorescence analysis

Rev. Sci. Instrum. 83 , 123102 (2012)
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T. Tanaka, M. Kato, T. Kurosawa, Y. Morishita, N. Saito, I.H. Suzuki, M. Krumrey, and F. Scholze

First comparison of spectral responsivity in the soft x-ray region

Metrologia 49 , 501 (2012)
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P. Troussel, D. Dennetiere, A. Rousseau, S. Darbon, P. Høghøj, S. Hedacq, and M. Krumrey

Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV

Rev. Sci. Instrum. 83 , 10E533-1 (2012)
http://dx.doi.org/10.1063/1.4738661

R. Unterumsberger, M. Müller, B. Beckhoff, P. Hönicke, B. Pollakowski, and S. Bjeoumikhova

Focusing of soft X-ray radiation and characterization of the beam profile enabling X-ray emission spectrometry at nanolayered specimens

Spectrochim. Acta B 78 , 37 (2012)
http://dx.doi.org/10.1016/j.sab.2012.10.001

J. Wernecke, F. Scholze, and M. Krumrey

Direct structural characterisation of line gratings with grazing incidencesmall-angle x-ray scattering

Rev. Sci. Instrum. 83 , 103906 (2012)
http://dx.doi.org/10.1063/1.4758283

2011

B. Andreas, Y. Azuma, G. Bartl, P. Becker, H. Bettin, M. Borys, I. Busch, M. Gray, P. Fuchs, K. Fujii, H. Fujimoto, E. Kessler, M. Krumrey, U. Kuetgens, N. Kuramoto, G. Mana, P. Manson, E. Massa, S. Mizushima, A. Nicolaus, A. Picard, A. Pramann, O. Rienitz, D. Schiel, S. Valkiers, and A. Waseda

A determination of the Avogadro constant by counting the atoms in a ²⁸Si crystal

Phys. Rev. Lett. 106 , 030801 (2011)
http://dx.doi.org/10.1063/1.4758283

B. Andreas, Y. Azuma, G. Bartl, P. Becker, H. Bettin, M. Borys, I. Busch, P. Fuchs, K. Fujii, H. Fujimoto, E. Kessler, M. Krumrey, U. Kuetgens, N. Kuramoto, G. Mana, E. Massa, S. Mizushima, A. Nicolaus, A. Picard, A. Pramann, O. Rienitz, D. Schiel, S. Valkiers, A. Waseda, and S. Zakel

Counting the atoms in a ²⁸Si crystal for a new kilogram definition

Metrologia 48 , S1 (2011)
http://dx.doi.org/10.1088/0026-1394/48/2/S01

U. Arp, R. Klein, Z. Li, W. Paustian, M. Richter, P.-S. Shaw, and R. Thornagel

Synchrotron radiation-based bilateral intercomparison of ultraviolet source calibrations

Metrologia 48 , 261 (2011)
http://iopscience.iop.org/article/10.1088/0026-1394/48/5/004/meta

M. Bavdaz, N. Rando, E. Wille, K. Wallace, B. Shortt, M. Collon, C. van Baren, G. Pareschi, F. Christensen, M. Krumrey, and M. Freyberg

ESA-led ATHENA/IXO Optics Development Status

SPIE 8147 , 81470C (2011)
http://dx.doi.org/10.1117/12.893567

B. Beckhoff, Ph. Hönicke, M. Kolbe, M. Müller, B. Pollakowski, F. Reinhardt, J. Weser, U. Brand, K. Herrmann, and V. Nesterov

Materialspezifische Messverfahren für die Nanotechnologie

PTB-Mitteilungen 121, Heft 2 , 165 (2011)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2011/Heft2/PTB-Mitteilungen_2011_Heft_2.pdf

B. Bodermann, J. Flügge, H. Groß, A. Kato, and F. Scholze

Charakterisierung von Nanostrukturen auf Substraten der Halbleiterindustrie

PTB-Mitteilungen 121, Heft 2 , 49 (2011)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2011/Heft2/PTB-Mitteilungen_2011_Heft_2.pdf

B. Bodermann, E. Buhr, H.-U. Danzebrink, M. Bär, F. Scholze, M. Krumrey, M. Wurm, P. Klapetek, P.-E. Hansen, V. Korpelainen, M. van Veghel, A. Yacoot, S. Siitonen, O. El Gawhary, S. Burger, and T. Saastamoinen

Joint Research on Scatterometry and AFM Wafer

AIP Conf. Proc. 1395 , 319 (2011)
http://dx.doi.org/10.1063/1.3657910

F. Bridou, M. Cuniot-Ponsard, J.-M. Desvignes, A. Gottwald, U. Kroth, and M. Richter

Polarizing and non-polarizing mirrors for the hydrogen Lyman-α radiation at 121.6 nm

Appl. Phys. A 102 , 641 (2011)
http://dx.doi.org/10.1007/S00339-010-6133-y

S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt, A. Kato, C. Laubis, and F. Scholze

Investigation of 3D patterns on EUV masks by means of scatterometry and comparison to numerical simulation

SPIE 8186 , 81661Q (2011)
http://dx.doi.org/10.1117/12.896839

I. Busch, Y. Azuma, H. Bettin, L. Cibik, P. Fuchs, K. Fujii, M. Krumrey, U. Kuetgens, N. Kuramoto, and S. Mizushima

Surface layer determination for the Si spheres of the Avogadro project

Metrologia 48 , S62 (2011)
http://dx.doi.org/10.1088/0026-1394/48/2/S10

M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, K. Wallace, E. Wille, M.O. Riekerink, J. Haneveld, A. Koelewijn, C. van Baren, P. Müller, M. Krumrey, M. Freyberg, A.C. Jakobsen, and F. Christensen

Design, Fabrication, and Characterization of Silicon Pore Optics for ATHENA/IXO

SPIE 8147 , 81470D (2011)
http://dx.doi.org/10.1117/12.893418

P. Cuony, D.T.L. Alexander, L. Löfgren, M. Krumrey, M. Marending, M. Despeisse, and C. Ballif

Mixed phase silicon oxide layers for thin-film silicon solar cells

Mater. Res. Soc. Symp. Proc. 1321 , a12-02 (2011)
http://dx.doi.org/10.1557/opl.2011.813

A. Delabie, S. Sioncke, J. Rip, S. van Elshocht, G. Pourtois, M. Mueller, B. Beckhoff, and K. Pierloot

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

J. Vac. Sci. Technol. A. 30 , 01A127 (2011)
http://dx.doi.org/10.1116/1.3664090

J. Feikes, M. von Hartrott, M. Ries, P. Schmidt, G. Wüstefeld, A. Hoehl, R. Klein, R. Müller, and G. Ulm

Metrology Light Source: The first electron storage ring optimized for generating coherent THz radiation

Phys. Rev. STAB 14 , 030705 (2011)
http://dx.doi.org/10.1103/PhysRevSTAB.14.030705

J. Feikes, T. Birke, K. Bürkmann-Gehrlein, O. Dressler, V. Dürr, D. Engel, F. Falkenstern, B. Franksen, H. Glass, A. Heugel, H.-G. Hoberg, F. Hoffmann, J. Kuszynski, J. Rahn, M. Ries, G. Schindhelm, P. Schmid, T. Schneegans, D. Schüler, G. Wüstefeld, and R. Klein

Recent developments at the Metrology Light Source

Proc. IPAC2011 , 2927 (2011)
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C. Fleischmann, S. Sioncke, S. Couet, K. Schouteden, B. Beckhoff, M. Müller, P. Hönicke, M. Kolbe, C. Van Haesendonck, M. Meuris, K. Temst, and A. Vantomme

Towards Passivation of Ge(100) Surfaces by Sulfur Adsorption from a (NH₄)₂S Solution: A Combined NEXAFS, STM and LEED Study

J. Elektrochem. Soc. 158 , H589 (2011)
http://dx.doi.org/10.1149/1.3204433

C. Fleischmann, M. Houssa, S. Sioncke, B. Beckhoff, M. Müller, P. Hönicke, M. Meuris, K. Temst, and A. Vantomme

Self-Affine Surface Roughness of Chemically and Thermally Cleaned Ge(100) Surfaces

J. Elektrochem. Soc. 158 , H1090 (2011)
http://dx.doi.org/10.1149/1.3624762

A. Gottwald, M. Richter, P.-S. Shaw, Z. Li, and U. Arp

Bilateral NIST–PTB comparison of spectral responsivity in the VUV

Metrologia 48 , 02001 (2011)
http://dx.doi.org/10.1088/0026-1394/48/1A/02001

S. Granato, R. Andritschke, J. Elbs, N. Meidinger, L. Striider, G. Weidenspointner, M. Krumrey, and F. Scholze

The spectral redistribution function of eROSITA PNCCDs

IEEE Trans. Nucl. Sci. , 122 (2011)
http://dx.doi.org/10.1109/NSSMIC.2011.6154464

M.-A. Henn, H. Gross, F. Scholze, C. Elster, and M. Bär

Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelyhood estimation

SPIE 8083 , 80830N (2011)
http://dx.doi.org/10.1117/12.889479

A. Jordan-Gehrkes, E. Buhr, T. Klein, C.G. Frase, M. Krumrey, Th. Dziomba, A. Nowak, and V. Ebert

Messverfahren für Größe und Anzahl von Nanopartikeln

PTB-Mitteilungen 121, Heft 2 , 109 (2011)
https://www.ptb.de/cms/fileadmin/internet/publikationen/ptb_mitteilungen/mitt2011/Heft2/PTB-Mitteilungen_2011_Heft_2.pdf

A. Kato and F. Scholze

Effect of line roughness on the diffraction intensities in angular resolved scatterometry

Appl. Opt. 49 , 6102 (2011)
http://dx.doi.org/10.1364/AO.49.006102

A. Kato and F. Scholze

The effect of line roughness on the diffraction intensities in angular resolved scatterometry

Proc. SPIE 8083 , 80830K (2011)
http://dx.doi.org/10.1117/12.899016

R. Klein, A. Gottwald, G. Brandt, R. Fliegauf, A. Hoehl, U. Kroth, H. Kaser, M. Richter, R. Thornagel, and G. Ulm

Radiometric comparison of the primary source standard

Metrologia 48 , 219 (2011)
http://dx.doi.org/10.1088/0026-1394/48/3/017

R. Klein, R. Thornagel, G. Ulm, J. Feikes, and G. Wüstefeld

Status of the Metrology Light Source

J. Elspec 184 , 331 (2011)
http://dx.doi.org/10.1016/j.elspec.2010.09.008

R. Klein, G. Brandt, R. Thornagel, J. Feikes, M. Ries, and G. Wüstefeld

Accurate electron beam size measurement at the Metrology Light Source

Proc. IPAC2011 , 1165 (2011)
http://accelconf.web.cern.ch/AccelConf/IPAC2011/papers/TUPC072.PDF

M. Krämer, R. Dietsch, Th. Holz, D. Weißbach, G. Falkenberg, R. Simon, U. Fittschen, T. Krugmann, M. Kolbe, M. Müller, and B. Beckhoff

Ultrathin layer depositions - a new type of reference samples for high performance XRF analysis

Adv. X-Ray Anal. 54 , 299 (2011)
http://www.icdd.com/resources/axa/vol54/V54_29.pdf

M. Krumrey, G. Gleber, F. Scholze, and J. Wernecke

Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology

Meas. Sci. Technol. 22 , 094032 (2011)
http://dx.doi.org/10.1088/0957-0233/22/9/094032

T. Leitner, A.A. Sorokin, J. Gaudin, H. Kaser, U. Kroth, K. Tiedtke, M. Richter, and P. Wernet

Shot-to-shot and average absolute photon flux measurements of a femtosecond laser high-order harmonic photon source

New J. Phys. 13 , 093003 (2011)
http://dx.doi.org/10.1088/1367-2630/13/9/093003

L. Lobo, B. Fernandez, R. Pereiro, N. Bordel, E. Demenev, D. Giubertoni, M. Bersani, P. Hönicke, B. Beckhoff, and A. Sanz-Medel

Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS

J. Anal. At. Spectrom. 26 , 542 (2011)
http://dx.doi.org/10.1039/C0JA00197J

R. Müller, A. Hoehl, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, and G. Wüstefeld

The Metrology Light Source of PTB - a Source for THz Radiation

J. Infrared Milli. Terahz Waves 32 , 742 (2011)
http://dx.doi.org/10.1007/s10762-011-9785-6

R. Müller, A. Hoehl, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, and G. Wüstefeld

THz studies at a dedicated beamline at the MLS

Proc. IPAC2011 , 2933 (2011)
http://accelconf.web.cern.ch/accelconf/ipac2011/papers/thpc013.pdf

Ralph Müller, Arne Hoehl, Anton Serdyukov, Gerhard Ulm, Jörg Feikes, Markus Ries, Godehard Wüstefeld

The Metrology Light Source of PTB – a Source for THz Radiation

Journal of Infrared, Millimeter, and Terahertz Waves 32 , 742 (2011)
https://link.springer.com/article/10.1007%2Fs10762-011-9785-6

P. Probst, A. Scheuring, S. Wünsch, K. Il’in, M. Siegel, A. Semenov, H.-W. Hübers, V. Judin, A.-S. Müller, A. Hoehl, R. Müller, and G. Ulm

YBa₂Cu₃O_7-δ hot-electron bolometers for fast time-domain analysis of THz synchrotron radiation

Appl. Phys. Lett. 98 , 043504 (2011)
http://dx.doi.org/10.1063/1.3546173

P. Probst, A. Scheuring, M. Hofherr, D. Rall, S. Wünsch, K. Il’in, M. Siegel, A. Semenov, A. Pohl, H.-W. Hübers, V. Judin, A.-S. Müller, A. Hoehl, R. Müller and G. Ulm

YBCO quasioptical detectors for fast time-domain analysis of terahertz synchrotron radiation

Appl. Phys. Lett. 98 , 043504 (2011)
http://aip.scitation.org/doi/10.1063/1.3546173

M. Richter

Atomic plasma excitations in the field of a soft x-ray laser

J. Phys. B 44 , 075601 (2011)
http://dx.doi.org/10.1088/0953-4075/44/7/075601

F. Scholze, B. Bodermann, H. Groß, A. Kato, and M. Wurm

First step towards traceability in scatterometry

Proc. SPIE 7985 , 7985G-1 (2011)
http://dx.doi.org/10.1117/12.929903

F. Scholze, A. Kato, and C. Laubis

Characterization of nano-structured surfaces by EUV scatterometry

J. Phys. Conf. Ser. 311 , 012006 (2011)
http://dx.doi.org/10.1088/1742-6596/311/1/012006

F. Scholze, A. Kato, J. Wernecke, and M. Krumrey

EUV and x-ray scattering methods for CD and roughness measurement

SPIE 8166 , 81661P (2011)
http://dx.doi.org/10.1117/12.896847

L. Shi, S. Nihtianov, F. Scholze, A. Gottwald, and L.K. Nanver

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

Proc. SPIE 8145 , 81450N (2011)
http://dx.doi.org/10.1117/12.891865

L. Shi, L. K. Nanver, C. Laubis, F. Scholze and S. Nihtianov

Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency

IEEE 12169254 (2011)
https://ieeexplore.ieee.org/document/5969130

S. Sioncke, H.C. Lin, L. Nyns, G. Brammertz, A. Delabie, T. Conard, A. Franquet, J. Rip, H. Struyf, S. De Gendt, M. Müller, B. Beckhoff, and M. Caymax

S-passivation of the Ge gate stack: Tuning the gate stack properties by changing the atomic layer deposition oxidant precursor

J. Appl. Phys. 110 , 084907 (2011)
http://dx.doi.org/10.1063/1.3622514

D. Sokaras, A.G. Kochur, M. Müller, M. Kolbe, B. Beckhoff, M. Mantler, Ch. Zarkadas, M. Andrianis, A. Lagoyannis, and A. G. Karydas

Cascade L-shell soft-x-ray emission as incident x-ray photons are tuned across the 1s ionization threshold

A Physical Review 83 , 052511 (2011)
http://dx.doi.org/10.1103/PhysRevA.83.052511

R. Unterumsberger, B. Pollakowski, M. Müller, and B. Beckhoff

Complementary Characterization of Buried Nanolayers by Quantitative X-ray Fluorescence Spectrometry under Conventional and Grazing Incidence Conditions

Anal. Chem. 83 , 8623 (2011)
http://dx.doi.org/10.1021/ac202074s

2010

M.D. Ackermann, M.J. Collon, C.P. Jensen, F.E. Christensen, M. Krumrey, L. Cibik, S. Marggraf, M. Bavdaz, D. Lumb, and B. Shortt

Performance of multilayer coated silicon pore optics

Proc. SPIE 7732 , 77323U (2010)
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=750220

O. Baake, P.S. Hoffmann, M.L. Kosinova, A. Klein, B. Pollakowski, B. Beckhoff , N.I. Fainer, V.A. Trunova, W. Ensinger

Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane

Anal. Bioanal. Chem. (2010)

P. Becker, H. Bettin, M. Borys, I. Busch, K. Fujii, M. Gray, M. Krumrey, U. Kuetgens, G. Mana, P. Manson, E. Massa, A. Nicolaus, A. Picard, D. Schiel and S.Valkiers

Status of the N_A determination by counting atoms in silicon crystals

Proc. CPEM , 107-108 (2010)

B. Beckhoff, M. Kolbe, M. Müller, J. Weser, M. Mantler, D. Rammlmair, A. Wittenberg

Reference-Free XRF - soft X-ray experiments and grain size effects

Proc. ESA Workshop ESA SP-687 (2010)

N. Berrah, J. Bozek, J.T. Costell, S. Düsterer, L. Fang, J. Feldhaus, H. Fukuzawa, M. Hoener, Y.H. Jiang, P. Johnsson, E.T. Kennedy, M. Meyer, R. Moshammer, P. Radcliffe, M. Richter, A. Rouzée, A. Rudenko, A.A. Sorokin, K. Tiedtke, K. Ueda, J. Ullrich and M.J.J. Vrakking

Non-linear processes in the interaction of atoms and molecules with intense EUV and X-ray fields from SASE free electron lasers (FELs)

Journal of Modern Optics 57 , 1015-1040 (2010)

F. Bridou, M. Cuniot-Ponsard, J.-M. Desvignes, M. Richter, U. Kroth, A. Gottwald

Experimental determination of optical constants of MgF₂ and AlF₃ thin films in the vacuum ultra-violet wavelength region (60â€“124 nm), and its application to optical designs

Opt. Commun. 283 , 1351-1358 (2010)

I. Busch, P. Fuchs, M. Krumrey and U. Kuetgens

Comparative surface investigations at spherical Si surfaces using optical and X-ray techniques

Proc. CPEM , 494-495 (2010)

M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, E. Wille, K. Wallace, M.O. Riekerink, B. Lansdorp, L. de Vrede, C. van Baren, P. Müller, M. Krumrey, M. Freyberg

Silicon Pore X-ray Optics for IXO

Proc. SPIE 7732 , 77321F (2010)

S. Ebermayer, R. Andritschke, J. Elbs, N. Meidinger, L. Strüder, R. Hartmann, A. Gottwald, M. Krumrey and F. Scholze

Quantum efficiency measurements of eROSITA pnCCDs

Proc. SPIE 7742 , 77420U (2010)

D. Giubertoni, E. Iacob, P. Hönicke, B. Beckhoff, G. Pepponi, S. Gennaro, M. Bersani

Ultralow energy boron implants in silicon characterization by nonoxidizing secondary ion mass spectrometry analysis and soft x-ray grazing incidence x-ray fluorescence

J. Vac. Sci. Technol. B 28 , C1C84-89 (2010)

G. Gleber, L. Cibik, S. Haas, A. Hoell, P. Müller and M. Krumrey

Traceable size determination of PMMA nanoparticles based on Small Angle X-ray Scattering (SAXS)

J. Phys. Conf. Ser. 247 , 012027 (2010)

A. Gottwald, U. Kroth, M. Richter, H. Schöppe, G. Ulm

Ultraviolet and vacuum-ultraviolet detector-based radiometry at the Metrology Light Source

Meas. Sci. Technol. 21 , 125101 (2010)

P. Hönicke, B. Beckhoff, M. Kolbe, D. Giubertoni, J. van den Berg, G. Pepponi

Depth profile characterisation of ultra shallow junction implants

Anal. Bioanal. Chem. 396 , 2825-2832 (2010)

A. Kato, F. Scholze

The effect of line roughness on the reconstruction of line profiles for EUV masks from EUV scatterometry

Proc. SPIE 7636 , 763621 (2010)

M. Kato, N. Saito, K. Tiedtke, P.e N Juranic, A.A. Sorokin, M. Richter, Y. Morishita, T. Tanaka, U. Jastrow, U. Kroth, H. Schöppe, M. Nagasono, M. Yabashi, K. Tono, T. Togashi, H. Kimura, H. Ohashi and T. Ishikawa

Measurement of the single-shot pulse energy of a free electron laser using a cryogenic radiometer

Metrologia 47 , 518-521 (2010)

R. Klein, G. Ulm, J. Feikes, M. v. Hartrott and G. Wüstefeld

Status of the Metrology Light Source

AIP Conf. Proc. 1234 , 543-546 (2010)

R. Klein, R. Thornagel and G. Ulm

From single photons to milliwatt radiant power - electron storage rings as radiation sources with a high dynamic range

Metrologia 47 , R33 (2010)

M. Kolbe, B. Beckhoff, M. Mantler

Reference-Free XRF - principle, calibrated instrumentation and spectra deconvolution

Proc. ESA Workshop (CD) ESA SP-687 (2010)

C. Koschitzki, A. Hoehl, R. Klein, R. Thornagel, J. Feikes, M. Hartrott, G. Wüstefeld

Highly sensitive beam size monitor for pA currents at the MLS electron storage ring

Proc. IPAC10 , 894-896 (2010)

M. Krämer, K. Roodenko, B. Pollakowski, K. Hinrichs, J. Rappich, N. Esser, A. v. Bohlen, R. Hergenröder

Combined ellipsometry and X-ray related techniques for studies of ultrathin organic nanocomposite films

Thin Solid Films 518 , 5509 (2010)

M. Krumrey, L. Cibik and P. Müller

High-accuracy X-ray detector calibration based on cryogenic radiometry

AIP Conf. Proc. 1234 , 826-829 (2010)

M. Krumrey, L. Cibik, P. Mueller, M. Bavdaz, E. Wille, M. Ackermann, M.J. Collon

X-ray pencil beam facility for optics characterization

Proc. SPIE 7732 , 77324O (2010)

C. Laubis, A. Kampe, C. Buchholz, A. Fischer, J. Puls, C. Stadelhoff, F. Scholze

Characterization of the polarization properties of PTB´s EUV reflectometry system

Proc. SPIE 7636 , 76362R (2010)
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7636/76362R/Characterization-of-the-polarization-properties-of-PTBs-EUV-reflectometry-system/10.1117/12.845098.full?SSO=1

