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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Length and Angle Graduations

Working Group 5.21

Publications

Length Graduations

Rezensierte Zeitschriftenartikel

 

Weichert, Christoph; Bosse, Harald; Flügge, Jens; Köning, Rainer; Köchert, Paul; Wiegmann, Axel; Kunzmann, Horst:
Implementation of straightness measurements at the nanometer comparator.

CIRP Annals, 65 (2016), 1, dx.doi.org/10.1016/j.cirp.2016.04.070
Elsevier B.V.. ISSN 0007-8506

 

Bosse, Harald; Bodermann, Bernd; Dai, Gaoliang; Flügge, Jens; Frase, Carl G.; Groß, Hermann; Häßler-Grohne, Wolfgang; Köchert, Paul; Köning, Rainer; Scholze, Frank; Weichert, Christoph:
Challenges in nanometrology: high precision measurement of position and size.

Technisches Messen, 82 (2015), 7/8, 346-358, dx.doi.org/10.1515/teme-2015-0002
De Gruyter.
ISSN 0171-8096

 

Meiners-Hagen, Karl; Bošnjakovic, Alen; Köchert, Paul; Pollinger, Florian:
Air index compensated interferometer as a prospective novel primary standard for baseline calibrations.

Measurement Science and Technology, 26 (2015), 8, 084002-1-084002-8, dx.doi.org/10.1088/0957-0233/26/8/084002
IOP. ISSN 0957-0233 (print) ; ISSN 1361-6501 (online)

 

Köchert, Paul; Flügge, Jens; Weichert, Christoph; Köning, Rainer; Manske, Eberhard:
Ultra-präzise Lageregelung mittels interferometrischer Positionsdetektion und Tauchspulenantrieb = Ultra-precision motion control using interferometric position feedback and an electromagnetic actuator.

Technisches Messen, 81 (2014), 6, 316-323, dx.doi.org/10.1515/teme-2014-0404
de Gruyter.
ISSN 0171-8096 (print) ; ISSN 2196-7113 (online)

 

Guan, Jun; Köchert, Paul; Weichert, Christoph; Tutsch, Rainer:
A high performance one-dimensional homodyne encoder and the proof of a novel two-dimensional homodyne encoder.

Precision Engineering, 37 (2013), 4, 865-870, dx.doi.org/10.1016/j.precisioneng.2013.05.003, www.sciencedirect.com/science/article/pii/S0141635913000895
Elsevier. ISSN 0141-6359

 

 

Konferenzartikel

 

Köchert, Paul [speaker]; Weichert, Christoph; Strube, Sebastian; Köning, Rainer; Flügge, Jens; Manske, Eberhard:
A fully-fibre coupled interferometer system for displacement and angle metrology.

Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology (2016), 51-52
Bedford, UK : euspen. ISBN 978-0-9566790-8-6

 

Weichert, Christoph [speaker]; Köning, Rainer; Köchert, Paul; Wiegmann, Axel; Flügge, Jens; Tutsch, Rainer:
Straightness measurements with sub-nanometre repeatability.

Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, 16 (2016), 99-100
Bedford, UK : euspen. ISBN 978-0-9566790-8-6

 

Köchert, Paul [speaker]; Köning, Rainer; Weichert, Christoph; Flügge, Jens; Manske, Eberhard:
An upgraded data acquisition and drive system at the Nanometer Komparator.

ASPE Summer Topical Meeting: Precision Interferometric Metrology : proceedings ; (Summer topical meeting volume: 61) (2015), [online], 61-66
Raleigh, NC : American Society for Precision Engineering. ISBN 978-1-887706-68-1

 

Köning, Rainer; Witkovsky, Viktor; Wimmer, Gejza [speaker]:
An algorithm for demodulation of correlated quadrature interferometer signals.

10th International Conference on Measurement, 10 (2015), 1, 17
Publishing House if the Slovak Academy of Sciences. ISBN 978-80-969672-9-2

 

Köning, Rainer [speaker]; Köchert, Paul; Flügge, Jens:
The new position control and data acquisition concept of the nanometer comparator.

10th International Conference on Measurement: proceedings, 10 (2015), 1, 179
Publishing House of the Slovak Academy of Sciences. ISBN 978-80-969672-9-2

 

Weichert, Christoph; Köchert, Paul; Köning, Rainer; Flügge, Jens:
Stability of a fully fibre-coupled interferometer.

