Radiometry with Synchrotron Radiation

Department 7.1

Tasks

Application of synchrotron radiation in the THz, IR, UV, EUV, VUV, and soft X-ray spectral range at the electron storage rings Metrology Light Source (MLS) and BESSY II for basic and applied metrological tasks:

Realisation of spectral responsivity scales in the UV, VUV, EUV, and soft X-ray ranges by means of cryogenic radiometers as primary detector standards
Calibration of radiation sources and detectors from the UV to soft X-rays
Photon diagnostics and materials research at X-ray lasers
Characterisation of space instrumentation
Reflectometry on optical components and materials from the UV to X-rays, in particular for EUV lithography
Investigation of nanolayers and nanostructure applying scattering techniques, soft X-ray reflectometry and IR-nearfield microscopy
Quantitative characterization of surfaces and thin layers applying VUV ellipsometry, electron spectroscopy and IR-spectrometry

News

Fourier transform infrared (FTIR) spectroscopy is a powerful technique in analytical chemistry. Typically, spatially distributed spectra of the substance of interest are registered simultaneously using FTIR spectrometers equipped with array detectors. Scanning methods such as near-field FTIR spectroscopy are a promising alternative providing higher...

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A nanospectroscopic device platform has been developed for the thermoelectric detection of molecular fingerprints of soft materials at nanometer scale spatial resolution. The technique makes use of a locally generated thermal gradient converted into a thermoelectric voltage that is read out in the underlying device. The thermal gradient is generated by an illuminated atomic force microscope tip...

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The metrological support of the German and European industries in the development of EUV lithography for semiconductor manufacturing is a major activity of PTB at its Berlin-Adlershof site. The close cooperation with ZEISS since 1998 forms a significant basis for the continuous development of PTB's metrological capabilities in the extreme ultraviolet spectral range (EUV). Based on the use of...

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