Selection of measuring instruments and test facilities designed
Figure: Microwave measuring device for energy flow density measurement in electromagnetic fields
Figure: Apparatus for orientation of lattice planes in highly pure silicon single crystals
Figure: DUV-scatterometer
Figure: Extrapolation camber
Figure: Photon irradiation facility
Figure: Spherical interferometer
Figure: Luminous source test facility
Figure: High-purity water measuring cell
Figure: Inclinometer
Figure: Electropolishing
Figure: X-Ray tube tester
Figure: Vacuum chamber
Figure: Ultraprecision interferometer
Figure: Cylindrical Water calorimeter
Figure: Primary standard of the unit of air kerma
Figure: Piezo sample environment
Figure : TCAP scattering chamber
Figure: Magnetization measuring station
Figure : Sparking Test Station