Logo PTB
Production sequence of Si-spheres and interferometrical determination of the sphere volume

Scanning Probe Metrology

Working Group 5.25

Contact persons

Contact

Head of Working Group

Dr. Hans-Ulrich Danzebrink

Phone: (0531) 592-5136

Email: hans-ulrich.danzebrink(at)ptb.de

Development of Scanning Probe Microscope metrology systems Calibration of standards for Scanning Probe Microscope metrology systems

Dr. Gaoliang Dai

Phone: (0531) 592-5127

Email: gaoliang.dai(at)ptb.de

Interaction probe-sample Development of 3d-standards

Dipl.-Phys. Thorsten Dziomba

Phone: (0531) 592-5122

Email: thorsten.dziomba(at)ptb.de

Calibration of standards for Scanning Probe Microscope

Dipl.-Ing. Frank Pohlenz

Phone: (0531) 592-5142

Email: frank.pohlenz(at)ptb.de

Self-calibration and error analysis of Scanning Force Microscope Virtual Scanning Force Microscope

Dr. Min Xu

Phone: (0531) 592-5147

Email: min.xu(at)ptb.de