M. Letz, A. Gottwald, M. Richter, V. Libermann, L. Parthier

Temperature-dependent Urbach tail measurements of luthetium aluminum garnet single crystals

Phys. Rev. B 81 , 155109 (2010)

M. Müller

Hochauflösende Röntgenemissionsspektrometrie im Spektralbereich weicher Röntgenstrahlung

Dissertation (2010)

M. Mantler, B. Beckhoff, M. Kolbe & D. Sokaras.

Reference-Free XRF: Mathematical models of quantitative analysis

Proc. ESA Workshop (CD) ESA SP-687 (2010)

R. Mitzner, B. Siemer, S. Roling, M. Wöstmann, T. Noll, F. Siewert, A.A. Sorokin, M. Richter, K. Tiedtke and H. Zacharias

A new soft x-ray autocorrelator - direct evaluation of the temporal properties of FEL pulses at 24 nm

AIP Conf. Proc. 1234 , 19-22 (2010)

R. Müller, A. Hoehl, R. Klein, A. Serdyukov, G. Ulm, J. Feikes, M. v. Hartrott, U. Schade, G. Wüstefeld

IR and THz activities at the Metrology Light Source

AIP Conf. Proc. 1214 , 32-35 (2010)

R. Müller, A. Hoehl, A. Serdyukov, G. Ulm, J. Feikes, M. Ries, G. Wüstefeld

THz activities at the MLS

Proc. of IRMMW-THz2010 (2010)

R. Müller, A. Hoehl, R. Klein, A. Serdyukov, G. Ulm, J. Feikes, M. v. Hartrott, G. Wüstefeld

THz-Strahlung an der MLS – dem Elektronenspeicherring der PTB

PTB-Mitt. 120 , 229-235 (2010)

M. Pagels, F. Reinhardt, B. Pollakowski, M. Roczen, C. Becker, K. Lips, B. Rech, B. Kanngießer, B. Beckhoff

GIXRF–NEXAFS investigations on buried ZnO/Si interfaces: A first insight in changes of chemical states due to annealing of the specimen

Nucl. Instr. and Meth. B 268 , 370-373 (2010)

G. Pepponi, D. Giubertoni, M. Bersani, F. Meirer, D. Ingerle, G. Steinhauser, C. Streli, P. Hönicke, B. Beckhoff

Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in silicon

J. Vac. Sci. Technol. B 28 , C1C59-64 (2010)

V. Richardson, J.T. Costello, D. Cubaynes, S. Düsterer, J. Feldhaus, H.W. van der Hart, P. Juranic, W.B. Li, M. Meyer, M. Richter, A.A. Sorokin, and K. Tiedke

Two-Photon Inner-Shell Ionization in the Extreme Ultraviolet

Phys. Rev. Lett. 105 , 013001 (2010)

M. Richter, S.V. Bobashev, A.A. Sorokin, K. Tiedtke

Multiphoton ionization of atoms with soft x-ray pulses

J. Phys. B: At. Mol. Opt. Phys. 43 , 194005 (2010)

M. Richter, E. Welter

Grundlagen der Absorptionsspektroskopie

Forschung mit Synchrotronstrahlung , 157-172 (2010) , edited by J. Falta, T. MÃ¶ller ; Vieweg und Teubner

N. Saito, P.N. Juranic, M. Kato, M. Richter, A.A. Sorokin, K.Tiedtke, U. Jastrow, U. Kroth, H. Schöppe, M. Nagasono, M. Yabashi, K. Tono, T. Togashi, H. Kimura, H. Ohashi, and T. Ishikawa

Radiometric comparison for measuring the absolute radiant power of a free-electron laser in the extreme ultraviolet

Metrologia 47 , 21-23 (2010)

F. Scholze, R. Vest and T. Saito

Report on the CCPR Pilot Comparison: Spectral Responsivity 10 nm to 20 nm

Metrologia 47 , 02001 (2010)

L. Shi, L. K. Nanver, A. Šakić, A. Gottwald, U. Kroth, S. Nihtianov

Optical Stability Investigation of High-Performance Silicon-Based VUV Photodiodes

IEEE Xplore (2010)
https://ieeexplore.ieee.org/document/5690669

L. Shi, F. Sarubbi, L. K. Nanver, U. Kroth, A. Gottwald and S. Nihtianova

Optical performance of B-layer ultra-shallow-junction silicon photodiodes in the VUV spectral range

Procedia Engineering 5 , 633-636 (2010)
https://www.sciencedirect.com/science/article/pii/S1877705810007368?via%3Dihub

S. Sioncke, H.C. Lin, C. Adelmann, G. Brammertz, A. Delabie, A. Conard, A. Franquet, M. Caymax, M. Meuris, H. Struyf, S. DeGendt, M. Heyns, C. Fleischmann, K. Temst, A. Vantomme, M. Müller, M. Kolbe, B. Beckhoff

ALD on high mobility channels: engineering the proper gate stack passivation

ECS Transactions 33 , 9-23 (2010)

D. Sokaras, M. Müller, M. Kolbe, B. Beckhoff, Ch. Zarkadas, and A.G. Karydas

Resonant Raman scattering of polarized and unpolarized x-ray radiation from Mg, Al, and Si

Phys. Rev. A 81 , 012703 (2010)

M. Störmer, C. Horstmann, F. Siewert, F. Scholze, M. Krumrey, F. Hertlein, M. Matiaske, J. Wiesmann and J. Gaudin

Single-layer and multilayer mirrors for advanced research light sources

AIP Conf. Proc. 1234 , 756-759 (2010)

C. Streeck, B. Beckhoff, F. Reinhardt, M. Kolbe, B. Kanngießer, C.A. Kaufmann, H.W. Schock

Elemental depth profiling of Cu(In,Ga)Se₂ thin films by reference-free grazing incidence X-ray fluorescence analysis

Nucl. Instr. and Meth. B 268 , 277-281 (2010)

G. Wüstefeld, J. Feikes, M. v. Hatrott, M. Ries, A. Hoehl, R. Klein, R. Müller, A. Serdyukov, G. Ulm

Coherent THz measurements at the Metrology Light Source

Proc. IPAC10 , 2508 (2010)

J.C. Zwinkels, E. Ikonen, N.P. Fox, G. Ulm and M.L. Rastello

Photometry, radiometry and â€˜the candelaâ€™: evolution in the classical and quantum world

Metrologia 47 , R15 (2010)

2009

M.D. Ackermann, M.J. Collon, R. Günther, R. Partpsing, G. Vacanti, E.-J. Buis, M. Krumrey, P. Müller, M.W. Beijersbergen, M. Bavdaz, K. Wallace

Performance prediction and measurement of Silicon Pore Optics

Proc. SPIE 7437 , 74371N (2009)

O. Baake, N.I. Fainer, P. Hoffmann, M.L. Kosinova, Yu.M. Rumyantsev, V.A. Trunova, A. Klein, W. Ensinger, B. Pollakowski, B. Beckhoff, and G. Ulm

Chemical characterization of SiC_xN_y nanolayers by FTIR- and Raman spectroscopy, XPS and TXRF-NEXAFS

Nucl. Instrum. Meth. A 603 , 174 (2009)

O. Baake, P.S. Hoffmann, S. Flege, H.M. Ortner, S. Gottschalk, W. Berky, A.G. Balogh, W. Ensinger, B. Beckhoff, M. Kolbe, M. Gerlach, B. Pollakowski, J. Weser, G. Ulm, M. Haschke, E. Blokhina, M. Peter, D. Porta, M. Heck

Nondestructive characterization of nanoscale layered samples

Anal. Bioanal. Chem. 393 , 623 (2009)

O. Baake, P.S. Hoffmann, A. Klein, B. Pollakowski, B. Beckhoff, W. Ensinger, M. Kosinova, N. Fainer, V.S. Sulyaeva and V. Trunova

Chemical character of BC_xN_y layers grown by CVD with trimethylamine borane

X-Ray Spectrom. 38 , 68 (2009)

O. Baake, P.S. Hoffmann, A. Klein, B. Pollakowski, B. Beckhoff, M.L. Kosinova, N.I. Fainer, V.S. Sulyaeva, V.A. Trunova, W. Ensinger

Speciation of BCxNy films grown by PECVD with trimethylborazine precursor

Anal. Bioanal. Chem. 395 , 1901 (2009)

J. Bahrdt, J. Feikes, W. Frentrup, A. Gaupp, M. v. Hartrott, M. Scheer, G. Wüstefeld, G. Ulm, J. Kuhnhenn

Cherenkov fibers for beam diagnostics at the Metrology Light Source

Proc. PAC09 , 1159 (2009)

B. Beckhoff, A. Nutsch, R. Altmann, G. Borionetti, C. Pello, M.L. Polgnano, D. Codegoni, S. Grasso, E. Cazzini, M. Bersani, P. Lazzeri, S. Gennaro, M. Kolbe, M. Müller, P. Kregsamer, F. Posch

Highly sensitive detection of inorganic contamination

Solid State Phenomena 145-146 , 101 (2009)

B. Beckhoff, A. Gottwald, R. Klein, M. Krumrey, R. Müller, M. Richter, F. Scholze, R. Thornagel, and G. Ulm

A quarter-century of metrology using synchrotron radiation by PTB in Berlin

Phys. Status Solidi B 246 , 1415 (2009)

B. Beckhoff, A. Nutsch, R. Altmann, G. Borionetti, C. Pello, M.L. Polignano, D. Codegoni, S. Grasso, E. Cazzini, M. Bersani, S. Gennaro, M. Kolbe, M. Müller, P. Kregsamer, F. Posch

Assessing various analytical techniques with different lateral resolution by investigating Spin-coated inorganic contamination on Si wafer surfaces

ECS Transactions 25 , 311 (2009)

B. Beckhoff, P. Hönicke, D. Giubertoni, G. Pepponi, M. Bersani

GIXRF in the soft X-ray range used for the characterization of ultra shallow junctions

AIP Conf. Proc. 1173 , 29 (2009)

B. Beckhoff, R. Fliegauf, P. Hönicke, M. Kolbe, M. Müller, B. Pollakowski, F. Reinhardt, J. Weser, and G. Ulm

Reference-free characterizazion of semiconductor surface contamination and nanolayers by X-ray spectrometry

AIP Conf. Proc. 1173 , 198 (2009)

A. BenMoussa, A. Soltani, U. Schühle, K. Haenen, Y.M. Chong, W.J. Zang, R. Dahal, J.Y. Lin, H.X. Jiang, H.A. Barkad, B. BenMoussa, D. Bolsee, C. Hermans, U. Kroth, C. Laubis, V. Mortet, J.C. De Jaeger, B. Giordanengo, M. Richter, F. Scholze, and J.F. Hochedez

Recent developments of wide-bandgap semiconductor based UV sensors

Diamond & Related Materials 18 , 860 (2009)

A. BenMoussa, I.E. Dammasch, J.-F. Hochedez, U. Schuehle, S. Koller, Y. Stockman, F. Scholze, M. Richter, U. Kroth, C. Laubis, M. Dominique, M. Kretzschmar, S. Mekaoui, S. Gissot, A. Theissen, B. Giordanengo, D. Bolsee, C. Hermans, D. Gillotay, J.-M. Defise, and W. Schmutz

Pre-flight calibration of LYRA, the solar VUV radiometer on board PROBA2

Astronomy & Astrophysics 508 , 1085 (2009)

J.A. van den Berg, M.A. Reading, A. Parisini, M. Kolbe, B. Beckhoff, S. Ladas, M. Fried, P. Petrik, P. Bailey, T. Noakes, T. Conard and S. de Gendt

High resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

ECS Transactions 25 , 349 (2009)

E. Bissaldi, A. von Kienlin, G. Lichti, H. Steinle, P.N. Bhat, M.S. Briggs, G.J. Fishman, A.S. Hoover, R.M. Kippen, M. Krumrey, M. Gerlach, V. Connaughton, R. Diehl, J. Greiner, A.J. van der Horst, C. Kouveliotou, S. McBreen, C.A. Meegan, W.S. Paciesas, R.D. Preece, C.A. Wilson-Hodge

Ground-based calibration and characterization of the Fermi gamma-ray burst monitor detectors

Exp Astron 24 , 47 (2009)

B. Bodermann, M. Wurm, A. Diener, F. Scholze, and H. Groß

EUV and DUV scatterometry for CD and edge profile metrology on EUV masks

GMM-Fachbericht [CD-ROM] 59 (2009)

B. Bodermann, M. Wurm, A. Diener, F. Scholze, H. Groß

EUV and DUV scatterometry for CD and edge profile metrology on EUV

Proc. SPIE 7470 , 74700F-1 (2009)

Ch. Bostedt, H.N. Chapman, J.T. Costello, J.R. CrespoLópez-Urrutia, S. Düsterer, S. W. Epp, J. Feldhaus, A. Föhlisch, M. Meyer, Th. Möller, R. Moshammer, M. Richter, K. Sokolowski-Tinten, A.A. Sorokin, K. Tiedtke, J. Ullrich, and W. Wurth

Experiments at FLASH

Nucl. Instrum. Meth. A 601 , 108 (2009)

I. Busch, H. Danzebrink, M. Krumrey, M. Borys, and H. Bettin

Oxide layer mass determination at the silicon shere of the Avogadro project

IEEE Transactions on Instrumentation and Measurement 58 , 891 (2009)

M.J. Collon, R. Günther, M. Ackermann, R. Partapsing, C. Kelly, M.W. Beijersbergen, M. Bavdaz, K. Wallace, M.O. Riekerink, P. Müller, M. Krumrey

Stacking of Silicon Pore Optics for IXO

Proc. SPIE 7437 , 74371A (2009)

B. Ewers, A. Kupsch, A. Lange, B.R. Müller, A. Hoehl, R. Müller, and G. Ulm

Terahertz Spectral Computed Tomography

Proc. of the 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES VOLS 1 AND 2 , 138 (2009)

J. Feikes, M. v. Hartrott, A. Hoehl, R. Klein, R. Müller, G. Ulm, and G. Wüstefeld

Low Alpha Operation at the MLS Storage Ring

Proc. of PAC09 , 1093 (2009)

C. Fleischmann, S. Sioncke, K. Schouteden, K. Paredis, B. Beckhoff, M. Müller, M. Kolbe, M. Meuris, C. Van Haesendonck, K. Temst, and A. Vantomme

Investigations of the Surface Composition and Atomic Structure of ex-situ Sulfur Passivated Ge(100)

ECS Transactions 25 , 421 (2009)

M. Gerlach, M. Krumrey, L. Cibik, P. Müller, and G. Ulm

Comparison of scattering experiments using synchrotron radiation with Monte Carlo simulations using Geant4

Nucl. Instrum. Meth. A 608 , 339 (2009)

D. Giubertoni, G. Pepponi, B. Beckhoff, P. Hoenicke, S. Gennaro, F. Meirer, D. Ingerle, G. Steinhauser, M. Fried, P. Petrik, A. Parisini, M.A. Reading, C. Streli, J.A. van den Berg and M. Bersani

Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium

AIP Conf. Proc. 1173 , 45 (2009)

H. Gross, F. Scholze, A. Rathsfeld, and M. Bär

Evaluation of measurement uncertainties in EUV scatterometry

Proc. SPIE 7390 , 73900T (2009)

H. Gross, A. Rathsfeld, F. Scholze, and M. Bär

Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates

Meas. Sci. Technol. 20 , 105102 (2009)

H. Gross, A. Rathsfeld, F. Scholze, and M. Bär

Impact of model uncertainties to the reconstruction of surface profiles in scatterometry

Proc. XIX IMEKO World Congress, Fundamental and Applied Metrology [online] , 2453 (2009)

C.P. Jensen, M. Ackermann, F.E. Christensen, M.J. Collon, M. Krumrey

Coating of silicon pore optics

Proc. SPIE 7437 , 743713 (2009)

G. Jost, T. Mensing, S. Golfier, R. Lawaczeck, H. Pietsch, J. Hütter, L. Cibik, M. Gerlach, M. Krumrey, D. Fratzscher, V. Arkadiev, R. Wedell, M. Haschke, N. Langhoff, P. Wust, and L. Lüdemann

Photoelectric-enhanced radiation therapy with quasi-monochromatic computed tomography

Med. Phys. 36 , 2107 (2009)

R. Klein, G. Brandt, R. Fliegauf, A. Hoehl, R. Müller, R. Thornagel, and G. Ulm

The Metrology Light Source operated as a primary source standard

Metrologia 46 , S266 (2009)

R. Klein, D. Raubert, R. Thornagel, J. Hollandt, and G. Ulm

Radiometric comparison of the primary synchrotron radiation source standard Metrology Light Source with calibrated filter radiometers in the visible and NIR spectral range

Metrologia 46 , 359 (2009)

M. Kolbe, B. Beckhoff, M. Krumrey, M. Reading, J. van den Berg, T. Conard, and S. De Gendt

Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

ECS Transactions 25 , 293 (2009)

M. Krumrey

Comments on Determination of X-ray flux using silicon pin diodes by R. L. Owen et al. (2009)

J. Synchrotron Radiat 16 , 690 (2009)

C. Laubis, F. Scholze, C. Buchholz, A. Fischer, S. Hesse, A. Kampe, J. Puls, C. Stadelhoff, and G. Ulm

High accuracy EUV reflectometry at large optical components and oblique incidence

Proc. SPIE 7271 , 72713Y-1 (2009)

T. Lauf, F. Aschauer, S. Herrmann, M. Hilchenbach, M. Krumrey, P. Lechner, G. Lutz, P. Majewski, M. Porro, R.H. Richter, F. Scholze, L. Strüder, J. Treis, and G. de Vita

Performance and spectroscopic behaviour of DePFET macropixels

IEEE Nuclear Science Symposium Conference Record N24-5 , 1202 (2009)

H. Legall, H. Stiel, M. Schnürer, M. Pagels, B. Kanngießer, M. Müller, B. Beckhoff, I. Grigorieva, A. Antonov, V. Arkadiev, and A. Bjeoumikhov

An efficient X-ray spectrometer based on thin mosaic crystal films and its application in various fields of X-ray spectroscopy

J. Appl. Cryst. 42 , 572 (2009)

M. Letz, A. Gottwald, M. Richter, and L. Parthier

Temperatur-dependent Urbach tail measurements of CaF₂ single crystals

Phys. Rev. B 79 , 195112 (2009)

M. Lommel, P. Hönicke, M. Kolbe, M. Müller, F. Reinhardt, P. Möbus, E. Mankel, B. Beckhoff, and B.O. Kolbesen

Preparation and characterization of self-assembled monolayers on germanium surfaces

Solid State Phenomena 145-146 , 169 (2009)

M. Lommel, F. Reinhardt, P. Hönicke, M. Kolbe, M. Müüller, B. Beckhoff, and B.O. Kolbesen

A comparison between self-assembled monolayers on gold and germanium employing grazing incidence X-ray absorption spectrometry GIXRF-NEXAFS

ECS Transactions 25 , 433 (2009)

M. Lommel, F. Reinhardt, M. Kolbe, B. Beckhoff, M. Müller, and P. Hönicke

Characterisation of Self-Assembled Monolayers on Germanium Surfaces via NEXAFS

ECS Transactions 19 , 227 (2009)

M. Martins, M. Wellhöfer, A.A. Sorokin, M. Richter, K. Tiedtke, and W. Wurth

Resonant multiphoton processes in the soft x-ray regime

Phys. Rev. A 80 , 023411 (2009)

B. Michel, M. Giza, M. Krumrey, M. Eichler, G. Grundmeier, and C.-P. Klages

Effects of dielectric barrier discharges on silicon surfaces: Surface roughness, cleaning and oxidation

J. Appl. Phys. 105 , 073302-1 (2009)

R. Mitzner, A.A. Sorokin, B. Siemer, S. Roling, M. Rutkowski, H. Zacharias, M. Neeb, T. Noll, F. Siewert, W. Eberhardt, M. Richter, P. Juranic, K. Tiedtke, and J. Feldhaus

Direct autocorrelation of soft-x-ray free-electron-laser pulses by time-resolved two-photon double ionization of He

Phys. Rev. A 80 , 025402 (2009)

M. Müller, B. Beckhoff, R. Fliegauf, and B. Kanngießer

Nickel LIII fluorescence and satellite transition probabilities determined with an alternative methodology for soft-x-ray emission spectrometry

Phys. Rev. A 79 , 032503 (2009)

R. Müller, A. Bawagan, A. Hoehl, R. Klein, G. Ulm, J. Feikes, M. v. Hartrott, U. Schade, and G. Wüstefeld

First results in the IR and THz spectral range at the Metrology Light Source

OPTO 2009 Proc. , 93 (2009)

R. Müller, A. Hoehl, R. Klein, G. Ulm, J. Feikes, M. v. Hartrott, and G. Wüstefeld

First measurements at the new dedicated THz beamline at the MLS

Proc. of the 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES VOLS 1 AND 2 , 158 (2009)

R. Müller, A. Bawagan, A. Hoehl, R. Klein, G. Ulm, J. Feikes, M. v. Hartrott, U. Schade, and G. Wüstefeld

Characterization of MLS THz radiation at a dedicated beamline

Proc. of PAC09 , 2288 (2009)

A.-S. Müller, I. Birkel, E. Huttel, Y.-L. Mathis, N. Smale, H.-W. Hübers, A. Semenov, J. Feikes, M. v. Hartrott, G. Wüstefeld, R. Klein, R. Müller, G. Ulm, E. Bründermann, T. Bückle, M. Fitterer, S. Hillenbrand, N. Hiller, A. Hofmann, V. Judin, M. Klein, S. Marsching, and K.G. Sonnad

Observation of coherent THz radiation from the ANKA and MLS storage rings with a Hot Electron Bolometer

Proc. of PAC09 , 1153 (2009)

A. Nutsch, B. Beckhoff, R. Altmann, J.A. Van Den Berg, D. Guibertoni, P. Hönicke, M. Bersani, A. Leibold, F. Meirer, M. Müller, G. Pepponi, M. Otto, P. Petrik, M. Reading, L. Pfitzner, and H. Ryssel

Complementary metrology within a European joint laboratory

Solid State Phenomena 145-146 , 97 (2009)

A. Nutsch, B. Beckhoff, R. Altmann, M.L. Polignano, E. Cazzini, D. Codegoni, G. Borionetti, M. Kolbe, M. Müller, C. Mantler, C. Streli, and P. Kregsamer

Comparability of TXRF Systems at Different Laboratories

ECS Transactions 25 , 325 (2009)

A. Nutsch, B. Beckhoff, G. Bedana, G. Borionetti, D. Codegoni, S. Grasso, G. Guerinoni, A. Leibold, M. Müller, M. Otto, L. Pfitzner, M.-L. Poligano, D. De Simone, and L. Frey

Characterization of organic contamination in Semiconductor Manufactoring Processes

AIP Conf. Proc. 1173 , 23 (2009)

J. Osan, F. Reinhardt, B. Beckhoff, A.E. Pap, and S. Török

Probing Patterned Wafer Structures by Means of Grazing Incidence X-ray

ECS Transactions 25 , 441 (2009)

