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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Ultra precision machining


With the ultra-precision machining, it is possible to work pieces of non-ferrous metals, plastics or semiconductor materials like silicon and germanium to produce single crystals with surface roughness and submicron form accuracies in the nanometer range. Moreover, the optical quality surfaces often, that they are good and the reflective geometry is reproducible in the same quality.

To meet these high requirements, must'll placed on the machine tool, the tool and the environment in terms of accuracy and temperature stability very high demands n. Within a CNC lathe are known by use of advanced control technology, a y-axis and a so called "fast tool servos" also not rotationally symmetric parts possible. The achieved shape deviations are smaller depending on the workpiece geometry than 100 nm. The average roughness is typically better than 10 nm. As a predominantly monocrystalline diamond tools are used.


Look at the Moore 250 Lathe UPL
Ultra-precision electroforming
Superfine roughness standard

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