58th IWK, Ilmenau Scientific Colloquium: Proceedings (2014), [USB-Stick], 9 S.
Ilmenau : Techn. Univ..

 

Bosse, Harald; Bodermann, Bernd; Dai, Gaoliang; Flügge, Jens; Frase, Carl Georg; Häßler-Grohne, Wolfgang; Köchert, Paul; Köning, Rainer; Weichert, Christoph:
Challenges in nanometrology: high precision measurement of position and size.

58th IWK, Ilmenau Scientific Colloquium: Proceedings (2014), [USB-Stick] file name: ml_2218.pdf, 15 S.
Ilmenau : Techn. Univ..

 

Bodermann, Bernd; Köning, Rainer; Bergmann, Detlef; Häßler-Grohne, Wolfgang; Flügge, Jens; Bosse, Harald:
The road towards accurate optical width measurements at the industrial level.

Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology (2014), 35-41, dx.doi.org/10.1007/978-3-642-36359-7_4
Berlin [u.a.] : Springer. ISBN 978-3-642-36358-0

 

Köchert, Paul; Flügge, Jens; Köning, Rainer; Weichert, Christoph; Guan, Juan:
Redetermination of the Abbe errors’ uncertainty contributions at the nanometer comparator.

Measurement 2013 : proceedings of the 9th International Conference on Measurement (2013), 171-174
Bratislava : Slovak Academy of Sciences. ISBN 978-80-969-672-5-4

 

Bodermann, Bernd; Köning, Rainer; Bergmann, Detlef; Buhr, Egbert; Häßler-Grohne, Wolfgang; Flügge, Jens; Bosse, Harald:
The road towards accurate optical width measurements at the industrial level.

Optical measurement systems for industrial inspection VIII ; (Proceedings of SPIE: 8788) (2013), [CD-ROM] file name: 8788_63.pdf, 87881S-1-87881S-12, dx.doi.org/10.1117/12.2021888
Bellingham, Wash. : SPIE. ISBN 978-081-949-604-1

 

An ultra-precision positioning device using interferometric feedback signals and a moving coil actuator.

Proceedings of: Precision control for advanced manufacturing systems : ASPE spring topical meeting (2013), 39-44, aspe.net/technical-meetings/past-aspe-meetings/aspe-spring-topical-meeting/technical-sessions/
Raleigh, NC : American Society for Precision Engineering. ISBN 978-1-887706-62-9

 

Köning, Rainer [speaker]; Bodermann, Bernd; Bergmann, Detlef; Buhr, Egbert; Häßler-Grohne, Wolfgang; Flügge, Jens; Bosse, Harald:
Towards traceable bidirectional optical size measurements for optical coordinate measuring machine metrology.

MacroScale 2011 : recent developments in traceable dimensional measurements (2013), [Online only], 13 S., dx.doi.org/10.7795/810.20130620r

 

Köchert, Paul; Weichert, Christoph; Flügge, Jens; Wurmus, Jens; Manske, Eberhard:
Digital beat frequency control of an offset-locked laser system.

58th IWK, Ilmenau Scientific Colloquium: Proceedings (2014), [USB-Stick], 8 S., nbn-resolving.de/urn:nbn:de:gbv_ilm1-2014iwk-prg:8
Ilmenau : Techn. Universität.

 

Köchert, Paul; Flügge, Jens; Köning, Rainer; Weichert, Christoph; Guan, Juan:
Redetermination of the Abbe errors’ uncertainty contributions at the nanometer comparator.

Measurement 2013 : proceedings of the 9th International Conference on Measurement (2013), 171-174
Bratislava : Slovak Academy of Sciences. ISBN 978-80-969-672-5-4

 

Köchert, Paul; Flügge, Jens; Köning, Rainer; Weichert, Christoph; Manske, Eberhard:
An ultra-precision positioning device using interferometric feedback signals and a moving coil actuator.

Proceedings of: Precision control for advanced manufacturing systems : ASPE spring topical meeting (2013), 39-44, aspe.net/technical-meetings/past-aspe-meetings/aspe-spring-topical-meeting/technical-sessions/
Raleigh, NC : American Society for Precision Engineering. ISBN 978-1-887706-62-9

 

Guan, Jun; Köchert, Paul; Weichert, Christoph; Tutsch, Rainer:
Study on a 1D homodyne encoder and a novel 2D homodyne encoder.