F. Reinhardt, B. Beckhoff, H. Eba, B. Kanngießer, M. Kolbe, M. Mizusawa, M. Müller, B. Pollakowski, K. Sakurai, and G. Ulm

Evaluation of High-Resolution X-ray Absorption and Emission Spectroscopy for the Chemical Speciation of Binary Titanum Compounds

Anal. Chem. 81 , 1770 (2009)

M. Richter, M.Ya. Amusia, S.V. Bobashev, T. Feigl, P.N. Juranic, M. Martins, A.A. Sorokin, and K. Tiedtke

Extreme Ultraviolet Laser Excites Atomic Giant Resonance

Phys. Rev. Lett. 102 , 163002 (2009)

F. Scholze and M. Procop

Modelling the response function of energy dispersive X-ray spectrometers with silicon detectors

X-Ray Spectrom. 38 , 312 (2009)

M.P. Seah, W.E.S. Unger, H. Wang, W. Jordaan, Th. Gross, J.A. Dura, D.W. Moon, P. Totarong, M. Krumrey, R. Hauert, and M. Zhiquiang

Ultra-thin SiO₂ on Si IX: absolute measurements of the amount of silicon oxide as a thickness of SiO₂ on Si

Surf. Interface Anal. 41 , 430 (2009)

L. Shi, F. Sarubbi, S. N. Nihtianov, L. K. Nanver, T. L. M. Scholtes, and F. Scholze

High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application

Proc. IECON , 1891 (2009)

2008

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser, and G. Ulm

X-ray spectrometry for wafer contamination analysis and speciation as well as for reference-free nanolayer characterization

Solid State Phenomena 134 , 277 (2008)

B. Beckhoff

Reference-free X-ray spectrometry based on metrology using synchrotron radiation

J. Anal. At. Spectrom. 23 , 845 (2008)

B. Beckhoff, M. Kolbe, O. Hahn, A.G. Karydas, Ch. Zarkadas, D. Sokaras, and M. Mantler

Reference-free x-ray fluorescence analysis of an ancient Chinese ceramic

X-Ray Spectrom. 37 , 462 (2008)

A. BenMoussa, J.F. Hochedez, R. Dehal, J. Li, J.Y. Li, H.X. Jiang, A. Soltani, J.-C. De Jaeger, U. Kroth, and M. Richter

Characterization of AIN metal-semiconductor-metal diodes in the spectral range of 44-360 nm: Photoemission assessments

Appl. Phys. Lett. 92 , 022108 (2008)

A. BenMoussa, A. Soltani, K. Haenen, U. Kroth, V. Mortet, H.A. Barkad, D. Bolsee, C. Hermans, M. Richter, J.C. De Jaeger, and J.F. Hochedez

New developments on diamond photodetector for VUV solar observations

Semicond. Sci. Technol. 23 , 035026 (2008)

B. Bodermann, E. Buhr, G. Ehret, F. Scholze, and M. Wurm

Optical metrology of micro- and nanostructures at PTB: Status and future developments

Proc. SPIE 7155 , 71550V-1 (2008)

M. J. Collon, R. Günther, M. Ackermann, E.J. Buis, G. Vacanti, M.W. Beijersbergen, M. Bavdaz, K. Wallace, M. Freyberg, and M. Krumrey

Performance of Silicon Pore Optics

Proc. SPIE 7011 , 70111E (2008)

P. Colombi, D. K. Agnihotri, V.E. Asadchikov, E. Bontempi, D.K. Bowen, C.-H. Chang, L. E. Depero, M. Farnworth, T. Fujimoto, A. Gibaud, M. Jergel, M. Krumrey, T. A. Lafford, A. Lamperti, T. Ma, R. J. Matyi, M. Meduna, S. Milita, K. Sakurai, L. Shabelnikov, A. Ulyanenkov, A. Van der Lee, and C. Wieme

Reproducibility in X-ray reflectometry: results from the first world-wide round robin experiment

J. Appl. Cryst. 41 , 143 (2008)

T. Conard, S. List, M. Claes, and B. Beckhoff

Advanced Metrologies for Cleans Characterization: ARXPS, GIXF and NEXAFS

Solid State Phenomena 134 , 281 (2008)

J. Feikes, M. Abo-Bakr, K. Bürkmann-Gehrlein, M. v. Hartrott, J. Rahn, G. Wüstefeld, R. Klein, and G. Ulm

Commissioning and Operation of the Metrology Light Source

Proc. of EPAC08 , 2010 (2008)

M. Gerlach, M. Krumrey, L. Cibik, P. Müller, H. Rabus, and G. Ulm

Cryogenic radiometry in the hard x-ray range

Metrologia 45 , 577 (2008)

H. Gross, A. Rathsfeld, F. Scholze, R. Model, and M. Bär

Computational methods estimating uncertainties for profile reconstruction in scatterometry

Proc. SPIE 6995 , 69950T-1 (2008)

P. Hönicke, B. Beckhoff, M. Kolbe, S. List, T. Conard, and H. Struyff

Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescence

Spectrochim. Acta B 63 , 1359 (2008)

G. Jost, S. Golfier, R. Lawaczeck, H. Pietsch, H.-J. Weinmann, L. Cibik, M. Gerlach M. Krumrey, V. Arkadiev, D. Fratzscher, M. Haschke, N. Langhoff, R. Wedell, L. Lüdemann, and P. Wust

Imaging-Therapy Computed Tomograph with quasi-monochromatic x-rays

Eur. J. Radiol. 68S , S63 (2008)

R. Klein, G. Brandt, R. Fliegauf, A. Hoehl, R. Müller, R. Thornagel, G. Ulm, M. Abo-Bakr, K. Bürkmann-Gehrlein, J. Feikes, M. v. Hartrott, K. Holldack, J. Rahn, and G. Wüstefeld

Absolute Measurement of the MLS Storage Ring Parameters

Proc. of EPAC08 , 2055 (2008)

R. Klein, G. Brandt, R. Fliegauf, A. Hoehl, R. Müller, R. Thornagel, G. Ulm, M. Abo-Bakr, J. Feikes, M. v. Hartrott, K. Holldack, and G. Wüstefeld

Operation of the Metrology Light Source as a primary radiation source standard

Phys. Rev. ST Accel. Beams 11 , 110701-1 (2008)

T. Kleine-Ostmann, T. Schrader, M. Bieler, U. Siegner, C. Monte, B. Gutschwager, J. Hollandt, A. Steiger, L. Werner, R. Müller, G. Ulm, I. Pupeza, and M. Koch

THz Metrology

Frequenz 62 , 137 (2008)

C. Laubis, F. Scholze, and G. Ulm

Metrology in the soft x-ray range - from EUV to the water window

Proc. SPIE 7101 , 71011U-1 (2008)

D.H. Lumb, C.P. Jensen, M. Krumrey, L. Cibik, F. Christensen,M. Collon, and M. Bavdaz

Low atomic number coating for XEUS silicon pore optics

Proc. SPIE 7011 , 70111D (2008)

R.J. Matyi, L.E. Depero, E. Bontempi, P. Colombi, A. Gibaud, M. Jergel, M. Krumrey, T.A. Lafford, A. Lamperti, M. Meduna, A. Van der Lee, and C. Wiemer

The international VAMAS project on X-ray reflectivity measurements for evaluation of thin films and multilayers - Preliminary results from the second round-robin

Thin Solid Films 516 , 7962 (2008)

R. Müller, A. Hoehl, R. Klein, G. Ulm, M. Abo-Bakr, J. Feikes, M.v. Hartrott, and G. Wüstefeld

First commissioning results in the IR/THz range at the electron storage ring Metrology Light Source

Proc. of IRMMW-THz 2008, Pasadena, Sept 2008 (2008)

R. Müller, A. Hoehl, R. Klein, G. Ulm, J. Feikes, and G. Wüstefeld

THz radiation from the Metrology Light Source of the PTB

Proc. of the 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES VOLS 1 AND 2 , 278 (2008)

A. Owens, B. Beckhoff, G. Fraser, M. Kolbe, M. Krumrey, A. Mantero, M. Mantler, A. Peacock, M.-G. Pia, D. Pullan, U.G. Schneider, and G. Ulm

Measuring and interpreting X-ray fluorescence from planetary surfaces

Anal. Chem. 80 , 8398 (2008)

B. Pollakowski, B. Beckhoff, F. Reinhardt, S. Braun, and P. Gawlitza

Speciation of deeply buried TiO_x nanolayers with grazing-incidence x-ray fluorescense combined with a near-edge x-ray absorption fine-structure investigation

Phys. Rev. B 77 , 235408 (2008)

J. Pomplun, S. Burger, F. Schmidt, F. Scholze, C. Laubis, and U. Dersch

Metrology of EUV Masks by EUV Scatterometry and Finite Element Analysis

Proc. of SPIE 7028 , 70280P-1 (2008)

M. Richter, S.V. Bobashev, A.A. Sorokin, and K. Tiedtke

Nonlinear photoionization in the soft X-ray regime

Appl. Phys. A 92 , 473 (2008)

M. Richter, S.V. Bobashev, A.A. Sorokin, and K. Tiedtke

Photon-matter interaction at short wavelengths and ultra-high intensity - Gas-phase experiments at FLASH

J. Phys. Conf. Series 141 , 012014 (2008)

F. Sarubbi, L.K. Nanver, T. Scholtes, S.N. Nihtianov, and F. Scholze

Pure boron-doped photodiodes: A solution for radiation detection in EUV lithography

IEEE , 278 (2008)

F. Scholze and M. Krumrey

Characterization of nanostructured surfaces using EUV- and X-ray reflectometry

VDI-Berichte 2027 , 175 (2008)

F. Scholze and C. Laubis

Use of EUV scatterometry for the characterization of line profiles and line roughness on photomasks

EMLC 2008 , 374 (2008)

F. Scholze, C. Laubis, G. Ulm, U. Dersch, J. Pomplun, S. Burger, F. Schmidt

Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-Simulation

Proc. of SPIE 6921 , 69213R-1 (2008)

F. Scholze and C. Laubis

Use of EUV scatterometry for the characterization of line profiles and line roughness on photomasks

SPIE 6792 , 67920U (2008)

M. Störmer, C. Horstmann, D. Häussler, E. Spiecker, F. Siewert, F. Scholze, F. Hertlein, W. Jäger, and R. Bormann

Single-layer and multilayer mirrors for current and next-generation light sources

Proc. SPIE 7077 , 707705-1 (2008)

K. Tiedtke, J. Feldhaus, U. Hahn, U. Jastrow, T. Nunez, T. Tschentscher, S.V. Bobashev, A.A. Sorokin, J.B. Haastings, S. Müller, L. Cibik, A. Gottwald, A. Hoehl, U. Kroth, M. Krumrey, H. Schöppe, G. Ulm, and M. Richter

Gas detectors for x-ray lasers

J. Appl. Phys. 103 , 094511 (2008)

R. Müller, A. Hoehl, R. Klein, G. Ulm, M. Abo-Bakr, K. Bürkmann-Gehrlein, J. Feikes, M. v. Hartrott, J.S. Lee J. Rahn, U. Schade, and G. Wüstefeld

Coherent Synchrotron Radiation at the Metrology Light Source

Proc. of EPAC08 , 2058 (2008)

M. Wellhöfer, J.T. Hoeft, M. Martins, W. Wurth, M. Braune, J. Viefhaus, K. Tiedtke and M. Richter

Photoelectron spectroscopy as a non-invasive method to monitor SASE-FEL spectra

JINST 3 , P02003 (2008)

2007

M. Abo-Bakr, P. Budz, K. Bürkmann, I. Churkin, V. Dürr, R.M. Klein, J. Kolbe, D. Krämer, E. Semenov, S. Sinyatkin, A. Steshov, J. Rahn, E. Rouvinskiy, G. Ulm, G. Wüstefeld

The magnets of the Metrology Light Source in Berlin-Adlershof

Nucl. Instr. and Meth. A 575 , 42-45 (2007)

M. Abo-Bakr et al.

Commissioning of the Metrology Light Source

Proc. PAC07 , 947-949 (2007) , ISBN: 1-4244-0917-9

W. Ackermann et al.

Operation of a free-electron laser from the extreme ultraviolet to the water window

Nature Photonics 1 , 336-342 (2007)

K. Bürkmann, T. Birke, J. Borninkhof, P. Budz, R. Daum, V. Duerr, J. Feikes, W. Gericke, H. Glass, H.G. Hoberg, J. Kolbe, R. Lange, G. Mielczarek, I. Müller, K. Ott, J. Rahn, G. Schindhelm, T. Schneegans, T. Schroeter, D. Schüler, D. Simmering, T. Westphal, R. Klein, G. Ulm

Commissioning of the 100 MeV Racetrack Microtron of the Metrology Light Source

Proc. PAC07 , 944-946 (2007) , ISBN: 1-4244-0917-9

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, J. Weser, G. Ulm

Reference-free TXRF analysis of semiconductor surfaces with synchrotron radiation

Anal. Chem. 79 , 7873-782 (2007)

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, B. Pollakowski, J. Weser, and G. Ulm

Wafer Contamination Analysis, Speciation and Reference-free Nanolayer Characterization using Synchrotron Radiation based X-Ray Spectrometry

ECS Transactions 10 (1) , 51-56 (2007)

B. Beckhoff, R. Fliegauf, P. Hönicke, M. Kolbe, M. Müler, B. Pollakowski, J. Weser, and G. Ulm

Advanced Metrologies for Wafer Contamination and Nanolayer Characterization using XRF Methods

ECS Transactions 11 (3) , 273-279 (2007)

G. Brandt, J. Eden, R. Fliegauf, A. Gottwald, A. Hoehl, R. Klein, R. Müller, M. Richter, F. Scholze, R. Thornagel, G. Ulm, K. Bürkmann, J. Rahn, G. Wüstefeld

The Metrology Light Source - the new dedicated electron storage ring of PTB

Nucl. Instr. and Meth. B 258 , 445-452 (2007)

P. Budz, M. Abo-Bakr, W. Anders, K. Bürkmann, O. Dressler, V. Dürr, J. Feikes, H.G. Hoberg, P. Kuske, R. Lange, J. Rahn, T. Schneegans, D. Schüler, E. Weihreter, G. Wüstefeld, D. Krämer, R. Klein, G. Ulm

Status of the New Metrology Light Source

Proc. of RuPAC 2006 , 144-146 (2007)

P. Budz, M. Abo-Bakr, K. Bürkmann, V. Dürr, J. Kolbe, D. Krämer, J. Rahn, G. Wüstefeld, R. Klein, G. Ulm, A. Batrakov, S. Belokrinitskiy, I. Churkin, N. Nefedov, A. Philipchenko, E. Rouvinski, E. Semenov, D. Shichov, S. Sinyatkin, P. Vagin

Multipole Magnets for the Metrology Light Source (PTB, Berlin)

Proc. of RuPAC 2006 , 295-297 (2007)

J.-Ph. Champeaux, Ph. Troussel, B. Villier, V. Vidal, T. Khachroum, B. Vidal and M. Krumrey

Development and realization of non-periodic W/Si multilayer mirrors for 5-14 keV X-ray plasma diagnostic

Nucl. Instr. and Meth. A 581 , 687-694 (2007)

M.J. Collon, M.W. Beijersbergen, K. Wallace, M. Bavdaz, R. Fairbend, J. Séguy, E. Schyns, M. Krumrey and M. Freyberg

X-ray imaging glass micro-pore optics

Proc. of SPIE 6688 , 668812 (2007)

M.J. Collon, R. Günther, S. Kraft, M.W. Beijersbergen, M. Bavdaz, K. Wallace, M. Krumrey and M. Freyberg

Silicon pore optics for astrophysical X-ray missions

Proc. of SPIE 6688 , 668813 (2007)

M. Gerlach, M. Krumrey, L. Cibik, P. Müller, G. Ulm

A cryogenic electrical substitution radiometer for hard X-rays

Nucl. Instr. and Meth. A 580 , 218-221 (2007)

A. Gottwald, F. Bridou, M. Cuniot-Ponsard, J.-M. Desvignes, S. Kroth, U. Kroth, W. Paustian, M. Richter, H. Schöppe, and R. Thornagel

Polarization-dependent vacuum-ultraviolet reflectometry using elliptically polarized synchrotron radiation

Appl. Opt. 46 , 7797-7804 (2007)

H. Gross, A. Rathsfeld, F. Scholze, M. BÃ¤r, U. Dersch

Optimal sets of measurement data for profile reconstruction in scatterometry

Proc. of SPIE 6617 , 66171B-1 (2007)

P. Hoffmann, O. Baake, B. Beckhoff, W. Ensinger, N. Fainer, A. Klein, M. Kosinova, B. Pollakowski, V. Trunova, G. Ulm, J. Weser

Chemical bonding in carbonitride nanolayers

Nucl. Instr. and Meth. A 575 , 78-84 (2007)

J. John, P. Malinowski, P. Aparicio, G. Hellings, A. Lorenz, M. Germain, F. Semond, J.-Y. Duboz, A. BenMoussa, J.-F. Hochedez, U. Kroth, M. Richter

AlxGa1-xN focal plane arrays for imaging applications in the extreme ultraviolet (EUV) wavelength range

Proc. of SPIE 6585 , 658505 (2007)

A. von Kienlin, E. Bissaldi, G.G. Lichti, H. Steinle, M. Krumrey, M. Gerlach, G.J. Fishman, Ch. Meegan, N. Bhat, M.S. Briggs, R. Diehl, V. Connaughton, J. Greiner, R.M. Kippen, Ch. Kouveliotou, W. Paciesas, R. Preece and C. Wilson-Hodge

Calibration of the GLAST Burst Monitor detectors

AIP Conf. Proc. 921 , 578-579 (2007)

R. Klein, G. Brandt, L. Cibik, M. Gerlach, M. Krumrey, P. Müller, G. Ulm, M. Scheer

A superconducting wavelength shifter as primary source standard in the X-ray range

Nucl. Instr. and Meth. 580 , 1536-1543 (2007)

M. Krumrey, M. Gerlach, M. Hoffmann and P. Müller

Thin transmission photodiodes as monitor detectors in the X-ray range

AIP Conf. Proc. 879 , 1145-1147 (2007)

M. Krumrey

X-ray radiometry

Opt. and Prec. Engineering 15 , 1829-1837 (2007)

D.H. Lumb, F.E. Christensen, C.P. Jensen, M. Krumrey

Influence of a carbon over-coat on the X-ray reflectance of XEUS mirrors

Opt. Commun. 279 , 101-105 (2007)

R. Müller, A. Hoehl, R. Klein, G. Ulm, J. Feikes, K. Bürkmann-Gehrlein, G. Wüstefeld

IR and THz radiation from the Metrology Light Source of the PTB

Proc. of IRMMW-THz2007 , 632-633 (2007)

J. Pomplun, S. Burger, F. Schmidt, F. Scholze, C. Laubis, U. Dersch

Finite element analysis of EUV lithography

Proc. of SPIE 6617 , 661718 (2007)

F. Scholze, T. Böttger, H. Enkisch, C. Laubis, L. van Loyen, F. Macco, S. Schädlich

Characterization of the measurement uncertainty of a laboratory EUV reflectometer for large optics

Meas. Sci. Technol. 18 , 126-130 (2007)

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, A. Kampe, S. PlÃ¶ger, F. Scholz, and G. Ulm

Polarization dependence of multilayer reflectance in the EUV spectral range

Proc. of SPIE 6517 , 65172 (2007)

F. Scholze, C. Laubis, U. Dersch, J. Pomplun, S. Burger, F. Schmidt

The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks

Proc. of SPIE 6617 , 66171 (2007)

A.A. Sorokin, M. Wellhöfer, S.V. Bobashev, K. Tiedtke, M. Richter

X-ray-laser interaction with matter and the role of multiphoton ionization: Free-electron-laser studies on neon and helium

Phys. Rev. A 75 , 051402 (R) (2007)

A.A. Sorokin, S.V. Bobashev, T. Feigl, K. Tiedtke, H. Wabnitz, M. Richter

Photoelectric effect at ultra-high intensities

Phys. Rev. Lett. 99 , 213002 (2007)

G. Ulm, G. Brandt, J. Eden, R. Fliegauf, A. Gottwald, A. Hoehl, R. Klein, R. Müller, M. Richter, F. Scholze, R. Thornagel, W. Anders, P. Budz, K. Bürkmann-Gehrlein, O. Dressler, V. Dürr, J. Feikes, H.-G. Hoberg, R. Lange, P. Kuske, D. Krämer, J. Rahn, T. Schneegans, E. Weihreter, G. Wüstefeld

The Metrology Light Source - the New Dedicated Electron Storage Ring of PTB

AIP Conf. Proc. 879 , 167-170 (2007)

G. Ulm, G. Brandt, R. Fliegauf, A. Hoehl, R. Klein, R. Müller, T. Birke, J. Borninkhof, P. Budz, K. Bürkmann-Gehrlein, R. Daum, O. Dressler, V. Dürr, J. Feikes, H. Glass, H.G. Hoberg, J. Kolbe, R. Lange, I. Müller, J. Rahn, G. Schindhelm, T. Schneegans, T. Schroeter, D. Schüler, G. Wüstefeld

Status of Metrology Light Source

Nucl. Instr. and Meth. A 582 , 26-30 (2007)

M. Wellhöfer, M. Martins, W. Wurth, A.A. Sorokin and M. Richter

Performance of the monochromator beamline at FLASH

J. Opt. A 9 , 749-759 (2007)

2006

M. Alvisi, M. Blome, M. Griepentrog, V.-D. Hodoroaba, P. Karduck, M. Mostert, M. Nacucchi, M. Procop, M. Rogde, F. Scholze, P. Statham, R. Terborg, J.-F. Thiot

The determination of the efficiency of energy-dispersive x-ray spectrometers by a new reference material

Microscopy and Microanalysis 12 , 406-415 (2006)

A. Antonov, V. Arkadiev, B. Beckhoff, A. Erko, I. Grigorieva, B. Kanngießer, B. Vidal

Optics for Monochromators

in: Handbook of Practical X-Ray Fluorescence Analysis , 115-167 (2006) , edited by B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, H. Wolff ; Springer, Heidelberg

B. Beckhoff, R. Fliegauf, M. Kolbe, M. MÃ¼ller, B. Pollakowski, J. Weser and G. Ulm

Reference-free X-ray Spectrometry Wafer Employed for Contamination Analysis and Nanolayer Characterization

KEK Proceedings 2006-3 , 126-129 (2006)

A. BenMoussa, A. Theissen, F. Scholze, J.F. Hochedez, U. Schühle, W. Schmutz, K. Haene, Y. Stockmann, A. Soltani, D. McMullin, R.E. Vest, U. Kroth, C. Laubis, M. Richter, V. Mortet, S. Gissot, V. Delouille, M. Dominique, S. Koller, J.P. Halain, Z. Remes, R. Petersen, M. D'Olieslaeger, J.-M. Defise

