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Production sequence of Si-spheres and interferometrical determination of the sphere volume


The surfaces characterized in almost all fields of the most important property of a body. It represents the interface of a component to the environment and is therefore exposed to all external influences. The function of a component at all or only to guarantee to extend its lifetime, the surface must be paid in any case, an increased attention.

Tools are coated with hard materials to increase their service life considerably (eg TiN coatings on drills and routers). Surfaces of Vakuumanlangen be electropolished to achieve faster pump down time and better vacuums. Exposed to aggressive solutions workpieces are coated with corrosion protection layers (eg of Au or Pt).

A detailed inspection of the production's success is essential for use in precision measuring equipment. To characterize the quality of the working group produced layers, different analysis methods are used:

  • X-ray spectroscopy
  • X-ray fluorescence spectroscopy
  • Metrological 3D digital microscopy
  • Scanning electron spectroscopy, EDX
  • Stylus instruments
  • Hardness Measurement
  • Weighing method
  • Mechanical and chemical etching and polishing processes

A special analysis tool represents the large-chamber scanning electron microscope, which allows it to bring work pieces with a diameter of about one meter in a vacuum and characterized by electron microscopy.


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3-D Digital Microscope
X-ray spectrometer
Large-chamber SEM