Metrology with Synchrotron Radiation

The geometry of periodic nanostructures can be reconstructed non-destructively from combined X-ray scattering and fluorescence measurement data. For the application of this new hybrid technique using synchrotron radiation, a compact measurement chamber was developed and put into operation at BESSY II.

The semiconductor industry needs metrology systems to characterize the dimensions of transistor structures in the nanometer range in a fast, non-destructive, and metrologically reliable manner. A major challenge here is the limitation of the resolution of the measurement systems by the wavelength of the radiation used. Therefore, the use of short-wavelength extreme ultraviolet (EUV) radiation is...

At the 'Process-near X-ray Analysis (PRORA) 2022' symposium, Karina Bzheumikhova, PhD student in the working group 7.24 X-ray spectrometry, was awarded the poster prize for the presentation of her work 'X-ray spectroscopy investigation of LiNi_xCo_yMn_1-x-yO₂ cathode materials: the final step to understanding pristine NMC cathode materials'.