Performance of diamond detectors for VUV applications

Nucl. Instr. and Meth. A 568 , 398-405 (2006)

A. BenMoussa, J.F. Hochedez, U. Schühle, W. Schmutz, K. Haenen, Y. Stockman, A. Soltani, F. Scholze, U. Kroth, V. Mortet, A. Theissen, C. Laubis, M. Richter, S. Koller, J.-M. Defise and S. Koizumi

Diamond detectors for LYRA, the solar VUV radiometer on board PROBA2

Diamond and Related Materials 15 , 802-806 (2006)

A. BenMoussa, U. Schühle, F. Scholze, U. Kroth, K. Haenen, T. Saito, J. Campos, S. Koizumi, C. Laubis, M. Richter, V. Mortet, A. Theissen and J.F. Hochedez

Radiometric characteristics of new diamond PIN photodiodes

Meas. Sci. and Technol. 17 , 913-917 (2006)

P. Budz, M. Abo-Bakr, K. Bürkmann, V. Dürr, J. Kolbe, D. Krämer, J. Rahn, G. Wüstefeld, I. Churkin, E. Semenov, S. Syniatkin, A. Steshov, E. Rouvinskiy, R. Klein, G. Ulm

The Magnets of the Metrology Light Source in Berlin-Adlershof

Proc. EPAC 2006 , 3296-3298 (2006)

L. Büermann, B. Grosswendt, H.-M. Kramer, H.-J. Selbach, M. Gerlach, M. Hoffmann and M. Krumrey

Measurement of the x-ray mass energy-absorption coefficient of air using 3 keV to 10 keV synchrotron radiation

Phys. Med. Biol. 51 , 5125-5150 (2006)

K. Bürkmann, M. Abo-Bakr, W. Anders, P. Budz, O. Dressler, V. Dürr, J. Feikes, HG. Hoberg, P. Kuske, R. Lange, J. Rahn, T. Schneegans, D. Schüler, E. Weihreter, G. Wüstefeld, D. Krämer, R. Klein, G. Ulm

Status of the Metrology Light Source

Proc. EPAC 2006 , 3299-3301 (2006)

I. Busch, J. Stümpel and M. Krumrey

Influence of growth interruption on the formation of solid-state interfaces

Powder Diffr. 21 , 122-124 (2006)

M.J. Collon, S. Kraft, R. Günther, E. Maddox, M. Beijersbergen, M. Bavdaz, D. Lumb, K. Wallace, M. Krumrey, L. Cibik, M. Freyberg

Performance characterization of silicon pore optics

Proc. SPIE 6266 , 62661T (2006)

M.J. Collon, S. Kraft, R. Günther, R. Partapsing, M. Beijersbergen, C. v. Baren, M. Bavdaz, K. Wallace, D. Kampf, M. Krumrey, P. Müller

Metrology, integration and performance verification of silicon pore optics in Wolter-I configuration

Proc. of SPIE 6266 , 626618 (2006)

A. Gottwald, U. Kroth, M. Krumrey, M. Richter, F. Scholze, G. Ulm

The PTB High-Accuracy Spectral Responsivity Scale in the VUV and X-Ray Range

Metrologia 43 , S125-S129 (2006)

R. Klein, G. Ulm, P. Budz, K. Bürkmann-Gehrlein, J. Rahn, G. Wüstefeld

The Metrology Light Source - An Electron Storage Ring Dedicated to Metrology

Proc. EPAC 2006 , 3314-3316 (2006)

R. Klein, C. Laubis, R. Müller, F. Scholze, G. Ulm

The EUV metrology program of PTB

Microelectronic Engineering 83 , 707-709 (2006)

S. Kraft, M. Collon, M.W. Beijersbergen, M. Bavdaz, D.H. Lumb, K. Wallace, A. Peacock, M. Krumrey, V. Lehmann

Programmatics of Large Scale Production of Silicon Pore Optics for Future X-Ray Telescopes

Proc.SPIE 6266 , 626617 (2006)

M. Krumrey, M. Gerlach, F. Scholze, G. Ulm

Calibration and characterization of semiconductor X-ray detectors with synchrotron radiation

Nucl. Instr. and Meth. A 568 , 364-368 (2006)

S. Kück, F. Brandt, H.-A. Kremling, A. Gottwald, A. Hoehl, M. Richter

Absolute measurement of F₂-laser power at 157 nm

Appl. Opt. 45 , 3325-3330 (2006)

J. Lang, B. J. Kent, W. Paustian, C. Brown, C. Keyser, M.R. Anderson, G.C.R. Case, R. A. Chaudry, A.M. James, C.M. Korendyke, C.D. Pike, B.J. Probyn, D.J. Rippington, J.F. Seely, J.A. Tandy, and M.C.R Whillock

Laboratory calibration of the Extreme-Ultraviolet Imaging Spectrometer for the Solar-B satellite

Appl. Opt. 45 , 8689-8705 (2006)

C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, F. Scholze, G. Ulm, H. Enkisch, S. Müllender, M. Wedowski, E. Louis, E. Zoethout

Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB

Proc. of SPIE 6151 , 61510I (2006)

E. Louis, R.W.E. van de Kruijs, A.E. Yakshin, S. Alonso van der Westen, F. Bijkerk, M.M.J.W. van Herpen, D.J.W. Klunder, L. Bakker, H. Emkisch, S. Müllender, M. Richter, V. Banine

Multilayer optics with spectral purity layers for the EUV wavelength range

Proc. SPIE 6151 , 615139-1-615139 (2006)

D.H. Lumb, M. Bavdaz, F.E. Christensen, A. Dariel, P. Hoghoj, C.P. Jensen, M. Krumrey, K.K. Madsen, E. Ziegler, B. Albertin, S. Hedacq, M. Collon, E.-J. Buis

Multi-layer Coating Development for XEUS

Proc. SPIE 6266 , 626614 (2006)

R. Müller, A. Hoehl, R. Klein, G. Ulm, U. Schade, K, Holldack, G. Wüstefeld

Planned infrared beamlines at the Metrology Light Source of PTB

Infrared Physics & Technology 49 , 161-166 (2006)

R. Müller, A. Hoehl, R. Klein, G. Ulm

Infrared radiation from the new electron storage ring

Proc. of the 9th International Conference on Infrared Sensors & Systems IRS² 2006 , 223-228 (2006)

M. Müller, B. Beckhoff, G. Ulm, B. Kanngießer

Absolute determination of cross sections for resonant Raman scattering on silicon

Phys. Rev. A 74 , 012702-1-012702 (2006)

J. Osán, S. Török, B. Beckhoff, G. Ulm, H. Hwang, C.-U. Ro, C. Abete, R. Fuoco

Nitrogen and sulfur compounds in coastal Antarctic fine aerosol particles - an insight using non-destructive X-ray microanalytical methods

Atmosph. Env. 40 , 4691-4702 (2006)

J. Pomplun, S. Burger, F. Schmidt, L. Zschiedrich, F. Scholze, C. Laubis, U. Dersch

Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters

Proc. SPIE 6349 , 63493D (2006)

M. Richter, A. Gottwald, F. Scholze, R. Thornagel, G. Ulm

Calibration of space instrumentation with synchrotron radiation

Advances in Space Research 37 , 265-272 (2006)

F. Scholze, B. Beckhoff, M. Kolbe, M. Krumrey, M. Müller, G. Ulm

Detector Calibration and Measurement of Fundamental Parameters for X-Ray Spectrometry

Microchim. Acta 155 , 275-278 (2006)

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, G. Ulm

Polarization dependence of multilayer reflectance in the EUV spectral range

Proc. SPIE 6151 , 615137 (2006)

F. Scholze and G. Ulm

Calibration of Detectors and Tools for EUV- Source Metrology

in: EUV Sources for Lithography , 785-815 (2006) , edited by V. Bakshi ; SPIE, Bellingham

F. Scholze, R. Klein, R. Müller

Characterization of detectors for extreme UV radiation

Metrologia 43 , S6-S10 (2006)

F. Scholze

X-Ray Detectors and XRF Detection Channels

in: Handbook of Practical X-Ray Fluorescence Analysis , 199-203 (2006) , edited by B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, H. Wolff ; Springer, Heidelberg

A.A. Sorokin, A. Gottwald, A. Hoehl, U. Kroth, H. Schöppe, G. Ulm, M. Richter, S.V. Bobashev, I.V. Domracheva, D. N. Smimov, K. Tiedtke, S. Düsterer, J. Feldhaus, U. Hahn, U. Jastrow, M. Kuhlmann, T. Nunez, E. Plönjes and R. Treusch

Method based on atomic photoionization for spot-size measurement on focused soft x-ray free-electron laser beams

Appl. Phys. Lett. 89 , 221114 (2006)

A.A. Sorokin, S.V. Bobashev, K. Tiedtke and M. Richter

Multi-photon ionization of molecular nitrogen by femtosecond soft x-ray FEL pulses

J. Phys. B 39 , L299-L304 (2006)

C. Streli, P. Wobrauschek, L. Fabry, S. Pahlke, F. Comin, R. Barrett, P. Pianetta, K. Lüning, B. Beckhoff

Total-Reflection X-Ray Fluorescence TXRF Wafer Analysis

in: Handbook of Practical X-Ray Fluorescence Analysis , 199-203 (2006) , edited by B. Beckhoff, B. Kanngießer, N. Langhoff, R. Wedell, H. Wolff ; Springer, Heidelberg

K. Wallace, M. Collon, M. Bavdaz, R. Fairbend, J. Serguy, M. Krumrey

Development in glass micro por optics for x-ray applications

Proc. SPIE 6266 , 62661A (2006)

M. Wurm, B. Bodermann, F. Scholze, C. Laubis, H. Groß, A. Rathsfeld

Untersuchungen zur Eignung der EUV-Scatterometrie zur quantitativen Charakterisierung periodischer Strukturen auf Photolithographiemasken

DGaO-Proc. 2006 (2006)
http://www.dgao-proceedings.de

Ch. Zarkadas, A.G. Karydas, M. Müller, B. Beckhoff

X-Ray resonant Raman scattering on Ni employing polarized and unpolarized exciting radiation

Spectrochim. Acta B 61 , 189-195 (2006)

2005

C. Wies, R. Lebert, B. Jaegle, L. Juschkin, F. Sobel, H. Seitz, R. Walter, C. Laubis, F. Scholze, W. Biel, O. Steffens

High speed reflectometer for EUV mask-blanks

Proc. SPIE 5752 , 1069-1079 (2005)

K. Wallace, M. Collon, M. Bavdaz, M. Beijersbergen, R. Fairbend, J. Seguy, M. Hoffmann, M. Krumrey

Development of micro-pore optics for x-ray applications

Proc. SPIE 5900 , 163-172 (2005)

G. Ulm

Metrologie mit Synchrotronstrahlung

PTB-Mitt. 115 , 167-171 (2005)

F. Scholze and M. Procop

Detection efficiency of energy-dispersive detectors with low-energy windows

X-Ray Spectrom. 34 , 473-476 (2005)

F. Scholze, C. Buchholz, A. Fischer, R. Klein, C. Laubis, S. Plöger, F. Scholz, G. Ulm, H. Wagner

Radiometrie für die EUV-Lithographie

PTB-Mitt. 115 , 214-217 (2005)

F. Scholze, M. Krumrey, M. Richter

Reflektometrie mit Synchrotronstrahlung

PTB-Mitt. 115 , 196-201 (2005)

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, G. Ulm

Status of EUV Reflectometry at PTB

Proc. SPIE 5751 , 749-758 (2005)

H. Riesemeier, K. Ecker, W. Görner, B.R. Müller, M. Radtke, M. Krumrey

Layout and first XRF Applications of the BAMline at BESSY II

X-Ray Spectrom. 34 , 160-163 (2005)

M. Richter, A. Gottwald, M. Krumrey, W. Paustian, F. Scholze, R. Thornagel, G. Ulm

Radiometrie für die Astrophysik

PTB-Mitt. 115 , 218-221 (2005)

M. Richter, A. Gottwald, U. Kroth, A. Sorokin

Messung gepulster VUV-Strahlung

PTB-Mitt. 115 , 193-195 (2005)

W. Paustian, M. Richter, F. Scholze, R. Thornagel, G. Ulm

Quellengestützte Radiometrie mit Synchrotronstrahlung

PTB-Mitt. 115 , 180-185 (2005)

R. Müller, F. Scholze, R. Klein, S. Plöger, G. Ulm

Linearity tests of silicon photodiodes for EUV radiation

Journal of Alloys and Compounds 401 , 104-107 (2005)

L. van Loyen, S. Böttger, S. Schädlich, S. Braun, Th. Folty, A. Leson, F. Scholze, S. Müllender

Laboratory LPP EUV Reflectometer working with Non-polarized Radiation

Applied Surface Science 252 , 57-60 (2005)

R. Lawaczeck, V. Arkadiev, F. Diekmann, M. Krumrey

Monochromatic X-rays in Digital Mammography

Investigative Radiology 40 , 33-39 (2005)

M. Krumrey

Bestimmung der relativen biologischen Wirksamkeit von Röntgenstrahlung

PTB-Mitt. 115 , 212-213 (2005)

M. Krumrey, M. Hoffmann, M. Kolbe

Schichtdickenbestimmung mit Röntgenreflektometrie

PTB-Mitt. 115 , 202-204 (2005)

S. Kraft, M. Collon, R. Guenther, M.W. Beijersbergen, M. Bavdaz, D.H. Lumb, K. Wallace, A. Peacock, M. Krumrey, M. Hoffmann, P. Müller, V. Lehmann

Development of modular high-performance pore optics for the XEUS x-ray telescope

Proc. SPIE 5900 , 151-162 (2005)

M. Kolbe, B. Beckhoff, M. Krumrey and G. Ulm

Comparison of reference-free X-ray fluorescence analysis and X-ray reflectometry for thickness determination in the nanometer range

Applied Surface Science 252 , 49-52 (2005)
http://dx.doi.org/10.1016/j.apsusc.2005.01.112

M. Kolbe, B. Beckhoff, M. Krumrey, G. Ulm

Thickness determination for Cu and Ni nanolayers: Comparison of reference-free fundamental-parameter based X-ray fluorescence analysis and X-ray reflectometry

Spectrochimica Acta B 60 , 505-510 (2005)
http://dx.doi.org/10.1016/j.sab.2005.03.018

R. Klein, G. Ulm, BESSY-MLS-Team

Die Metrology Light Source

PTB-Mitt. 115 , 222-227 (2005)

R. Klein, R. Thornagel, G. Ulm

Der Speicherring BESSY II als primäres Strahlernormal

PTB-Mitt. 115 , 172-179 (2005)

J. Hollandt, J. Seidel, R. Klein, G. Ulm, A. Migdall, M. Ware

Primary Sources for Use in Radiometry

in: Optical Radiometry , 213-290 (2005) , edited by A.C. Parr, R.U. Datla, J.L. Gardner ; Elsevier, Amsterdam

A. Gottwald, U. Kroth, M. Krumrey, P. Müller, M. Richter, F. Scholze, G. Ulm

Empfängergestützte Radiometrie mit Kryoradiometern und monochromatisierter Synchrotronstrahlung

PTB-Mitt. 115 , 186-192 (2005)

A. Gottwald, M. Richter, G. Ulm, U. Schühle

Stability of vacuum-ultraviolet radiometric transfer standards: Electron cyclotron resonance versus hollow cathode source

Rev. Sci. Instrum. 76 , 023101 (2005)

S. Friedrich, R. Fliegauf, M. Frank, M. Veldkamp, S. Labov, B. Beckhoff, G. Ulm

The spectral response of superconducting tunnel junction X-ray detectors

Nucl. Instr. Meth. A 551 , 35-45 (2005)

L. Büermann, M. Krumrey

Röntgendosimetrie bei BESSY II

PTB-Mitt. 115 , 209-211 (2005)

B. Beckhoff, R. Fliegauf, M. Kolbe, M. Müller, J. Weser, G. Ulm

Röntgenspektrometrie mit Synchrotronstrahlung

PTB-Mitt. 115 , 205-208 (2005)

L. Büermann, M. Krumrey, M. Haney, E. Schmid

Is there reliable experimental evidence for different dicentric yields in human lymphocytes produced by mammography X-rays free-in-air and within a phantom?

Radiation and Environmental Biophysics 44 , 17 - 22 (2005)

J. Wunderlich, B. Kaestner, J. Sinova, T. Jungwirth

Experimental Observation of the Spin-Hall Effect in a Two-Dimensional Spin-Orbit Coupled Semiconductor System

Phys. Rev. Lett. 94 , 47204 (2005)
https://journals.aps.org/prl/abstract/10.1103/PhysRevLett.94.047204

2004

S. Török, J. Osán, B. Beckhoff, G. Ulm

Ultra-trace Speciation of Nitrogen Compounds in Aerosols Collected on Silicon Wafer Surfaces by means of TXRF-NEXAFS

Powder Diffraction 19 , 81-86 (2004)
http://dx.doi.org/10.1154/1.1649327

P. Thomsen-Schmidt, F. Pohlenz, G. Ulm, M. Krumrey, K. Hasche

Consistent standards for nanometrology or step height versus film thickness measurement

XI. International Colloquium on Surfaces, Chemnitz 2004, Proc. II , 108-116 (2004) , edited by M. Dietzsch

P. Thomsen-Schmidt, K. Hasche, G. Ulm, K. Herrmann, M. Krumrey, G. Ade, J. Stümpel, I. Busch, S. Schädlich, A. Schindler, W. Frank, D. Hirsch, M. Procop, U. Beck

Realisation and metrological characterisation of thickness standards below 100 nm

Appl. Phys. A 78 , 645-649 (2004)

A.A. Sorokin, I.L. Beigman, S.V. Bobashev, M. Richter and L.A. Vainshtein

Total electron-impact ionization cross sections of helium

J. Phys. B 37 , 3215-3226 (2004)

A.A. Sorokin, S. V. Bobashev, J. Feldhaus, Ch. Gerth, A. Gottwald, U. Hahn, U. Kroth, M. Richter, L. A. Shmaenok, B. Steeg, K. Tiedtke, R. Treusch

Gas-monitor detector for intense and pulsed VUV/EUV free-electron laser radiation

AIP Conf. Proc. 705 , 557-560 (2004)

M. P. Seah, S. J. Spencer, F. Bensebaa, I. Vickridge, H. Danzebrink, M. Krumrey, T. Gross, W. Oesterle, E. Wendler, B. Rheinländer, Y. Azuma,1 I. Kojima,1 N. Suzuki, M. Suzuki, S. Tanuma, D. W. Moon, H. J. Lee, Hyun Mo Cho, H. Y. Chen, A. T. S. Wee, T. Osipowicz, J. S. Pan, W. A. Jordaan, R. Hauert, U. Klotz, C. van der Marel, M. Verheijen, Y. Tamminga, C. Jeynes, P. Bailey, S. Biswas, U. Falke, N. V. Nguyen, D. Chandler-Horowitz, J. R. Ehrstein, D. Muller and J. A. Dura

Critical review of the current status of thickness measurements for ultrathin SiO₂on Si Part V: Results of a CCQM pilot study

Surf. Interface Anal. 36 , 1269 1303 (2004)

U. Schühle, J.F. Hochedez, J.L. Pau, C. Rivera, E. Munoz, J. Alvarez, J.-P. Kleider, Ph. Lemaire, Th. Appourcheax, B. Fleck, A. Peacock, M. Richter, U. Kroth, A. Gottwald, M.-C. Castex, A. Deneuville, P. Muret, M. Nesladek, F. Omnes, J. John, C. Van Hoof

Development of imaging arrays for solar UV observations based on wide band gap materials

Proc. SPIE 5171 , 231-238 (2004)

F. Scholze, R. Klein, R. Müller

Linearity of silicon photodiodes for EUV radiation

Proc. SPIE 5374 , 926-934 (2004)

M. Procop, F. Scholze

Synchrotron Radiation for the Characterization of Energy Dispersive X-ray Spectrometers

Microsc. Microanal. (Suppl. 2) 10 , 98-99 (2004)

J. Perlich, F.-M. Kamm, J. Rau, F. Scholze, G. Ulm

Characterization of extreme ultraviolet masks by extreme ultraviolet scatterometry

J. Vac. Sci. Technol. B 22 , 3059-3062 (2004)

T. Missalla, M.C. Schürmann, R. Lebert, C. Wies, L. Juschkin, R.M. Klein, F. Scholze, G. Ulm, A. Egbert, B. Tkachenko, B.N. Chichkov

Metrology tools for EUV-source characterization and optimization

Proc. SPIE 5374 , 979-990 (2004)

B. Mertens, M. Weiss, H. Meiling, R. Klein, E. Louis, R. Kurt, M. Wedowski, H. Trenkler, B. Wolschrijn, R. Jansen, A. van de Runstraat, R. Moores, K. Spee, S. Plöger, R. van de Kruijs

Progress in EUV optics lifetime expectations

Microelectron. Eng. 73-74 , 16-22 (2004)

H. Legall, H. Stiel, U. Vogt, H. Schönnagel, P.-V. Nickles, J. Tümmler, F. Scholz, F. Scholze

Spatial and spectral characterization of a laser produced plasma source for EUV metrology

Rev. Sci. Instrum. 75 , 4981-4988 (2004)

R. Lebert, Ch. Wies, L. Juschkin, B. Jägle, M. Meisen, L. Aschke, F. Sobel, H. Seitz, F. Scholze, G. Ulm, K. Walter, W. Neff, K. Bergmann, W. Biel

High throughput EUV-reflectometer for EUV mask-blanks

Proc. SPIE 5374 , 808-817 (2004)

M. Krumrey, F. Scholze, G. Ulm

High-accuracy X-ray detector calibration at PTB

Proc. SPIE 5501 , 277-285 (2004)

M. Krumrey, M. Hoffmann, G. Ulm, K. Hasche, P. Thomsen-Schmidt

Thickness determination of SiO₂films on Si by X-ray reflectometry at the Si K edge

Thin Solid Films 459 , 241-244 (2004)

M. Krumrey, L. Büermann, M. Hoffmann, P. Müller, F. Scholze, G. Ulm

Absolute responsivity of silicon photodiodes in the X-ray range

AIP Conf. Proc. 705 , 861-864 (2004)

M. Krumrey, G. Ulm, E. Schmid

Dicentric chromosomes in monolayers ofhuman lymphocytes produced by monochromatized synchrotron radiation with photon energies from 1.83 keV to 17.4 keV

Radiat. Environ. Biophys. 43 , 1-6 (2004)

R. Klein, G.Ulm, M. Abo-Bakr, P. Budz, K. Bürkmann-Gehrlein, D. Krämer, J. Rahn, G. Wüstefeld

The Metrology Light Source of the Physikalisch-Technische Bundesanstalt in Berlin-Adlershof

Proceedings of EPAC 2004, Lucerne, Switzerland , 2290 - 2292 (2004)

