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Tactile Probing Methods

Working Group 5.11

Research/Development

Innovative tactile sensors

  • Piezoresistive Si micro tactile sensors for fast roughness measurements in nozzles and holes with diameters of less than 100 μm (Profilscanner for structures with high aspect ratio) [1]. Opens external link in new windowEMPIR-Project Micro probes
  • Microelectro-mechanical systems (MEMS) with small deflections and forces in the nanometer range can be measured [2]. Areas of application: fast surface measurement [3], near-surface measurement of E-modul and hardness [4] and calibration of stiffness of AFM cantilevers [5]
  • Recirculated, linear, air-bearing probe system (Lupo) that allows probing forces in the range from 50 µN to 700 µN (tactile reference measuring instrument HRTS [6]).
    In the case of soft materials to determ geometric quantities using tactile methods, special attention must be paid to the probe tip shape and the tactile forces in connection with the material properties [7], [8]. 

 

Reference standard for the calibration of the probing force, the tip radius and the z-measuring axis

  • Si-meander reference spring sensors [9], [10] for calibrating the probing force of coordinate measuring devices, nanoindenters and AFM
  • MEMS double-spring sensors for the calibration of the probing force and deflection of stylus instruments, nanoindenters and AFM [11]
  • Probe tip test standard for the calibration of the radius and the 2D shape of diamond probe tips of conventional stylus instruments and of special silicon probe tips (Initiates file downloadFlyer_Stylus tip characterizer_PTB_2017) [12]


Nanoindentation technology with MEMS sensors

  • Development of MEMS actuators with capacitive displacement measurement [4]
  • Development of a picoindenter for nanoelectromechanical measurement of nanomaterials within the EMPIR project NanoWires "High throughput metrology for nanowire energy harvesting devices" (Opens external link in new windowhttps://www.ptb.de/empir2020/nanowires/home/)

 

Opens internal link in current windowReferences  [1] - [16]

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Services

The working group calibrated:


• Radial normals with R ≤ 20 μm
• Probing force standard for stylus instruments
• Force-displacement standard for martensity hardeners and nanoindenter
• Cantilever and reference cantilever for scanning force microscopes
• Micro- and nanoforce sensors

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Information

Devices and installations

Reference profile methode measurment device (HRTS)

 

 

Short description

 

Principle

 

 

 

 

 

expanded uncertainty (k = 2)

 

Range

HRTS

 

Air guided stylus with variable contact force (100 µN – 700 µN) and inter­fero­metrical

deflection measurement

 

6 nm (2D)

33 nm (3D)

35 nm (Radius)

50 x 50 mm² x
450 µm

Profilscanner

 

Short description

 

Principle

 

 

 

 

 

extended uncertainty
(k = 2)

 

Range

Profilscanner

 

Piezoresistive Si-Micro-stylus with controlled contact force (Fmin = 1 µN) and interferometrical positions measurement

 

10 nm (3D)

 

 

800 x 800 x 250 µm³

Micro force measurement device



Short description

 

Principle

 

 

 

extended uncertainty
(k = 2)

Range

MKME

 

Stiffness measurement device with compensation scale and nano positioning

 

4 % (Stiffness)

3,5 % (Deflection)

3 % (Force)

Maximum: 500 mN, 90 µm

Minimum: 50 nN, 50 nm

Nanoindenter Hysitron TI950


Short description

 

Principle

 

 

extended uncertainty
(k = 2)

 

 

Range

TI950

 

Penetration


 

 

2 % (Force)

2 % (depth of penetration)

2 % (Stiffness)

F: 1 µN…10 mN

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