Proceedings of the twenty-seventh annual meeting of the American Society for Precision Engineering (2013), 268-271
Raleigh : American Society for Precision Engineering.
ISBN 978-1-887706-61-2

 

Weichert, Christoph; Flügge, Jens; Köning, Rainer; Köchert, Paul:
Design des Verschiebeinterferometers zur Bestimmung der Gitterkonstante von Silizium mit einer relativen Unsicherheit von 3·10-9. (2013), www.dgao-proceedings.de/abstract/abstract_only.php?id=1592

Angle Graduations

Rezensierte Zeitschriftenartikel

 

Yandayan, T.; Geckeler, Ralf D.; Aksulu, M.; Akgoz, S. A.; Ozgur, B.:
Application of advanced shearing techniques to the calibration of autocollimators with small angle generators and investigation of error sources.

Review of Scientific Instruments, 87 (2016), 051903-1-051903-13, dx.doi.org/10.1063/1.4950720
AIP. ISSN 0034-6748 (print) ; ISSN 1089-7623 (online)

Yashchuck, Valeriy V.; Artemiev, Nikolay A.; Centers, Gary; Geckeler, Ralf D.; Lacey, Ian; Marth, Harry; McKinney, Wayne R.; Noll, Tino; Siewert, Frank; Winter, Mathias; Zeschke, Thomas:
High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments.

Review of Scientific Instruments, 87 (2016), 051904-1-051904-12, dx.doi.org/10.1063/1.4950729
Melville, NY. ISSN 0034-6748 (print) ; ISSN 1089-7623 (online)

Geckeler, Ralf D.; Artemiev, Nikolay A.; Barber, S. K.; Just, Andreas; Lacey, I.; Kranz, Oliver; Smith, B. V.; Yashchuk, V. V.:
Aperture alignment in autocollimator-based deflectometric profilometers.

Review of Scientific Instruments, 87 (2016), 051906-1-051906-8, dx.doi.org/10.1063/1.4950734
AIP. ISSN 0034-6748 (print) ; ISSN 1089-7623 (online)

Kranz, Oliver; Geckeler, Ralf D.; Just, Andreas; Krause, Michael; Osten, Wolfgang:
From plane to spatial angles: PTB's Spatial Angle Autocollimator Calibrator.

Advanced Optical Technologies, 4 (2015), 5-6, 397-411, dx.doi.org/10.1515/aot-2015-0017
De Gruyter. ISSN 2192-8576 (print) ; ISSN 2192-8584 (online)

 

Qian, Shinan; Geckeler, Ralf D.; Just, Andreas; Idir, Mourad; Wu, Xuehui:
Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine.

Nuclear Instruments and Methods in Physics Research A, 785 (2015), 206-212, dx.doi.org/10.1016/j.nima.2015.02.065, www.sciencedirect.com/science/article/pii/S0168900215002831
Elsevier. ISSN 0168-9002

 

Geckeler, Ralf D.; Krause, Michael; Just, Andreas; Kranz, Oliver; Bosse, Harald:
New frontiers in angle metrology at the PTB.

Measurement, 73 (2015), 231-238, dx.doi.org/10.1016/j.measurement.2015.05.010
Elsevier Ltd. ISSN 0263-2241

 

Geckeler, Ralf D.; Link, Alfred; Krause, Michael; Elster, Clemens:
Capabilities and limitations of the self-calibration of angle encoders.

Measurement Science and Technology, 25 (2014), 5, 055003-1-055003-10, dx.doi.org/10.1088/0957-0233/25/5/055003
IOP. ISSN 0957-0233 (print) ; ISSN 1361-6501 (online)

 

Geckeler, Ralf D.; Just, Andreas:
A shearing-based method for the simultaneous calibration of angle measuring devices.

Measurement Science and Technology, 25 (2014), 10, 105009-1-105009-15, dx.doi.org/10.1088/0957-0233/25/10/105009
IOP. ISSN 0957-0233 (print) ; ISSN 1361-6501 (online)

 

 

Konferenzartikel

 

Yandayan, Tanfer; Geckeler, Ralf D.; Siewert, Frank:
Pushing the limits - latest developments in angle metrology for the inspection of ultra-precise synchrotron optics.

Advances in metrology for x-ray and EUV optics V ; (Proceedings of SPIE: 9206) (2014), 92060F-1-92060F-15, dx.doi.org/10.1117/12.2060953
Bellingham, Wash. : SPIE.
ISBN 978-1-62841-233-8

Kranz, Oliver; Geckeler, Ralf D.; Just, Andreas; Krause, Michael:
Charakterisierung und Justage des Spatial Angle Autocollimator Calibrators der PTB.