R. Klein, R. Thornagel, G.Ulm

BESSY II operated as a primary source standard

Proceedings of EPAC 2004, Lucerne, Switzerland , 273-275 (2004)

M. Huber, S. Bechstein, B. Beckhoff, F.v. Feilitzsch, J. Jochum, M. Krumrey, A. Rüdig, G. Ulm

Characterization of an Al-STJ-based X-ray detector with monochromatized synchrotron radiation

Nucl. Instr. and Meth. A 520 , 234-236 (2004)

O. Hahn, W. Malzer, B. Kanngießer, B. Beckhoff

Characterization of iron-gall inks in historical manuscripts and music compositions using x-ray fluorescence spectrometry

X-Ray Spectrometry 33 , 234-239 (2004)

A. Gottwald, U. Kroth, M. Letz, H. Schöppe, M. Richter

High-accuracy VUV reflectometry at selectable sample temperatures

Proc. SPIE 5538 , 13-21 (2004)

A. Gottwald, S.V. Bobashev, U. Hahn, A. Hoehl, U. Jastrow, M. Richter, A.A. Sorokin, K.I. Tiedke

FEL beam metrology with a gas-monitor detector

Proc. SPIE 5534 , 154-164 (2004)

A. Gottwald, R. Klein, R. Müller, M. Richter, A.A. Sorokin, G. Ulm

Absolute measurement of EUV radiation from an undulator

AIP Conf. Proc. 705 , 553-556 (2004)

A. Gottwald, R. Müller, M. Richter, A. Sorokin and G. Ulm

Pulse energy measurements of extreme ultraviolet undulator radiation

Meas. Sci. Technol. 15 , 437-443 (2004)

F. Diekmann, S. Diekmann, K. Richter, U. Bick, T. Fischer, R. Lawaczeck, W.-R. Press, K. Schön, H.-J. Weinmann, V. Arkadiev, A. Bjeoumikhov, N. Langhoff, J. Rabe, P. Roth, J. Tilgner, R. Wedell, M. Krumrey, U. Linke, G. Ulm, B. Hamm

Near monochromatic X-rays for digital slot-scan mammography: initial findings

Eur. Radiol. 14 , 1641-1646 (2004)

S. Bechstein, B. Beckhoff, R. Fliegauf, J. Weser, G. Ulm

Characterization of an Nb/Al/AlO_x/Al/Nb superconducting tunnel junction detector with a very high spatial resolution in the soft X-ray range

Spectrochim. Acta B 59 , 215-221 (2004)

2003

G. Ulm

Radiometry with synchrotron radiation

Metrologia 40 , S101-S106 (2003)

J. Tümmler, H. Blume, G. Brandt, J. Eden, B. Meyer, H. Scherr, F. Scholz, F. Scholze, G. Ulm

Characterization of the PTB EUV reflectometry facility for large EUVL optical components

Proc. SPIE 5037 , 265-273 (2003)

C. Streli, G. Pepponi, P. Wobrauschek, B. Beckhoff, G. Ulm, S. Pahlke, L. Fabry, Th. Ehmann, B. Kanngießer, W. Malzer and W. Jark

Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II

Spectrochimica Acta B 58 , 2113-2121 (2003)
http://dx.doi.org/10.1016/j.sab.2003.05.008

M. C. Schürmann, T. Missalla, K.R. Mann, S. Kranzusch, R.M. Klein, F. Scholze, G. Ulm, R. Lebert, L. Juschkin

Metrology tools for EUVL-source characterization and optimization

Proc. SPIE 5037 , 378-388 (2003)

F. Scholze, R. Klein, T. Bock

Irradiation stability of silicon photodiodes for exreme-ultraviolet radiation

Appl. Opt. 42 , 5621-5626 (2003)

F. Scholze, J. Tümmler, E. Gullikson, A. Aquila

Comparison of extreme ultraviolet reflectance measurements

J. Microlith., Microfab., Microsyst. 2 , 233-235 (2003)

F. Scholze, F. Scholz, J. Tümmler, G. Ulm, H. Legall, P.V. Nickles, W. Sandner, H. Stiel, L. van Loyen

Characterization of a laser produced plasma source for a laboratory EUV reflectometer

Proc. SPIE 5037 , 670-681 (2003)

F. Scholze, J. Tümmler and G. Ulm

High-accuracy radiometry in the EUV range at the PTB soft x-ray beamline

Metrologia 40 , S224-S228 (2003)
https://iopscience.iop.org/article/10.1088/0026-1394/40/1/352

H. Schoeppe

Untersuchung der Temperaturabhängigkeit optischer Eigenschaften von CaF2 im Spektralbereich von Vakuum - UV - Strahlung

Diplomarbeit, TFH Wildau (2003)

E. Schmid, M. Krumrey, G. Ulm, H. Roos, D. Regulla

The maximum low-dose RBE of 17.4 and 40 keV monochromatic x rays for the induction of dicentric chromosomes in human peripheral lymphocytes

Radiat. Res. 160 , 499-504 (2003)

M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S.V. Bobashev, L.A. Shmaenok, J. Feldhaus, Ch. Gerth, B. Steeg, K. Tiedtke, R. Treusch

Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser

Appl. Phys. Lett. 83 , 2970-2972 (2003)

M. Richter, G. Ulm, C. Gerth, K. Tiedtke, J. Feldhaus, A.A. Sorokin, L.A. Shmaenok, S.V. Bobashev

Photoionization cross sections of Kr and Xe from threshold up to 1000 eV X-ray and inner-shell processes: 19^thinternational conference on X-ray and inner-shell processes

AIP Conf. Proc. 652 , 165-171 (2003)

M. Richter, J. Hollandt, U. Kroth, W. Paustian, H. Rabus, R. Thornagel and G. Ulm

Source and detector calibration in the UV and VUV at BESSY II

Metrologia 40 , S107-S110 (2003)

G. Pepponi, B. Beckhoff, T. Ehmann, G. Ulm, C. Streli, L. Fabry, S. Pahlke and P. Wobrauschek

Analysis of organic contaminants on Si wafers with TXRF-NEXAFS

Spectrochim. Acta B 58 , 2245-2253 (2003)
http://dx.doi.org/10.1016/S0584-8547(03)00217-9

A. Owens, M. Bavdaz, G. Brammertz, V. Gostilo, H. Graafsma, A. Kozorezov, M. Krumrey, I. Lisjutin, A. Peacock, A. Puig, H. Sipila, S. Zatoloka

The X-ray response of TIBr

Nucl. Instr. and Meth. A 497 , 370-380 (2003)

B. Mertens, B. Wolschrijn, R. Jansen, N. Koster, M. Weiss, M. Wedowski, R. Klein, T. Bock, R. Thornagel

EUV time resolved studies on carbon growth and cleaning

Proc. SPIE 5037 , 95-102 (2003)

M. Letz, A. Gottwald, M. Richter, M. Brinkmann, G. Wehrhan, L. Parthier

On the optical anisotropy in the cubic crystal of CaF₂: Scaling arguments and their relation to dispersing absorption

Proc. SPIE 5040 , 662-666 (2003)

M. Letz, L. Parthier, A. Gottwald, M. Richter

Spatial anisotropy of the exciton level in CaF₂ at 11.1 eV and its relation to the weak optical anisotropy at 157 nm

Phys. Rev. B 67 , 233101 (2003)

U. Kleineberg, Th. Westerwalbesloh, W. Hachmann, U. Heinzmann, J. Tümmler, F. Scholze, G. Ulm, S. Müllender

Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing

Thin Solid Films 433 , 230-236 (2003)

K. Hasche, P. Thomsen-Schmidt, M. Krumrey, G. Ade, G. Ulm, J. Stuempel, S. Schaedlich, W. Frank, M. Procop, U. Beck

Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications

Proc. SPIE 5190 , 165-172 (2003)

A. Ehrmann, J. Rau, A. Wolter, F.M. Kamm, J. Mathuni, F. Scholze, J. Tümmler, G. Ulm

Mask CD characterization with EUV reflectometry at the electron storage ring BESSY II GMM-Fachbericht Band39, 19^thEuropean Mask Conference on Mask

Technology for Integrated Circuits and Mirco-Components, January 13-15, 2003, Sonthofen, Germany, p. 59-64 (2003) und Proc. SPIE 5148 , 71-78 (2003)

C. Buchholz

Präzisionsmessung des Probenwinkels im EUV-Reflektometer zur optischen Bestimmung von Schichtdicken

Diplomarbeit, TFH Wildau (2003)

A. Benmoussa, J.-F. Hochedez, W.K. Schmutz, U. Schühle, M. Nesladek, Y. Stockmann, U. Kroth, M. Richter, A. Theissen, Z. Remes, K. Haenen, V. Mortert, S. Koller, J.P. Halain, R. Petersen, M. Dominique and M. D'Olieslaeger

Solar-Blind Diamond Detectors for Lyra, the Solar VUV Radiometer on Board Proba II

Experimental Astronomy 16 , 141-148 (2003)

B. Beckhoff, R. Fliegauf, G. Ulm

Investigation of high-resolution superconducting tunnel junction detectors for low-energy X-ray fluorescence analysis

Spectrochim. Acta B 58 , 615-626 (2003)

B. Beckhoff, R. Fliegauf, G. Ulm, J. Weser, G. Pepponi, C. Streli, P. Wobrauschek, T. Ehmann, L. Fabry, C. Mantler, S. Pahlke, B. Kanngießer, W. Malzer

Ultra-trace analysis of light elements and speciation of minute organic contaminants on silicon wafer surfaces by means of TXRF in combination with NEXAFS

Electrochem. Soc. Proc. 2003-03 , 120-128 (2003)

B. Beckhoff, R. Fliegauf, G. Ulm, J. Weser, G. Pepponi, C. Streli, P. Wobrauschek, T. Ehmann, L. Fabry, S. Pahlke, B. Kanngießer, W. Malzer

TXRF Analysis of Low Z Elements and TXRF-NEXAFS Speciation of Organic Contaminants on Silicon Wafer Surfaces Excited by Monochromatized Undulator Radiation

Solid State Phenomena 92 , 165-170 (2003)

B. Beckhoff, R. Fliegauf, J. Weser and G. Ulm

A Novel Instrumentation for Contamination and Deposited Control on 300 mm Silicon Wafers Employing Synchrotron Radiation Based TXRF and EDXRF Analysis

Solid State Phenomena 92 , 89-92 (2003)

L. van Loyen, T. Böttger, S. Braun, H. Mai, A. Leson, F. Scholze, J. Tümmler, G. Ulm, H. Legall, P. V. Nickles, W. Sandner, H. Stiel, C. Rempel, M. Schulze, J. Brutscher, F. Macco, S. Müllender

A new laboratory EUV reflectometer for large optics using a laser plasma source

Proc. SPIE 5038 , 12-21 (2003)

2002

K. Wilhelm, U. Schühle, W. Curdt, I.E. Dammasch, J. Hollandt, P. Lemaire, M.C.E. Huber

Solar Vacuum-ultraviolet radiometry with SUMER

in: The radiometric calibration of SOHO , 145-160 (2002) , edited by A. Pauluhn, M.C.E. Huber, R. von Steiger ; International Space Science Institute

M. Veldkamp, B. Beckhoff, R. Fliegauf, G. Ulm, M. Frank, S. Friedrich, S.E. Labov

Characterization of superconducting tunnel junction X-ray detectors by means of monochromatized undulator radiation

Nucl. Instr. and Meth. A 487 , 450-456 (2002)

J. Tümmler, F. Scholze, G. Brandt, B. Meyer, F. Scholz, K. Vogel, G. Ulm, M. Poier, U. Klein, W. Diete

New PTB reflectometer for the characterization of large optics for the extreme ultraviolet spectral region

Proc. SPIE 4688 , 338-347 (2002)

R. Stuik, F. Scholze, J. Tümmler, F. Bijkerk

Absolute calibration of a multilayer-based XUV diagnostik

Nucl. Instr. and Meth. A 492 , 305-316 (2002)

M. Schürmann, T. Mißalla, R. Klein, F. Scholze, G. Ulm, R. Lebert, L. Juschkin

Development of EUV Metrology: Spatial Resolved Absolute EUV Spectroscopy

Lambda Highlights No 61 , 1-3 (2002)

F. Scholze, G. Brandt, P. Müller, B. Meyer, F. Scholz, J. Tümmler, K. Vogel, G. Ulm

High-accuracy detector calibration for EUV metrology at PTB

Proc. SPIE 4688 , 680-689 (2002)

M. Richter, U. Kroth, A. Gottwald, Ch. Gerth, K. Tiedtke, T. Saito, I. Tassy, K. Vogler

Metrology of pulsed radiation for 157-nm lithography

Appl. Opt. 41 , 7167-7172 (2002)

H. Rabus, R. Klein, F. Scholze, R. Thornagel, G. Ulm

Validation of the uncertainty budget for soft X-ray radiant power measurement using a cryogenic radiometer

Metrologia 39 , 381-389 (2002)

M. Procop, M. Radtke, M. Krumrey, K. Hasche, S. Schädlich, W. Frank

Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range

Anal Bioanal Chem 374 , 631-634 (2002)

A. Paulhuhn, J. Lang, U. Schühle, S.K. Solanki, K. Wilhelm, W.T. Thompson, C.D. Pike, I. Rüedi, J. Hollandt, M.C.E. Huber

Intercalibration of CDS and SUMER

in: The radiometric calibration of SOHO , 235-247 (2002) , edited by A. Pauluhn, M.C.E. Huber, R. von Steiger ; International space science institute

A. Owens, H. Andersson, M. Bavdaz, C. Erd, T. Gagliardi, V. Gostilo, N. Haack, M. Krumrey, V. Nämsä, D. Lumb, I. Lisjutin, I. Major, S. Nenonen, A. Peacock, H. Sipila, S. Zatoloka

Development of compound semiconductor detectors for X- and gamma-ray spectroscopy

Proc. SPIE 4784 , 244-258 (2002)

A. Owens, A. Peacock, M. Bavdaz, G. Brammertz, F. Dubecky, V. Gostilo, D. Gryaznov, N. Haack, M. Krumerey, A. Loupilov

The X-ray response of InP: Part B, synchrotron radiation measurements

Nucl. Instr. and Meth. A 491 , 444-451 (2002)

A. Owens, M. Bavdaz, H. Andersson, T. Gagliardi, M. Krumrey, S. Nenonen, A. Peacock, I. Taylor, L. Tröger

The X-ray response of CdZnTe

Nucl. Instr. and Meth. A 484 , 242-250 (2002)

A. Owens, M. Bavdaz, G. Brammertz, M. Krumrey, D. Martin, A. Peacock, L. Tröger

The hard X-ray response of HgI₂

Nucl. Instr. and Meth. A 479 , 535-547 (2002)

A. Owens, M. Bavdaz, A. Peacock, H. Andersson, S. Nenonen, M. Krumrey, A. Puig

High-resolution X-ray spectroscopy using a GaAs pixel detector

Nucl. Instr. and Meth. A 479 , 531-534 (2002)

N. Koster, B. Mertens, R. Jansen, A. van de Runstraat, F. Stietz, M. Wedowski, H. Meiling, R. Klein, A. Gottwald, F. Scholze, M. Visser, R. Kurt, P. Zalm, E. Louis, A. Yakshin

Molecular contamination mitigation in EUVL by environmental control

Microelectron. Eng. 61-62 , 65-76 (2002)

K. Hasche, G. Ulm, K. Hermann, M. Krumrey, G. Ade, J. Stümpel, I. Busch, P. Thomsen-Schmidt, S. Schädlich, A. Schindler, W. Frank, M. Procop, U. Beck

Film thickness standards on the nanometer scale

Proc. ASPE, annual meeting , 57-62 (2002)

R. Klein, F. Scholze, G. Ulm

High-Accuracy At-Wavelength Metrology for Extreme Ultraviolet Lithography at PTB

Lambda Highlights No 61 , 4-6 (2002)

K. Hasche, G. Ulm, K. Herrmann, M. Krumrey, G. Ade, J. Stümpel, K. Busch, P. Thomsen-Schmidt, S. Schädlich, A. Schindler, W. Frank, M. Procop, U. Beck

About calibration of thickness standards on the nanometer scale

Proc. of 3rd euspen Internat. Conf., Eindhoven, 26-30 May , 549-552 (2002)

R. Klein, F. Scholze, R. Thornagel, J. Tümmler, M. Wedowski, R. Jansen, B. Mertens, A. van de Runstraat, G. Ulm

Irradiation of EUV multilayer optics with synchrotron radiation of different time structure

Proc. SPIE 4782 , 292-299 (2002)

R. den Hartog, A. Kozorezov, D. Martin, G. Brammertz, P. Verhoeve, A. Peacock, F. Scholze, D. J. Goldie

Large-format distributed readout imaging devices for x-ray imaging spectroscopy

Proc. SPIE 4497 , 50-60 (2002)

R. Klein, P. Kuske, R. Thornagel, G. Brandt, R. Görgen, G. Ulm

Measurement of the BESSY II electron beam energy by Compton-backscattering of laser photons

Nucl. Instr. and Meth. A 486 , 545-551 (2002)

R. den Hartog, A. Kozorezov, D. Martin, G. Brammertz, P. Verhoeve, A. Peacock, F. Scholze, D. J. Goldie

Large-Format Distributed Read-Out Imaging Devices for X-ray Imaging Spectroscopy

AIP Conf. Proc. 605 , 11-14 (2002)

R. Klein, M. Krumrey, M. Richter, F. Scholze, R. Thornagel, G. Ulm

Radiometry with Synchrotron Radiation at the PTB Laboratory at BESSY II

Synchrotron Radiation News 15 , 23-29 (2002)

P. Grübling, J. Hollandt, G. Ulm

Topography of an electron cyclotron resonance plasma in the vacuum-ultraviolet spectral range

Rev. Sci. Instrum. 73 , 614-616 (2002)

J. Hollandt, M.C.E. Huber, M. Kühne, B. Wende

Source standards for the radiometric calibration of astronomical instruments in the VUV spectral range traceable to the primary standard BESSY

in: The Radiometric Calibration of SOHO , 51-68 (2002) , edited by A. Pauluhn, M.C.E. Huber, R. von Steiger ; International Space Science Institute

N. Kawahara, T. Shoji, T. Yamada, Y. Kataoka, B. Beckhoff, G. Ulm, M. Mantler

Fundamental parameter method for the low energy region including cascade effect and photoelectron excitation

Advances in X-ray Analysis 45 , 511-516 (2002)

2001

R. Thornagel, R. Klein, G. Ulm

The electron storage ring BESSY II as a primary source standard from the visible to the X-ray range

Metrologia 38 , 385-389 (2001)

C. Streli, P. Wobrauschek, B. Beckhoff, G. Ulm, L. Fabry and S. Pahlke

First results of TXRF measurements of low-Z elements on Si wafer surfaces at the PTB plane grating monochromator beamline for undulator radiation at BESSY II

X-Ray Spectrom. 30 , 24-31 (2001)
http://dx.doi.org/10.1002/xrs.463

F. Scholze, R. Thornagel, G. Ulm

Calibration of energy-dispersive X-ray detectors at BESSY I and BESSY II

Metrologia 38 , 391-395 (2001)

F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, A. Gottwald, R. Klein, B. Meyer, U. Schwarz, R. Thornagel, J. Tümmler, K. Vogel, J. Weser, G. Ulm

High-Accuracy EUV Metrology of PTB Using Synchrotron Radiation

Proc. SPIE 4344 , 402-413 (2001)

F. Scholze, M. Procop

Measurement of detection efficiency and response functions for an Si(Li) x-ray spectrometer in the range 0.1 - 5 keV

X-Ray Spectrom. 30 , 69-76 (2001)

M. Richter, J. Hollandt, U. Kroth, W. Paustian, H. Rabus, R. Thornagel, G. Ulm

The two normal-incidence monochromator beam lines of PTB at BESSY II

Nucl. Instr. and Meth. A 467-468 , 605-608 (2001)

H. Meiling, B. Mertens, F. Stietz, M. Wedowski, R. Klein, R. Kurt, E. Louis, A. Yakshin

Prevention of MoSi multilayer reflection loss in EUVL tools

Proc. SPIE 4506 , 93-104 (2001)

M. Krumrey, G. Ulm

High-accuracy detector calibration at the PTB four-crystal monochromator beamline

Nucl. Instr. and Meth. A 467-468 , 1175-1178 (2001)

R. Klein, A. Gottwald, F. Scholze, R. Thornagel, J. Tümmler, G. Ulm, M. Wedowski, F. Stietz, B. Mertens, N. Koster, J.V. Elp

Lifetime testing of EUV optics using intense synchrotron radiation at the PTB radiometry laboratory

Proc. SPIE 4506 , 105-112 (2001)

K. Hasche, K. Herrmann, M. Krumrey, G. Ulm, S. Schädlich, W. Frank, M. Procop

Calibrated reference standards for films in the nanometer range

Proc. of 2nd euspen International Conference - Turin, Italy - May 27^th- 31^st , 396-399 (2001)

P. Grübling

Untersuchung der Strahlungscharakteristik eines resonant mikrowellengeheizten Plasmas im Vakuum-UV

Dissertation an der Fakultät II Mathematik und Naturwissenschaften der Techn. Universität Berlin (2001)

W. Görner, M.P. Hentschel, B.R. Müller, H. Riesemeier, M. Krumrey, G. Ulm, W. Diete, U. Klein, R. Frahm

BAMline: the first hard X-ray beamline at BESSY II

Nucl. Instr. and Meth. A 467-468 , 703-706 (2001)

M. Beijersbergen, M. Bavdaz, A. Peacock, E. Tomaselli, R. Fairbend, J.-P. Boutot, S.O. Flyckt, A. Brunton, G. Price, G. Fraser, C. Herrmann, M. Krumrey, E. Ziegler and A. Freund

High-resolution micro-pore X-ray optics produced with micro-channel plate technology

Proc. SPIE 4145 , 188-192 (2001)

B. Beckhoff and G. Ulm

Determination of Fluorescence Yields using Monochromatized Undulator Radiation of High Spectral Purity and Well-Known Flux

Advances in X-ray Analysis 44 , 349-354 (2001)

V. Arkadiev, A. Bjeoumikhov, N. Langhoff, J. Rabe, P. Roth, R. Wedell, B. Ham, F. Diekmann, K. Richter, M. Krumrey, U. Linke, G. Ulm, R. Lawaczeck, W.-R. Press, K. Schön und H.-J. Weinmann

Aufbau und Charakterisierung eines Röntgen-Monochromatormoduls für Mammographiegeräte

Medizinische Physik 2001 , 123-124 (2001) , edited by K. Welker und K. Zink

B. Beckhoff, R. Fliegauf, G. Ulm, G. Pepponi, C. Streli, P. Wobrauschek, L. Fabry and S. Pahlke

Improvement of a total reflection X-ray fluorescence analysis of low Z elements on silicon wafer surfaces at the PTB monochromator beamline for undulator radiation at BESSY II

