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DKD-guidelines and standards

VDI and DKD guidelines and standards


In order to ensure a uniform and comparable procedure in surface metrology, a number of guidelines and standards are available in this field.
Experts of the department are involved - partly in a leading position - in various committees drafting these normative documents that need to be developed further continuously to reflect the progress of measurement techniques and take into account the increasing number of their applications.
While standards and guidelines for profile roughness use to exist for many years already, comprehensive sets of guidelines and standards are being developed in the past few years for areal roughness measurements (e. g. with optical techniques) as well.
For surface analytical techniques, various documentary standards have been developed over the past 20 years; normative documents for scanning probe microscopy, under development for about 10 years now, are complementing the sets of standards for surface metrology.

Nearly all VDI guidelines (VDI: Verein Deutscher Ingenieure / Association of German Engineers) and DIN-, CEN- or ISO-standards are copyright protected and available in Germany from Beuth Verlag publishing company against costs:

Not all ISO standards use to be translated into German or adapted into the German national set of standards. ISO standards can be retrieved on the ISO website, where they can usually be ordered directly from ISO as well:

The following DKD guidelines (DKD: Deutscher Kalibrierdienst) and the terminology standard ISO 18115 with its two parts ISO 18115-1 for surface analytical techniques and ISO 18115-2 for scanning probe techniques are freely accessible within the set limits described below.


Opens internal link in current windowGeneral DKD guidelines


German language:    

DKD-R 4-2 Kalibrierung von Geräten und Normalen für die Rauheitsmesstechnik

Initiates file downloadDKD-R 4-2 Blatt 1 "Kalibrieren von Normalen für die Rauheitsmesstechnik"

Initiates file downloadDKD-R 4-2 Blatt 2 "Kalibrierung des vertikalen Messsystems von Tastschnittgeräten"

Initiates file downloadDKD-R 4-2 Blatt 3 "Kalibrierung von Normalen mit periodischen Profilen in horizontaler Richtung mit Tastschnittgeräten"

Blatt 4 Kalibrierung des horizontalen Messsystems von Tastschnittgeräten


English language: Version : DKD-R 4-2 2009 en

Initiates file downloadDKD-R 4-2 sheet 1, "Calibration of standards for roughness measuring technique"

Initiates file downloadAnnex A "Uncertainty of measurement in the calibration of roughness standards"

Initiates file downloadAnnex B "Uncertainty of measurement of the total height of profile of a depth-setting standard"

Initiates file downloadAnnex C "Measurement uncertainty of the total height of profile of a depth-setting standard with the standard deviation of the groove depth as topography term"

Initiates file downloadAnnex D "Uncertainty of measurement of the total height of profile of a depth-setting standard with the range of the groove depth as topography term"

Initiates file downloadDKD-R 4-2 sheet 2, "Calibrartion of the vertical measuring system of stylus instruments"

Initiates file downloadDKD-R 4-2 sheet 3, "Calibration of standards with periodic profiles in horizontal direction by means of stylus instruments"

page 4 (in construction)

Optical measurement at microtopographies

Sheet 1.1 - Calibration of interference microscopes and depth measurement standards for roughness measurement
VDI: Opens external link in new windowhttps://www.vdi.de/richtlinien/details/vdivde-2655-blatt-11-optische-messtechnik-an-mikrotopographien-kalibrieren-von-interferenzmikroskopen-und-tiefeneinstellnormalen-fuer-die-rauheitsmessung

BEUTH: Opens external link in new windowhttp://www.beuth.de/de/technische-regel/vdi-vde-2655-blatt-1-1/105907758?websource=vdin

Sheet 1.2 - Calibration of confocal microscopes and depth setting standards for roughness measurement
VDI: Opens external link in new windowhttps://www.vdi.de/richtlinien/details/vdivde-2655-blatt-12-optische-messtechnik-an-mikrotopografien-kalibrieren-von-konfokalen-mikroskopen-und-tiefeneinstellnormalen-fuer-die-rauheitsmessung

