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Diffuse Scattering

Diffuse Scattering

For the reconstruction of the dimensional sizes of periodic nanostructures, the interference pattern, also called diffraction pattern, is usually investigated. Scattering intensities deviating from the main diffraction pattern are also called diffuse scattering. Their origin lies in the imperfection of nanostructured surfaces. Real nanostructures always deviate from ideal structures. Edge roughness, surface roughness or errors in the main periodicity can lead to very complex scattering patterns. This statistical information can, for example, allow conclusions to be drawn about the type of edge roughness (LER, LWR), or be useful in quantifying the roughness.  

 

 

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