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X-ray Metrology with Synchrotron Radiation

Department 7.2



Application of synchrotron radiation especially in the X-ray range for basic and applied metrological tasks with main focus on radiometry, spectroscopy and nanometrology:



The significant challenges posed by the increasing complexity of nanostructured surfaces used in technological applications include the characterization of such surfaces. The importance of complex and multidimensional nanostructures consisting of several materials is particularly noticeable in the semiconductor industry. At PTB's laboratory at the BESSY II electron storage ring, synchrotron...

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PTB and ASML are putting a new test beamline into operation at BESSY


Increasing miniaturization in the microelectronic sector has created inevitable facts: In the future, structures on microchips and on other components will have to be manufactured by means of lithography in the EUV range, which means using extremely short wavelengths of just 13.5 nm. For test measurements, the...

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Fundamental material parameters such as the interaction cross sections used to describe the interaction of matter with radiation are very important, both for fundamental research and for diagnostic and analytical applications. In collaboration with Fraunhofer IPM in Freiburg im Breisgau, interaction cross sections for the photoionization of noble gases in the VUV spectral range have recently been...

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