Layer Thickness and Crystalline Standards

Leader

Nanometer thickness standards
Spectral ellipsometry (SE, nm layer thickness)
x-ray reflectometry (XRR, nm layer thickness)
Avogadro-project

Dr. rer. nat. Ingo Busch
+49 (0) 531 592-6136
  +49 (0) 531 592-69 6136
ingo.busch(at)ptb.de

Scanning Electron Microscope (SEM, µm and nm layer thickness)

Profile methodes

Dipl.-Phys. Thomas Ahbe
+49 (0) 531 592-5143
  +49 (0) 531 592-69 5143
thomas.ahbe(at)ptb.de

Layer thickness general

film thickness measurement

preparation

Dr. rer. nat. Ingo Busch
+49 (0) 531 592-6136
  +49 (0) 531 592-69 6136
ingo.busch(at)ptb.de

Adress

Physikalisch-Technische Bundesanstalt

AG 5.13 Layer Thickness and Crystalline Standards

Bundesallee 100
38116 Braunschweig
Germany