Beuth: Opens external link in new windowhttp://www.beuth.de/de/technische-regel/vdi-vde-2655-blatt-1-2/129221372?websource=vdin


Sheet 1.3 - Calibration of interference microscopes for form measurement

VDI: Opens external link in new windowhttps://www.vdi.de/richtlinien/details/vdivde-2655-blatt-13-optische-messtechnik-an-mikrotopographien-kalibrieren-von-flaechenhaft-messenden-interferometern-und-interferenzmikroskopen-fuer-die-formmessung

Beuth: Opens external link in new windowhttps://www.beuth.de/de/technische-regel-entwurf/vdi-vde-2655-blatt-1-3/276110731


Sheet 1.4 - Calibrating confocal microscopes for shape measurement

VDI: Opens external link in new windowhttps://www.vdi.de/richtlinien/details/vdivde-2655-blatt-14-optische-messtechnik-an-mikrotopografien-kalibrieren-von-konfokalen-mikroskopen-fuer-die-formmessung


Sheet 2.1 - Methods of roughness measurement

VDI: Opens external link in new windowhttps://www.vdi.de/richtlinien/details/vdivde-2655-blatt-21-optische-messtechnik-an-mikrotopografien-verfahren-der-rauheitsmessung



Description of the Main Filtration Methods of Standards of the Series ISO 16610

In roughness metrology internationally standardized procedures to detrend form, waviness and roughness are employed. A detailed description is presented in

Selected Filtration Methods of the Standard ISO 16610

Terminology for surface chemical analysis and scanning probe microscopy


About 900 terms for surface chemical analysis and scanning probe microscopy have been defined by the ISO committee ISO/TC 201 "Surface Chemical Analysis" in the latest edition of the standards series ISO 18115 dating from the year 2013.

Both parts of the standard ISO 18115 are accessible on the ISO server in English. It is recommended to search for terms and acronyms in the index document first and then to look up the corresponding definition in the standard by using the reference number.
Please note the special conditions for use (copyright of ISO) below*.

Vocabulary in alphabetic order


Index to Index ISO 18115-1 :2013(E) for techniques used in surface chemical analysis

Index to Index ISO 18115-2 :2013(E) for techniques used in scanning probe microscopy


Complete standards

ISO 18115-1 :2013(E) Surface chemical analysis - Vocabulary - Part 1: General terms and terms used in spectroscopy*

ISO 18115-2 :2013(E) Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy*


The German national mirror committee DIN NA 062-08-16 AA "Chemische Oberflächenanalyse und Rastersondenmikroskopie" is currently preparing a translation into German.


* Hint of the publisher:

©   ISO 2017
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester.
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Email: copyright@iso.org
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Permission has been granted by ISO for public access to ISO 18115-1 and ISO 18115-2 for educational and implementation purposes through eight approved websites at the National Physical Laboratory (UK), the American Vacuum Society (USA), the Environmental Molecular Sciences Laboratory (USA), the Surface Analysis Society of Japan (Japan), the National Institute of Advanced Industrial Science and Technology (Japan), the Bundesanstalt für Materialforschung und –prüfung (Germany), the Physikalisch-Technische Bundesanstalt (National Metrology Institute of Germany) and the Spanish Vacuum Society (Spain).




Determination of geometrical quantities by using of Scanning Probe Microscopes


Sheet 1 - Calibration of measurement systems
Opens external link in new windowhttps://www.vdi.de/technik/fachthemen/mess-und-automatisierungstechnik/fachbereiche/fertigungsmesstechnik/gma-fa-341-oberflaechenmesstechnik-im-mikro-und-nanobereich/

BEUTH: Opens external link in new windowhttp://www.beuth.de/de/technische-regel/vdi-vde-2656-blatt-1/102510872?websource=vdin


Sheet 2 (in progress) Determination of geometric quantities with scanning probe microscopes : Method of roughness measurement.