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Research project

3D tactile microprobe with isotropic mechanical properties for the transfer into industrial micro coordinate measurement technology

Period of the project

Start: February 2016
End:  January 2019

Description of the project

The DFG funded project takes up the need for reliable solutions in micro coordinate measurement technology which fully satisfy the increasing demands of industry and research. Improvements are striven in terms of measurement accuracy, probing of 3D micro-structures and robustness.

Aim of the project is the integration of enhanced microprobes into commercial coordinate measurement machines. Bringing this approach to industrial application these machines could easily be extended for micro measurements at low cost.

The implementation is based on knowledge derived from the preceding DFG funded project in which a stiffness adapted microprobing system was developed (Fig. 1). Result was the first measurement of a microgear with module 0.1 mm.


Figure 1: Spur gear measurement with tactile probing system

Due to the involvement of two industrial partners optimal conditions for the knowledge transfer into industrial application will be achieved. Klingelnberg group is a global market leader for measuring centers for axially symmetrical objects of all types. 5microns is a start-up whose main expertise is micro-systems technology.

Fields of work include:

  • Optimization of the tactile probing system
  • Extension of the microprobe geometries
  • Development of a portable measurement environment for industrial application
  • Integration in commercially available coordinate measurement machines
  • Testing and comparison measurements

Project partner

Institute for Microtechnology, TU Braunschweig, Klingelnberg GmbH and 5microns GmbH


Stephan Jantzen, M. Sc. and Dr. rer. nat. Martin Stein