Working Group: 5.31 5.32 5.33 5.34 5.35
Measuring devices 5.31
Mahr MarForm MFU 110 WP
4-axis cylindrical shape measuring device with length measurement option (C, X, Y, Z)
- combined centering / leveling turntable
- Measuring range: 190 mm (X) x 320mm (Z)
- Contact and optical touch probes with nanometer resolution
- Integrated metrology frame with automatic correction of deviations guide
- Contact: Sabrina Koslowski and Dr. rer. nat. Otto Jusko
Mahr MarForm MFU 8-Retro PTB
4-axis cylindrical shape measuring device with Length measurement option (C, X, Y, Z)
- combined centering / leveling turntable
- Measuring range: 200 mm (X) x 500 mm (Z)
- 1D and 2D Tactile touch probes with nanometer resolution
- Plane mirror laser interferometer in Abbekonfiguration for length measurement and to position correction with envelope method
- Contact: Sabrina Koslowski and Dr. rer. nat. Otto Jusko
Roundness measurement instrument Talyrond 73
Roundness measurement instrument
- Contact: Sabrina Koslowski and Dr. rer. nat Otto Jusko
Zeiss F25
3D micro-CMM with tactile micro-probe
- Scanning and single point probing measurement
- Measurement volume:
130 mm x 130 mm x 100 mm (x, y, z) - no Abbe error in the centre of the z-height
- Zerodur scales with resolution 0.25 nm
- Diameter of probing sphere 125 µm or 300 µm
- Contact: Dr.-Ing. Michael Neugebauer
Typical measurement tasks:
- Measurement of micro parts
- High precision 3D measurements
- Calibration of standards for micro CMMs and CT
Measuring devices 5.32
Zeiss Prismo 7 ultra
Tactile coordinate measuring machine
- Measurement volume: 900 mm × 1300 mm × 650 mm
- Scanning and single point probing E0,MPE = (0.6 + L/500) µm
- Equipped with high precision air-bearing rotary table
- Contact: Wiebke Schmaljohann and
Dr. Daniel Heißelmann
Measurement tasks:
- Research
- Special measurement task
Zeiss XENOS 9/15/7
Tactile coordinate measuring machine with rotary table
- Scanning and single point probing
- Measurement volume: 900 mm x 1300 mm x 700 mm
- E0, MPE = 0,3 µm + L /1000
- Contact: Dr. Daniel Heißelmann
Measurement tasks:
- Research
- Special measurement tasks
Reference wall
Measuring facility for the characterization of mobile 3D measuring systems like laser trackers
- Planar arrangement of calibrated lengths between 1.5 m and 12 m
- Calibration uncertainty of single lengths U(k=2) <10 µm
- Testing of the maximum permissible length measuring error following VDI 2617 Part 10 / ISO 10360-10
- Possible measuring volume: 10 m x 6 m x 3 m
- Contact: Dr. Daniel Heißelmann
Application
- Research
- measuring service providers, manufacturer, universities
Further information [more]
Measuring devices 5.33
Klingelnberg P40
Tactile 3D gear inspection center
- Horizontal range: ± 200 mm
- Vertical measuring range: 550 mm
- Contact: Dipl.-Ing. (FH) Achim Wedmann
LEITZ PMM-G 50.40.20
Large tactile coordinate measuring machine
- Contact: B. Eng. Marlen Krause
Zeiss UPMC 850
Tactile coordinate measuring machine
- Measurement volume: 850 mm × 1200 mm × 600 mm
- Installation in air-conditioned environment
- Equipped with a rotary table and a laser measuring system for gear and thread measurements
- Contact: Dipl.-Ing. (FH) Achim Wedmann
Measuring devices 5.34
Werth VideoCheck HA 400
Multi-sensor coordinate measuring machine equipped with Video-Sensor, chromatic distance sensor, tactile probe and tactile-optical probe
- Measurement volume: 400 mm x 400 mm x 200 mm
- Specified maximum permissible length measurement error:E0, MPE = (1.5 + L/500) µm (ϑ = 20 °C ± 0.5 °C)
- Contact: Dipl.-Ing. (FH) Dieter Schulz and
Dr.-Ing. Ulrich Neuschaefer-Rube
Typical measurement tasks:
- Diameter and area of pinholes
- Calibration of micro contour standards
- Micro bore holes
Werth VideoCheck UA 400
Multi-sensor coordinate measuring machine equipped with Video-Sensor, tactile probe and tactile-optical 2D- and 3D-probe
- Measurement volume: 400 mm x 400 mm x 250 mm
- Specified maximum permissible length measurement error: E0, MPE = (0.25 + L/500) µm (ϑ = 20 °C ± 0.5 °C)
- Contact: Dipl.-Ing. (FH) Dieter Schulz and
Dr.-Ing. Ulrich Neuschaefer-Rube
Typical measurement tasks:
- Development of tactile-optical 3D-probe
- Calibration of micro standards
- Measurement of micro bore holes
Alicona µCMM
Surface-measuring stick, optical 3D measuring device based on focus variation
- Rotate the table for the complete collection of components
- Measuring volume: 310 mm x 310 mm x 310 mm
- Coverage: 266 µm x 266 µm (50x objective) bis 3.2 mm x 3.2 mm (4x objective)
- Contact: Astrid Linkogel and
Dr.-Ing. Ulrich Neuschaefer-Rube
Zygo NewView 8200
White light interference microscope
- Measurement volume: 150 mm x 150 mm x 100 mm
- Piezo working range: 150 µm
- Field of view: 0.08 mm x 0.08 mm (objective 100x)
to 1.66 mm x 1.66 mm (objective 5x) - Contact: Astrid Linkogel and
Dr.-Ing. Ulrich Neuschaefer-Rube
Typical measurement tasks:
- Measurement of step standards
- Measurement of micro standards
CT-Anlage Nikon MCT 225
Industrial computed tomography scanner
- X-ray tube: Umax = 225 kV,
Reflection target: Pmax = 225 W - Flat panel detector: 2000 x 2000 pixel;
Pixel size: 200 µm x 200 µm - Specified maximum permissible sphere distance error:
E0:Sph MPE = (9 + L/50) µm (ϑ = 20°C ± 0.5 °C) - Max. size of measurement object: approx. 250 mm
- Min. voxel edge length: approx. 2 µm
- Contact: Dr. rer. nat. Markus Bartscher and
Dr.-Ing. Ulrich Neuschaefer-Rube
Typical measurement tasks:
- Acquisition of the complete geometry of plastic parts and small metal parts
- Measurement of regular geometries and freeform surfaces
- Measurement of internal geometries
Measuring devices 5.34
LEITZ Infinity 12.10.7 / 1
Tactile coordinate measuring machines
- Measurement volume: 1200 mm x 1000 mm x 700 mm
- Specifically measurement uncertainty:
E0 = 0,3 µm + L / 1000, PFTU = 0,4 µm - Contact: Clarissa Hädrich and
Dipl.-Ing. (FH) Jürgen Hirsch
LEITZ Infinity 12.10.7 / 2
Tactile coordinate measuring machines
- Measurement volume: 1200 mm x 1000 mm x 700 mm
- Specifically measurement uncertainty:
E0 = 0,3 µm + L / 1000, PFTU = 0,4 µm - Contact: Astrid Linkogel and
Dipl.-Ing. (FH) Jürgen Hirsch