Profile
The working group vacuum metrology operates primary standards for the realisation of the pressure scale in the vacuum regime from 10-9 Pa to 103 Pa. By these primary standards vacuum gauges are calibrated for many international clients (dissemination of pressure scale up to 105 Pa). The research activities focus on the improvement of the realisation and dissemination of the pressure scale in the vacuum regime.
Research/Development
- Metrological characteristics of vacuum gauges
Project EMRP IND12: Dynamic vacuum pressure measurement; standard leaks for any gas species; partial pressure and outgassing rate measurement- Project EMPIR 14SIP01: Technical Specifications for quadrupole mass spectrometers and outgassing rates for assessing the quality of vacuum environments
- Project EMPIR 16NRM05: Development of an ionisation vacuum gauge
- Project EMPIR 20SIP01: Technical specification for a stable ionisation vacuum gauge
- Publications (
.pdf, .bib) - Automated calibration workflow with generation of digital calibration certificates
National and International Cooperation
- Working group for pressure and vacuum (WG PV) within the Consultative Committee for Mass and Related Quantities (CCM) of the Meter convention
- German Standardization (DIN) committee for vacuum technology
- ISO Technical committee (TC) 112 (Vacuum Technology) - International standardization