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Production sequence of Si-spheres and interferometrical determination of the sphere volume

AFM Linewidth Metrology

Working Group 5.23


Head of Working Group

Dr. Gaoliang Dai

Phone: (0531) 592-5127

Email: gaoliang.dai(at)ptb.de

Development of new 3D AFM probing techniques

Dr. Sebastian Bütefisch

Phone: (0531) 592-5119

Email: sebastian.buetefisch(at)ptb.de

Calibration of nano 3D standards

Dipl.-Ing.(FH) Kai Hahm

Phone: (0531) 592-5189

Email: kai.hahm(at)ptb.de