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Radiometry with Synchrotron Radiation

Department 7.1


Application of synchrotron radiation in the THz, IR, UV, EUV, VUV, and soft X-ray spectral range at the electron storage rings Metrology Light Source (MLS) and BESSY II for basic and applied metrological tasks:


In cooperation with the Helmholtz-Center, Berlin, and the Tsinghua University, Beijing, a so-called proof of principle experiment towards Steady State Micro Bunching (SSMB) was successfully performed at the Metrology Light Source (MLS), the electron storage ring of PTB in Berlin-Adlershof. It could be proven that approximately one µm long structures created within a stored electron bunch of a few...

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The announcement made by the large semiconductor manufacturers Samsung and TSMC in autumn 2018 that they are going to use EUV lithography for the manufacturing of high-end processors marks the commercial breakthrough of this technology after a long development phase. PTB has contributed to this development in metrological matters through its work at the synchrotron radiation sources BESSY II and...

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The significant challenges posed by the increasing complexity of nanostructured surfaces used in technological applications include the characterization of such surfaces. The importance of complex and multidimensional nanostructures consisting of several materials is particularly noticeable in the semiconductor industry. At PTB's laboratory at the BESSY II electron storage ring, synchrotron...

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