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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Design

Working Group 5.51

Selection of measuring instruments and test facilities designed

 

 

 

 

 


Figure: Microwave measuring device for energy flow density measurement in electromagnetic fields


 

 

 

 


Figure: Apparatus for orientation of lattice planes in highly pure silicon single crystals


 

 

 

 

 

 


Figure: DUV-scatterometer


 

 

 

 

 


Figure: Extrapolation camber


 

 

 

 

 


Figure: Photon irradiation facility


 

 

 


Figure: Spherical interferometer


 

 

 

 

 

 


Figure: Luminous source test facility


 

 

 

 


Figure: High-purity water measuring cell


 

 

 

 

 

 

 


Figure: Inclinometer


 

 

 


Figure: Electropolishing


 

 

 

 

 

 

 


Figure: X-Ray tube tester


 

 

 


Figure: Vacuum chamber


 

 

 

 

 


Figure: Ultraprecision interferometer


 

 

 

 


Figure: Cylindrical Water calorimeter


 

 

 

 

 

 


Figure: Primary standard of the unit of air kerma


 

 

 


Figure: Piezo sample environment


 

 

 


Figure : TCAP scattering chamber


 

 

 

 


Figure: Magnetization measuring station


 

 

 


Figure : Sparking Test Station


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