Spectrochimica Acta B 56 , 2073-2083 (2001)
http://dx.doi.org/10.1016/S0584-8547(01)00320-2

2000

K. Wilhelm, U. Schühle, W. Curdt, I.E. Dammasch, J. Hollandt, P. Lemaire and M.C.E. Huber

Solar spectroradiometry with the telescope and spectrograph SUMER on the Solar and Heliosperic Observatory SOHO

Metrologia 37 , 393-398 (2000)

K. Wilhelm, P. Lemaire, I.E. Dammasch, J. Hollandt, U. Schühle, W. Curdt, T. Kucera, D.M. Hassler, M.C.E. Huber

Solar Irradiances of Ultraviolet Emission Lines Measured During the Minimum of Sunspot Activity in 1996 and 1997

Phys. Chem. Earth 5-6 , 389-392 (2000)

A. A. Sorokin, L. A. Shmaenok, S. V. Bobashev, B. Möbus, M. Richter, G. Ulm

Measurements of electron-impact ionization cross sections of argon, krypton, and xenon by comparison with photoionization

Phys. Rev. A 61 , 022723 (2000)

U. Schühle, A. Pauluhn, J. Hollandt, P. Lemaire, K. Wilhelm

Radiance Variations of Vacuum-Ultraviolet Emission Lines of the Quiet Sun Observed with SUMER on SOHO

Phys. Chem. Earth (C) 5-6 , 429-432 (2000)

U. Schühle, W. Curdt, J. Hollandt, U. Feldman, P. Lemaire, K. Wilhelm

Radiometric calibration of the vacuum-ultraviolet spectrograph SUMER on the SOHO spacecraft with the B detector

Applied Optics 39 , 418-425 (2000)

F. Scholze, B. Beckhoff, G. Brandt, R. Fliegauf, R. Klein, B. Meyer, D. Rost, D. Schmitz, M. Veldkamp, J. Weser, G. Ulm, E. Louis, A.E. Yakshin, S. Oestreich, F. Bijkerk

The new PTB beamlines for high-accuracy EUV reflectometry at BESSY II

Proc. SPIE, 4146 , 72-82 (2000)

F. Scholze, H. Henneken, P. Kuschnerus, H. Rabus, M. Richter, G. Ulm

Determination of the electron-hole pair creation energy for semiconductors from the spectral responsivity of photodiodes

Nucl. Instr. and Meth. A 439 , 208-215 (2000)

M. Richter, F. Becker, K. Grützmacher, U. Kroth, H. Rabus, K. Vogler, E. Bergmann, U. Stamm

Metrology of Laser Radiation in the DUV for Lithography

Laser Beam and Optics Characterization, Technische Universität Berlin , 301-303 (2000) , edited by H. Weber, H. Laabs

M. Richter, U. Johannsen, P. Kuschnerus, U. Kroth, H. Rabus, G. Ulm and L. Werner

The PTB high-accuracy spectral responsivity scale in the ultraviolet

Metrologia 37 , 515-518 (2000)

S. Oestreich, R. Klein, F. Scholze, J. Jonkers, E. Louis, A. Yakshin, P. Görts, G. Ulm, M. Haidl, F. Bijkerk

Multilayer reflectance during exposure to EUV radiation

Proc. SPIE, 4146 , 64-71 (2000)

E. Louis, A.E. Yakshin, P.C. Görts, S. Oestreich, E.L.G. Maas, M.J.H. Kessels, D. Schmitz, F. Scholze, G. Ulm, S. Müllender, M. Haidl, F. Bijkerk

Mo/Si multilayer coating technology for EUVL, coating uniformity and time stability

Proc. SPIE, 4146 , 60-63 (2000)

E. Louis, A.E. Yakshin, P.C. Görts, S. Oestreich, R. Stuik, E.L.G. Maas, M.J.H. Kessels, F. Bijkerk, M. Haidl, S. Müllender, M. Mertin, D. Schmitz, F. Scholze, G. Ulm

Progress in Mo/Si multilayer coating technology for EUVL optics

Proc. SPIE, 3997 , 406-411 (2000)

J. Lang, B. J. Kent, A. A. Breeveld, E. R. Breeveld, B. J. I. Bromage, J. Hollandt, J. Payne, C. D. Pike, W. T. Thompson

The laboratory calibration of the SOHO Coronal Diagnostic Spectrometer

J. Opt. A: Pure Appl. Opt. 2 , 88-106 (2000)

R. P. Lambe, R. Saunders, C. Gibson, J. Hollandt, E. Tegeler

A CCPR international comparison of spectral radiance measurements in the air-ultraviolet

Metrologia 37 , 51-54 (2000)

P. Kuske, R. Goergen, R. Klein, R. Thornagel, G. Ulm

High precision determination of the energy at BESSY II

Proc. of EPAC , 1771-1773 (2000)

P. Kuschnerus

Quantenausbeute von kristallinem Silicium im Spektralbereich von 40 nm bis 400 nm

Dissertation Technische Universität Berlin (2000)

M. Krumrey, C. Herrmann, P. Müller and G. Ulm

Synchrotron-radiation-based cryogenic radiometry in the X-ray range

Metrologia 37 , 361-364 (2000)

J. Hollandt, U. Becker, W. Paustian, M. Richter and G. Ulm

New developments in the radiance calibration of deuterium lamps in the UV and VUV spectral range at the PTB

Metrologia 37 , 563-566 (2000)

H. Henneken, F. Scholze, M. Krumrey and G. Ulm

Quantum efficiencies of gold and copper photocathodes in the VUV and X-ray range

Metrologia 37 , 485-488 (2000)

H. Henneken, F. Scholze, G. Ulm

Lack of proportionality of total electron yield and soft x-ray absorption coefficient

J. Appl. Phys. 87 , 257-268 (2000)

R. den. Hartog, D. Martin, A. Kozorezov, P. Verhoeve, N. Rando, A. Peacock, G. Brammertz, M. Krumrey, D.J. Goldie, R. Venn

Distributed read-out imaging devices for X-ray imaging spectroscopy

Proc. SPIE 4012 , 237-248 (2000)

R. den Hartog, P. Verhoeve, D. Martin, N. Rando, A. Peacock, M. Krumrey, D.J. Goldie

An X-ray photon-counting imaging spectrometer based on an Ta absorber with four superconducting tunnel junctions

Nucl. Instr. and Meth. A 444 , 278-282 (2000)

R. den Hartog, A. Golubov, D. Martin, P. Verhoeve, A. Poelaert, A. Peacock, M. Krumrey

The lateral proximity effect and long-range energy-gap gradients in Ta/Al and Nb/Al Josephson junctions

Nucl. Instr. and Meth. A 444 , 28-32 (2000)

P. Grübling, J. Hollandt, G. Ulm

Electron cyclotron resonance light source assembly - A vacuum-ultraviolet radiation source based on an electron cyclotron resonance plasma

Rev. Sci. Instrum. 71 , 1200-1202 (2000)

M.W. Beijersbergen, M. Bavdaz, A. Peacock, E. Tomaselli, G. Fraser, A. Brunton, G. Price, M. Krumrey, C. Herrmann, A. Freund, E. Ziegler, A. Souvorov, R. Fairbend, J.-P. Boutot, S.O. Flyckt

Novel micro-pore X-ray optics produced with micro-channel plate technology

Proc. SPIE 4012 , 218-224 (2000)

B. Beckhoff, R. Klein, M. Krumrey, F. Scholze, R. Thornagel, G. Ulm

X-ray detector calibration in the PTB radiometry laboratory at the electron storage ring BESSY II

Nucl. Instr. and Meth. A 444 , 480-483 (2000)

M.W. Bautz, M. J. Pivovaroff, S. E. Kissel, G. Y. Prigozhin, T. Isobe, S. E. Jones, G. R. Ricker, R. Thornagel, S. Kraft, F. Scholze, G. Ulm

Absolute Calibration of ACIS X-ray CCDs Using Calculable, Undispersed Synchrotron Radiation

Proc. SPIE 4012 , 53-67 (2000)

G. Angloher, B. Beckhoff, M. Bühler, F. v. Feilitzsch, T. Hertrich, P. Hettl, J. Höhne, M. Huber, J. Jochum, R.L. Mößbauer, J. Schnagl, F. Scholze, G. Ulm

Development of superconducting tunnel junction detectors for high-resolution X-ray spectroscopy

Nucl. Instr. and Meth. A 444 , 214-219 (2000)

M. Abo-Bakr, G. Wüstefeld, R. Klein, G. Ulm

Study of a small synchrotron radiation source for radiometry

Proc. EPAC , 601-603 (2000)

1999

R. Stuik, E. Louis, A.E. Yakshin, P.C. Görts, E.L.G. Maas, F. Bijkerk, D. Schmitz, F. Scholze, G. Ulm, M. Haidl

Peak and integrated reflectivity, wavelength and gamma optimization of Mo/Si and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography

J. Vac. Sci. Technol. B 17 , 2998-3002 (1999)

S. Serej, E. Kellogg, R. Edgar, F. Scholze, G. Ulm

Absolute calibration of the Chandra X-ray Observatory: transfer standard solid state detectors

Proc. SPIE 3765 , 777-788 (1999)

M. Richter and G. Ulm

Radiometry using synchrotron radiation at PTB

J. Electron Spectr. Relat. Phenomena 101-103 , 1013-1018 (1999)

H. Rabus, U. Kroth, M. Richter, G. Ulm, J. Friese, R. Gernhäuser, A. Kastenmüller, P. Maier-Komor, K. Zeitelhack

Quantum efficiency of cesium iodide photocathodes in the 120-220 nm spectral range traceable to a primary detector standard

Nucl. Instr. and Meth. A 438 , 94-103 (1999)

A. Pauluhn, I. Rüedi, S. K. Solanki, J. Lang, C. D. Pike, U. Schühle, W. T. Thompson, J. Hollandt, M. C. E. Huber

Intercalibration of SUMER and CDS on SOHO. I. SUMER detector A and CDS NIS

Applied Optics. 38 , 7035-7046 (1999)

A. Owens, M. Bavdaz, S. Kraft, A. Peacock, S. Nenonen, A. Andersson, M.A. Gagliardi, T. Gagliardi, F. Scholze, G. Ulm

X-ray response of epitaxial GaAs

J. Appl. Phys. 85 , 7522-7527 (1999)

E. Louis, A.E. Yakshin, P.C. Görts, S. Abdali, E.L.G. Maas, R. Stuik, F. Bijkerk, D. Schmitz, F. Scholze, G. Ulm, M. Haidl

Reflectivity of Mo/Si multilayer systems for EUVL

Proc. SPIE 3676 , 844-845 (1999)

P. Grübling, J. Hollandt, G. Ulm

Performance of the new monomode 10 GHz ECR radiation source ELISA

Nucl. Instr. and Meth. A 437 , 152-162 (1999)

S. Kraft, P. Verhoeve, A. Peacock, N. Rando, D.J. Goldie, R. Hart, D. Glowacka, F. Scholze, G. Ulm

On the factors governing the energy resolution of Ta-based superconducting tunnel junctions

J. Appl. Phys. 86 , 7189-7191 (1999)

A. Gottwald, Ch. Gerth, M. Richter

4d Photoionization of Free Singly Charged Xenon Ions

Phys. Rev. Lett. 82 , 2068-2070 (1999)

H. Henneken, F. Scholze, G. Ulm

Absolute total electron yield of Au(111) and Cu(111) surfaces

J. Electron Spectr. Relat. Phenomena 101-103 , 1019-1024 (1999)

R. Friedrich, J. Hollandt, H. Rabus, M. Richter, L. Werner

Progress in UV Radiometry

Proc. 9. Congrès International de Métrologie , 261-264 (1999)

H. Henneken

Totale Elektronenausbeute von Gold und Kupfer im Bereich weicher Röntgenstrahlung

Dissertation Technische Universität Berlin (1999)

M. Beijersbergen, M. Bavdaz, A. Peacock, E. Tomaselli, G. Fraser, A. Brunton, E. Flyckt, M. Krumrey, A. Souvorov

Micro-channel plate based X-ray optics

Proc. SPIE 3765 , 452-458 (1999)

P. Grübling, J. Hollandt, G. Ulm

The Electron Cyclotron Resonance Light Source Assembly of PTB - ELISA

Proc. of the 14th Int. Workshop on ECR Sources, ECRIS99, CERN, Geneva , 54-57 (1999)

R. Hartmann, G. Hartner, U.G. Briel, K. Dennerl, F. Haberl, L. Strüder, J. Trümper, E. Bihler,E. Kendziorra, J.-F. Hochedez, E. Jourdain, P. Dhez, Ph. Salvetat, J. Auerhammer, D. Schmitz, F. Scholze, G. Ulm

The Quantum Efficiency of the XMM pn-CCD camera

Proc. SPIE 3765 , 703-713 (1999)

1998

K. Wilhelm, P. Lemaire, I.E. Dammasch, J. Hollandt, U. Schühle, W. Curdt, T. Kucera, D.M. Hassler, M.C.E. Huber

Solar irradiances and radiances of UV and EUV lines during the minimum of sunspot activity in 1996

Astron. Astrophys. 334 , 685-702 (1998)

G. Ulm, B. Beckhoff, R. Klein, M. Krumrey, H. Rabus, R. Thornagel

The PTB radiometry laboratory at the BESSY II electron storage ring

Proc. SPIE 3444 , 610-621 (1998)

H.-J. Stock, G. Haindl, F. Hamelmann, D. Menke, O. Wehmeyer, U. Kleineberg, U. Heinzmann, P. Bulicke, D. Fuchs, G. Ulm

Carbon/titanium multilayers as soft-x-ray mirrors for the water window

Appl. Opt. 37 , 6002-6005 (1998)

A.A. Sorokin, L.A. Shmaenok, S.V. Bobashev, B. Möbus, G. Ulm

Measurements of electron-impact ionization cross sections of neon by comparison with photoionization

Phys. Rev. A 58 , 2900-2910 (1998)

G. Sommerer, E. Mevel, J. Hollandt, D. Schulze, P.V. Nickles, G. Ulm, W. Sandner

Absolute photon number measurement of high-order harmonics in the extreme UV

Opt. Comm. 146 , 347-355 (1998)

F. Senf, U. Flechsig, F. Eggenstein, W. Gudat, R. Klein, H. Rabus and G. Ulm

A plane-grating monochromator beamline for the PTB undulators at BESSY II

J. Synchrotron Rad. 5 , 780-782 (1998)

U. Schüle, P. Brekke, W. Curdt, J. Hollandt, P. Lemaire, K. Wilhelm

Radiometric calibration tracking of the vacuum-ultraviolet spectrometer SUMER during the first year of the SOHO mission

Appl. Opt. 37 , 2646-2652 (1998)

F. Scholze, H. Rabus, G. Ulm

Mean energy required to produce an electron-hole pair in silicon for photons of energies between 50 and 1500 eV

J. Appl. Phys. 84 , 2926-2939 (1998)

F. Scholze, H. Henneken, P. Kuschnerus, H. Rabus, M. Richter and G. Ulm

High-accuracy detector calibration in the 3-1500 eV spectral range at the PTB radiometry laboratory

J. Synchrotron Rad. 5 , 866-868 (1998)

G. Prigozhin, J. Woo, J.A. Gregory, A.H. Loomis, M.W. Bautz, G.R. Ricker, S. Kraft

Quantum efficiency of X-ray CCDs

Proc. SPIE 3301 , 108-115 (1998)

P. Kuschnerus, H. Rabus, M. Richter, F. Scholze, L. Werner and G. Ulm

Characterization of photodiodes as transfer detector standards in the 120 nm to 600 nm spectral range

Metrologia 35 , 355-362 (1998)

M. Krumrey, C. Herrmann, P. Müller and G. Ulm

Components for the X-Ray radiometry beamline at BESSY II

J. Synchrotron Rad. 5 , 788-790 (1998)

M. Krumrey

Design of a four-crystal monochromator beamline for radiometry at BESSY II

J. Synchrotron Rad. 5 , 6-9 (1998)

S. Kraft, A. Peacock, M. Bavdaz, A. Owens, M. A. Gagliardi, S. Nenonen, F. Scholze, G. Ulm, T. Tuomi, M. Juvonen, R. Rantamaki

Recent results on the factors govering the energy resolution in compound semiconductors to be used as future spectroscopic detectors for hard X-ray astronomy

Proc. SPIE 3445 , 236-246 (1998)

S. Kraft, M. Bavdaz, B. Castelletto, A. Peacock, F. Scholze, G. Ulm, M.-A. Gagliardi, S. Nenonen, T. Tuomi, M. Juvonen, R. Rantamäki

The X-ray response of CdZnTe detectors to be used as future spectroscopic detectors for X-ray astronomy

Nucl. Instr. and Meth. A 418 , 337-347 (1998)

R. Klein, J. Bahrdt, D. Herzog, G. Ulm

The PTB electromagnetic undulator for BESSY II

J. Synchrotron Rad. 5 , 451-452 (1998)

R. Klein, T. Mayer, P. Kruske, R. Thornagel and G. Ulm

Measurement of the electron energy and energy spread at the electron storage ring BESSY I

J. Synchrotron Rad. 5 , 392-394 (1998)

J. Hollandt, U. Schühle, W. Curdt, I.E. Dammasch, P. Lemaire and K. Wilhelm

Solar radiometry with the telescope and VUV spectrometer SUMER on the Solar and Heliospheric Observatory (SOHO)

Metrologia 35 , 671-675 (1998)

J. Hollandt, H. Rabus, M. Richter, R. Thornagel, G. Ulm

The Laboratory for UV and VUV Radiometry of the Physikalisch-Technische Bundesanstalt at BESSY I

in: Proc. of The 8th Int. Symposium on the Science&Technology of Light Sources (LS-8) , 366-367 (1998) , edited by G. Babucke ; Greifswald: INP , ISBN: 3-00-003105-7

A. Gottwald

Wechselwirkung von Innerschalenanregung und Valenzkonfiguration: Elektronenspektroskopie an freien positiven Ionen

Dissertation TU Berlin (1998) ; Verlag Wissenschaft und Technik, Berlin , ISBN: 3-89685-306-6

A. Gottwald, Ch. Gerth, M. Groen, M. Richter, P. Zimmermann

Photoelectron spectroscopy on atomic Pr and Nd in the 4d giant resonance region

J. Phys. B: At. Mol. Opt. Phys. 31 , 3875-3884 (1998)

D. Fuchs, S. Kraft, F. Scholze, G. Ulm

Soft X-Ray Detector Calibration and Reflectometry Facilities of the PTB at BESSY

in: X-Ray Microscopy and Spectromicroscopy , I-187 to I-191 (1998) , edited by J. Thieme, G. Schmahl, D. Rudolph, E. Umbach ; Berlin: Springer-Verlag

M. Bavdaz, S. Kraft, A. Peacock, F. Scholze, M. Wedowski, G. Ulm, S. Nenonen, M.A. Gagliardi, T. Tuomi, K.T. Hjelt, M. Juvonen

Compound semiconductor detectors for X-ray astronomy: spectroscopic measurements and material characteristics

Mat. Res. Soc. Symp. Proc. 487 , 565-572 (1998)

M. Bautz, M. Pivovaroff, F. Baganoff, T. Isobe, S. Jones, S. Kissel, B. LaMarr, H. Manning, G. Prigozhin, G. Ricker, J. Nousek, C. Grant, K. Nishikida, F. Scholze, R. Thornagel, G. Ulm

X-ray CCD Calibration for the AXAF CCD Imaging Spectrometer

Proc. SPIE 3444 , 210-224 (1998)

J.M. Auerhammer, G. Brandt, F. Scholze, R. Thornagel, G. Ulm, B.J. Wargelin, W.C. McDermott, T.J. Norton, I.N. Evans, E.M. Kellogg

High-accuracy calibration of the HXDS flow proportional counter for AXAF at the PTB laboratory at BESSY

Proc. SPIE 3444 , 19-29 (1998)

1997

K. Wilhelm, P. Lemaire, U. Feldman, J. Hollandt, U. Schühle, W. Curdt

Radiometric calibration of SUMER: refinement of the laboratory results under operational conditions on SOHO

Appl. Opt. 36 , 6416-6422 (1997)

K. Wilhelm, P. Lemaire, W. Curdt, U. Schühle, E. Marsch, A.I. Poland, S.D. Jordan, R.J. Thomas, D.M. Hassler, M.C.E. Huber, J.-C. Vial, M. Kühne, O.H.W. Sigmund, A. Gabriel, J.G. Timothy, M. Grewing, U. Feldman, J. Hollandt, P. Brekke

First Results of the SUMER Telescope and Spectrometer on SOHO

Solar Physics 170 , 75-104 (1997)

P. Verhoeve, N. Rando, A. Peacock, A. van Dordrecht, M. Bavdaz, J. Verveer, D.J. Goldie, M. Richter, G. Ulm

Tantalum Based Superconducting Tunnel Junctions as Photon Counting Detectors in the UV to the Near Infrared

Proc. of the 7th Int. Workshop on Low Temperature Detectors(LTD-7), München (27. Juli - 2. August 1997) , 97-100 (1997) , edited by S. Cooper , ISBN: 3-00-002266-x

G. Ulm and B. Wende

X-Ray Radiometry

in:Röntgen Centennial , 81-99 (1997) , edited by A. Haase, G. Landwehr, E. Umbach ; World Scientific, Singapore , ISBN: 981-02-3085-0

T. Tikkanen, S. Kraft, F. Scholze, R. Thornagel, G. Ulm

Characterising a Si(Li) detector element for the SIXA X-ray spectrometer

Nucl. Instr. and Meth. A 390 , 329-335 (1997)

K.-H. Stephan, C. Reppin, F. Haberl, M. Hirschinger, H.J. Maier, D. Frischke, M. Wedowski,P. Bulicke, G. Ulm, J. Friedrich, P. Gürtler

Optical filters for the EPIC CCD-camera on board the XMM astronomy satellite

Proc. SPIE 3114 , 166-172 (1997)

G. Schriever, R. Lebert, A. Naweed, S. Mager, W. Neff, S. Kraft, F. Scholze, G. Ulm

Calibration of charge coupled devices and a pinhole transmission grating to be used as elements of a soft x-ray spectrograph

Rev. Sci. Instrum. 68 , 3301-3306 (1997)

F. Scholze

Quantenausbeute von Silicium für Photonen im Energiebereich von 50 eV bis 1500 eV

Dissertation Technische Universität Berlin (1997)

H. Rabus, V. Persch, G. Ulm

Synchrotron-Radiation Operated Cryogenic Electrical-Substitution Radiometer as High-Accuracy Primary Detector Standard in the Ultraviolet, Vacuum Ultraviolet and Soft X-ray Spectral Ranges

Appl. Opt. 36 , 5421-5440 (1997)

G. Prigozhin, M. Bautz, S. Kissel, G. Ricker, S. Kraft, F. Scholze, R. Thornagel, G. Ulm

Absolute Measurements of Oxygen Edge Structure in the Quantum Efficiency of X-ray CCDs

