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Vacuum Metrology

Working Group 7.54

Profile

The working group vacuum metrology operates primary standards for the realisation of the pressure scale in the vacuum regime from 10-9 Pa to 103 Pa. By these primary standards vacuum gauges are calibrated for many international clients (dissemination of pressure scale up to 105 Pa). The research activities focus on the improvement of the realisation and dissemination of the pressure scale in the vacuum regime.

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Research/Development

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Services

  • Calibration of vacuum gauges (Initiates file downloadCE3, Initiates file downloadSE3)
  • Calibration of test leaks against vacuum (Initiates file downloadTL1)
  • Calibration of test leaks against atmospheric pressure (Initiates file downloadTL2)
  • Measurement of vacuum pump performance

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