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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Scanning Probe Metrology

Working Group 5.25

Publications

 

2007

  • Dai, G.; Wolff, H.; Weimann, T.; Xu, M.; Pohlenz, F.; Danzebrink, H.-U.: Nanoscale surface measurements at sidewalls of nano- and micro-structures, Meas. Sci. Technol. 18 (2007), S. 334-341
  • Dai, G.; Pohlenz, F.; Dziomba, T.; Xu, M.; Diener, A.; Koenders, L.; Danzebrink, H.-U.: Accurate and traceable calibration of two-dimensional gratings, Meas. Sci. Technol. 18 (2007), S. 415-421

2006

  • Dai, G.: Pohlenz, F.; Dziomba, T.; Xu, M., Diener, A.; Koenders, L.; Danzebrink, H.-U.: Accurate and traceable calibration of two dimensional gratings, Meas. Sci. Technol. 18 (2006) S. 415 - 421
  • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.: Die Ankopplung verschiedenartiger Detektionssysteme für dimensionelle Messungen im Mikro- und Nanometerbereich an die Nanomessmaschine, “Technisches Messen (tm)” 73 (2006), S. 472-484
  • Dal Savio, C., Dejima, S., Danzebrink, H.-U., Gotszalk, T.: 3D metrology with a compact scanning probe microscope based on self-sensing cantilever probes, Meas. Sci. Technol. 18 (2006) S. 328 - 333
  • Dai, G., Wolff, H., Weimann, T., Xu, M., Pohlenz, F., Danzebrink H.-U.: Nanoscale surface measurements at sidewalls of nano and micro structures, Meas. Sci. Technol. 18 (2006) S. 334 - 341
  • Danzebrink,H.-U.; Koenders, L.; Wilkening, G.; Yacoot, A.; Kunzmann, H.: Advances in Scanning Force Microscopy for Dimensional Metrology, Annals of the CIRP 55/2 (2006) S. 841 - 879
  • Dai, G.; Koenders, L.; Danzebrink, H.-U.; Wilkening, G.; Zhou, J.-X.; Chen, Z.-Y.: Metrological scanning probe microscopy applied for calibrations of micro- and nanoscale transfer standards [in Chinesisch], Nanotechnology and Precision Engineering, 2006, 4, 1, 10 – 19
  • Dai, G.; Pohlenz, F.; Xu, M.; Koenders, L.; Danzebrink, H.-U.; Wilkening, G.: Accurate and traceable measurement of nano- and microstructures, Meas. Sci. Technol. 17 (2006) S. 545-552
  • Dai, G.; Wolff, H.; Pohlenz, F.; Danzebrink, H.-U.; Wilkening, G.: Atomic force probe for sidewall scanning of nano- and microstructures, Appl. Phys. Lett. 88, 171908 (2006)

2005

  • Dai, G.; Koenders, L.; Pohlenz, F.; Dziomba, T.; Danzebrink, H.-U.: Accurate and traceable calibration of one-dimensional gratings, Meas. Sci. Technol. 16 (2005) S. 1241-1249
  • Danzebrink, H.-U.; Dai, G.; Pohlenz, F.; Wilkening, G.: Overview of the Metrological Scanning Probe Microscopes at PTB, Microscopy and microanalysis 11- supp 3 (2005) S. 2-5
  • Danzebrink, H.-U.; Pohlenz, F.; Dai, G.; Dal Savio C.: Metrological scanning probe microscopes - instruments for dimensional nanometrology, in Nanoscale Calibration Standards and Methods (Eds. G. Wilkening, L. Koenders, 2005), 3-21
  • Sokolov, D.V.; Kasantzev, D.V.; Tyrrell, J.W.G.; Hasek, T.; Danzebrink, H.-U.: Combined optical and SPM probe sensor for nano-coordinate metrology, in Nanoscale Calibration Standards and Methods (Eds. G. Wilkening, L. Koenders, 2005), 131-143
  • Sikora, A.; Sokolov, D.V.; Danzebrink, H.-U.: Scanning probe microscope set-up with interferometric drift compensation, in Nanoscale Calibration Standards and Methods (Eds. G. Wilkening, L. Koenders, 2005), 109-118
  • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.; Xu, M.; Hasche, K.; Wilkening, G.: Metrological large range scanning probe microscope applicable for traceable calibration of surface textures, in "Nanoscale Calibration Standards and Methods" (Eds. G. Wilkening, L. Koenders, 2005), 73 - 92
  • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.; Xu, M.; Hasche, K.; Wilkening, G.: DSP-based metrological scanning probe microscope with direct interferometric position meas-urement and improved measurement speed, in "Nanoscale Calibration Standards and Methods" (Eds. G. Wilkening, L. Koenders, 2005), 119-130

