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Production sequence of Si-spheres and interferometrical determination of the sphere volume

Dimensional Nanometrology

Department 5.2



The main tasks of the department are to develop and to optimize measurement methods, standards and instrumentation in the area of dimensional nanometrology and to disseminate dimensional measurands by calibration of suitable micro- and nanostructured measurement objects. The existing equipment allows to perform high precision measurements on micro- and nanostructured measurement standards, material measures and dimensional measuring systems with uncertainties in the nanometre region. This also holds for angle measuring systems and angle material measures, which can be characterized with uncertainties in the nanoradian region. In addition, the department is involved in several research projects in the area of nanometrology.