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News Archive 2019

Departments 7.1 and 7.2

 

Analía Fernández Herrero, a doctoral candidate with Working Group 7.14, "EUV Nanometrology", won the Poster Prize at the Adlershof Research Forum on 11 November 2019 for her work on edge roughness in etched line structures.

 

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Beim Erhitzen (z.B. frittieren) von Lebensmitteln kommt es zu so genannten Maillard-Reaktionen, bei denen als Produkt einer chemischen Umwandlung Melanoidine entstehen, welche die Bräunung und geschmackliche Prägung bestimmen. Auf Grund der komplexen Strukturen der Melanoidine konnten bislang nur vereinzelt physiologisch wirksame Verbindungen identifiziert und in Lebensmitteln quantifiziert...

 

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On October 22 and 23, 2019, the 313th PTB Seminar "VUV and EUV Metrology" took place in PTB's Hermann-von-Helmholtz building. At this workshop, by now the fifth arranged in a regular bi-annual cycle, 107 participants from research and metrology institutes as well as from industry discussed the newest developments and results in the field of applying radiation in the extreme- and vacuum-ultraviolet...

 

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Photo diode signal of the undulator radiation originating from different stored electron bunches as recorded by a fast oscilloscope.

 

In cooperation with the Helmholtz-Center, Berlin, and the Tsinghua University, Beijing, a so-called proof of principle experiment towards Steady State Micro Bunching (SSMB) was successfully performed at the Metrology Light Source (MLS), the electron storage ring of PTB in Berlin-Adlershof. It could be proven that approximately one µm long structures created within a stored electron bunch of a few...

 

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The announcement made by the large semiconductor manufacturers Samsung and TSMC in autumn 2018 that they are going to use EUV lithography for the manufacturing of high-end processors marks the commercial breakthrough of this technology after a long development phase. PTB has contributed to this development in metrological matters through its work at the synchrotron radiation sources BESSY II and...

 

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