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R&D project

Traceable tactile-optical 3D measurement of micro geometries with very a small probing element

Period of the project

Start: June 2012
End:   August 2015

Description of the project

The objective of the project are traceable high precision measurements of micro geometries using a tactile-optical 3D probe (3D fiber probe) with a very small probing element (min. diameter currently 40 µm), and multiprobe configurations. For this purpose prototypes, procedures for automated probe calibration, and methods to reduce the measurement uncertainty will be developed and tested for a new microprobe principle. The performance will be proven by measurements at industrial workpieces, that are currently not measurable or difficult to measure.

The three-year project was funded by the Federal Ministry of Economic Affairs and Energy (BMWi) within the funding program MNPQ.

Project partner

Werth Messtechnik GmbH


Dr.-Ing. Ulrich Neuschaefer-Rube