IEEE Trans. Nucl. Sci. 44 , 970-974 (1997)

W.C. McDermott, E.M. Kellogg, B.J. Wargelin, I.N. Evans, S.A. Vitek, E.Y. Tsiang, D.A. Schwartz, R. Edgar, S. Kraft, F. Scholze, R. Thornagel, G. Ulm, M. Weisskopf, S. Odell, A. Tennant, J. Kolodziej

The AXAF HXDS germanium solid state detectors

Proc. SPIE 3113 , 535-543 (1997)

S. Kraft, F. Scholze, R. Thornagel, G. Ulm, W.C. McDermott, E.M. Kellogg

High Accuracy Calibration of the HXDS HPGe Detector at the PTB Radiometry Laboratory at BESSY

Proc. SPIE 3114 , 101-112 (1997)

U. Kleineberg, H.-J. Stock, D. Menke, O. Wehmeyer, U. Heinzmann, D. Fuchs, P. Bulicke, M. Wedowski, G. Ulm, K.F. Heidemann and K. Osterried

Multilayer-coated soft x-ray diffraction gratings for Synchrotron Radiation applications

Proc. SPIE 3150 , 18-30 (1997)

R. Klein, T. Mayer, P. Kuske, R. Thornagel, G. Ulm

Beam diagnostics at the BESSY I electron storage ring with Compton backscattered laser photons: measurement of the electron energy and related quantities

Nucl. Instr. and Meth. A 384 , 293-298 (1997)

E. Kellogg, L. Cohen, R. Edgar, I. Evans, M. Freeman, T. Gaetz, D. Jerius, W.C. McDermott, P. McKinnon, S. Murray, W. Podgorski, D. Schwartz, L. Van Speybroeck, B. Wargelin, M. Zombeck, M. Weisskopf, R. Elsner, S. O\'Dell, A. Tennant, J. Kolodziejczak, G. Garmire, J. Nousek, S. Kraft, F. Scholze, R. Thornagel, G. Ulm, K. Flanagan, D. Dewey, M. Bautz, S. Texter, J. Arenberg, R. Carlson

Absolute Calibration of the AXAF Telescope Effective Area

Proc. SPIE 3113 , 515-521 (1997)

W. Jans, B. Möbus, M. Kühne, G. Ulm, A. Werner, K.-H. Schartner

Emission cross sections for electron-impact-induced line radiation in the VUV from Ne, Ar, and Kr: Measurements and comparison with theory

Phys. Rev. A 55 , 1890-1898 (1997)

J. Hollandt, W. Curdt, U. Schühle und K. Wilhelm

Sonnenradiometrie mit SUMER auf SOHO

Phys. Bl. 53 , 1101-1105 (1997)

A. Gottwald, S. Anger, J.-M. Bizau, D. Rosenthal, M. Richter

Inner-shell resonances in metastable Ca⁺ions

Phys. Rev. A 55 , 3941-3944 (1997)

M. Bavdaz, A. Peacock, S. Nenonen, M.A. Jantunen, T. Gagliardi, T. Tuomi, K.T. Hjelt, M. Juvonen, R. Rantamäki, S. Kraft, M. Wedowski, F. Scholze, G. Ulm, P.J. McNally, J. Curley, A.N. Danilewsky

On the correlation between crystal morphology and X-ray performance of a CdZnTe detector

Proc. SPIE 3114 , 322-332 (1997)

1996

P. Verhoeve, N. Rando, J. Verveer, A. Peacock, A. van Dordrecht, P. Videler, M. Bavdaz, D.J. Goldie, T. Lederer, F. Scholze, G. Ulm

Response of niobium-based superconducting tunnel junctions in the soft x-ray region 0.15-6.5 keV

Phys. Rev. B 53 , 809-817 (1996)

G. Ulm, B. Wende

Quantitative spectral radiation measurements in the VUV and soft x-ray region

Optical and Quantum Electronics 28 , 299-307 (1996)

R. Thornagel, R. Fliegauf, R. Klein, F. Scholze, G. Ulm

Measurement and calculation of the spatial and spectral distribution of wavelength shifter radiation at BESSY

Rev. Sci. Instrum. 67 , 653-657 (1996)

K.-H. Stephan, C. Reppin, M. Hirschinger, H.J. Maier, D. Frischke, D. Fuchs, P. Müller, P. Gürtler

On the Performance of an Optical Filter for the XMM Focal Plane CCD-Camera EPIC

Proc. SPIE 2808 , 421-437 (1996)

K. Solt, H. Melchior, U. Kroth, P. Kuschnerus, V. Persch, H. Rabus, M. Richter, G. Ulm

PtSi-n-Si Schottky-barrier photodetectors with stable spectral responsivity in the 120 - 250 nm spectral range

Appl. Phys. Lett. 69 , 3662-3664 (1996)

F. Scholze, H. Rabus, G. Ulm

Spectral responivity of silicon photodiodes: High-accuracy measurement and improved self calibration in the soft X-ray spectral range

Proc. SPIE 2808 , 534-543 (1996)

F. Scholze, H. Rabus, G. Ulm

Measurement of the mean electron-hole pair creation energy in crystalline silicon for photons in the 50 - 1500 eV spectral range

Appl. Phys. Lett. 69 , 2974-2976 (1996)

H. Rabus, F. Scholze, R. Thornagel, G. Ulm

Detector Calibration at the PTB Radiometry Laboratory at BESSY

Nucl. Instr. and Meth. A 377 , 209-216 (1996)

U. Kleineberg, H.-J. Stock, A. Kloidt, K. Osterried, D. Menke, B. Schmiedeskamp, U. Heinzmann, D. Fuchs, P. Müller, F. Scholze, G. Ulm, K.F. Heidemann, B. Nelles

Mo/Si Multilayer Coated Laminar Phase and Ruled Blaze Gratings for the Soft X-Ray Region

J. Electr. Spectr. Rel. Phen. 80 , 389 - 392 (1996)

J. Hollandt, U. Schühle, W. Paustian, W. Curdt, M. Kühne, B. Wende, K. Wilhelm

Radiometric Calibration of the Telescope and Ultraviolet Spectrometer SUMER on SOHO

Appl. Opt. 35 , 5125 - 5133 (1996)

K.A. Flanagan, T.T. Fang, C. Baluta, J.E. Davis, D. Dewey, T.H. Markert, D.E. Graessle, J. Drake, J.E. Fitch, J.Z. Juda, J. Woo, S. Kraft, P. Bulicke, R. Fliegauf, F. Scholze, G. Ulm, J. Bauer

Modeling the Diffraction Efficiencies of the AXAF High Energy Transmission Gratings: II

Proc. SPIE 2808 , 650-676 (1996)

J. Hollandt, M. Kühne, M.C.E. Huber and B. Wende

Source standards for the radiometric calibration of astronomical telescopes in the VUV spectral range

Astron. Astrophys. Suppl. Ser. 115 , 561-572 (1996)

M. Bavdaz, A. Peacock, R. den Hartog, A. Poelaert, P. Underwood, V.-P. Viitanen, D. Fuchs, P. Bulicke, S. Kraft, F. Scholze, G. Ulm, A.C. Wright

The Performance of Transmission Filters for EUV&Soft X-ray Astronomy

Proc. SPIE 2808 , 301-312 (1996)

D.P. Gaines, T.P. Daly, D.G. Stearns, B. LaFontaine, D.W. Sweeney, H.C. Chapman, D. Fuchs

Image degradation from surface scatter in EUV optics

OSA TOPS on Extreme Ultraviolet Lithography 4 , 199-202 (1996) , edited by G.D. Kubiak and D. Kania

R. Hartmann, D. Hauff, P. Lechner, R. Richter, L. Strüder, J. Kemmer, S. Krisch, F. Scholze, G. Ulm

Low energy response of siliconpn-junction detectors

Nucl. Instr. and Meth. A 377 , 191-196 (1996)

1995

A. Lau-Främbs, U. Kroth, H. Rabus, E. Tegeler, G. Ulm

New detector calibration facility for the wavelength range 35 - 400 nm based on an electrical substitution radiometer

Rev. Sci. Instrum. 66 , 2324-2326 (1995)

R.A. Harrison et al. mult (39 authors including M. Kühne and J. Hollandt, PTB)

The Coronal Diagnostic Spectrometer for the Solar and Heliospheric Observatory

Solar Physics 162 , 233-290 (1995)

A. Lau-Främbs

Entwicklung der Radiometrie mit Synchrotronstrahlung im Spektralbereich 170 bis 400 nm mit einem Kryoradiometer als Primärnormal und Halbleiter-Photodioden als Transfernormale

Dissertation Technische Universität Berlin (1995)

D.P. Gaines, S. P. Vernon, G.E. Sommargren, D. Fuchs

X-ray characterization of a four-bounce projection system Proc. on Extreme Ultraviolet Lithography

Optical Society of America, Washington D.C. , 171-176 (1995) , edited by Frits Zernike and David T. Attwood

M. Krumrey, E. Tegeler, R. Goebel, R. Köhler

Self-calibration of the same silicon photodiode in the visible and soft x-ray ranges

Rev. Sci. Instrum. 66 , 4736-4737 (1995)

D. Fuchs, M. Krumrey, P. Müller, F. Scholze, G. Ulm

High precision soft x-ray reflectometer

Rev. Sci. Instrum. 66 , 2248-2250 (1995)

U. Kleineberg, K. Osterried, H.-J. Stock, D. Menke, B. Schmiedeskamp, D. Fuchs, P. Müller, F. Scholze, K.F. Heidemann, B. Nelles, U. Heinzmann

Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region

Appl. Opt. 34 , 6506 - 6512 (1995)

C. Budtz-Jørgensen, C. Olesen, H.W. Schnopper, T. Lederer, F. Scholze, G. Ulm

The response functions of the HEPC/LEPC detector system measured at the Xe L edge region

Nucl. Instr. and Meth. A 367 , 83-87 (1995)

R. Hartmann, P. Lechner, L. Strüder, F. Scholze, G. Ulm

The radiation entrance window of pn-junction detectors

Metrologia 32 , 491-494 (1995)

B.J. Kent, R.A. Harrison, E.C. Sawyer, R.W. Hayes, A.G. Richards, J.L. Culhane, K. Norman, A.A. Breeveld, P.D. Thomas, A.I. Poland, R.J. Thomas, W.T. Thompson, B. Aschenbach, H. Bräuninger, O. Kjeldseth-Moe, M. Kühne, J. Hollandt, W. Paustian, B.J.I. Bromage

The Coronal Diagnostic Spectrometer: an extreme ultraviolet spectrometer for the Solar and Heliospheric Observatory

Proc. SPIE 2517 , 12-28 (1995)

J.H. Underwood, C. Khan Malek, E.M. Gullikson, M. Krumrey

Multilayer coated Echelle gratings for soft x-rays and extreme ultraviolet

Rev. Sci. Instrum. 66 , 2147-2150 (1995)

M. Bavdaz, A. Peacock, D. Fuchs, T. Lederer, P. Müller, F. Scholze, G. Ulm, V.-P. Viitanen, R. Mutkainen

The soft X-ray transmission properties of thin polyimide windows and their application to future detectors

Rev. Sci. Instrum. 66 , 2570-2573 (1995)

R.A. Harrison, B.J. Kent, E.C. Sawyer, J. Hollandt, M. Kühne, W. Paustian, B. Wende, M.C.E. Huber

The Coronal Diagnostic Spectrometer for the Solar and Heliospheric Observatory: Experiment description and calibration

Metrologia 32 , 647-652 (1995)

W. Jans, B. Möbus, M. Kühne, G. Ulm, A. Werner, K.-H. Schartner

Determination of absolute emission cross sections for the electron impact-induced line radiation in the VUV

Appl. Opt. 34 , 3671-3680 (1995)

A. Lau-Främbs, U. Kroth, H. Rabus, E. Tegeler, G. Ulm, B. Wende

First results with the new PTB cryogenic radiometer for the vacuum ultraviolet spectral range

Metrologia 32 , 571-574 (1995)

T. Lederer, H. Rabus, F. Scholze, R. Thornagel and G. Ulm

Detector Calibration at the Radiometry Laboratory of PTB in the VUV and Soft X-ray Spectral Ranges using Synchrotron Radiation

Proc. SPIE 2519 , 92-107 (1995)

Fu Lei, W. Paustian, E. Tegeler

Determination of the spectral radiance of transfer standards in the spectral range 110 nm - 400 nm using BESSY as a primary source standard

Metrologia 32 , 589-592 (1995)

K.-H. Stephan, C. Reppin, H.J. Maier, D. Frischke, D. Fuchs, P. Müller, S. Moeller, P. Gürtler

On the performance of optical filters for the XMM focal plane CCD-camera EPIC

Nucl. Instr. and Meth. A362 , 178-182 (1995)

R. Thornagel, J. Fischer, R. Friedrich, M. Stock, G. Ulm, B. Wende

The electron storage ring BESSY as a primary standard source- a radiometric comparison against a cryogenic electrical substitution radiometer in the visible

Metrologia 32 , 459-462 (1995)

G. Ulm, B. Wende

Radiometry laboratory of Physikalisch-Technische-Bundesanstalt at BESSY

Rev. Sci. Instrum. 66 , 2244-2247 (1995)

B. Wende

Radiometry with synchrotron radiation

Metrologia 32 , 419-424 (1995)

1994

T. Wilhein, D. Rothweiler, A. Tusche, F. Scholze, W. Meyer-Ilse

Thinned, back-illuminated CCDs for x-ray microscopy

Proc. of the Int. Conf. X-Ray Microscopy IV, Chernogolovka, Russia, Sept. 1993, Inst. of Microelectronics Technology , 470-475 (1994) , edited by V.V. Aristov and A. I. Erko

R. Thornagel, G. Ulm, P. Kuske, Th. Mayer, K. Ott

Monitoring the beam depolarization with a dc current transformer at BESSY I

Proc. Fourth Europ. Particle Accel. Conf. EPAC 94, London 1994, World Scientific, Vol. 2 , 1719-1721 (1994)

H.-J. Stock, U. Kleineberg, B. Heidemann, K. Hilgers, A. Kloidt, B. Schmiedeskamp, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze

Thermal stability of Mo/Si multilayer soft-x-ray mirrors fabricated by electron- beam evaporation

Appl. Phys. A 58 , 371-376 (1994)

K.-H. Stephan, C. Reppin, H.J. Maier, D. Frischke, D. Fuchs, P. Müller, S. Möller, P. Gürtler

Transmittance performance of polypropylene, poly-xylylene and polycarbonate films in the photon energy range from 1 eV to 10 keV

Proc. SPIE 2279 , 134-142 (1994)

J.M. Slaughter, D.W. Schulze, C.R. Hills, A. Mirone, R. Stalio, R.N. Watts, C. Tarrio, T.B. Lucatorto, M. Krumrey, P. Müller, Ch. M. Falco

Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet

J. Appl. Phys. 76 , 2144-2156 (1994)

F. Scholze, M. Krumrey, P. Müller, D. Fuchs

Plane grating monochromator beamline for VUV radiometry

Rev. Sci. Instrum. 65 , 3229 - 3232 (1994)

F. Scholze, G. Ulm

Characterization of a windowless Si(Li) detector in the photon energy range 0.1 - 5 keV

Nucl. Instr. and Meth. A 339 , 49 - 54 (1994)

B. Schmiedeskamp, A. Kloidt, H.-J. Stock, U. Kleineberg, T. Döhring, M. Pröpper, S. Rahn, K. Hilgers, B. Heidemann, T. Tappe, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze, K.F. Heidemann

Electron-beam-deposited Mo/Si and Mo_xSi_y/Si multilayer X-ray mirrors and gratings

Optical Engineering 33 , 1314 - 1321 (1994)

H. Rabus, E. Tegeler, G. Ulm, B. Wende

Empfängergestützte Radiometrie mit Kryoradiometern und monochromatisierter Synchrotronstrahlung

PTB-Mitt. 104 , 343 - 347 (1994)

U. Kleinberg, H.-J. Stock, D. Menke, K. Osterried, B. Schmiedeskamp, U. Heinzmann, D. Fuchs, P. Müller, F. Scholze, K.F. Heidemann, B. Nelles, J. Thieme

Multilayer Reflection Type Zone Plates and Blazed Gratings for the Normal Incidence Soft X-Ray Region

Proc. SPIE 2279 , 269-282 (1994)

J. Hollandt, M. Kühne, B. Wende

High-current hollow-cathode source as a radiant intensity standard in the 40 - 125 nm wavelength range

Appl. Opt. 33 , 68-74 (1994)

J. Hollandt

Strahlungsnormale für die solare Spektroradiometrie im Vakuum-UV

Dissertation Technische Universität Berlin (1994)

C. Heise, J. Hollandt, R. Kling, M. Kock, M. Kühne

Radiometric characterization of a Penning discharge in the VUV

Appl. Opt. 33 , 5111 - 5117 (1994)

D. Fuchs, M. Krumrey, T. Lederer, P. Müller, F. Scholze, G. Ulm

Soft x-ray reflectometer for large and complex samples using synchrotron radiation

Proc. SPIE 2279 , 402-410 (1994)

M. Bavdaz, A. Peacock, A.N. Parmar, D. Fuchs, P. Müller, F. Scholze, G. Ulm, A.C. Wright

On the X-ray transmission properties of multilayer windows

Nucl. Instr. and Meth. A 345 , 549 - 560 (1994)

D. Arnold, G. Ulm

Determination of photon emission probabilities of radionuclides using a Si(Li) detector calibrated by the primary standard source, BESSY

Nucl. Instr. and Meth. A 339 , 43 - 48 (1994)

1993

B. Wende

Photon Metrology with Electromagnetic Radiation from Accelerated Relativistic Electrons

PTB-Mitt. 103 , 119-129 (1993)

E. Tegeler

Recommendations for future work in the air UV spectral radiometry: Results of a report to the CCPR

Metrologia 30 , 373-374 (1993)

M. Stock, J. Fischer, R. Friedrich, H.J. Jung, R. Thornagel, G. Ulm, B. Wende

Present state of the comparison between radiometric scales based on three primary standards

Metrologia 30 , 439 - 449 (1993)

H.-J. Stock, U. Kleineberg, A. Kloidt, B. Schmiedeskamp, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze

Mo_0.5Si_0.5/Si multilayer soft x-ray mirrors, high thermal stability, and normal incidence reflectivity

Appl. Phys. Lett. 63 , 2207 - 2209 (1993)

K.-H. Stephan, H. Bräuninger, C. Reppin, H.J. Maier, D. Frischke, M. Krumrey, P. Müller

Optical filter for X-ray astronomy CCDs

Nucl. Instr. and Meth. A 334 , 229 - 233 (1993)

E. Spiller, D. Stearns, M. Krumrey

Multilayer x-ray mirrors: Interfacial roughness, scattering, and image quality

J. Appl. Phys. 74 , 107-118 (1993)

W. Jans

Messung absoluter Wirkungsquerschnitte der elektronenstoßinduzierten Linien- emission von Edelgasen und Stickstoff im Spektralbereich von 40 - 120 nm

Dissertation Technische Universität Berlin (1993)

J. Hollandt, M.C.E. Huber, M. Kühne

Hollow cathode transfer standards for the radiometric calibration of VUV telescopes of the solar and heliospheric observators (SOHO)

Metrologia 30 , 381-388 (1993)

D.P. Gaines, R.C. Spitzer, N.M. Ceglio, M. Krumrey, G. Ulm

Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

Appl. Opt. 32 , 6991-6998 (1993)

N. Ahr

Elektrisch kalibrierbare Kryobolometer als primäre Empfängernormale im Spektralbereich weicher Röntgenstrahlung

Dissertation Technische Universität Berlin (1993)

1992

B. Wende

New developments in photon metrology by use of the BESSY synchrotron radiation

Proc. SPIE 1712 , 14-23 (1992)

B. Wende

Photonenmetrologie mit BESSY

Phys. Bl. 48 , 913-916 (1992)

Ch. Wang, K. Molter, J. Bahrdt, A. Gaupp, W.B. Peatman, G. Ulm, B. Wende

Calculation of Undulator Radiation from Measured Magnetic Fields and Comparison with Measured Spectra

EPAC 92, Berlin 1992, Editions Frontieres , 928-930 (1992)

F. Scholze, C.J. Buckley

Design Considerations for a Si(Li) Detector Assembly for X-Ray Microscopy

X-Ray Microscopy III , 339-341 (1992) , edited by A. Michette, G. Morrison, C. Buckley ; Springer Verlag Berlin, Heidelberg

Z.U. Rek, J. Wong, T. Tanaka, Y. Kamimura, F. Schäfers, B. Müller, M. Krumrey, P. Müller

Characterization of YB66 for use as a soft X-ray monochromator crystal

Proc. SPIE 1740 , 173-180 (1992)

K. Molter, G. Ulm

Absolute measurement of the spectral and angular properties of undulator radiation with a pinhole transmission grating spectrometer

Rev. Sci. Instrum. 63 , 1296-1299 (1992)

K. Molter

Experimentelle Untersuchungen zur Berechenbarkeit von Undulatorstrahlung

Dissertation Technische Universität Berlin (1992)

A.G. Michette, M. Kühne

The Optical Constants of Materials at Soft X-Ray Wavelengths

X-Ray Microscopy III , 293-295 (1992) , edited by A. Michette, G. Morrison, C. Buckley ; Springer Verlag Berlin, Heidelberg

A.G. Michette, C.J. Buckley, M. Kühne, P. Müller

Characteristics of a Multilayer Schwarzschild Objective

X-Ray Microscopy III , 125-127 (1992) , edited by A. Michette, G. Morrison, C. Buckley ; Springer Verlag Berlin, Heidelberg

M. Kühne, R. Thornagel

Soft X-Ray Emission from a Laser-Produced Carbon Plasma

X-Ray Microscopy III , 39-42 (1992) , edited by A. Michette, G. Morrison, C. Buckley ; Springer Verlag Berlin, Heidelberg

M. Kühne, M. Krumrey, E. Tegeler

Characterization of Soft X-Ray Detectors

X-Ray Microscopy III , 321-328 (1992) , edited by A. Michette, G. Morrison, C. Buckley ; Springer Verlag Berlin, Heidelberg

M. Krumrey, E. Tegeler

Self-calibration of semiconductor photodiodes in the soft x-ray region

Rev. Sci. Instrum. 63 , 797-801 (1992)

A. Kloidt, H.J. Stock, U. Kleineberg, T. Döhring, M. Pröpper, K. Nolting, B. Heidemann, T. Tappe, B. Schmiedeskamp, U. Heinzmann, M. Krumrey, P. Müller, F. Scholze, S. Rahn, J. Hormes, K.F. Heidemann

Fabrication, thermal stability and reflectivity measurements of Mo/Si-multilayers as X-ray mirrors and other optical components

Proc. SPIE 1742 , 593-603 (1992)

J. Hollandt, W. Jans, M. Kühne, F. Lindenlauf, B. Wende

A beam line for radiant power measurements ofvacuum ultraviolet and ultraviolet sources in the wavelength range 40-400 nm

