Logo of the Physikalisch-Technische Bundesanstalt

Cryosensor Technology

Working Group 7.62


The working group Cryosensor Technology manufactures integrated cryogenic sensor circuits for metrological applications. Mainly we are fabricating Superconductive Quantum Interference Devices (SQUIDs) for partners from PTB and external users. Our working group operates a cleanroom, thin-film deposition machines, plasma etching tools and equipment for UV- and e-beam lithography. Those chips are used within the PTB and by external partners for research in, e.g., biomagnetism.

The sensors are fabricated on 3-inch wafers by standard deposition, lithography and etching technology.

To top


Currently we are working on the development of a technology for Metallic Magnetic Calorimeters (MMCs) for radionuclide metrology. This work is done in collaboration with the University of Heidelberg, KRISS and working group 6.11.

We are optimizing our standard technology for the fabrication of Superconducting Quantum Interference Devices (SQUIDs) in close collaboration with the Clean Room Centre of PTB in Braunschweig.

To top


The working group does not offer Services.

To top


Our highly sensitive SQUID magnetometers and current sensors are commercially available from our partner Opens external link in new windowMagnicon GmbH.

To top