Low noise 3D/CD-AFM
This research task aims to develop a new low noise 3D/CD AFM with following research targets:
- An improved version of the 3D/CD-AFM, offering low measurement noise, automatic tip-change mechanism and improved optical illumination and microscopy;
- Scanning range of 12 µm x 12 µm x 8 µm (x, y, z);
- Sample motion range of 210 mm x 210 mm x 8 mm (x, y, z);
- 3D nanometrology using flared AFM tips;
- 3D nanometrology using tilting-AFM principle;
- “Know-how” available at PTB for technology transfer;
The tool currently is still under development.
Figure 1. (a) Photo of the new low-noise 3D/CD-AFM;
(b) measurement repeatability when the AFM tip is probing at a same surface point.