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Crystalline standards

For scanning probe microscopy (SPM), new measurement standards have been developed within the scope of JRP (joint research project) SIB 61 CRYSTAL (Crystalline surfaces, self-assembled structures, and nano-origami as length standards in (nano)metrology) for the measurement of step heights (in the sub-nanometer range) and of lateral standards (5 nm to 50 nm). These standards are based on the crystal lattice and constant lattice spacing of silicon, and on self-assembled structures of block copolymers. In addition, DAN nano-origami is used to develop 3D nano-objects. This JRP started in October 2013 and has since been realized by EURAMET within the scope of the EMRP projects.

Figure 1: Overview of the step heights and lateral resolution standards available as of 2012. JRP SIB 61 aims to close the current gap (represented by the white area at the bottom left of the graphic) and to develop new standards.