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Production sequence of Si-spheres and interferometrical determination of the sphere volume


Low noise 3D/CD-AFM


This research task aims to develop a new low noise 3D/CD AFM with following research targets:

  • An improved version of the 3D/CD-AFM, offering low measurement noise, automatic tip-change mechanism and improved optical illumination and microscopy;
  • Scanning range of 12 µm x 12 µm x 8 µm (x, y, z);
  • Sample motion range of 210 mm x 210 mm x 8 mm (x, y, z);
  • 3D nanometrology using flared AFM tips;
  • 3D nanometrology using tilting-AFM principle;
  • “Know-how” available at PTB for technology transfer;

The tool currently is still under development.



Figure 1. (a) Photo of the new low-noise 3D/CD-AFM;

(b) measurement repeatability when the AFM tip is probing at a same surface point.