Rev. Sci. Instrum. 63 , 1278-1281 (1992)

J. Hollandt, M. Kühne, M.C.E. Huber

Radiometric Calibration of Solar Space Telescopes - The Development of a Vacuum-Ultraviolet Transfer Source Standard

ESA Bulletin 69 (1992)

K. Bürkmann, H. Huber, E. Jaeschke, D. Krämer, B. Kuske, P. Kuske, M. Martin, H. Oertel, M. Scheer, L. Schulz, G. Ulm, E. Weihreter, G. Wüstefeld

SC-Wavelength Shifter for Deep X-Ray Lithography at BESSY I

EPAC 92, Berlin March 1992, Editions Frontieres , 1699-1701 (1992)

P. Boher, Ph. Houdy, C. Khan Malek, F.R. Ladan, S. Bac, D. Schirmann, P. Troussel, M. Krumrey, P. Müller, F. Scholze

Fabrication and performance of linear multilayer gratings in the 44 - 130 Å wavelength range

Proc. SPIE 1742 , 464-474 (1992)

P. Boher, Ph. Houdy, M. Kühne, P. Müller, R. Barchewitz, J.P. Delaboudiniere, D.J. Smith

Tungsten/Magnesium Silicide Multilayers for Soft X-Ray Optics

J. of X-Ray Sci. Technol. 3 , 118-132 (1992)

D. Arnold, G. Ulm

Electron storage ring BESSY as a source of calculable spectral photon flux in the x-ray region

Rev. Sci. Instrum. 63 , 1539-1542 (1992)

N. Ahr, E. Tegeler

Electrically calibrated cryogenic bolometers as primary detectors in the soft X-ray region

Nucl. Instr.&Meth. A319 , 387-392 (1992)

1991

S.P. Vernon, D.G. Stearns, R.S. Rosen, N.M. Ceglio, D.P. Gaines, M. Krumrey, P. Müller

Multilayer coatings on figured optics

Proc. SPIE 1547 , 39-46 (1991)

F. Lindenlauf

Entwicklung und radiometrische Charakterisierung einer kompakten VUV- Strahlungsquelle auf der Basis lasererzeugter Plasmen im Spektralbereich 25 nm bis 125 nm

Dissertation Technische Universität Berlin (1991)

M. Krumrey, M. Kühne, P. Müller, F. Scholze

Precision soft x-ray reflectometry of curved multilayer optics

Proc. SPIE 1547 , 136-143 (1991)

A. Kloidt, K. Nolting, U. Kleineberg, B. Schmiedeskamp, U. Heinzmann, P. Müller, M. Kühne

Enhancement of the reflectivity of Mo/Si multilayer x-ray mirrors by thermal treatment

Appl. Phys. Lett. 58 , 2601-2603 (1991)

D.P. Gaines, N.M. Ceglio, S.P. Vernon, M. Krumrey, P. Müller

Repair of high performance multilayer coatings

Proc. SPIE 1547 , 228-238 (1991)

F. Eggert, M. Maneck, F. Scholze, M. Krumrey, E. Tegeler

Calibration of a Si(Li) detector system with different radiation entrance windows

Rev. Sci. Instrum. 62 , 741 - 743 (1991)

P. Boher, Ph. Houdy, L. Hennet, J.P. Delaboudiniere, M. Kühne, P. Müller, Z.G. Li, D.J. Smith

Silicon/silicon oxide and silicon/silicon nitride multilayers for extreme ultraviolet optical applications

Opt. Engin. 30 , 1049-1060 (1991)

P. Boher, Ph. Houdy, L. Hennet, M. Kühne, P. Müller, J.P. Frontier, P. Touslard, C. Senillou, J.C. Joud, P. Ruterana

Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft X-ray optics

Proc. SPIE 1547 , 21 - 38 (1991)

P. Boher, Ph. Houdy, L. Hennet, Z.G. Li, A. Modak, D.J. Smith, M. Idir, T. Moreno, R. Barchewitz, M. Kühne, P. Müller, J.P. Delaboudiniere

Magnesium silicide based multilayers for soft X-ray optics

Proc. SPIE 1546 , 502 - 519 (1991)

D. Arnold

Der Elektronenspeicherring BESSY als Strahlungsnormal im Röntgenbereich und die Bestimmung der Photonenemissionswahrscheinlichkeiten von Radionukliden

Dissertation Technische Universität Berlin (1991)

N. Ahr, E. Tegeler

Cryogenic Microbolometers as Detectors in the VUV

Metrologia 28 , 189-192 (1991)

1990

J. Xu, E. Weihreter, L. Schulz, G. Ulm, N. Liu

Local improvement of the field homogeneity for a light source dipole magnet

Proc. 2nd European Particle Accelerator Conf. EPAC 90, Nice 1990, Editions Frontières 2 , 1128-1130 (1990)

R. Thornagel

Entwicklung einer Methode zur quantitativen Bestimmung der Photonenemission von Röntgenquellen und ihre Anwendung auf lasererzeugte Kohlenstoff- und Eisen-Plasmen

Dissertation Technische Universität Berlin (1990)

E. Tegeler

New Developments in VUV Radiometry

Physica Scripta T31 , 215-222 (1990)

B. Schmiedeskamp, B. Heidemann, U. Kleineberg, A. Kloidt, M. Kühne, H. Müller, P. Müller, K. Nolting, U. Heinzmann

Fabrication and characterization of Si-based soft x-ray mirrors

Proc. SPIE 1343 , 64-72 (1990)

H. Petersen, W. Braun, M. Krumrey, E. Tegeler, A. Goldmann, F. Lodders, D. Rudolph

Characteristics of a stigmatic SX 700 beamline for surface analysis at BESSY. Proc. of the 2nd Europ. Conf. on Progress in X-Ray Synchrotron Radiation

Research, SIF, Bologna 1990 , 315-318 (1990)

M. Krumrey, E. Tegeler

Semiconductor Photodiodes in the VUV: Determination of Layer Thicknesses and Design Criteria for Improved Devices

Nucl. Instr.&Meth. A288 , 114-118 (1990)

M. Krumrey, E. Tegeler

Empfängernormale im Spektralbereich des Vakuum-Ultraviolett

PTB-Mitt. 100 , 9-15 (1990)

M. Krumrey

Halbleiter-Photodioden als radiometrische Empfängernormale im Bereich weicher Röntgenstrahlung

Dissertation Technische Universität Berlin (1990)

U. Kroth, T. Saito, E. Tegeler

Quantum efficiency of a semiconductor photodiode in the VUV determined by comparison with a proportional counter in monochromatized synchrotron radiation

Appl. Opt. 29 , 2659-2661 (1990)

K. Eidmann, M. Kühne, P. Müller, G.D. Tsakiris

Characterization of pinhole transmission gratings

J. X-Ray Sci. Technol. 2 , 259-273 (1990)

1989

G. Ulm, W. Hänsel-Ziegler, S. Bernstorff, F.P. Wolf

Measuring devices at BESSY for stored beam currents ranging from 0.8 pA to 1 A

Rev. Sci. Instrum. 60 , 1752-1755 (1989)

E. Tegeler, M. Krumrey

Semiconductor photodiodes as detectors in the VUV and soft x-ray range

Inst. Phys. Conf. Ser. No. 92 , 55-62 (1989)

E. Tegeler, M. Krumrey

Stability of semiconductor photodiodes as vuv detectors

Nucl. Instr. and Meth. A282 , 701-705 (1989)

E. Tegeler

Determination of the spectral radiance of deuterium lamps using the storage ring BESSY as a primary radiometric standard

Nucl. Instr. and Meth. A282 , 706-713 (1989)

M. Sterzik, H. Bräuninger, P. Predehl, C. Reppin, K. Schuster, M. Krumrey

Characterization of fully depleted pn-CCD's for X-ray imaging

Proc. SPIE 1159 , 588-594 (1989)

H.-C. Petzold, M. Kühne

Determination of soft X-ray emission of pulsed plasma sources by comparison with the calculable emission of an electron storage ring using X-ray lithographic exposures

Microelectr. Eng. 10 , 41-47 (1989)

A.G. Michette, E. Fill, T. Taguchi and M. Kühne

High-resolution transmission gratings for use in the spectroscopy of laser-produced plasmas

Proc. SPIE 1140 , 247-252 (1989)

M. Kühne, E. Tegeler, G. Ulm, B. Wende

Radiometrie und Charakterisierung optischer Komponenten

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich, 2. Teil: Technische Studie, Berlin , 402-414 (1989)

M. Kühne and P. Müller

Higher order contributions in the synchrotron radiation spectrum of a toroidal grating monochromator determined by the use of a transmission grating

Rev. Sci. Instrum. 60 , 2101-2104 (1989)

M. Kühne and P. Müller

Characterization of X-ray optics by synchrotron radiation

Proc. SPIE 1140 , 220-225 (1989)

M. Kühne

The electron storage ring BESSY as a primary radiometric standard

Inst. Phys. Conf. Ser. No. 92 , 25-30 (1989)

M. Krumrey, E. Tegeler, R. Thornagel, G. Ulm

Calibration of semiconductor photodiodes as soft x-ray detectors

Rev. Sci. Instrum. 60 , 2291-2294 (1989)

M. Krumrey, E. Tegeler, G. Ulm

Complete characterization of a Si(Li) detector in the photon energy range 0.9 - 5 keV

Rev. Sci. Instrum. 60 , 2287-2290 (1989)

1988

B. Wende

Radiometry from the Infrared to the X-Ray Region: An Electron Storage Ring as a Primary Radiator Standard

The Art of Measurement , 233-248 (1988) , edited by B. Kramer ; VCH Verlag. mbH. Weinheim

E. Tegeler and G. Ulm

Determination of the beam energy of an electron storage ring by using calibrated energy dispersive Si(Li)-Detectors

Nucl. Instr. and Meth. A266 , 185-190 (1988)

F. Riehle, S. Bernstorff, R. Fröhling and F.P. Wolf

Determination of electron currents below 1 nA in the storage ring BESSY by measurement of the synchrotron radiation of single electrons

Nucl. Instr. and. Meth. A268 , 262-269 (1988)

P. Predehl, H. Bräuninger, W. Burkert, B. Aschenbach, J. Trümper, M. Kühne, P. Müller

The Transmission Grating Spectrometer Of Spektrosat

Proc. SPIE 982 , 265-272 (1988)

D.H. Nettleton, E. Tegeler

Intercomparison of spectral radiance scales over the spectral range 115 nm to 350 nm

BCR Information EUR 11568 EN (1988)

M. Kühne

VUV and soft X-ray radiometry at the laboratory of PTB at the Berlin storage ring BESSY

Proc. SPIE 982 , 326-334 (1988)

M. Krumrey, E. Tegeler, J. Barth, M. Krisch, F. Schäfers, R. Wolf

Schottky type photodiodes as detectors in the VUV and soft x-ray range

Appl. Opt. 27 , 4336-4341 (1988)

K. Danzmann, M. Günther, J. Fischer, M. Kock, M. Kühne

High current hollow cathode as a radiometric transfer standard source for the extreme vacuum ultraviolet

Appl. Opt. 27 , 4947-4951 (1988)

N.M. Ceglio, A.M. Hawryluk, D.G. Stearns, M. Kühne, P. Müller

Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths

Opt. Lett. 13 , 267-269 (1988)

1987

B. Wende

Radiometrie 18. IFF-Ferienkurs "Synchrotronstrahlung in der Festkörperforschung"

KFA Jülich, 16. - 27. März 1987 , 35.3-35.15 (1987)

F. Riehle and B. Wende

Ein Elektronenspeicherring als primäres Strahlungsnormal zur Realisierung strahlungsoptischer Einheiten vom Infraroten bis in den Bereich weicher Röntgenstrahlung

Optik 75 , 142-148 (1987)

M. Kühne and E. Tegeler

On The Suitability Of Semiconductor Photodiodes As Standard Detectors In The VUV

Proc. IMEKO Braunschweig 1987 , 56-63 (1987)

M. Kühne and H.-C. Petzold

Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography

Appl. Opt. 27 , 3926-3932 (1987)

M. Kühne, J. Fischer, B. Wende

Laser-produced plasmas as radiometric source standards for the VUV and the soft X-ray region

Proc. SPIE 831 , 95-100 (1987)

1986

F. Riehle

A Soft X-Ray Bragg Polarimeter For Synchrotron Radiation At The Storage Ring BESSY

Nucl. Instr. and Meth. A246 , 385-388 (1986)

P. Müller, F. Riehle, E. Tegeler and B. Wende

Measurement Of The Spectral Efficiency Of Energy Dispersive Si(Li) Detectors Below 5 keV Photon Energy Using BESSY As A Standard Source

Nucl. Instr. and Meth. A246 , 569-571 (1986)

M. Kühne and E. Tegeler

Quantum Efficiency and Radiation Damage of Silicon Photodiodes in the Vicinity of the Si L-Absorption Edge

VUV 8, 4.-8.8.86 Lund, Abstracts 1 , 281-284 (1986)

E. Tegeler

Transmissiongitteroptiken

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich; Berlin , 460-461 (1986)

M. Kühne, F. Riehle, E. Tegeler, B. Wende

Radiometrie

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich, Berlin , 311-321 (1986)

E. Tegeler

Charakterisierung des Strahlungsflusses aus Wigglern und Undulatoren

BESSY II, eine optimierte Undulator/Wiggler-Speicherring-Lichtquelle für den VUV- und XUV-Spektralbereich; Berlin , 470-478 (1986)

J. Fischer, M. Kühne and B. Wende

Instrumentation For Spectral Radiant Power Measurements Of Sources in the Wavelength Range From 5 To 150 nm Using The Electron Storage Ring BESSY As A Radiometric Standard Source

Nucl. Instr. and Meth. A 246 , 404-407 (1986)

M. Kühne, F. Riehle, E. Tegeler, B. Wende

Uncertainties of the Radiometric Primary Standard BESSY and the Calibration of Detector and Source Transfer Standards in the Radiometric Laboratory of PTB at BESSY

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1 , 266-268 (1986)

E. Tegeler

A Compact Plane Crystal Spectrometer for the Energy Range between 500 eV and 5000 eV

Nucl. Instr. and Meth. A246 , 488-490 (1986)

K. Danzmann, M. Kühne, P. Müller, N.M. Ceglio, D.G. Stearns and A.M. Hawryluk

Characterization of VUV- and Soft X-Ray Optical Components

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1 , 278-279 (1986)

M. Kühne, K. Danzmann, P. Müller, B. Wende, N.M. Ceglio, D.G. Stearns, A.M. Hawryluk

Characterization of multilayer structures for soft x-ray laser research

Proc. SPIE 688 , 76-80 (1986)
https://doi.org/10.1117/12.964825

D.G. Stearns, N.M. Ceglio, A.M. Hawryluk, M.B. Stearns, A.K. Petford-Long, C.-H. Chang, K. Danzmann, M. Kühne, P. Müller, B. Wende

TEM and x-ray analysis of multilayer mirrors and beamsplitters

Proc. SPIE 688 , 91-98 (1986)

K. Danzmann, J. Fischer, M. Kühne

Radiometric Transfer Standard Sources for the Vacuum-Ultraviolet and the Soft X-Ray Range

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1 , 275-277 (1986)

M. Kühne

Soft X-Ray Radiometry

Proc. SPIE 733 , 472-480 (1986)

F. Riehle, E. Tegeler, B. Wende

Spectral Efficiency and Resolution of Si(Li)-Detectors for Photon Energies between 0.3 keV and 5 keV

Proc. SPIE 733 , 80-85 (1986)

N.M. Ceglio, D.G. Stearns, A.M. Hawryluk, T.W. Barbee, K. Danzmann, M. Kühne, P. Müller, B. Wende, M.B. Stearns, A.K. Petford-Long and C.-H. Chang

Soft X-Ray Laser Cavities

J. de Physique 47 , C6-277 - C6-286 (1986)

A.M. Hawryluk, N.M. Ceglio, D.G. Stearns, K. Danzmann, M. Kühne, P. Müller, B. Wende

Soft x-ray beamsplitters and highly dispersive multilayer mirrors for use as soft x-ray laser cavity components

Proc. SPIE 688 , 81-90 (1986)

F. Riehle and B. Wende

Establishment of a Spectral Irradiance Scale in the Visible and Near Infrared Using the Electron Storage Ring BESSY

Metrologia 22 , 75-85 (1986)

J. Barth, E. Tegeler, M. Krisch and R. Wolf

Characteristics and applications of semiconductor photodiodes from the visible to the X-ray region

SPIE Vol. 733 , 481-485 (1986)

J. Fischer, M. Kühne and B. Wende

Laser-Produced Plasmas as Radiometric Transfer-Standard Sources for the Vacuum-Ultraviolet and the Soft X-ray Range

Metrologia 23 , 179-186 (1986)

N.P. Fox, P.J. Key, F. Riehle, B. Wende

Intercomparison between two independent primary radiometric standards in the visible and near infrared: a cryogenic radiometer and the electron storage ring BESSY

Appl. Opt. 25 , 2409-2420 (1986)

F. Riehle, R. Fröhling, F.-P. Wolf

Determination of Electron Currents Below 1 nA in the Storage Ring BESSY by Measurement of the VUV Synchrotron Radiation of Single Electrons

VUV 8, 4.-8.8.86 Lund, Abstracts Vol. 1 , 272-273 (1986)

F. Riehle and E. Tegeler

Simple method for the determination of the characteristic photon energy Ec of a storage ring by x-ray measurement at photon energies around 20 Ec.

Proc. SPIE 733 , 86-91 (1986)

1985

E. Tegeler

Polarisatoren für den UV- und Vakuum-UV-Spektralbereich

Kohlrausch, Prakt. Physik, Band 1, 23. Auflage 1 , 688-690 (1985)

F. Riehle and B. Wende

Electron storage ring BESSY as a radiometric source of calculable spectral radiant power between 0.5 and 1000 nm

Opt. Lett. 10 , 365-367 (1985)

M. Kühne und B. Wende

Radiometrie für Wellenlängen unterhalb 200 nm

Kohlrausch, Prakt. Physik, Band 1, 23. Auflage 1 , 539-553 (1985)

M. Kühne and B. Wende

Vacuum uv and soft x-ray radiometry

J. Phys. E: Sci. Instrum. 18 , 637-647 (1985)

M. Kühne and H.-C. Petzold

Conversion Efficiency of Laser Radiation into Soft X-Ray Radiation of Laser Produced Plasmas for X-Ray Lithography

Microelectr. Eng. 3 , 565-571 (1985)

J. Fischer

Lasererzeugte Plasmen als radiometrische Transfernormale und ihre Kalibrierung mit dem Elektronenspeicherring BESSY als Strahlungsnormal im Wellenlängenbereich von 7 nm bis 100 nm

Dissertation Technische Universität Berlin (1985)

K. Danzmann, J. Fischer and M. Kühne

A high-current hollow cathode as a source of intense line radiation in the vuv

J. Phys. D: Appl.Phys. 18 , 1299-1305 (1985)

1984

E. Tegeler

Zeitabhängigkeit der spektralen Strahldichte von Deuteriumlampen mit Magnesiumfluoridfenster

PTB-Mitt. 94 , 256 (1984)

F. Riehle, B. Wende

Querschnitte und Divergenzen des Elektronenstrahls im Speicherring BESSY für radiometrische Anwendungen

PTB-Mitt. 94 , 176 (1984)

M. Kühne, B. Wende, A. Heuberger, H.-C. Petzold

Lasererzeugte Plasmen für die Röntgenlithographie

PTB-Mitt. 94 , 255 (1984)

M. Kühne, B. Wende

Spectral Radiant Power Measurements of VUV and Soft X-Ray Sources X-Ray Microscopy

in Optical Sciences, Springer 1984 , 30-37 (1984) , edited by G. Schmahl and D. Rudolph ; Springer Series

M. Kühne, H.-C. Petzold

Soft x-ray generation in a helium environment using laser-produced plasmas

Opt. Lett. 9 , 16-18 (1984)

J. Fischer, M. Kühne, F. Riehle, E. Tegeler, B.Wende

Strahlungsoptische Einstellung eines Einelektronenstroms und von Stromstufen im pA-Bereich mit einer Unsicherheit von<10^-5im Speicherring BESSY

PTB-Mitt. 94 , 175 (1984)

J. Fischer, M. Kühne, B. Wende

Lasererzeugtes Wolframplasma als Gebrauchsnormal für Vakuum-UV- und weiche Röntgenstrahlung

PTB-Mitt. 94 , 177 (1984)

J. Fischer, M. Kühne, B. Wende

Spectral radiant power measurements of VUV and soft x-ray sources using the electron storage ring BESSY as a radiometric standard source

Appl. Opt. 23 , 4252-4260 (1984)

1983

D.H. Nettleton and E. Tegeler

Time Dependence of Spectral Radiance of Magnesium Fluoride Windowed Deuterium Lamps

Vacuum Ultraviolet Radiation Physics , A1.4 (1983) , edited by A. Weinreb und A. Ron ; Adam Hilger, Bristol

M. Kühne, F. Riehle, E. Tegeler, B. Wende

The Radiometric Laboratory of PTB at BESSY

Nucl. Instr. and Meth. 208 , 399-403 (1983)

M. Kühne, H.-C. Petzoldt

Laser Produced Plasma in High Pressure Helium as Radiation Source for X-Ray Lithography

Microcircuit Engineering 83 , 255-260 (1983)

J. Fischer, M. Kühne, B. Wende

Laser Produced Plasmas as Radiometric Transfer Standards in the VUV

Vacuum Ultraviolet Radiation Physics , A2.2 (1983) , edited by A. Weinreb und A. Ron ; Adam Hilger, Bristol

J. Fischer and M. Kühne

Time Duration of VUV-Radiation Emission of a Laser Produced Plasma as Function of Laser Pulse Length and Wavelength of Observation

Appl. Phys. B32 , 17-159 (1983)

1982

M. Kühne, D. Stuck, E. Tegeler

BRV-continuum source as a radiometric transfer standard between 40 nm and 600 nm

Appl. Opt. 21 , 3919-3922 (1982)

M. Kühne

Radiometric comparison of a laser-produced plasma and a BRV-source plasma at normal incidence

Appl. Opt. 21 , 2124-2128 (1982)

1980

D. Einfeld and D. Stuck

Synchrotron Radiation as an Absolute Standard Source

Nucl. Instr. and Meth. 172 , 101-106 (1980)

1979

B. Wende

A Proposal for a Radiometric Program at an Electron Storage Ring

PTB-Bericht PTB-JB-7 (1979)

Contact

Head of Division

Prof. Dr. Mathias Richter

Phone: +49 30 3481-7312
Email:
mathias.richter(at)ptb.de

Secretariat

Jacqueline Kubitz

Phone: +49 30 3481-7444
Fax: +49 30 3481-7503
Email:
jacqueline.kubitz(at)ptb.de

Address

Physikalisch-Technische Bundesanstalt
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