Logo of the Physikalisch-Technische Bundesanstalt
Production sequence of Si-spheres and interferometrical determination of the sphere volume

3D Nanometrology

Working Group 5.23

Head of Working Group

Dr. Gaoliang Dai

Phone: (0531) 592-5127

Email: gaoliang.dai(at)ptb.de

Development of new 3D AFM probing techniques

Dr. Sebastian Bütefisch

Phone: (0531) 592-5119

Email: sebastian.buetefisch(at)ptb.de

Calibration of nano 3D standards

Dipl.-Ing.(FH) Kai Hahm

Phone: (0531) 592-5189

Email: kai.hahm(at)ptb.de