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X-ray Metrology with Synchrotron Radiation

Department 7.2

Tasks

Application of synchrotron radiation especially in the X-ray range for basic and applied metrological tasks with main focus on radiometry, spectroscopy and nanometrology:

News

Fourier transform infrared (FTIR) spectroscopy is a powerful technique in analytical chemistry. Typically, spatially distributed spectra of the substance of interest are registered simultaneously using FTIR spectrometers equipped with array detectors. Scanning methods such as near-field FTIR spectroscopy are a promising alternative providing higher...

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A nanospectroscopic device platform has been developed for the thermoelectric detection of molecular fingerprints of soft materials at nanometer scale spatial resolution. The technique makes use of a locally generated thermal gradient converted into a thermoelectric voltage that is read out in the underlying device. The thermal gradient is generated by an illuminated atomic force microscope tip...

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The metrological support of the German and European industries in the development of EUV lithography for semiconductor manufacturing is a major activity of PTB at its Berlin-Adlershof site. The close cooperation with ZEISS since 1998 forms a significant basis for the continuous development of PTB's metrological capabilities in the extreme ultraviolet spectral range (EUV). Based on the use of...

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