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Measuring devices

Department 5.3

Measuring devices 5.31

Mahr MarForm MFU 110 WP

4-axis cylindrical shape measuring device with length measurement option (C, X, Y, Z)

4-axis cylindrical shape measuring device with length measurement option (C, X, Y, Z)

  • combined centering / leveling turntable    
  • Measuring range: 190 mm (X) x 320mm (Z)
  • Contact and optical touch probes with nanometer resolution
  • Integrated metrology frame with automatic correction of deviations guide
  • Contact: Sabrina Koslowski and Dr. rer. nat. Otto Jusko

 

 

Mahr MarForm MFU 8-Retro PTB

4-axis cylindrical shape measuring device with Length measurement option (C, X, Y, Z)

4-axis cylindrical shape measuring device with Length measurement option (C, X, Y, Z)

  • combined centering / leveling turntable
  • Measuring range: 200 mm (X) x 500 mm (Z)
  • 1D and 2D Tactile touch probes with nanometer resolution
  • Plane mirror laser interferometer in Abbekonfiguration for length measurement and to position correction with envelope method
  • Contact: Sabrina Koslowski and Dr. rer. nat. Otto Jusko

Roundness measurement instrument Talyrond 73

Roundness measurement instrument

Zeiss F25

3D micro-CMM with tactile micro-probe

3D micro-CMM with tactile micro-probe

  • Scanning and single point probing measurement
  • Measurement volume:
    130 mm x 130 mm x 100 mm (x, y, z)
  • no Abbe error in the centre of the z-height
  • Zerodur scales with resolution 0.25 nm
  • Diameter of probing sphere 125 µm or 300 µm
  • Contact: Dr.-Ing. Michael Neugebauer

 

Typical measurement tasks:

  • Measurement of micro parts
  • High precision 3D measurements
  • Calibration of standards for micro CMMs and CT

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Measuring devices 5.32

Zeiss Prismo 7 ultra

Tactile coordinate measuring machine

Tactile coordinate measuring machine

  • Measurement volume: 900 mm × 1300 mm × 650 mm
  • Scanning and single point probing E0,MPE = (0.6 + L/500) µm
  • Equipped with high precision air-bearing rotary table
  • Contact: Wiebke Schmaljohann and
    Dr. Daniel Heißelmann

Measurement tasks:

  • Research
  • Special measurement task

Zeiss XENOS 9/15/7

Tactile coordinate measuring machine with rotary table

Tactile coordinate measuring machine with rotary table

  • Scanning and single point probing
  • Measurement volume: 900 mm x 1300 mm x 700 mm
  • E0, MPE = 0,3 µm + L /1000
  • Contact: Dr. Daniel Heißelmann

Measurement tasks:

  • Research
  • Special measurement tasks

Reference wall

Measuring facility for the characterization of mobile 3D measuring systems like laser trackers

Measuring facility for the characterization of mobile 3D measuring systems like laser trackers

  • Planar arrangement of calibrated lengths between 1.5 m and 12 m
  • Calibration uncertainty of single lengths U(k=2) <10 µm
  • Testing of the maximum permissible length measuring error following VDI 2617 Part 10 / ISO 10360-10
  • Possible measuring volume: 10 m x 6 m x 3 m
  • Contact: Dr. Daniel Heißelmann

Application

  • Research
  • measuring service providers, manufacturer, universities

Further information Initiates file download[more]

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Measuring devices 5.33

Klingelnberg P40

Tactile 3D gear inspection center

LEITZ PMM-G 50.40.20

Large tactile coordinate measuring machine

Zeiss UPMC 850

Tactile coordinate measuring machine

Tactile coordinate measuring machine

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Measuring devices 5.34

Werth VideoCheck HA 400

Multi-sensor coordinate measuring machine equipped

Multi-sensor coordinate measuring machine equipped with Video-Sensor, chromatic distance sensor, tactile probe and tactile-optical probe

Typical measurement tasks:

  • Diameter and area of pinholes
  • Calibration of micro contour standards
  • Micro bore holes

Werth VideoCheck UA 400

Multi-sensor coordinate measuring machine

Multi-sensor coordinate measuring machine equipped with Video-Sensor, tactile probe and tactile-optical 2D- and 3D-probe

Typical measurement tasks:

  • Development of tactile-optical 3D-probe
  • Calibration of micro standards
  • Measurement of micro bore holes

Alicona µCMM

Surface-measuring stick, optical 3D measuring device based on focus variation

Surface-measuring stick, optical 3D measuring device based on focus variation

  • Rotate the table for the complete collection of components
  • Measuring volume: 310 mm x 310 mm x 310 mm
  • Coverage: 266 µm x 266 µm (50x objective) bis 3.2 mm x 3.2 mm (4x objective)
  • Contact: Astrid Linkogel and
    Dr.-Ing. Ulrich Neuschaefer-Rube

Zygo NewView 8200

White light interference microscope

White light interference microscope


Typical measurement tasks:

  • Measurement of step standards
  • Measurement of micro standards

CT-Anlage Nikon MCT 225

Industrial computed tomography scanner

Industrial computed tomography scanner

  • X-ray tube: Umax = 225 kV,
    Reflection target: Pmax = 225 W
  • Flat panel detector: 2000 x 2000 pixel;
    Pixel size: 200 µm x 200 µm
  • Specified maximum permissible sphere distance error:
    E0:Sph MPE = (9 + L/50) µm (ϑ = 20°C ± 0.5 °C)
  • Max. size of measurement object: approx. 250 mm
  • Min. voxel edge length: approx. 2 µm
  • Contact: Dr. rer. nat. Markus Bartscher and
    Dr.-Ing. Ulrich Neuschaefer-Rube


Typical measurement tasks:

  • Acquisition of the complete geometry of plastic parts and small metal parts
  • Measurement of regular geometries and freeform surfaces
  • Measurement of internal geometries

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Measuring devices 5.34

LEITZ Infinity 12.10.7 / 1

Tactile coordinate measuring machines

Tactile coordinate measuring machines 

LEITZ Infinity 12.10.7 / 2

Tactile coordinate measuring machines

Tactile coordinate measuring machines 

  • Measurement volume: 1200 mm x 1000 mm x 700 mm
  • Specifically measurement uncertainty:
    E= 0,3 µm + L / 1000, PFTU = 0,4 µm
  • Contact: Astrid Linkogel and Konrad Hierse