Radiometry with Synchrotron Radiation

Department 7.1

Tasks

Application of synchrotron radiation in the THz, IR, UV, EUV, VUV, and soft X-ray spectral range at the electron storage rings Metrology Light Source (MLS) and BESSY II for basic and applied metrological tasks:

Realisation of spectral responsivity scales in the UV, VUV, EUV, and soft X-ray ranges by means of cryogenic radiometers as primary detector standards
Calibration of radiation sources and detectors from the UV to soft X-rays
Photon diagnostics and materials research at X-ray lasers
Characterisation of space instrumentation
Reflectometry on optical components and materials from the UV to X-rays, in particular for EUV lithography
Investigation of nanolayers and nanostructure applying scattering techniques, soft X-ray reflectometry and IR-nearfieldmicroskopy
Quantitative characterization of surfaces and thin layers applying VUV ellipsometry, lectron spectroscopy and IR-spectrometry

News

The significant challenges posed by the increasing complexity of nanostructured surfaces used in technological applications include the characterization of such surfaces. The importance of complex and multidimensional nanostructures consisting of several materials is particularly noticeable in the semiconductor industry. At PTB's laboratory at the BESSY II electron storage ring, synchrotron...

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PTB and ASML are putting a new test beamline into operation at BESSY

Increasing miniaturization in the microelectronic sector has created inevitable facts: In the future, structures on microchips and on other components will have to be manufactured by means of lithography in the EUV range, which means using extremely short wavelengths of just 13.5 nm. For test measurements, the...

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Fundamental material parameters such as the interaction cross sections used to describe the interaction of matter with radiation are very important, both for fundamental research and for diagnostic and analytical applications. In collaboration with Fraunhofer IPM in Freiburg im Breisgau, interaction cross sections for the photoionization of noble gases in the VUV spectral range have recently been...

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