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GISAXS is a modern non-destructive measurement technique for the investigation of nanostructured surfaces. In a GISAXS experiment a nanostructured sample is illuminated with X-rays under grazing incidence and the angular distribution of the reflected and scattered X-ray photons is determined. This scatter distribution correlates with the morphology of the surface. However, it is generally not possible to rigorously derive the dimensional shape of the structures from the scatter distribution. Instead, suitable forward calculations based on a model of the structure must be chosen to determine the scattering intensities.
Experiments with GISAXS can be performed at the FCM beamline at BESSY II. The beamline allows to use X-rays with a very small divergence in the soft X-ray energy range (Tender X-ray). A vacuum compatible hybrid pixel detector PILATUS 1M allows to detect the single scattered photons.
Further information can be found under (Opens external link in current window7.21 Röntgenradiometrie ).


FCM Beamline
Energy range:1.75 keV - 10 keV
Photon flux: 10^10 / s
Beam waist:0.5 mm x 0.5 mm (options for smaller beam size with pinholes)
Energy resolution:10^-4
Preferred sample sizes:> 1 mm x 10 mm



GISAXS:PILATUS 1M (in-vacuum)
scattering angles in plane:0° - 5°
scattering angles out of plane:0° - 2°
angular resolution:< 0.003°
sample-detector distance:2.3 m - 4.5 m
pixel size:172 µm
WAXS:PILATUS 100k (in-vacuum)
scattering angles in plane:0° - 90°
scattering angles out of plane:0° - 9°
angular resolution:0.05°
sample-detector distance:200 mm
pixel size:

172 µm


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