Standards and Guidelines
DIN Standard committee 027-03-03 AA 
"Workshop Facilities for Microsystems"
In this committee standards for workshop facilities for the production of microsystems are developed:
- Determination of material influence on measurement uncertainty in the optical and tactile dimensional metrology. DIN 32456 was worked out. Part 2 and 3 concerns with tactile measurememt of the thickness of soft layers on hard substrates. Part 4 and 5 treats opticcal measurements of tranparent layers.