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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Research results received the “MST Outstanding Paper Award 2020” and the “STMP Paper of the Year 2020 Award”

30.04.2021

The MST award acknowledges the progress in high precision AFM tip characterization using single crystal silicon line structures imaged in high resolution TEM as a reference. More details are described here.

The paper Accurate tip characterization in critical dimension atomic force microscopy has received the Measurement Science and Technology’s Outstanding Paper Award for 2020 in the field of Precision Measurement:
https://iopscience.iop.org/journal/0957-0233/page/Outstanding-Paper-Awards-2020

Reference:
Gaoliang Dai, Linyan Xu, Kai Hahm. 2020 Accurate tip characterization in critical dimension atomic force microscopy, Meas. Sci. Technol. 31 074011,
https://doi.org/10.1088/1361-6501/ab7fd2


The STMP award acknowledges the development, characterisation and application of a new material measure to determine 2D instrument transfer functions of optical areal surface topography measuring instruments. More details are described here.

The publication, A novel material measure for characterising two-dimensional instrument transfer functions of areal surface topography measuring instruments, has been awarded the “Paper of the Year 2020” of the scientific journal Surface Topography: Metrology and Properties.”
https://iopscience.iop.org/journal/2051-672X/page/Awards


Reference:
Gaoliang Dai, Ziyang Jiao, Lanting Xiang et al. 2020 A novel material measure for characterising two-dimensional instrument transfer functions of areal surface topography measuring instruments, Surf. Topogr.: Metrol. Prop. 8 045025;
https://doi.org/10.1088/2051-672X/abc9d2

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