2004

  • Danzebrink, H.-U.; Tyrrell, J.W.G.; Dal Savio, C. und Krüger-Sehm, R.: Combined interference and scanning force microscope, Proc. of SPIE, Vol. 5457 Optical Metrology in Production Engineering, Eds. W. Osten, M. Takeda, (2004), 158-165
  • Tyrrell, J.W.G.; Dal Savio, C.; Krüger-Sehm, R.; Danzebrink, H.-U.: Development of a combined interference microscope objective and scanning probe microscope, Rev. Sci. Instrum. 75 (2004), 4, 1120-1126
  • Danzebrink, H.-U.; Pohlenz, F.; Dai, G.; Dal Savio, C.: Metrologische Rastersondenmikroskope - Messgeräte für die dimensionelle Nanometrologie, Artikel in „PTB-Mitteilungen". Themenschwerpunkt: "Metrologie in der Nanotechnik“ 01.2004, S. 5-15
  • Dai, G.; Jung, L.; Pohlenz, F.; Danzebrink, H.-U.; Krüger-Sehm, R.; Hasche, K.; Wilkening, G.: Measurement of micro-roughness using a metrological large range scanning force microscope, Meas. Sci. Technol. 15 (2004) S. 2039-204
  • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.; Hasche, K.; Wilkening, G.: Improving the performance of interferometers in metrological scanning probe microscopes, Meas. Sci. Tech-nol. 15 (2004) S. 444-450
  • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.; Xu, M.; Hasche, K.; Wilkening, G.: Metrological large range scanning probe microscope, Rev. Sci. Instrum.; 75 (2004), 4, 962-969
  • Tyrrell, J.W.G.; Dal Savio, C.; Krüger-Sehm, R. und Danzebrink, H.-U.: Development of a combined interference microscope objective and scanning probe microscope, Rev. Sci. Instrum. 75 (2004), 4 1120-1126

2003

  • Tyrrell, J.W.G.; Sokolov, D.V.; Danzebrink, H.-U.: Development of a scanning probe microscope compact sensor head featuring a diamond pro-be mounted on a quartz tuning fork, Meas. Sci. Technol. 14 (2003), 2139 - 2143
  • Dai, G.; Pohlenz, F.; Danzebrink, H.-U.; Xu, M.; Hasche, K.: A novel metrological scanning probe microscope with a measurement range up to (25 mm)2, PTB-Bericht F-48 (2003), 175-182
  • Danzebrink, H.-U.; Kazantsev, D.V.; Dal Savio, C.; Pierz, K.; Güttler, B.: Optical microscope with SNOM option for micro- and nanoanalytical investigations at low temperatures, Appl. Phys. A 76 (2003), 889-892
  • Dal Savio, C.; Dziomba, Th.; Kazantsev D.V. und Danzebrink H.-U.: Entwicklung eines kombinierten Nahfeldmikroskopie- und -spektroskopiesystems, PTB-Bericht F-47 (2003)
  • Tyrrell, J.W.G.; Sokolov, D.V. und Danzebrink, H.-U.: Development of a scanning probe microscope compact sensor head featuring a diamond pro-be mounted on a quartz tuning fork, Meas. Sci. Technol. 14 (2003), 2139 - 2143
  • Danzebrink, H.-U.; Tyrrell, J.W.G.; Dal Savio, C. und Krüger-Sehm, R.: Combined optical and scanning probe microscopy, PTB-Bericht O-68 (2003), 112-123

2002

  • Herrmann, K.; Koenders, L.; Danzebrink, H.-U.; Hasche, K.; Wilkening, G.; Pohlenz, F.; Kuetgens, U.; Mirandé, W.; Yacoot, A.: Dimensionelle Metrologie mittels Rastersondenmikroskopie, Technisches Messen 69 (2002), 12, 519-525
  • Dal Savio, C.; Wolff, H.; Dziomba, T.; Fuß, H.-A.; Danzebrink, H.-U.: A compact sensor-head for simultaneous scanning force and near-field optical microscopy, Precision Engineering 26 (2002), 199-203

2001

  • Herrmann, K.; Mirandé, W.; Hasche, K.; Pohlenz, F.: Investigations on gratings with period length in the nanometre range, Proceedings of the 5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibrati-on Standards and Methods, Bergisch-Gladbach, November 2001, PTB-Bericht F-44 (2001) S. 78-85

2000 und vorher

  • Castiaux, A.; Danzebrink H.U.; Bouju X.: Glass and silicon probes: a comparative theoretical study for near-field optical microscopy, J. Appl. Phys. 84 (1998), 52-57
  • Fillard, J.P.; Castagne, M.; Benfedda, M.; Lahimer S.; Danzebrink H.-U.: Virtual photon scattering at subwavelength sized tips. Appl. Phys. A 63 (1996), 421-425
  • Danzebrink, H.-U.; Wilkening G.; Ohlsson O.: Near-field optoelectronic detector probes based on standard scanning force cantilevers, Appl. Phys. Lett. 67, (1995), 1981-1983
  • Geuther, H.; Schröder, K.-P.; Danzebrink H.-U.; und Mirandé W.: Rastermikroskopie im Nah- und Fernfeld an Strukturen im Submikrometerbereich, tm-Technisches Messen 61 (1994), 390-400
  • Danzebrink H.-U.; Fischer U.C.: The concept of an optoelectronic probe for near field microscopy, in: Pohl, D.W. und Courjon, D. (Hrsg.): Near Field Optics, Kluwer, Dordrecht (1993), 303ff