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Surface Metrology

Department 5.1

News

Helmholtz-seminar 2023: NanoScale October 10th to 12th, 2023 in Helsinki

After a 4-year break due to the pandemic, Opens external link in new windowNanoScale took place again in October 2023, this time in the modern conference center Technopolis Ruoholahti in Helsinki, Finland. With 106 participants from 24 countries, the 9th edition of the NanoScale was once again very well received and significantly exceeded the organizational team's expectations – which were somewhat cautious after the pandemic. Many conference guests were pleased to be able to finally meet their colleagues from Europe and all over the world in person again after the pandemic and exchange ideas with them. In addition to guests from 15 European countries, we were able to also welcome experts from Australia (NMIA), Japan (NMIJ), USA (NIST), Korea (KRISS), Taiwan (ITRI) and South Africa (NMISA).

NanoScale 2023, which also runs as permanent EURAMET project #1342 under the leadership of Uwe Brand, was organized by a local team led by Virpi Korpelainen from the Finnish Metrology Institute VTT MIKES together with the PTB team led by Thorsten Dziomba (PTB 5.1) with support through the Opens external link in new windowHelmholtz Fund. The oral presentations were selected by a 12-member International Scientific Committee. A total of Opens external link in new window31 lectures and Opens external link in new window52 posters were presented.

The conference proceedings are published in a virtual Opens external link in new windowSpecial Section of Measurement Science and Technology (MST) . The first papers have already been accepted for publication and are already linked there, and further papers will be added in summer 2024 once they will have completed peer-review.

 

Development of a New Probetip Characterizer

In cooperation with Department 5.2 Dimensional Nanometrology a material measure of silicon with grooves of very sharp rectangular edges has been developed to measure the tip radius of tactile probes. Radius and shape of probe tips can either be determined by the tip's entrance depth into the grooves of varying width or by analysing the transfer characteristics of the edge transitions.

Tasks and aims

The Department Surface Metrology conducts industry-related research and development on tactile and optical surface texture measurement methods with the aim of being able to use optical measuring microscopes to use for roughness measurements in the future. In addition, new calibration standards based on silicon crystals and new measurement methods using micro-electro-mechanical systems (MEMS) are being developed.

The department is responsible for the calibration

The department

  • participates in the development of standards and guidelines for surface metrology, both at the international level in ISO/TC 213 and IMEKO and in national committees of DIN, VDI and DKD
  • conducts and supports the development of standards and test specimens in the field of surface metrology, i.e. for tactile, optical and atomic force microscopy methods as well as for hardness and coating thickness metrology
  • is active in the field of research and development of new measuring instruments and measuring methods as well as algorithms for the analysis of data and the modelling of measuring methods.

Research

Mono-atomic step-height standards

Processing procedure and measurement capabilities on mono-atomic steps on otherwise atomically smooth Si surfaces.

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Opens internal link in current windowoptical roughness metrology

Development of guidelines for the configuration of optical surface measuring instruments for the measurement of roughness

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Tactile Micro-Electro-Mechanical Systems (MEMS)

Development of measurement methods for measuring the dynamic mechanical characteristics of surfaces.

Opens external link in new windowScientific news

 

 

Opens internal link in current windowSoftware developement for roughness parameter determination
Development of software for determination of the roughness parameters from surface measurements.

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5.15 : Change of organisation

 Warnschild Former working group 5.15 now integrated into 5.14

The former working group 5.15 Calibration of roughness parameters has been integrated with all its activities and tasks into working group 5.14 headed by Dr. Sai Gao as of January 1, 2023. Contact persons remain Thorsten Dziomba for calibrations and for the PTB reference software (Opens external link in new windowhttps://www.ptb.de/rptb) Dr. Dorothee Huser.