DGaO-Proceedings, 115(2014), [Online only], www.dgao-proceedings.de/download/115/115_b30.pdf, www.dgao-proceedings.de/abstract/abstract_only.php, nbn-resolving.de/urn/resolver.pl?urn=urn:nbn:de:0287-2014-B030-6
Erlangen : Deutsche Gesellschaft für angewandte Optik.
ISSN 1614-8436

 

Geckeler, Ralf D.; Krause, Michael; Just, Andreas; Kranz, Oliver; Bosse, Harald:
New frontiers in angle metrology at the PTB.

Proceedings of 11th IMEKO Symposium LMPMI 2014 (Laser Metrology for Precision Measurement and Inspection in Industry) (2014), [USB-Stick], 6 S.
Niigata : Akatsuki Printing Corporation.
ISBN 978-92-990075

 

Ehret, Gerd; Quabis, Susanne; Schulz, Michael; Andreas, Birk; Geckeler, Ralf D.:
Sensorentwicklung zur deflektometrischen Topografiemessung mit sub-Millimeter Aperturen.

DGaO-Proceedings, 114 (2013), [Online only], www.dgao-proceedings.de/download/114/114_a3.pdf, nbn-resolving.de/urn/resolver.pl?urn=urn:nbn:de:0287-2013-P011-3, www.dgao-proceedings.de/abstract/abstract_only.php?id=1510
Erlangen : Deutsche Gesellschaft für angewandte Optik. ISSN 1614-8436

 

Geckeler, Ralf D.; Krause, Michael; Just, Andreas:
Determining interpolation errors of angle encoders by error-separating shearing techniques = Anwendung von Shearing-Fehlertrennverfahren zur Bestimmung von Interpolationsfehlern bei radialen Gittern in Winkelencodern.

DGaO-Proceedings, 114 (2013), [Online only], www.dgao-proceedings.de/download/114/114_b38.pdf, www.dgao-proceedings.de/abstract/abstract_only.php?id=1493, nbn-resolving.de/urn/resolver.pl?urn=urn:nbn:de:0287-2013-B038-8
Erlangen : Deutsche Gesellschaft für angewandte Optik. ISSN 1614-8436

 

Kranz, Oliver; Geckeler, Ralf D.; Just, Andreas; Krause, Michael:
Raytracing-Modellierung von Autokollimatoren.

DGaO-Proceedings, 114 (2013), [Online only], www.dgao-proceedings.de/download/114/114_p52.pdf, www.dgao-proceedings.de/abstract/abstract_only.php?id=1492, nbn-resolving.de/urn/resolver.pl?urn=urn:nbn:de:0287-2013-P052-4
Erlangen : Deutsche Gesellschaft für angewandte Optik. ISSN 1614-8436

 

Kranz, Oliver; Geckeler, Ralf D.; Just, Andreas; Krause, Michael:
Rückführbare Kalibrierung von räumlichen Winkeln: Der Spatial Angle Autocollimator Calibrator der PTB.

DGaO-Proceedings, 114 (2013), [Online only], www.dgao-proceedings.de/download/114/114_a4.pdf, www.dgao-proceedings.de/abstract/abstract_only.php?id=1491, nbn-resolving.de/urn/resolver.pl?urn=urn:nbn:de:0287-2013-A004-4
Erlangen : Deutsche Gesellschaft für angewandte Optik.
ISSN 1614-8436

 

Ehret, Gerd; Quabis, Susanne; Schulz, Michael; Andreas, Birk; Geckeler, Ralf D.:
New sensor for small angle deflectometry with lateral resolution in the sub-millimetre range.

Fringe 2013: 7th International Workshop on Advanced Optical Imaging and Metrology (2014), 887-890, dx.doi.org/10.1007/978-3-642-36359-7_165
Berlin [u.a.] : Springer. ISBN 978-3-642-36358-0 ; ISBN 978-3-642-36359-7 (online)

 

Kranz, Oliver; Geckeler, Ralf D.; Just, Andreas; Krause, Michael:
Modelling PTB's spatial angle autocollimator calibrator.

Modeling Aspects in Optical Metrology IV ; (Proceedings of SPIE: 8789) (2013), [CD-ROM] file name: 8789_13.pdf, 87890D-1-87890D-11, dx.doi.org/10.1117/12.2020279
Bellingham, Wash. : SPIE. ISBN 978-0-8194-9605-8