We offer routine calibration services on step heights/depth setting standards, pitch of 1D/2D gratings, 3D nanoscale standards, feature width, sidewall angle, line edge roughness, sidewall profile etc.
*) achievable measurement uncertainty strongly depends on the quality of the customer sample.
How to request nanoscale calibration services at PTB?
A typical work flow of a calibration service is given as below:
* The customer should delivere detailed info about sample to PTB for preparing an offer, as detailed below.
Figure 1. Typical work flow of a calibration service.
Customers should provide the following detailed info for a calibration request.
- Measurement tasks (i.e. parameters to be measured)
- Sample size
- Sample manufacturer
- Material of the sample and structure
- Layout
- Mark for identifying the orientation of the sample
- Sample status (e.g. contamination)
- Sample mounting
- Measurement positions
- Targeted measurement uncertainty
We suggest that our customer provides detailed drawing(s) to illustrate clearly the Layout and measurement positions of the sample.
To send a calibration request, please email 
Mr. Frank Pohlenz (Frank.Pohlenz@ptb.de, Tel +49 531 5925142).